Air tightness detection device

Abstract

The utility model belongs to the technical field of air tightness detection, and specifically relates to an air tightness detection device, which comprises: a support table, on which a plurality of installation notches are opened; a sealing seat clamped in the installation notches, a sealing sinking platform is opened on the top of the sealing seat, the sealing sinking platform is suitable for clamping the support seat, and a through hole is opened on the sealing sinking platform, so that the support table is connected to the support seat through bolts; a sealing cover, which is arranged on the outer side of the support seat, and a sealing member is arranged between the sealing cover and the support table, and a detection port is opened on the top of the sealing cover; in short, the support seat is installed on the sealing seat, and the sealing cover is installed on the outer side, an exhaust source is connected from the detection port, and a pressure gauge is arranged on its pipeline to detect the air pressure in the sealing cover, so as to detect whether there is leakage at the support seat and the table and at the rotating end of the target tube and the rotating part of the support seat, so as to improve the yield rate of the support seat and avoid leakage of the support seat when in use.

Description

Technical Field

[0001] The utility model belongs to the technical field of air tightness detection, and in particular relates to an air tightness detection device. Background Art

[0002] The working principle of magnetron sputtering is that electrons collide with argon atoms in the process of flying toward the substrate under the action of the electric field E, ionizing them to produce Ar positive ions and new electrons; the new electrons fly toward the substrate, and the Ar ions are accelerated to fly toward the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to sputter; the existing magnetron sputtering device needs to be placed in a vacuum environment, and a pair of support seats are used to support the target tube, and the rotating end of the target tube needs to be connected to a drive motor to realize the rotation of the target tube;

[0003] The support seat and the table need to be sealed and connected, and because the rotating end of the target tube is usually plugged into the support seat, pressure relief is likely to occur at the support seat and the table, and at the rotating end of the target tube and the support seat.

[0004] Therefore, how to avoid the stability of the vacuum environment is a technical problem that needs to be solved urgently in this field. Utility Model Content

[0005] The purpose of the utility model is to provide an airtightness detection device.

[0006] In order to solve the above technical problems, the utility model provides an airtightness detection device, including: a support table with a plurality of installation notches; a sealing seat mounted in the installation notches, a sealing sinker is provided on the top of the sealing seat, the sealing sinker is suitable for mounting the support seat, and a through hole is provided on the sealing sinker so that the support table is connected to the support seat by bolts; a sealing cover is provided on the outside of the support seat, and a sealing member is provided between the sealing cover and the support table, and a detection port is provided on the top of the sealing cover.

[0007] Preferably, a first sealing groove is formed on the bottom wall of the sealing seat, and the first sealing groove is suitable for clamping a sealing member to seal between the bottom wall of the sealing seat and the sealing sink.

[0008] Preferably, a second sealing groove is formed on the top of the sealing sink, and the second sealing groove is suitable for clamping a sealing member so as to seal the top wall of the sealing seat and the bottom of the support seat.

[0009] Preferably, the cross-sections of the first sealing groove and the second sealing groove are trapezoidal, and the mouths of the first sealing groove and the second sealing groove are smaller than the bottoms of the first sealing groove and the second sealing groove.

[0010] Preferably, a reinforcing ring is provided at the bottom of the sealing cover; and an annular groove is provided at the top of the supporting table surface so that the reinforcing ring can be clamped in the annular groove.

[0011] Preferably, a third sealing groove is provided in the annular groove, and the third sealing groove is suitable for clamping a sealing member to seal the support table and the bottom of the reinforcement ring.

[0012] Preferably, a plurality of clamping assemblies are arranged on the top of the support table; the clamping assemblies include a clamping seat, a first hinged arm and a second hinged arm; the clamping seat is installed on the top of the support table, the first hinged arm is hinged on the clamping seat, a clamping block is arranged at the end of the first hinged arm, the second hinged arm is hinged on the clamping seat, and a connecting rod is hinged on the second hinged arm, and the other end of the connecting rod is hinged on the first hinged arm.

[0013] Preferably, a sliding groove is provided on the first hinged arm, an adjusting bolt is inserted into the sliding groove, a pair of clamping plates are provided on the adjusting bolt, and clamping nuts are provided on both sides of the clamping plates.

[0014] Preferably, a driving motor is provided at the bottom of the supporting table, and a driving wheel is provided on the output shaft of the driving motor.

[0015] The beneficial effects of the utility model are:

[0016] The support seat is installed on the sealing seat, and a sealing cover is installed on the outside. The exhaust source is connected from the detection port, and a pressure gauge is set on its pipeline to detect the air pressure in the sealing cover to detect whether there is leakage between the support seat and the table surface and between the rotating end of the target tube and the rotating part of the support seat, so as to improve the yield rate of the support seat and avoid leakage of the support seat when it is in use.

[0017] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by implementing the present invention.

[0018] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 It is a stereogram of a preferred embodiment of the detection device of the utility model;

[0021] Figure 2 It is a cross-sectional view of a preferred embodiment of the detection device of the utility model;

[0022] Figure 3 yes Figure 2 The enlarged view of point A in the middle;

[0023] Figure 4 yes Figure 2 Enlarged view of point B in the middle.

[0024] In the figure:

[0025] 1. Support the table;

[0026] 11. Installation notch; 12. Annular groove; 13. Third sealing groove; 14. Driving motor; 15. Driving wheel;

[0027] 2. Sealing seat;

[0028] 21. Sealing sink; 22. First sealing groove; 23. Second sealing groove;

[0029] 3. Sealing cover;

[0030] 31. Inspection port; 32. Strengthening ring;

[0031] 4. Press the components;

[0032] 41. Pressing seat;

[0033] 42, first hinged arm; 421, sliding slot; 422, adjusting bolt; 423, clamping plate; 424, clamping nut;

[0034] 43. Second articulated arm; 44. Pressing block. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0036] like Figures 1 to 4As shown, at least one embodiment provides an airtightness detection device, comprising: a support table 1, on which a plurality of installation notches 11 are opened; a sealing seat 2 is clamped in the installation notches 11, a sealing sink 21 is opened on the top of the sealing seat 2, the sealing sink 21 is suitable for clamping the support seat, and a through hole is opened on the sealing sink 21, so that the support table 1 is connected to the support seat by bolts; a sealing cover 3, which is arranged on the outside of the support seat, and a sealing member is arranged between the sealing cover 3 and the support table 1, and a detection port 31 is opened on the top of the sealing cover 3; in short, the support seat is installed on the sealing seat 2, and the sealing cover 3 is installed on the outside, the exhaust source is connected from the detection port 31, and a pressure gauge is arranged on its pipeline to detect the air pressure in the sealing cover 3, so as to detect whether there is leakage between the support seat and the table and between the rotating end of the target tube and the rotating part of the support seat, so as to improve the yield rate of the support seat and avoid leakage of the support seat when in use.

[0037] In some embodiments, a first sealing groove 22 is provided on the bottom wall of the sealing seat 2, and the first sealing groove 22 is suitable for clamping a seal to seal the bottom wall of the sealing seat 2 and the sealing sink 21; a second sealing groove 23 is provided on the top of the sealing sink 21, and the second sealing groove 23 is suitable for clamping a seal to seal the top wall of the sealing seat 2 and the bottom of the support seat; in short, through the provision of the first sealing groove 22 and the second sealing groove 23, a seal can be installed to ensure the sealing between the sealing seat 2 and the support table 1 and the support seat, which can better restore the use scenario of the support seat and detect the airtightness of the rotating end of the target tube and the rotating part of the support seat.

[0038] In some embodiments, the cross-section of the first sealing groove 22 and the second sealing groove 23 is trapezoidal, and the mouth of the first sealing groove 22 and the second sealing groove 23 is smaller than the bottom of the first sealing groove 22 and the second sealing groove 23; in short, the cross-section of the first sealing groove 22 and the second sealing groove 23 is designed to be body-shaped, which can better clamp the seal, wherein the seal can be a sealing ring with a circular cross-section.

[0039] In some embodiments, a reinforcement ring 32 is provided at the bottom of the sealing cover 3; an annular groove 12 is opened at the top of the support table 1 so that the reinforcement ring 32 can be clamped in the annular groove 12; in short, the sealing performance of the sealing cover 3 and the support table 1 can be improved by the reinforcement ring 32 and the annular groove 12.

[0040] In some embodiments, a third sealing groove 13 is opened in the annular groove 12, and the third sealing groove 13 is suitable for clamping a seal to seal the support table 1 and the bottom of the reinforcement ring 32; in short, through the setting of the third sealing groove 13, the sealing performance of the sealing cover 3 and the support table 1 can be further improved.

[0041] In some embodiments, a plurality of clamping assemblies 4 are provided on the top of the support table 1; the clamping assembly 4 includes a clamping seat 41, a first hinged arm 42 and a second hinged arm 43; the clamping seat 41 is installed on the top of the support table 1, the first hinged arm 42 is hinged on the clamping seat 41, and a clamping block 44 is provided at the end thereof, the second hinged arm 43 is hinged on the clamping seat 41, and a connecting rod is hinged on the second hinged arm 43, and the other end of the connecting rod is hinged on the first hinged arm 42; in short, by rotating the second hinged arm 43, the first hinged arm 42 can be turned to the reinforcement ring 32, and the reinforcement ring 32 is pressed by the clamping seat 41, and when the sealing cover 3 starts to be vacuumed, the sealing cover 3 can be automatically adsorbed on the support table 1.

[0042] In some embodiments, a sliding groove 421 is provided on the first hinged arm 42, an adjusting bolt 422 is inserted into the sliding groove 421, a pair of clamping plates 423 are provided on the adjusting bolt 422, and clamping nuts 424 are provided on both sides of the clamping plates 423; in short, through the setting of the sliding groove 421, the position of the clamping block 44 can be adjusted to ensure that the clamping block 44 can press the top of the reinforcement ring 32.

[0043] In some embodiments, a driving motor 14 is provided at the bottom of the support table 1, and a driving wheel 15 is provided on the output shaft of the driving motor 14; in short, by providing the driving motor 14, the rotation of the target tube can be simulated to better detect the rotating end of the target tube and the rotating part of the support seat, and the structure is simple and reliable.

[0044] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0046] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. An airtightness detection device, characterized in that: include: A supporting table top is provided with a plurality of installation notches; A sealing seat is clamped in the installation notch, a sealing sink is provided on the top of the sealing seat, and the sealing sink is suitable for clamping the support seat, and The sealing sink is provided with a through hole so that the support table is connected to the support seat by bolts; The sealing cover is arranged on the outer side of the support seat, and a sealing member is arranged between the sealing cover and the support table surface, and a detection port is opened on the top of the sealing cover.

2. The airtightness detection device according to claim 1, characterized in that: The bottom wall of the sealing seat is provided with a first sealing groove, and the first sealing groove is suitable for clamping a sealing member to seal between the bottom wall of the sealing seat and the sealing sink.

3. The airtightness detection device according to claim 2, characterized in that: A second sealing groove is formed on the top of the sealing sink, and the second sealing groove is suitable for clamping a sealing member so as to seal the top wall of the sealing seat and the bottom of the supporting seat.

4. The airtightness detection device according to claim 3, characterized in that: The cross-sections of the first sealing groove and the second sealing groove are trapezoidal, and the mouths of the first sealing groove and the second sealing groove are smaller than the bottoms of the first sealing groove and the second sealing groove.

5. The airtightness detection device according to claim 1, characterized in that: A reinforcing ring is provided at the bottom of the sealing cover; An annular groove is formed on the top of the support table, so that the reinforcement ring can be clamped in the annular groove.

6. The airtightness detection device according to claim 5, characterized in that: A third sealing groove is provided in the annular groove, and the third sealing groove is suitable for clamping a sealing member to seal the support table and the bottom of the reinforcement ring.

7. The airtightness detection device according to claim 6, characterized in that: A plurality of pressing components are arranged on the top of the supporting table; The clamping assembly includes a clamping seat, a first hinged arm and a second hinged arm; The pressing seat is installed on the top of the supporting table, the first hinged arm is hinged on the pressing seat, and a pressing block is arranged at the end of the first hinged arm, the second hinged arm is hinged on the pressing seat, and A connecting rod is hinged on the second hinged arm, and the other end of the connecting rod is hinged on the first hinged arm.

8. The airtightness detection device according to claim 7, characterized in that: A sliding groove is provided on the first hinged arm, an adjusting bolt is inserted into the sliding groove, a pair of clamping plates are provided on the adjusting bolt, and clamping nuts are provided on both sides of the clamping plates.

9. The airtightness detection device according to claim 8, characterized in that: A driving motor is arranged at the bottom of the supporting table, and a driving wheel is arranged on the output shaft of the driving motor.

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