A rack for wafer defect detection

Abstract

The utility model discloses a rack for wafer defect detection, belonging to the technical field of wafer equipment racks. It includes a frame component and a fixed component, the frame component includes a placement table, the top surface of the placement table is provided with a plurality of mounting holes 1, the fixed component includes a mounting plate, the top surface of the mounting plate is provided with a plurality of mounting holes 2, the side wall of the mounting plate is connected to the fixed plate, the side wall of the fixed plate is connected to the lower slot plate and the upper slot plate, the lower slot plate and the upper slot plate are provided with moving rods, the circumferential side wall of the moving rod is provided with a connecting plate, the side wall of the connecting plate is connected to a push plate, the side wall of the fixing plate is penetrated by a threaded rod, and one end of the threaded rod is connected to a push block. The utility model can be adjusted and fixed according to the size of the detection equipment, and is suitable for fixing equipment of various sizes, and has strong adaptability. At the same time, the placement table can place multiple detection equipment, and each detection equipment can be fixed by using the fixed component, so that the practicality of the rack is strong.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer equipment racks, and more specifically, to a rack for wafer defect detection. Background Art

[0002] Wafers are the basic materials for semiconductor manufacturing. They are thin slices used to make integrated circuits (ICs) and other semiconductor devices.

[0003] Before wafers are put into production and processing, they need to be inspected to avoid damage. Defective wafers enter the next process, and the wafer defect detection equipment needs a suitable rack as a fixed support. The rack of wafer defect detection is a structure used to support and fix the wafer detection equipment. It is usually a rigid frame or bracket used to install and position the wafer detection instrument to ensure the accuracy and stability of the detection process;

[0004] The wafer defect detection rack is an important component of the wafer inspection system. It provides a stable foundation for the inspection equipment and plays a key role in the accuracy and reliability of the inspection results.

[0005] The existing racks for wafer defect detection can usually only install and fix one detection device, but there are multiple wafer defect detection devices, which requires multiple racks for installation and fixation, resulting in poor practicality of the racks; in addition, since different detection devices are of different sizes, and the existing racks are usually customized according to the size of the device, the racks are only suitable for use with devices of one size, and the adaptability is low. In view of this, we propose a rack for wafer defect detection. Utility Model Content

[0006] 1. Technical problems to be solved

[0007] The utility model aims to provide a rack for wafer defect detection, so as to solve the problems of poor practicality and low adaptability of the rack proposed in the above background technology.

[0008] 2. Technical solution

[0009] A rack for wafer defect detection, comprising a frame component and a fixing component;

[0010] The frame assembly includes a placement platform, a top surface of which is provided with a plurality of mounting holes, and a bottom of which is connected with a plurality of column legs;

[0011] The fixing assembly comprises a mounting plate arranged on the top surface of the mounting platform, the top surface of the mounting plate is provided with a plurality of mounting holes 2 matching the mounting holes 1 from top to bottom, the top surface of the mounting plate is connected with a plurality of triangular plates, the side walls of the plurality of triangular plates are connected to the fixing plate, the side walls of the fixing plate are connected with a plurality of lower slot plates and a plurality of upper slot plates, the top surface of the lower slot plate is provided with a lower movable slot from top to bottom, the top surface of the upper slot plate is provided with an upper movable slot corresponding to the lower movable slot from top to bottom, the top surface of the lower slot plate is connected with a supporting plate, the movable rods are arranged in the lower movable slots and the upper movable slots, the circumferential side walls of the movable rods are provided with connecting plates, the side walls of the connecting plates are connected to the pushing plates, the side walls of the fixing plates are provided with screw holes, the side walls of the fixing plates are penetrated by threaded rods through the screw holes, one end of the threaded rod is connected to a pushing block, and the other end of the threaded rod is connected to a rotating handle.

[0012] Preferably, a frame cover is provided on the top surface of the placement platform, and glass is provided inside the frame cover.

[0013] Preferably, the side walls of the plurality of column legs are connected with transverse support rods and diagonal braces, the top of the diagonal brace is connected to the bottom of the placement platform, and the plurality of column legs, the plurality of transverse support rods and the plurality of diagonal braces are made of hollow steel pipes.

[0014] Preferably, the push plate is made of rectangular ceramic material with a thickness of 3 cm, and the push block is made of round ceramic material with a thickness of 1.5 cm.

[0015] Preferably, a spring is sleeved on the circumferential side wall of the threaded rod, and one end of the spring is connected to the side wall of the push block.

[0016] 3. Beneficial effects

[0017] Compared with the prior art, the advantages of the present invention are:

[0018] The utility model places the detection equipment on the top surface of the placement table, utilizes two fixing components to be distributed on both sides of the detection equipment, and selects the mounting holes at suitable positions of the fixing components on the top surface of the placement table for adjustment and fixing, further utilizes two groups of push plates to cooperate with each other to clamp the equipment on both sides of the detection equipment, can adjust and fix according to the size of the detection equipment, is suitable for fixing equipment of various sizes, and has strong adaptability. At the same time, the placement table can place multiple detection equipment, and each detection equipment can be fixed by using the fixing components, so that the machine frame has strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the structure of the fixing assembly of the utility model;

[0021] Figure 3 This is a schematic diagram of the disassembly of the fixed component structure of the utility model;

[0022] Explanation of the numbers in the figure: 1. Frame assembly; 2. Fixing assembly; 101. Placement table; 102. Mounting hole one; 103. Column leg; 104. Horizontal support rod; 105. Diagonal support; 106. Frame cover; 107. Glass; 201. Mounting plate; 202. Mounting hole two; 203. Fixing plate; 204. Triangular plate; 205. Lower groove plate; 206. Upper groove plate; 207. Support plate; 208. Threaded rod; 209. Push block; 210. Spring; 211. Rotating handle; 212. Moving rod; 213. Connecting plate; 214. Push plate; 215. Lower moving groove; 216. Upper moving groove. DETAILED DESCRIPTION

[0023] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0024] In the description of the present invention, "plurality" means two or more than two, unless otherwise clearly and specifically defined.

[0025] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "set / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0026] See also Figure 1-3 ,The utility model provides a technical solution:

[0027] A rack for wafer defect detection, comprising a frame component 1 and a fixing component 2;

[0028] Specifically, the frame assembly 1 includes a mounting platform 101, a plurality of mounting holes 102 are provided on the top surface of the mounting platform 101, a plurality of column legs 103 are welded on the bottom of the mounting platform 101, the mounting platform 101 is used to provide a mounting platform for the detection equipment, and the mounting holes 102 are used to provide a fixing structure for the fixing assembly 2;

[0029] Furthermore, the fixing assembly 2 includes a mounting plate 201 disposed on the top surface of the mounting platform 101, and a plurality of mounting holes 202 matching the mounting holes 102 are opened from top to bottom on the top surface of the mounting plate 201. The fixing assembly 2 is connected and fixed to the mounting platform 101 by screws through the mounting holes 202 and the mounting holes 102. A plurality of triangular plates 204 are welded to the top surface of the mounting plate 201, and a fixing plate 203 is welded to the side walls of the plurality of triangular plates 204. The function of the triangular plates 204 is to make the structure of the fixing plate 203 and the mounting plate 201 more stable. A plurality of lower groove plates 205 and a plurality of upper groove plates 206 are welded to the side walls of the fixing plate 203. A lower moving groove 215 is provided on the top surface of the lower groove plate 205 from top to bottom, an upper moving groove 216 corresponding to the lower moving groove 215 is provided on the top surface of the upper groove plate 206 from top to bottom, a support plate 207 is welded on the top surface of the lower groove plate 205, a moving rod 212 is provided in the lower moving groove 215 and the upper moving groove 216, a connecting plate 213 is welded on the circumferential side wall of the moving rod 212, and a push plate 214 is welded on the side wall of the connecting plate 213, the moving rod 212 can be horizontally moved in the lower moving groove 215 and the upper moving groove 216, and the push plate 214 can be horizontally moved by driving the push plate 214, a screw hole is provided on the side wall of the fixing plate 203, and a screw hole is provided on the side wall of the fixing plate 203. A threaded rod 208 passes through the wall through a screw hole, a push block 209 is welded to one end of the threaded rod 208, and a rotating handle 211 is connected to the other end of the threaded rod 208. By placing the detection device on the top surface of the placement table 101, and then placing the fixing assembly 2 on both sides of the detection device, the second mounting hole 202 on the mounting plate 201 of the fixing assembly 2 is aligned with the first mounting hole 102 of the placement table 101, and then the second mounting hole 202 and the first mounting hole 102 are connected and fixed by screws, so that the fixing assembly 2 is connected and fixed to the placement table 101, and further by rotating the rotating handle 211, the threaded rod 208 is rotated and moved forward at the same time, driving The push block 209 moves forward, and the push block 209 pushes the push plate 214 to move forward until it contacts the side wall of the detection device for fixing. According to the size of the detection device, two fixing components 2 are distributed on both sides of the detection device, and the fixing component 2 selects a mounting hole 102 at a suitable position on the top surface of the placement table 101 for adjustment and fixing, so that the frame can be adjusted and fixed according to the size of the detection device, and is suitable for fixing equipment of various sizes, with strong adaptability. At the same time, the placement table 101 can hold multiple detection devices, and each detection device can be fixed using the fixing component 2, making the frame more practical.

[0030] It is worth noting that, in order to provide protection for the top surface of the placement platform 101 , a frame cover 106 is welded to the top surface of the placement platform 101 , and glass 107 is arranged inside the frame cover 106 .

[0031] It is worth noting that in order to make the bottom structure of the placement platform 101 firm, the side walls of the multiple column legs 103 are welded with horizontal support rods 104 and diagonal braces 105, and the top of the diagonal brace 105 is welded to the bottom of the placement platform 101. The multiple column legs 103, multiple horizontal support rods 104 and multiple diagonal braces 105 are made of hollow steel pipes.

[0032] In addition, in order to make the push plate 214 and the push block 209 have higher wear resistance, high hardness and high electrical resistance, the push plate 214 is made of rectangular ceramic material with a thickness of 3 cm, and the push block 209 is made of round ceramic material with a thickness of 1.5 cm.

[0033] Finally, in order to prevent the threaded rod 208 from naturally rotating, a spring 210 is sleeved on the circumferential side wall of the threaded rod 208, and one end of the spring 210 is welded to the side wall of the push block 209. The spring 210 generates elastic force to push the threaded rod 208 away from the screw hole position of the fixing plate 203, and will not produce natural rotation and cause loose fixation.

[0034] Working principle: When the device is needed to work, the detection equipment is placed on the top surface of the placement table 101, and then the fixing components 2 are placed on both sides of the detection equipment, the mounting hole 202 on the mounting plate 201 of the fixing component 2 is aligned with the mounting hole 102 of the placement table 101, and then the mounting hole 202 and the mounting hole 102 are connected and fixed by screws, so that the fixing component 2 is connected and fixed to the placement table 101, and further the threaded rod 208 is rotated and moved forward by rotating the rotating handle 211, driving the push block 209 to move forward, and the push block 209 pushes the push plate 214 to move forward until it contacts the side wall of the detection equipment, and the fixing component 2 arranged on the other side wall of the detection equipment is fixed in this way, and the push plates 214 of the fixing components 2 on the two side walls cooperate with each other to make the fixed structure stable, and the placement table 101 can hold multiple detection equipment, and each detection equipment can be fixed in this way using the fixing component 2.

[0035] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A rack for wafer defect detection, characterized in that: It comprises a frame component (1) and a fixing component (2); A frame assembly (1), the frame assembly (1) comprising a mounting platform (101), a top surface of the mounting platform (101) being provided with a plurality of mounting holes (102), a bottom of the mounting platform (101) being connected to a plurality of column legs (103); A fixing assembly (2), the fixing assembly (2) comprising a mounting plate (201) arranged on the top surface of the placement platform (101), the top surface of the mounting plate (201) being provided with a plurality of mounting holes (202) matching the mounting holes (102) from top to bottom, the top surface of the mounting plate (201) being connected with a plurality of triangular plates (204), the side walls of the plurality of triangular plates (204) being connected with a fixing plate (203), the side walls of the fixing plate (203) being connected with a plurality of lower groove plates (205) and a plurality of upper groove plates (206), the top surface of the lower groove plate (205) being provided with a lower movable groove (215) from top to bottom, the top surface of the upper groove plate (206) being provided with a plurality of movable grooves (216) matching the mounting holes (102) from top to bottom The upper moving groove (216) corresponds to the lower moving groove (215), the top surface of the lower groove plate (205) is connected to a support plate (207), a moving rod (212) is arranged in the lower moving groove (215) and the upper moving groove (216), a connecting plate (213) is arranged on the circumferential side wall of the moving rod (212), the side wall of the connecting plate (213) is connected to a push plate (214), a screw hole is opened on the side wall of the fixed plate (203), a threaded rod (208) passes through the side wall of the fixed plate (203) through the screw hole, one end of the threaded rod (208) is connected to a push block (209), and the other end of the threaded rod (208) is connected to a rotating handle (211).

2. The rack for wafer defect detection according to claim 1, characterized in that: The top surface of the placement platform (101) is provided with a frame cover (106), and glass (107) is provided inside the frame cover (106).

3. The rack for wafer defect detection according to claim 2, characterized in that: The side walls of the plurality of column legs (103) are connected with a transverse support rod (104) and an inclined support (105), the top of the inclined support (105) is connected to the bottom of the placement platform (101), and the plurality of column legs (103), the plurality of transverse support rods (104) and the plurality of inclined support (105) are made of hollow steel pipes.

4. The rack for wafer defect detection according to claim 3, characterized in that: The push plate (214) is made of rectangular ceramic material with a thickness of 3 cm, and the push block (209) is made of round ceramic material with a thickness of 1.5 cm.

5. The rack for wafer defect detection according to claim 4, characterized in that: A spring (210) is sleeved on the circumferential side wall of the threaded rod (208), and one end of the spring (210) is connected to the side wall of the push block (209).

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