A drying oven

Abstract

The utility model provides an oven, which belongs to the technical field of coating crystallization, and includes a box body, a heating component and a hot air component. The heating component is arranged in the box body, and the top of the heating component is used to place the substrate to be processed; the hot air component is arranged above the heating component to bake the substrate to be processed with hot air. The hot air component includes a first air blade and a second air blade. The first air blade is arranged on the first side wall of the box body, and the first air blade is connected to the hot air source through an air inlet duct; the second air blade is arranged on the second side wall of the box body, and the first side wall and the second side wall are arranged opposite to each other, and the second air blade is connected to the outside through an air outlet duct. The oven provided by the utility model heats the bottom and the top of the substrate to be processed at the same time through the cooperation of the heating component and the hot air component, thereby reducing the drying time and improving the crystallization efficiency of the substrate and the quality of the crystallization.

Description

Technical Field

[0001] The utility model relates to the technical field of coating crystallization, in particular to a drying oven. Background Art

[0002] In the semiconductor, panel, new energy and other industries, the glass substrate needs to be crystallized quickly after completing the coating process. Currently, hot air ovens are used on the market to complete crystallization.

[0003] In the existing hot air oven, the coating of the glass substrate is mainly dried by the principle of hot air circulation baking and drying. The glass substrate is placed on the table in the oven and is baked by the hot air above it. However, since the bottom of the glass substrate cannot be exposed to the hot air baking, the drying time is greatly increased and the baking efficiency is reduced. Utility Model Content

[0004] Therefore, the utility model aims to solve the defect in the prior art that the bottom of the glass substrate cannot be exposed to hot air baking, which greatly increases the drying time and reduces the baking efficiency, thereby providing an oven.

[0005] In order to solve the above technical problems, the utility model provides an oven, comprising:

[0006] Box;

[0007] A heating component is arranged in the box, and a substrate to be processed is placed above the heating component;

[0008] The hot air component is arranged above the heating component to bake the substrate to be processed with hot air.

[0009] Optionally, the hot air component includes:

[0010] A first air blade is arranged on the first side wall of the box body, and the first air blade is connected to the hot air source through an air inlet duct;

[0011] The second wind blade is arranged on the second side wall of the box body, the first side wall and the second side wall are arranged opposite to each other, and the second wind blade is connected to the outside through an air outlet duct.

[0012] Optionally, a speed regulating valve is provided on the air inlet duct.

[0013] Optionally, the first wind blade member and the second wind blade member have the same structure, and the first wind blade member includes:

[0014] The wind knife housing has a wind cavity inside, and the wind knife housing has a wind port connected to the wind cavity;

[0015] An adjusting member is movably arranged on the wind knife housing, and the size of the air outlet is changed by moving the adjusting member;

[0016] Hot air enters the box from the air outlet of the first air blade component, and then is sent out of the box from the air outlet of the second air blade component.

[0017] Optionally, the heating component divides the inner space of the box into a first cavity and a second cavity which are distributed vertically, and the substrate to be processed and the hot air component are arranged in the first cavity.

[0018] Optionally, the heating component comprises:

[0019] A base is horizontally arranged in the box, and the substrate to be processed is placed on the base;

[0020] A heating element is connected to the base to heat the base.

[0021] Optionally, it also includes:

[0022] A lifting assembly is arranged in the second cavity, and the lifting assembly has a pin that can slide toward the substrate to be processed. The heating assembly is provided with a through hole for the pin to pass through. The pin moves to realize the lifting and lowering of the substrate to be processed.

[0023] Optionally, the lifting assembly includes a driving member, the driving member is connected to the ejector pin member, and the driving member drives the ejector pin member to slide in a direction toward the substrate to be processed.

[0024] Optionally, the second cavity is a closed cavity, and a negative pressure pipeline is connected to the second cavity, and the negative pressure pipeline is connected to an air extraction device.

[0025] Optionally, the base is made of aluminum alloy or stainless steel;

[0026] And / or, the upper end portion of the ejector pin is made of PEEK;

[0027] And / or, the heating element is a built-in mica heating plate or a hot water circulation heating pipe or a heating rod;

[0028] And / or, a temperature detection component is arranged in the base platform.

[0029] The technical solution of the utility model has the following advantages:

[0030] 1. The oven provided by the utility model includes a box body, a heating component and a hot air component. The heating component is arranged in the box body and is used to heat the bottom of the substrate to be processed. The hot air component is arranged above the heating component and performs hot air baking on the top of the substrate to be processed. Through the cooperation of the heating component and the hot air component, the bottom and top of the substrate to be processed are heated at the same time, which reduces the drying time and improves the crystallization efficiency and crystallization quality of the substrate.

[0031] 2. The utility model provides an oven, and the hot air component includes a first wind blade component and a second wind blade component. The first wind blade component and the second wind blade component are relatively arranged on the two side walls of the box body. The first wind blade component is connected to the hot air source through an air inlet duct, and the second wind blade component is connected to the outside through an air outlet duct. The setting of the first wind blade component converts the hot air entering the box body into uniform wind blade output, making the baking more uniform, and the hot air after baking is discharged through the second wind blade component, also discharged in the form of wind blades, so that the fluid inside the box body is more uniform.

[0032] 3. The utility model provides an oven with a speed regulating valve on the air inlet duct. The setting of the speed regulating valve ensures that the air volume and air duct are uniform after the hot air from the air inlet duct enters the interior of the box, thereby improving the uniformity of crystallization.

[0033] 4. In the oven provided by the utility model, the first wind knife component includes a wind knife shell and an adjusting component. The adjusting component is movably arranged on the wind knife shell, and the size of the air outlet of the wind knife shell can be changed. By adjusting the adjusting component on the wind knife component, the amount of hot air blown out from the wind knife component and the size of the air duct are adjusted to match the baking of glass substrates of different specifications, thereby ensuring the best crystallization effect of glass substrates of different specifications.

[0034] 5. In the oven provided by the utility model, the heating component divides the internal space of the box into a first cavity and a second cavity distributed up and down, and the substrate to be processed and the hot air component are arranged in the first cavity, that is, the heating effect of the heating component and the baking effect of the hot air component are both completed in the first cavity, avoiding heat from entering other spaces to cause heat waste, thereby ensuring the efficiency of crystallization.

[0035] 6. The heating assembly of the oven provided by the utility model includes a base and a heating element. The base is horizontally arranged in the box body. The heating element is connected to the base for heating the base. The arrangement of the base facilitates the placement of the substrate to be processed and the separation of the two cavities, and also facilitates the uniform transfer of heat.

[0036] 7. The oven provided by the utility model further includes a lifting assembly, which is arranged in the second cavity. The lifting assembly has a lifting pin for driving the substrate to be processed to rise and fall. The height of the substrate to be processed can be adjusted according to the baking requirements to achieve the best baking effect;

[0037] After baking, the substrate can be driven to rise, making it easier for workers to pick up the glass substrate through the clamping plate, avoiding the difficulty in picking up the substrate caused by the slight vacuum at the bottom of the glass substrate when baking, and reducing the risk of burns.

[0038] 8. The oven provided by the utility model has a lifting assembly including a driving member, which drives the ejector member to slide in the direction of the substrate to be processed. The setting of the driving member improves the degree of automation of the operation, and the height can be quickly adjusted according to the baking conditions of different substrates to improve efficiency.

[0039] 9. The utility model provides an oven in which the second cavity is a closed cavity, and a negative pressure pipeline is connected to the second cavity. The negative pressure pipeline is connected to the exhaust device, and the internal air is discharged through the negative pressure pipeline to prevent air from entering the first cavity from the through holes on the heating component and affecting the baking effect.

[0040] 10. The utility model provides an oven, wherein the base is made of aluminum alloy or stainless steel, which has good thermal conductivity and ensures uniform heating of the substrate; the upper end of the ejector pin is made of PEEK, which is resistant to high temperatures and has strong hardness and corrosion resistance, and its smooth texture can reduce damage to the glass substrate; the temperature detection component in the base can accurately control the temperature of the base to achieve the best heating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0042] Figure 1 This is a schematic structural diagram of an implementation of an oven provided in Example 1 of the utility model;

[0043] Figure 2 for Figure 1 Schematic diagram of the internal structure;

[0044] Figure 3 for Figure 2 A schematic structural diagram of the first air knife member in FIG.

[0045] Figure 4 for Figure 2 Schematic diagram of the structure of the lifting assembly.

[0046] Description of reference numerals:

[0047] 1. Box body; 2. Substrate to be processed; 3. First wind knife component; 4. Air inlet duct; 5. Second wind knife component; 6. Air outlet duct; 7. Wind knife housing; 8. Air outlet; 9. Adjustment component; 10. First cavity; 11. Second cavity; 12. Base; 13. Lifting assembly; 14. Ejector component; 15. Driving component; 16. Negative pressure pipeline; 17. Mounting frame; 18. Lifting plate. DETAILED DESCRIPTION

[0048] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0049] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0050] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0052] The oven provided in this embodiment is used in the semiconductor, panel, new energy and other industries for rapid crystallization of glass substrate coatings.

[0053] like Figure 1 and Figure 2As shown, a specific implementation of the oven provided in this embodiment includes a box body 1, a heating component and a hot air component. The heating component is arranged in the box body 1, and the top of the heating component is used to place the substrate 2 to be processed; the hot air component is arranged above the heating component to bake the substrate 2 to be processed with hot air.

[0054] By cooperating with the heating component and the hot air component, the bottom and top of the substrate 2 to be processed are heated at the same time, which reduces the drying time and improves the substrate crystallization efficiency and the quality of crystallization. Specifically, the box 1 is a rectangular box structure, and the substrate 2 to be processed is placed horizontally in the box 1, located between the heating component and the hot air component, which improves the uniformity of baking crystallization; the box 1 can be provided with a door for taking out the substrate 2 to be processed, and the box 1 can also be set in the form of an upper cover and a lower cover structure, and the two covers are sealed to facilitate taking out.

[0055] like Figure 2 As shown, the oven provided in this embodiment, the hot air component includes a first wind blade member 3 and a second wind blade member 5, the first wind blade member is arranged on the first side wall of the box body 1, and the first wind blade member 3 is connected to the hot air source through the air inlet duct 4; the second wind blade member 5 is arranged on the second side wall of the box body 1, the first side wall and the second side wall are arranged opposite to each other, and the second wind blade member 5 is connected to the outside through the air outlet duct 6.

[0056] The first wind blade 3 is set to convert the hot air entering the box 1 into a uniform wind blade output, making the baking more uniform, and the hot air after baking is discharged through the second wind blade 5, also discharged in the form of a wind blade, so that the fluid inside the box 1 is more uniform. Among them, the first wind blade 3 and the second wind blade 5 are symmetrically arranged, and the air outlet of the first wind blade 3 is higher than the substrate 2 to be processed by a specified distance, and is set accordingly according to the baking requirements of the glass substrate.

[0057] Specifically, the first wind blade 3 and the second wind blade 5 are fixedly arranged in parallel on the side wall of the box 1 and parallel to the substrate 2 to be processed to ensure uniform baking. They can be directly installed on the inner wall of the box 1 or on the outer wall, and their air outlets extend into the interior of the box 1.

[0058] In the oven provided in this embodiment, a speed regulating valve is arranged on the air inlet duct 4, and the arrangement of the speed regulating valve ensures that the hot air from the air inlet duct 4 enters the interior of the box body 1 with uniform air volume and air passage, thereby improving the uniformity of crystallization. Specifically, the speed regulating valve can be a mechanical speed regulating valve, an electronic speed regulating valve or a pneumatic speed regulating valve.

[0059] like Figure 2 and Figure 3As shown, in the oven provided by this embodiment, the first wind blade member 3 and the second wind blade member 5 have the same structure. The first wind blade member 3 includes a wind blade housing 7 and an adjusting member 9. The wind blade housing 7 has a wind cavity inside, and the wind blade housing 7 has an air outlet 8 connected to the wind cavity. The adjusting member 9 is movably arranged on the wind blade housing 7, and the size of the air outlet 8 can be changed by moving the adjusting member 9. Hot air enters the box body 1 from the air outlet 8 of the first wind blade member 3, and then is sent out of the box body 1 from the air outlet 8 of the second wind blade member 5.

[0060] By adjusting the adjusting member 9 on the wind blade member, the amount of hot air blown out from the wind blade member and the size of the air duct are adjusted to match the baking of glass substrates of different specifications, thereby ensuring the best crystallization effect of glass substrates of different specifications.

[0061] Specifically, Figure 2 and Figure 3 As shown, the vertical cross-section of the wind knife shell 7 is a trapezoidal structure, and the adjusting member 9 is a plate structure, which is arranged on the wind knife shell 7, and one end cover is arranged on the air outlet 8. The adjusting member 9 moves to change the size of the area covered on the air outlet 8, thereby adjusting the size of the air outlet 8; the adjusting member 9 and the wind knife shell 7 are connected by a waist-shaped hole, and a fixing bolt is arranged in the waist-shaped hole. When it needs to be moved, the bolt is loosened, and the bolt is tightened after moving to the specified position; in addition, as an alternative embodiment, the adjusting member 9 can also be set to be electrically controlled to automatically adjust the size of the air outlet 8.

[0062] like Figure 2 As shown, in the oven provided in this embodiment, the heating component divides the internal space of the box body 1 into a first cavity 10 and a second cavity 11 which are distributed vertically, and the substrate 2 to be processed and the hot air component are arranged in the first cavity 10. That is, the heating effect of the heating component and the baking effect of the hot air component are both completed in the first cavity 10, which prevents heat from entering other spaces and causing heat waste, thereby ensuring the efficiency of crystallization.

[0063] like Figure 2 As shown, in the oven provided in this embodiment, the heating assembly includes a base 12 and a heating element, the base 12 is horizontally arranged in the box body 1, and the substrate 2 to be processed is placed above the base 12; the heating element is connected to the base 12 to heat the base 12. The arrangement of the base 12 facilitates the placement of the substrate 2 to be processed and the separation of the two cavities, and also facilitates the uniform transfer of heat.

[0064] The specific implementation of the heating element includes but is not limited to an embedded mica heating plate or a hot water circulation heating pipe or a heating rod, which is installed in the base 12 in an embedded manner.

[0065] An improved implementation of the heating component, a temperature detection component is provided in the base 12, and the setting of the temperature detection component in the base 12 can accurately control the temperature of the base 12 to achieve the best heating effect. The temperature detection component can be a temperature sensor, and a temperature control line can also be provided in the base 12 to indicate the specific temperature.

[0066] Specifically, the base 12 is made of aluminum alloy or stainless steel, which has good thermal conductivity and ensures uniform heating effect on the substrate.

[0067] like Figure 2 and Figure 4 As shown, the oven provided in this embodiment also includes a lifting component 13, which is arranged in the second cavity 11. The lifting component 13 has a lifting needle 14 that can slide toward the direction of the substrate 2 to be processed. The heating component is provided with a through hole for the lifting needle 14 to pass through. The lifting needle 14 moves to realize the lifting and lowering of the substrate 2 to be processed.

[0068] The height of the substrate 2 to be processed can be adjusted according to the baking requirements to achieve the best baking effect; and after the baking is completed, the substrate can be driven to rise, so that the staff can take the glass substrate through the clamping plate to avoid the slight vacuum at the bottom of the glass substrate during baking, which may cause difficulty in taking the substrate and reduce the risk of burns.

[0069] In a specific implementation of the ejector pin 14, the upper end of the ejector pin 14 is made of PEEK, which is resistant to high temperatures and has strong hardness and corrosion resistance, and has a smooth texture that can reduce damage to the glass substrate.

[0070] like Figure 2 and Figure 4 As shown, in the oven provided in this embodiment, the lifting assembly 13 includes a driving member 15, the driving member 15 is connected to the ejector member 14, and the driving member 15 drives the ejector member 14 to slide toward the substrate 2 to be processed. The setting of the driving member 15 improves the degree of automatic operation, and the height is quickly adjusted according to the baking conditions of different substrates, thereby improving efficiency.

[0071] Specifically, the driving member 15 includes but is not limited to a motor, a screw rod, a cylinder and the like.

[0072] A specific implementation of the lifting component 13, the lifting component 13 includes a mounting frame 17 and a lifting plate 18, the mounting frame 17 is fixedly mounted on the base 12 or fixedly mounted on the bottom wall of the box body 1, the driving member 15 is fixedly mounted on the mounting frame 17, the lifting plate 18 is mounted on the output end of the driving member 15, the ejector member 14 is vertically arranged on the lifting plate 18, the ejector member 14 has multiple ejector members 14, and the substrate 2 to be processed is lifted at the same time, the movement of the lifting plate 18 is carried out along the guide rail, and a linear bearing is arranged between the guide rail to ensure the guiding effect.

[0073] like Figure 2 As shown, in the oven provided in this embodiment, the second cavity 11 is a closed cavity, and a negative pressure pipeline 16 is connected to the second cavity 11. The negative pressure pipeline 16 is connected to the exhaust device, and the internal air is discharged through the negative pressure pipeline 16 to prevent air from entering the first cavity 10 from the through holes on the heating component and affecting the baking effect.

[0074] The use process of the oven in this embodiment:

[0075] The substrate 2 to be processed is placed on the base 12 of the heating component, and then the height of the substrate 2 to be processed is adjusted by the lifting component 13 to achieve the best baking effect; then the heating component and the hot air component are turned on to act on the bottom and top of the substrate 2 to be processed respectively, and the hot air enters the first wind blade component 3 through the air inlet duct 4, and the hot air is converted into a uniform wind blade and output to the first cavity 10, so as to evenly bake the substrate 2 to be processed, and the baked hot air is discharged from the second wind blade component 5. After the baking is completed, the staff inserts the processed substrate through the plug plate.

[0076] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from these are still within the scope of protection of the present utility model.

Claims

1. A baking oven, characterized in that: include: Box body (1); A heating component is arranged in the box (1), and a substrate (2) to be processed is placed above the heating component; A hot air component is arranged above the heating component to bake the substrate (2) to be processed with hot air.

2. The oven according to claim 1, characterized in that The hot air component comprises: A first wind blade member (3) is arranged on a first side wall of the box body (1), and the first wind blade member (3) is connected to a hot air source via an air inlet duct (4); The second wind blade member (5) is arranged on the second side wall of the box body (1), the first side wall and the second side wall are arranged opposite to each other, and the second wind blade member (5) is connected to the outside through an air outlet duct (6).

3. The oven according to claim 2, characterized in that The air inlet duct (4) is provided with a speed regulating valve.

4. The oven according to claim 2, characterized in that: The first wind blade component (3) and the second wind blade component (5) have the same structure, and the first wind blade component (3) comprises: A wind knife housing (7) having a wind cavity inside, and the wind knife housing (7) has a wind port (8) communicating with the wind cavity; An adjusting member (9) is movably arranged on the wind knife housing (7), and the size of the air outlet (8) can be changed by moving the adjusting member (9); Hot air enters the box (1) from the air outlet (8) of the first air blade component (3), and is then sent out of the box (1) from the air outlet (8) of the second air blade component (5).

5. The oven according to claim 1, characterized in that The heating component divides the internal space of the box (1) into a first cavity (10) and a second cavity (11) which are arranged vertically, and the substrate (2) to be processed and the hot air component are arranged in the first cavity (10).

6. The oven according to claim 5, characterized in that The heating assembly comprises: A base (12) is horizontally arranged in the box (1), and the substrate (2) to be processed is placed above the base (12); A heating element is connected to the base (12) to heat the base (12).

7. The oven according to claim 6, characterized in that Also includes: A lifting component (13) is arranged in the second cavity (11), the lifting component (13) has a lifting needle (14) that can slide in the direction of the substrate (2) to be processed, the heating component is provided with a through hole for the lifting needle (14) to pass through, and the lifting needle (14) moves to realize the lifting and lowering of the substrate (2) to be processed.

8. The oven according to claim 7, characterized in that The lifting assembly (13) comprises a driving member (15), wherein the driving member (15) is connected to the ejector pin member (14), and the driving member (15) drives the ejector pin member (14) to slide in the direction of the substrate (2) to be processed.

9. The oven according to claim 7, characterized in that The second cavity (11) is a closed cavity, and a negative pressure pipeline (16) is arranged in communication with the second cavity (11), and the negative pressure pipeline (16) is connected to an air extraction device.

10. The oven according to claim 7, characterized in that The base (12) is made of aluminum alloy or stainless steel; And / or, the material of the upper end portion of the ejector pin (14) is PEEK; And / or, the heating element is a built-in mica heating plate or a hot water circulation heating pipe or a heating rod; And / or, a temperature detection component is arranged inside the base platform (12).

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