Integrated circuit cleaning process equipment

Abstract

The utility model relates to an integrated circuit cleaning process device in the field of integrated circuit cleaning technology, including an equipment body, a product working area is arranged inside the equipment body, and an electric control area is arranged below the product working area. The utility model enables the device to clean the integrated circuit from different angles through the design of upper and lower blowing combined with exhaust, ensuring the comprehensiveness and thoroughness of the cleaning. The blowing nozzle is obliquely opposite to the product direction, and the funnel-shaped exhaust port design is combined to form a strong airflow, which helps to blow up the particles on the surface of the product and discharge them through the exhaust port, reducing dead angles during the cleaning process; two upper and lower front baffles are installed at the equipment entrance to effectively prevent the return of particles during the cleaning process; the suction cup holes on the vacuum suction cup carrier are used for vacuum adsorption, which can stably fix the product to prevent the product from being displaced or damaged due to excessive wind force during the cleaning process.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuit cleaning, in particular to an integrated circuit cleaning process device. Background Art

[0002] In recent years, MEMS (micro-electromechanical systems) have developed rapidly due to their advantages of small packaging volume, light weight, low power consumption, good durability, stable performance, etc. MEMS microphones, micromotors, micropumps, micro-vibrators, MEMS optical sensors, MEMS pressure sensors, etc. are particularly important for particle control in the packaging process. The present invention is based on a device for cleaning particles before LF materials are put on the machine.

[0003] The particularity of MEMS requires that the proportion of particles in sensitive chips during packaging must be lower than that of ordinary chips, and their effective exposure to the environment must be minimized. The disadvantages of the cleaning device used in the traditional way are: manual tools and container flipping operations are used to achieve multi-faceted cleaning of the substrate. The process is relatively cumbersome and can easily be affected by human factors and cause quality abnormalities. In addition, the operating platform is open and will be exposed to the environment. It is difficult to prevent particles from falling a second time, which can easily cause the risk of re-contamination of the product. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes an integrated circuit cleaning process device.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an integrated circuit cleaning process device, including an equipment body, a product working area is arranged inside the equipment body, an electric control area is arranged below the product working area, a cleaning device is arranged in the product working area, the cleaning device includes an inner tank, a blower nozzle is passed through and fixedly connected to the inner tank, a slide rail is fixedly connected inside the cleaning device, a vacuum suction cup carrier is slidably connected to the slide rail, and an exhaust fan is fixedly connected to one side of the equipment body.

[0006] As a further description of the above technical solution:

[0007] The shape of the inner container is oval.

[0008] As a further description of the above technical solution:

[0009] The upper and lower ends of the inner container are fixedly connected with a front baffle, and the four corners of the bottom of the inner container are fixedly connected with supporting legs.

[0010] As a further description of the above technical solution:

[0011] One end of the vacuum suction cup carrier is fixedly connected to a carrier handle, and a plurality of suction cup holes are provided on the vacuum suction cup carrier. The vacuum suction cup carrier fixes the product by vacuum adsorption of the suction cup holes thereon, and the distance between the suction cup holes is 5.8-11mm. The suction cup holes are adsorbed on the four sides of the product, and 7-13 suction cup holes are distributed on each side.

[0012] As a further description of the above technical solution:

[0013] The position of the inner tank near the exhaust fan is the product exhaust port, which is funnel-shaped, and the vacuum suction cup carrier in the direction of the product exhaust port adopts an open design.

[0014] As a further description of the above technical solution:

[0015] The air blowing nozzle is fixedly connected with an ion gun, and the ion gun is fixedly connected to the side of the inner container.

[0016] As a further description of the above technical solution:

[0017] The blowing nozzle is obliquely opposite to the product direction. The blowing nozzle allows compressed air to pass through the air pipe to reach the designated guide pipe and then blow in one direction, forming a positive pressure with the product suction port, so that the particles are completely discharged from the cavity of the equipment body.

[0018] As a further description of the above technical solution:

[0019] When the product is pushed into the box, the sensor senses the product and automatically starts the air blowing nozzle and the exhaust fan.

[0020] As a further description of the above technical solution:

[0021] The entire cabinet of the equipment body is made of smooth and bright stainless steel plate.

[0022] The utility model has the following beneficial effects:

[0023] 1. In the utility model, the device can clean the integrated circuit from different angles through the design of blowing and exhausting air from top to bottom, ensuring the comprehensiveness and thoroughness of the cleaning. The blowing nozzle is obliquely facing the product direction, and the funnel-shaped exhaust port design forms a strong airflow, which helps to quickly discharge particles and reduce dead angles during the cleaning process;

[0024] 2. Install two upper and lower front baffles at the equipment entrance to effectively prevent the return of particles during the cleaning process. The air blowing nozzle is diagonally facing the product direction to facilitate blowing up particles on the surface of the product and discharging them through the exhaust port;

[0025] 3. Use the suction cup holes on the vacuum suction cup carrier for vacuum adsorption to stabilize the product and prevent the product from shifting or being damaged due to excessive wind force during the cleaning process. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 The structure of the integrated circuit cleaning process device proposed by the utility model is shown in FIG. Figure 1 ;

[0027] Figure 2 The structure of the integrated circuit cleaning process device proposed by the utility model is shown in FIG. Figure 2 ;

[0028] Figure 3 This is a schematic structural diagram of a cleaning device of an integrated circuit cleaning process device proposed by the utility model;

[0029] Figure 4 This is a schematic diagram of the structure of the inner tank of the integrated circuit cleaning process device proposed by the utility model;

[0030] Figure 5 This is a structural schematic diagram of a vacuum suction cup carrier and a carrier handle of an integrated circuit cleaning process device proposed by the utility model.

[0031] Legend:

[0032] 1. Equipment body; 2. Product working area; 3. Electronic control area; 4. Cleaning device; 5. Inner tank; 6. Blowing nozzle; 7. Vacuum suction cup carrier; 8. Carrier handle; 9. Front baffle; 10. Suction cup hole; 11. Ion gun; 12. Slide rail; 13. Support leg; 14. Exhaust fan. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] Reference Figure 1-5The utility model provides an embodiment: an integrated circuit cleaning process device, including an equipment body 1, a frame and a shell of the entire cleaning process device, which provide necessary space and protection for internal components, a product working area 2 is arranged inside the equipment body 1, and an electric control area 3 is arranged below the product working area 2. The product working area 2 is a special area for cleaning integrated circuit products, which is separated from the electric control area 3 to avoid cross contamination. A cleaning device 4 is arranged in the product working area 2. The cleaning device 4 is the main component for performing cleaning tasks, and is composed of multiple sub-components that work together to clean the integrated circuit. Road product, the cleaning device 4 includes an inner liner 5, and a blowing nozzle 6 is passed through and fixedly connected inside the inner liner 5. The blowing nozzle 6 is responsible for blowing compressed air to the integrated circuit product to remove particles on the surface of the integrated circuit product. A slide rail 12 is fixedly connected inside the cleaning device 4, and a vacuum suction cup carrier 7 is slidably connected to the slide rail 12. The vacuum suction cup carrier 7 is connected to the cavity of the cleaning device 4 by the slide rail 12 to reduce friction and achieve portability that is more convenient for personnel to pull out. An exhaust fan 14 is fixedly connected to one side of the equipment body 1, and the exhaust fan 14 is responsible for discharging particles generated during the cleaning process out of the equipment.

[0035] The shape of the inner container 5 is elliptical, and the elliptical shape is helpful to form a uniform airflow.

[0036] The upper and lower ends of the inner container 5 are fixedly connected with front baffles 9 , which can effectively prevent the return of particles during the cleaning process. The four corners of the bottom of the inner container 5 are fixedly connected with support legs 13 .

[0037] One end of the vacuum suction cup carrier 7 is fixedly connected to a carrier handle 8, which facilitates the operator to grasp and move the carrier. The vacuum suction cup carrier 7 is provided with a plurality of suction cup holes 10, which fix the product by vacuum adsorption to ensure the stability of the product during the cleaning process. The vacuum suction cup carrier 7 fixes the product by vacuum adsorption of the suction cup holes 10 thereon. The distance between the suction cup holes 10 is 5.8-11mm, and it is adsorbed on the four sides of the product, with 7-13 suction cup holes 10 distributed on each side.

[0038] The position of the inner container 5 near the exhaust fan 14 is the product exhaust port, which is funnel-shaped, and the vacuum suction cup carrier 7 in the direction of the product exhaust port adopts an open design.

[0039] The air blowing nozzle 6 is fixedly connected with an ion gun 11, and the ion gun 11 is fixedly connected to the side of the inner tank 5. The ion gun 11 is used to neutralize the static electricity on the surface of the integrated circuit and reduce the adsorption of particulate matter.

[0040] The blowing nozzle 6 is obliquely opposite to the product direction. The blowing nozzle 6 allows compressed air to pass through the air pipe to reach the designated guide pipe and then blow in one direction to form a positive pressure with the product suction port, so that the particles are completely discharged from the cavity of the equipment body 1.

[0041] When the product is pushed into the box, the sensor senses the product and automatically starts the blowing nozzle 6 and the exhaust fan 14, thereby realizing automatic operation.

[0042] The entire body of the device 1 is made of smooth and bright stainless steel sheet, which is easy to clean, reduces particle adhesion, and improves the durability and cleaning efficiency of the device.

[0043] Working principle:

[0044] Product positioning and fixing: When the integrated circuit product is placed in the product working area 2, the suction cup hole 10 on the vacuum suction cup carrier 7 fixes the product by vacuum adsorption to ensure that the product is stable and immobile during the cleaning process;

[0045] Cleaning process starts: after the sensor senses the product, the blowing nozzle 6 and the exhaust fan 14 are automatically started without manual intervention, thus improving the automation level of the operation;

[0046] Airflow control and cleaning: The blowing nozzle 6 is diagonally facing the product direction, generating a directional compressed air flow, which forms a positive pressure through a specific guide tube, and blows the particles on the surface of the integrated circuit to the product exhaust port;

[0047] Particle suction: The product exhaust port is designed to be funnel-shaped, which, combined with the open design of the vacuum suction cup carrier 7, effectively guides the particles to move toward the exhaust fan 14 and eventually be discharged from the equipment;

[0048] Optimized cleaning effect: The oval shape of the inner tank 5 and the design of the front baffle 9, combined with the mobility of the slide rail 12 and the vacuum suction cup carrier 7, enable the cleaning device 4 to adapt to products of different sizes and achieve a comprehensive cleaning effect.

[0049] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An integrated circuit cleaning process device, comprising an equipment body (1), characterized in that: A product working area (2) is arranged inside the equipment body (1), an electric control area (3) is arranged below the product working area (2), a cleaning device (4) is arranged inside the product working area (2), the cleaning device (4) comprises an inner liner (5), a blower nozzle (6) is passed through and fixedly connected to the inner liner (5), a slide rail (12) is fixedly connected inside the cleaning device (4), a vacuum suction cup carrier (7) is slidably connected to the slide rail (12), and an exhaust fan (14) is fixedly connected to one side of the equipment body (1); One end of the vacuum suction cup carrier (7) is fixedly connected to a carrier handle (8), and a plurality of suction cup holes (10) are provided on the vacuum suction cup carrier (7). The vacuum suction cup carrier (7) fixes the product by vacuum adsorption of the suction cup holes (10) thereon, and the distance between the suction cup holes (10) is 5.8-11 mm. The suction cup holes (10) are adsorbed on the four sides of the product, and 7-13 suction cup holes (10) are distributed on each side.

2. The integrated circuit cleaning process device according to claim 1, characterized in that: The shape of the inner container (5) is oval.

3. The integrated circuit cleaning process device according to claim 2, characterized in that: The upper and lower ends of the inner container (5) are fixedly connected to a front baffle (9), and the four corners of the bottom of the inner container (5) are fixedly connected to support legs (13).

4. The integrated circuit cleaning process device according to claim 3, characterized in that: The location of the inner container (5) near the exhaust fan (14) is the product exhaust port, which is funnel-shaped, and the vacuum suction cup carrier (7) in the direction of the product exhaust port adopts an open design.

5. The integrated circuit cleaning process device according to claim 4, characterized in that: The air blowing nozzle (6) is fixedly connected to an ion gun (11), and the ion gun (11) is fixedly connected to the side of the inner container (5).

6. The integrated circuit cleaning process device according to claim 5, characterized in that: The blowing nozzle (6) is diagonally opposite to the product direction. The blowing nozzle (6) allows compressed air to pass through the air pipe to reach the designated guide pipe and then blow in a fixed direction, forming a positive pressure with the product suction port, so that the particles are completely discharged from the cavity of the equipment body (1).

7. The integrated circuit cleaning process device according to claim 6, characterized in that: When the product is pushed into the box, the sensor senses the product and automatically starts the air blowing nozzle (6) and the exhaust fan (14).

8. The integrated circuit cleaning process device according to claim 7, characterized in that: The entire housing of the equipment body (1) is made of smooth and bright stainless steel plate.

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