Photovoltaic cell process equipment, photovoltaic cell production line and photovoltaic cell
By setting up multiple intake pipes in the photovoltaic cell process equipment and inputting different types of process gases separately, the problem of mutual interference between process gases is solved, and the diffusion uniformity and finished product quality of the silicon wafer surface are improved.
Patent Information
- Application Number
- CN202421534024.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-28
- Publication Date
- 2025-04-11
- Estimated Expiration
- 2034-06-28
AI Technical Summary
In the diffusion process of photovoltaic cells, process gases interfere with each other, resulting in poor square resistance uniformity on the surface of the silicon wafer, affecting the performance of the silicon wafer and the yield of the finished product.
By setting up multiple intake pipes in the photovoltaic cell process equipment, different types of process gas are input separately, and interference between different gases is reduced, thereby improving the diffusion uniformity of process gas on the surface of the silicon wafer.
The process gas is more uniformly distributed on the surface of the silicon wafer, and the silicon wafer performance and finished product yield are improved.
Smart Images
Figure CN222744444U_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the field of photovoltaic cell technology, and in particular relates to a photovoltaic cell process equipment, a photovoltaic cell production line, and a photovoltaic cell. Background Art
[0002] In the process of preparing photovoltaic cells, diffusion is a relatively important process. In the diffusion process, the silicon wafer needs to be placed in the inner cavity of the diffusion furnace, and the diffusion gas in the diffusion furnace interacts with the surface of the silicon wafer to form the required structure. However, in the process of introducing process gases into the diffusion furnace, the process gases easily interfere with each other, resulting in poor uniformity of the square resistance of the silicon wafer surface after the process gases diffuse on the surface of the silicon wafer, which in turn affects the performance of the silicon wafer and the yield of the finished product. Utility Model Content
[0003] The embodiments of the present application provide a photovoltaic cell process equipment, a photovoltaic cell production line, and a photovoltaic cell to solve or alleviate one or more technical problems in the prior art.
[0004] As one aspect of an embodiment of the present application, an embodiment of the present application provides a photovoltaic cell process equipment, including:
[0005] A furnace body, having an air inlet end and a reaction chamber which are interconnected, wherein the reaction chamber is used to accommodate the battery cells;
[0006] a first air inlet pipe, connected to the air inlet end, for inputting a first process gas into the reaction chamber;
[0007] a second air inlet pipe, connected to the air inlet end and spaced apart from the first air inlet pipe, for inputting a second process gas into the reaction chamber;
[0008] The first process gas and the second process gas are simultaneously input into the reaction chamber.
[0009] Optionally, a portion of the first air inlet pipe is inserted into the furnace body, and a portion of the second air inlet pipe is inserted into the furnace body;
[0010] The length of the first air inlet pipe inserted into the furnace body is the same as the length of the second air inlet pipe inserted into the furnace body.
[0011] Optionally, the total gas category of the process gas includes source gas, oxygen, and nitrogen; the source gas is BCl3 or BBr3;
[0012] The first process gas includes one or two of the process gases;
[0013] The second process gas includes two or one of the process gases;
[0014] wherein the gas category of the first process gas and the gas category of the second process gas do not overlap;
[0015] The sum of the gas category of the first process gas and the gas category of the second process gas is equal to the total category of the process gas.
[0016] Optionally, the first process gas includes a source gas;
[0017] The second process gas includes oxygen and nitrogen.
[0018] Optionally, the first air intake pipe is located above the second air intake pipe.
[0019] Optionally, the first process gas includes oxygen and nitrogen;
[0020] The second process gas includes a source gas.
[0021] Optionally, the photovoltaic cell process equipment also includes a third air inlet pipe, which is connected to the air inlet end and is spaced apart from the first air inlet pipe and the second air inlet pipe, and the third air inlet pipe is used to input a third process gas into the reaction chamber, wherein the first process gas, the second process gas and the third process gas are simultaneously input into the reaction chamber.
[0022] Optionally, the total gas category of the process gas includes source gas, oxygen, and nitrogen; the source gas is BCl3 or BBr3;
[0023] The first process gas includes one of the process gases;
[0024] The second process gas includes one of the process gases;
[0025] The third process gas includes one of the process gases;
[0026] The category of the first process gas, the category of the second process gas and the category of the third process gas do not overlap.
[0027] Optionally, the first air intake pipe is located above the second air intake pipe;
[0028] The third air intake pipe is located above the first air intake pipe; and
[0029] The first process gas includes oxygen;
[0030] The second process gas includes nitrogen;
[0031] The third process gas includes a source gas.
[0032] Optionally, the material of the furnace body, the material of the first air inlet pipe, and the material of the second air inlet pipe all contain quartz.
[0033] Optionally, the photovoltaic cell process equipment further comprises:
[0034] A boat body, used for carrying the battery cells;
[0035] Wherein, the reaction chamber is used to accommodate one or more boats.
[0036] As another aspect of the embodiments of the present application, the embodiments of the present application also provide a photovoltaic cell production line, comprising the photovoltaic cell process equipment as described in any one of the above items.
[0037] As another aspect of the embodiments of the present application, the embodiments of the present application further provide a photovoltaic cell, including a photovoltaic cell produced by the photovoltaic cell production line as described above.
[0038] The embodiment of the present application adopts the above-mentioned technical solution to input different types of process gases into the reaction chamber through different air inlet pipes to reduce the mutual interference between different process gases, thereby improving the diffusion uniformity of the process gas on the surface of the silicon wafer and ensuring the performance of the silicon wafer and the yield of the finished product.
[0039] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present application will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS
[0040] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.
[0041] Figure 1 A schematic diagram of the structure of a photovoltaic cell process equipment according to an embodiment of the present application;
[0042] Figure 2 Another structural schematic diagram of the photovoltaic cell process equipment according to an embodiment of the present application.
[0043] Description of reference numerals:
[0044] 10. furnace body; 100. reaction chamber; 21. first air inlet pipe; 22. second air inlet pipe; 23. third air inlet pipe; 40. boat body. DETAILED DESCRIPTION
[0045] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings. In the accompanying drawings, for clarity, the sizes of layers, regions, elements and their relative sizes may be exaggerated. The same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.
[0046] It should be understood that when an element or layer is referred to as "on ...", "adjacent to ...", "connected to" or "coupled to" other elements or layers, it can be directly on, adjacent to, connected to or coupled to other elements or layers, or there can be intervening elements or layers. On the contrary, when an element is referred to as "directly on ...", "directly adjacent to ...", "directly connected to" or "directly coupled to" other elements or layers, there is no intervening element or layer. It should be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers and / or parts, these elements, components, regions, layers and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or part from another element, component, region, layer or part. Therefore, without departing from the teachings of the present disclosure, the first element, component, region, layer or part discussed below can be represented as the second element, component, region, layer or part. And when the second element, component, region, layer or part is discussed, it does not mean that the present disclosure necessarily has the first element, component, region, layer or part.
[0047] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.
[0048] See also Figure 1 , the embodiment of the present application provides a photovoltaic cell process equipment. The photovoltaic cell process equipment may include: a furnace body 10, a first air inlet pipe 21 and a second air inlet pipe 22. The following is a detailed introduction:
[0049] The furnace body 10 has an air inlet end and a reaction chamber 100 which are connected to each other, and the reaction chamber 100 is used to accommodate the battery cells. The furnace body 10 also has an exhaust end, and the exhaust end and the air inlet end are respectively located at two opposite ends of the furnace body 10.
[0050] The first gas inlet pipe 21 is connected to the gas inlet end, and is used to input the first process gas into the reaction chamber 100 .
[0051] The second air inlet pipe 22 is connected to the air inlet end and is spaced apart from the first air inlet pipe 21 , and is used for inputting the second process gas into the reaction chamber 100 .
[0052] The first process gas and the second process gas are simultaneously input into the reaction chamber.
[0053] The first process gas may include one or more gases, and the second process gas may also include one or more gases. The gas type of the first process gas is different from the type of the second process gas, so that different types of gases enter the reaction chamber 100 through different gas inlet pipes, thereby reducing interference between different gases.
[0054] When the photovoltaic cell process equipment introduces gas to process the cell, the first gas inlet pipe 21 and the second gas inlet pipe 22 can simultaneously input corresponding process gas into the reaction chamber 100 .
[0055] Different types of process gases are input into the reaction chamber 100 through different gas inlet pipes to reduce mutual interference between different process gases, thereby improving the diffusion uniformity of the process gases on the surface of the silicon wafer and ensuring the performance of the silicon wafer and the yield rate of the finished product.
[0056] In an optional embodiment, a portion of the first air inlet pipe 21 is inserted into the furnace body 10 , and a portion of the second air inlet pipe 22 is inserted into the furnace body 10 ;
[0057] The length of the first air inlet pipe 21 inserted into the furnace body 10 is the same as the length of the second air inlet pipe 22 inserted into the furnace body 10 .
[0058] The first gas inlet pipe 21 and the second gas inlet pipe 22 with the same insertion length can make the process gas more evenly distributed in the reaction chamber 100. It can ensure that the battery cells are subjected to similar processing conditions in the entire reaction chamber 100, thereby improving the consistency of production.
[0059] In an optional embodiment, the total gas category of the process gas includes source gas, oxygen (O2), and nitrogen (N2); the source gas is BCl3 or BBr3;
[0060] The first process gas includes one or two of the process gases;
[0061] The second process gas includes two or one of the process gases;
[0062] wherein the gas category of the first process gas and the gas category of the second process gas do not overlap;
[0063] The sum of the gas category of the first process gas and the gas category of the second process gas is equal to the total category of the process gas.
[0064] Specifically, in this embodiment, the first process gas includes a source gas;
[0065] The second process gas includes oxygen and nitrogen.
[0066] That is, the source gas enters the reaction chamber 100 through the first air inlet pipe 21, and oxygen and nitrogen enter the reaction chamber 100 through the second air inlet pipe 22, so that the source gas and oxygen and nitrogen are separated to be input into the reaction chamber 100, reducing the interference of oxygen and nitrogen on the source gas, making the distribution of the process gas in the reaction chamber 100 more uniform, thereby improving the uniformity of diffusion.
[0067] Further, in this embodiment, the first air intake pipe 21 may be located above the second air intake pipe 22 .
[0068] The process gas entering the reaction chamber 100 through the first air inlet pipe 21 moves downward under the influence of gravity to mix with the process gas entering the reaction chamber 100 through the second air inlet pipe 22, thereby improving the uniformity of gas mixing and further improving the overall diffusion uniformity of the process gas.
[0069] In other embodiments, the first air inlet pipe 21 may also be located in other positions of the second air inlet pipe 22, for example, the first air inlet pipe 21 and the second air inlet pipe 22 are arranged side by side, the first air inlet pipe 21 is located obliquely above the second air inlet pipe 22, etc. Specifically, the position of the first air inlet pipe 21 or the second air inlet pipe 22 may be adjusted according to the requirements of various parameters of the reaction conditions.
[0070] In an optional embodiment, the first process gas includes oxygen and nitrogen;
[0071] The second process gas includes a source gas.
[0072] The source gas enters the reaction chamber 100 through the second air inlet pipe 22, and oxygen and nitrogen enter the reaction chamber 100 through the first air inlet pipe 21, reducing the interference of oxygen and nitrogen on the source gas, making the distribution of the process gas in the reaction chamber 100 more uniform, thereby improving the uniformity of diffusion.
[0073] In an optional embodiment, the first process gas includes source gas and oxygen;
[0074] The second process gas includes nitrogen.
[0075] The source gas and oxygen enter the reaction chamber 100 through the first air inlet pipe 21, and the nitrogen enters the reaction chamber 100 through the second air inlet pipe 22, so as to reduce the interference of nitrogen on the source gas, make the distribution of the process gas in the reaction chamber 100 more uniform, and thus improve the uniformity of diffusion.
[0076] In other embodiments, the first process gas may include source gas and nitrogen, and the second process gas may include oxygen, thereby reducing the interference of oxygen on the source gas.
[0077] In some embodiments, according to specific process requirements, the process gas may also include other gases including but not limited to oxygen, nitrogen, and source gas.
[0078] See also Figure 2 In an optional embodiment, the photovoltaic cell process equipment also includes a third air inlet pipe 23, which is connected to the air inlet end and is spaced apart from the first air inlet pipe 21 and the second air inlet pipe 22. The third air inlet pipe 23 is used to input a third process gas into the reaction chamber 100, wherein the first process gas, the second process gas and the third process gas are simultaneously input into the reaction chamber.
[0079] The three gas inlet pipes can be used to input different types of gases into the reaction chamber 100 respectively, so as to further reduce interference between the gases.
[0080] Further, in this embodiment, the total gas category of the process gas includes source gas, oxygen, and nitrogen; the source gas is BCl3 or BBr3;
[0081] The first process gas includes one of the process gases;
[0082] The second process gas includes one of the process gases;
[0083] The third process gas includes one of the process gases;
[0084] The category of the first process gas, the category of the second process gas and the category of the third process gas do not overlap.
[0085] For example, the first process gas may include nitrogen, the second process gas may include oxygen, and the third process gas may include a source gas; or the first process gas may include a source gas, the second process gas may include oxygen, and the third process gas may include nitrogen.
[0086] The source gas, oxygen and nitrogen are respectively input into the reaction chamber 100 through different gas inlet pipes to reduce the interference of nitrogen and oxygen on the source gas, thereby improving the diffusion uniformity of the process gas on the surface of the silicon wafer and ensuring the performance of the silicon wafer and the yield of the finished product.
[0087] Specifically, in this embodiment, the first air intake pipe 21 is located above the second air intake pipe 22;
[0088] The third air intake pipe 23 is located above the first air intake pipe 21; and
[0089] The first process gas includes oxygen;
[0090] The second process gas includes nitrogen;
[0091] The third process gas includes a source gas.
[0092] The source gas entering the reaction chamber 100 through the third air inlet pipe 23 moves downward under the influence of gravity to mix with the oxygen entering the reaction chamber 100 through the first air inlet pipe 21 and the nitrogen entering the reaction chamber 100 through the second air inlet pipe 22, thereby improving the uniformity of gas mixing and thereby improving the overall diffusion uniformity of the process gas.
[0093] In some embodiments, the process gas may further include other gases, and other number of inlet pipes may be added based on the total number of gas types. For example, when there are five types of process gases, a fourth inlet pipe and a fifth inlet pipe may be added so that each inlet pipe corresponds to one type of gas, thereby reducing interference between gases.
[0094] In an optional embodiment, the total gas category of the process gas includes source gas, oxygen, and nitrogen; the source gas is BCl3 or BBr3. The intake rate of nitrogen is 1000 SCCM / min to 20000 SCCM / min; the intake rate of oxygen is 100 SCCM / min to 1500 SCCM / min; the intake rate of source gas is 50 SCCM / min to 350 SCCM / min. SCCM / min is cubic centimeters per minute.
[0095] In an optional embodiment, the material of the furnace body 10 , the material of the first air inlet pipe 21 , and the material of the second air inlet pipe 22 all include quartz.
[0096] Quartz has good high temperature stability and can withstand high temperature process conditions without deformation or cracking. In addition, quartz has good resistance to many chemicals, including acids, alkalis, and other corrosive substances. This makes quartz-made equipment more resistant to the temperature and chemical environment in the photovoltaic cell preparation process, improving the durability and operational stability of the equipment.
[0097] In some embodiments, the furnace body 10 and the air inlet pipe may also be made of other materials that can withstand the temperature and chemical environment during the photovoltaic cell preparation process.
[0098] In an optional embodiment, the photovoltaic cell process equipment may further include:
[0099] The boat body 40 is used to carry the battery cells;
[0100] The reaction chamber 100 is used to accommodate one or more boats 40 .
[0101] The boat body 40 can carry a plurality of battery cells, so that the battery cells are spaced apart and placed together, thereby increasing the number of battery cells that can be processed while ensuring that the battery cells can be evenly exposed to the process gas, thereby improving the process efficiency.
[0102] The following will conduct production tests on the structure of the photovoltaic cell process equipment provided in the embodiments of the present application and related comparative examples.
[0103] Example 1
[0104] The photovoltaic cell process equipment in this embodiment includes a furnace body, a first air inlet pipe and a second air inlet pipe. The furnace body is provided with a first boat body, a second boat body, a third boat body, a fourth boat body, a fifth boat body, a sixth boat body, a seventh boat body, an eighth boat body, a ninth boat body and a tenth boat body which are sequentially distributed from the air inlet end to the exhaust end, and each boat body carries one or more silicon wafers.
[0105] The diffusion step includes: introducing BCl3 into the furnace body through a first air inlet pipe, and simultaneously introducing oxygen and nitrogen into the furnace body through a second air inlet pipe to perform a diffusion process on the silicon wafer.
[0106] Comparative Example 1
[0107] The photovoltaic cell process equipment in this comparative example includes a furnace body and a first air inlet pipe. The furnace body is provided with a first boat body, a second boat body, a third boat body, a fourth boat body, a fifth boat body, a sixth boat body, a seventh boat body, an eighth boat body, a ninth boat body, and a tenth boat body, which are sequentially distributed from the air inlet end to the exhaust end, and each boat body carries one or more silicon wafers.
[0108] The diffusion step includes: simultaneously inputting BCl3, oxygen and nitrogen into the furnace body through a first air inlet pipe to perform a diffusion process on the silicon wafer.
[0109] The following is a performance test table of the upper, middle and lower silicon wafers sampled in the first, third, fifth, seventh and tenth boats in Example 1 and Comparative Example 1 after the diffusion process.
[0110]
[0111] According to the above table, in Comparative Example 1, process gas is input through a single pipeline, resulting in uneven distribution of gas flow at the exhaust end of the furnace body, which in turn results in poor uniformity of square resistance of silicon wafers in the tenth boat body near the exhaust end of the furnace body. In Example 1 of the present application, process gas is input through dual pipelines, so that oxygen and nitrogen share one pipeline, and BCl3 has a separate pipeline, thereby reducing the interference of oxygen and nitrogen on BCl3, improving the diffusion uniformity of process gas on the surface of silicon wafers, and making the uniformity of square resistance of silicon wafers in the tenth boat body near the exhaust end of the furnace body relatively good, thereby ensuring the performance of silicon wafers and the yield rate of finished products.
[0112] Based on the same inventive concept, an embodiment of the present application also provides a photovoltaic cell production line, including the photovoltaic cell process equipment in any of the above embodiments.
[0113] The embodiments of the present application also provide a photovoltaic cell, including the photovoltaic cell produced by the photovoltaic cell production line in the above embodiments.
[0114] In this embodiment, the photovoltaic cells can be electrically connected in the form of a whole piece or multiple pieces to form a plurality of battery strings. The plurality of battery strings can be electrically connected in series and / or in parallel to form a more flexible battery organization structure. In order to protect the battery string, the photovoltaic module can also include an encapsulation layer and a cover plate. The encapsulation layer can cover the surface of the battery string, and the cover plate can cover the surface of the encapsulation layer away from the battery string.
[0115] In some embodiments, multiple battery strings can be electrically connected through conductive tapes to achieve a series or parallel arrangement of batteries. The encapsulation layer can be made of an organic encapsulation film, such as an ethylene-vinyl acetate copolymer film, a polyethylene octene co-elastic film, or a polyethylene terephthalate film, to provide protection and isolation functions.
[0116] The cover plate may be made of a light-transmitting material, such as a glass cover plate or a plastic cover plate, to ensure that light can enter the battery string while providing protection for the battery.
[0117] The photovoltaic cell process equipment, photovoltaic cell production line, and other components of the photovoltaic cells in the above-mentioned embodiments may adopt various technical solutions known to ordinary technicians in the field now and in the future, and will not be described in detail here.
[0118] The disclosure above provides many different embodiments or examples to realize the different structures of the present application. In order to simplify the disclosure of the present application, the parts and settings of specific examples are described above. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeat reference numerals and / or reference letters in different examples, and this repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed.
[0119] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.
Claims
1. A photovoltaic cell process equipment, characterized in that: include: A furnace body, having an air inlet end and a reaction chamber which are interconnected, wherein the reaction chamber is used to accommodate the battery cells; a first air inlet pipe, connected to the air inlet end, for inputting a first process gas into the reaction chamber; a second air inlet pipe, connected to the air inlet end and spaced apart from the first air inlet pipe, for inputting a second process gas into the reaction chamber; The first process gas and the second process gas are simultaneously input into the reaction chamber.
2. The photovoltaic cell process equipment according to claim 1, characterized in that: A portion of the first air inlet pipe is inserted into the furnace body, and a portion of the second air inlet pipe is inserted into the furnace body; The length of the first air inlet pipe inserted into the furnace body is the same as the length of the second air inlet pipe inserted into the furnace body.
3. The photovoltaic cell process equipment according to claim 1, characterized in that: The total gas category of the process gas includes source gas, oxygen, and nitrogen; the source gas is BCl3 or BBr3; The first process gas includes one or two of the process gases; The second process gas includes two or one of the process gases; wherein the gas category of the first process gas and the gas category of the second process gas do not overlap; The sum of the gas category of the first process gas and the gas category of the second process gas is equal to the total category of the process gas.
4. The photovoltaic cell process equipment according to claim 3, characterized in that: The first process gas includes a source gas; The second process gas includes oxygen and nitrogen.
5. The photovoltaic cell process equipment according to claim 4, characterized in that: The first air intake pipe is located above the second air intake pipe.
6. The photovoltaic cell process equipment according to claim 3, characterized in that: The first process gas includes oxygen and nitrogen; The second process gas includes a source gas.
7. The photovoltaic cell process equipment according to claim 1, characterized in that: The photovoltaic cell process equipment also includes a third air inlet pipe, which is connected to the air inlet end and is spaced apart from the first air inlet pipe and the second air inlet pipe. The third air inlet pipe is used to input a third process gas into the reaction chamber, wherein the first process gas, the second process gas and the third process gas are simultaneously input into the reaction chamber.
8. The photovoltaic cell process equipment according to claim 7, characterized in that: The total gas category of the process gas includes source gas, oxygen, and nitrogen; the source gas is BCl3 or BBr3; The first process gas includes one of the process gases; The second process gas includes one of the process gases; The third process gas includes one of the process gases; The category of the first process gas, the category of the second process gas and the category of the third process gas do not overlap.
9. The photovoltaic cell process equipment according to claim 8, characterized in that: The first air intake pipe is located above the second air intake pipe; The third air intake pipe is located above the first air intake pipe; and The first process gas includes oxygen; The second process gas includes nitrogen; The third process gas includes a source gas.
10. The photovoltaic cell process equipment according to claim 1, characterized in that: The material of the furnace body, the material of the first air inlet pipe, and the material of the second air inlet pipe all contain quartz.
11. The photovoltaic cell process equipment according to any one of claims 1 to 10, characterized in that: The photovoltaic cell process equipment also includes: A boat body, used for carrying the battery cells; Wherein, the reaction chamber is used to accommodate one or more boats.
12. A photovoltaic cell production line, characterized in that: The photovoltaic cell production line comprises the photovoltaic cell process equipment according to any one of claims 1 to 11.
13. A photovoltaic cell, characterized in that: The photovoltaic cell produced by the photovoltaic cell production line as claimed in claim 12.