Precooling device and test equipment

Abstract

The present application relates to a precooling device and testing equipment, including a precooling plate, an opening and closing door, and a first air supply assembly. The precooling plate has a precooling cavity and a material taking and discharging port, and the precooling cavity is connected to the outside through the material taking and discharging port. The opening and closing door can be movably arranged on the precooling plate, and is adapted to the material taking and discharging port, and is used to open and close the material taking and discharging port. The first air supply assembly is arranged on the precooling plate and is formed with an air supply gas path, which is used to blow gas along the air supply gas path to the side of the opening and closing door away from the precooling cavity, so as to form an air film at the opening and closing door to prevent external gas from entering the precooling cavity through the material taking and discharging port. The technical solution of the present application, under the obstruction of the air film, the external gas of the precooling plate is not easy to enter the precooling cavity through the material taking and discharging port, which is conducive to maintaining the dew point stability of the precooling cavity, and can also reduce the probability of external gas flowing through the opening and closing door and frosting on its surface, and reduce the risk of the opening and closing door not being able to work normally due to frosting.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a precooling device and a testing device. Background Art

[0002] The precooling plate is mainly used to precool the chips waiting to be tested. When the precooling operation is completed, the robot takes the test piece through the loading and unloading port of the precooling plate and puts it in the test area for testing. When the robot takes the material, the opening and closing door on the precooling plate used to open and close the loading and unloading port opens, and the opening and closing door closes after the robot completes the material taking. During the opening and closing process of the opening and closing door, external gas can easily flow into the cavity of the precooling plate through the loading and unloading port, affecting the stability of the dew point inside the cavity. Moreover, under the temperature difference between the inside and outside of the opening and closing door, the moisture in the gas can easily frost on the opening and closing door, affecting the normal use of the opening and closing door. Utility Model Content

[0003] Based on this, it is necessary to provide a precooling device and testing equipment to address the problem that when the opening and closing door opens and closes the precooling plate's material discharging port, external gas can easily enter the precooling plate and affect the dew point stability, and it is easy to frost on the opening and closing door, affecting the normal opening and closing of the opening and closing door.

[0004] In a first aspect, the present application provides a precooling device, the precooling device comprising:

[0005] A precooling plate, comprising a precooling cavity and a material taking-in and discharging port, wherein the precooling cavity is connected to the outside through the material taking-in and discharging port;

[0006] An opening and closing door is movably arranged on the pre-cooling plate and is adapted to the material taking and discharging opening, and is used to open and close the material taking and discharging opening;

[0007] A first air supply component is arranged on the precooling plate and forms an air supply path, which is used to blow gas along the air supply path to the side of the opening and closing door away from the precooling chamber, so as to form an air film at the opening and closing door to prevent external gas from entering the precooling chamber through the material loading and unloading port.

[0008] In some embodiments, the first air supply component includes an air supply block arranged on the top surface of the pre-cooling plate, and the air supply block is located on the side of the opening and closing door away from the pre-cooling chamber; the air supply gas flow path includes an injection channel arranged at the air outlet end of the air supply block, and the gas can flow through the injection channel to the side of the opening and closing door away from the pre-cooling chamber.

[0009] In some embodiments, the outlet area of ​​the injection channel is larger than the inlet area thereof.

[0010] In some embodiments, a notch for forming the injection channel is provided at the air outlet end of the air supply block, and a side wall of the notch is spaced apart from the pre-cooling plate to form an internal space of the injection channel.

[0011] In some embodiments, the air supply path includes a drainage channel provided on the air supply block, the drainage channel is used to supply air toward the notch, and a blocking rib is provided at the air outlet end of the notch, the blocking rib separates the air outlet end of the notch to form two outlet air channels, and the blocking rib is arranged at a relative interval to the outlet of the drainage channel to divert the gas delivered from the drainage channel to each of the outlet air channels for outflow.

[0012] In some embodiments, the first air supply assembly includes a plurality of the air supply blocks arranged side by side; the air supply flow path includes an air inlet channel provided in each of the air supply blocks, and the injection channel and the air inlet channel on the same air supply block are connected.

[0013] In some embodiments, the first air supply component includes an air supply plate extending along the arrangement direction of the plurality of air supply blocks; the air supply flow path includes an air source interface, an air passage and a plurality of air supply parts provided on the air supply plate, the air passage connecting the air source interface and all the air supply parts; each of the air supply parts is connected to the air inlet channel of different air supply blocks.

[0014] In some embodiments, the air supply plate has a first end surface facing the pre-cooling plate, and the first end surface is concave to form an air passage groove serving as the air passage; the first end surface of the air supply plate is sealed on the side of the pre-cooling plate to close the air passage groove.

[0015] In some embodiments, the air supply plate has a second end surface facing the air supply block, the second end surface is concavely formed with a plurality of positioning grooves, each of the air supply blocks is installed in one of the positioning grooves, and the air supply portion passes through the positioning grooves.

[0016] In some embodiments, the precooling device further includes a second gas delivery component, and the second gas delivery component is used to deliver gas to the precooling chamber.

[0017] In some embodiments, the second air supply component includes an air distribution plate and an air supply member; the air distribution plate is located inside the pre-cooling plate, and is spaced apart from the inner wall of the pre-cooling plate to form an air distribution channel, and the air distribution plate is separated between the pre-cooling cavity and the air distribution channel; a flow channel connecting the air distribution channel and the pre-cooling cavity is formed at the end position of the air distribution plate; the air supply member is installed on the pre-cooling plate for supplying air to the air distribution channel.

[0018] In some embodiments, a support seat and a baffle are provided in the pre-cooling chamber; the baffle is located at the outer periphery of the support seat, and is arranged on two different sides of the support seat with the air distributor plate; the baffle at least partially blocks the airflow on the path from the flow channel to the support seat.

[0019] In a first aspect, the present application provides a testing device, comprising a testing chamber, a transfer device and a precooling device as described in any of the above embodiments, wherein the transfer device is used to transfer the test piece from the precooling chamber to the testing chamber through the loading and unloading port.

[0020] In the above-mentioned precooling device and testing equipment, when the opening and closing door opens the material loading and unloading port so that the robot can take and place the test piece in the precooling chamber, the first air supply component can blow gas through the air supply flow path on the side of the opening and closing door away from the precooling chamber to form an air film. Under the obstruction of the air film, it is not easy for the external gas of the precooling plate to enter the precooling chamber through the material loading and unloading port, which is beneficial to maintaining the dew point stability of the precooling chamber, and can also reduce the probability of external gas flowing through the opening and closing door and frosting on its surface, thereby reducing the risk of the opening and closing door not being able to work normally due to frosting. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present application. Moreover, the same reference numerals are used throughout the drawings to represent the same components. In the drawings:

[0022] Figure 1 is a three-dimensional schematic diagram of a precooling device in some embodiments;

[0023] Figure 2 for Figure 1 Another perspective view of the pre-cooling device shown;

[0024] Figure 3 for Figure 1 A top view of the precooling device shown;

[0025] Figure 4 It is a schematic structural diagram of a first blowing assembly in some embodiments;

[0026] Figure 5 for Figure 4 A schematic structural diagram of a blowing block in a first blowing assembly is shown;

[0027] Figure 6 for Figure 5 A bottom view schematic diagram of the blow block shown;

[0028] Figure 7 for Figure 4 A schematic diagram of the structure of the blowing plate in the first blowing assembly shown;

[0029] Figure 8 for Figure 3 Sectional view at AA in the middle;

[0030] Fig. 9 for Figure 2 Enlarged view of point B in the middle.

[0031] The reference numerals in the specific implementation manner are as follows:

[0032] 100, precooling device; 10, precooling plate; Q, precooling chamber; L, material loading and unloading port; 11, mounting wall; 12, supporting seat; 13, baffle plate; 20, opening and closing door; 30, first air supply assembly; T, air supply flow path; 31, air supply block; T1, injection channel; 31a, notch; a1, first notch layer; a2, second notch layer; T2, drainage channel; 31b, blocking rib; k, outlet flow channel; 31j, air inlet Channel; 31g, first fixing hole; 31h, blocking hole; 32, air supply plate; T3, air source interface; T4, air passage; T5, air supply part; 32c, air supply hole; 32d, first end face; d1, air passage; 32e, second end face; e1, positioning groove; 32m, second fixing hole; 33, air source connector; 40, second air supply component; 41, air distribution plate; F, air distribution channel; G, flow channel; 42, air supply part. DETAILED DESCRIPTION

[0033] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0034] In the description of the present application, it should be understood that terms such as “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships, if any, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0035] In addition, if present, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0036] In this application, unless otherwise clearly specified and limited, if any, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0037] In the present application, if it appears, unless otherwise clearly specified and limited, a first feature “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature “above”, “above” and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature “below”, “below” and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0038] It should be noted that, if present, when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0039] Please refer to Figures 1 to 3The embodiment of the present application provides a precooling device 100, comprising a precooling plate 10, an opening and closing door 20 and a first air supply component 30. The precooling plate 10 has a precooling cavity Q and a material taking-in and discharging port L, and the precooling cavity Q is connected to the external space through the material taking-in and discharging port L. The opening and closing door 20 is movably arranged on the precooling plate 10, and is adapted to the material taking-in and discharging port L, and is used to open and close the material taking-in and discharging port L. The first air supply component 30 is arranged on the precooling plate 10 and is formed with an air supply flow path T, which is used to blow gas along the air supply flow path T to the side of the opening and closing door 20 away from the precooling cavity Q, so as to form an air film at the opening and closing door 20 for preventing external gas from entering the precooling cavity Q through the material taking-in and discharging port L.

[0040] The precooling chamber Q is used to accommodate the test piece, so that the precooling device 100 can precool the test piece in the precooling chamber Q. It can be understood that the precooling device 100 includes a refrigeration module, and the refrigeration module is used to cool the test piece in the precooling chamber Q. The refrigeration module can be a semiconductor refrigeration sheet, a liquid cooling module, etc., and those skilled in the art can make conventional settings regarding the specific structure of the refrigeration module.

[0041] The material taking-in and material discharging port L is connected to the inside and outside of the precooling chamber Q, so that the test pieces can enter and exit the precooling chamber Q. The opening and closing door 20 can be movably arranged along the precooling plate 10, and can open and close the material taking-in and material discharging port L during the movement. Of course, the opening and closing door 20 can also be rotatably arranged on the precooling plate 10, and the specific structure and movement mode of the opening and closing door 20 are not limited in the embodiment of the present application. In a specific example, the material taking-in and material discharging port L extends in the direction of its opening to form a hole-like structure with a certain depth, and the opening and closing door 20 is telescopically arranged on the inner wall of the material taking-in and material discharging port L, and can open and close the material taking-in and material discharging port L during the telescopic process.

[0042] The first air supply assembly 30 is formed with an air supply path T, and the air supply path T is used to circulate gas. In actual application, the gas circulated in the air supply path T is usually dry gas. The side of the opening and closing door 20 away from the precooling chamber Q refers to the side of the opening and closing door 20 facing the external space of the precooling plate 10 (i.e., the outside of the opening and closing door 20). The first air supply assembly 30 blows gas to the outside of the opening and closing door 20 through the air supply path T to form an air film on the outside of the opening and closing door 20.

[0043] Specifically, the first air supply assembly 30 can be arranged inside the pre-cooling plate 10, and the air supply path T directly penetrates the hole wall of the material taking and discharging port L, and is connected with the material taking and discharging port L. At this time, the opening and closing door 20 can be located inside the material taking and discharging port L, and the air film formed when the air supply path T blows gas is directly located inside the material taking and discharging port L.

[0044] Specifically, the first air supply assembly 30 can also be arranged outside the precooling tray 10, and the air supply path T is not directly connected to the material taking-in and discharging port L, but is connected to the material taking-in and discharging port L through the external space of the precooling tray 10. In this case, the opening and closing door 20 can be arranged inside the material taking-in and discharging port L, or outside the precooling tray 10, as long as the air film formed by the air blown by the air supply path T is located on the side of the opening and closing door 20 away from the precooling chamber Q, so as to prevent the external air of the precooling tray 10 from entering the precooling chamber Q through the material taking-in and discharging port L.

[0045] Optionally, the air supply direction of the air supply passage T is substantially perpendicular to the opening direction of the material taking and discharging port L, so as to form an air film substantially perpendicular to the opening direction of the material taking and discharging port L.

[0046] In the above-mentioned precooling device 100, when the opening and closing door 20 opens the material taking-in and discharging port L for the robot to take and place the test piece in the precooling chamber Q, the first air supply component 30 can blow gas through the air supply path T on the side of the opening and closing door 20 away from the precooling chamber Q, and form an air film. Under the obstruction of the air film, it is not easy for the external air of the precooling plate 10 to enter the precooling chamber Q through the material taking-in and discharging port L, which is conducive to maintaining the dew point stability of the precooling chamber Q, and can also reduce the probability of external air flowing through the opening and closing door 20 and frosting on its surface, thereby reducing the risk of the opening and closing door 20 not being able to work normally due to frosting.

[0047] It is understandable that when the opening and closing door 20 closes the material loading and unloading port L and the pre-cooling plate 10 is in the pre-cooling operation stage, due to the poor temperature difference between the inside and outside of the pre-cooling plate 10, in order to reduce frost on the surface of the opening and closing door 20 when the external air flows through the opening and closing door 20, the first air supply component 30 can be used to blow gas through the air supply path T to form a barrier air film on the outside of the opening and closing door 20, thereby reducing the probability of frost on the surface of the opening and closing door 20.

[0048] In some embodiments, please refer to Figures 1 to 4 The first air supply assembly 30 includes an air supply block 31 arranged on the top surface of the pre-cooling plate 10, and the air supply flow path T includes an injection channel T1 arranged at the air outlet end of the air supply block 31. The gas flows through the injection channel T1 to the side of the opening and closing door 20 away from the pre-cooling chamber Q.

[0049] The gas outlet end of the gas supply block 31 is provided with an injection channel T1 , and the gas transported by the gas supply path T is finally blown out through the injection channel T1 , that is, the injection channel T1 serves as the gas supply outlet of the gas supply path T.

[0050] Specifically, the end surface of the precooling plate 10 penetrated by the material taking-in and discharging port L is called the structural end surface, and the air supply block 31 can be installed on the structural end surface, and the injection channel T1 of the air supply block 31 can blow gas toward the position where the material taking-in and discharging port L is located to form an air film. Among them, the number of air supply blocks 31 can be one or more. The injection channels T1 of all air supply blocks 31 are used to blow gas toward the position where the material taking-in and discharging port L is located.

[0051] At this time, by setting an air supply block 31 on the pre-cooling plate 10 and using the injection channel T1 on the air supply block 31 to guide the air flow direction of the air supply flow path T, not only the structure can be simplified, but also an air film can be easily formed on the outer side of the opening and closing door 20.

[0052] In some embodiments, please refer to Figure 3 , the outlet area of ​​the injection channel T1 is larger than its inlet area.

[0053] For example, the injection channel T1 is an outwardly expanding trumpet-shaped channel. The outlet area of ​​the injection channel T1 refers to the flow area for the gas in the injection channel T1 to flow out, and the inlet area of ​​the injection channel T1 refers to the flow area for the gas to flow into the injection channel T1. The outlet area of ​​the injection channel T1 is larger than the inlet area, indicating that the gas outlet area of ​​the injection channel T1 is larger, the gas diffusion area blown by it is larger, and it is easy to form a larger air film, thereby improving the air film's barrier effect on the external gas of the pre-cooling plate 10.

[0054] In some embodiments, please refer to Figure 5 and Figure 6 A notch 31a for forming the injection channel T1 is provided at the air outlet end of the air supply block 31, and a side wall of the notch 31a is spaced apart from the pre-cooling plate 10 to form an internal space of the injection channel T1.

[0055] Specifically, the air supply block 31 is disposed on the structural end face of the precooling plate 10, the notch 31a is open toward the structural end face, and the wall surface of the notch 31a opposite to the structural end face is spaced from the structural end face to form the internal space of the injection channel T1.

[0056] At this time, the injection channel T1 is formed by setting a notch 31a at the air outlet end of the air supply block 31, which makes it easy to process the injection channel T1 and reduces the processing cost.

[0057] In order to obtain a jet channel T1 with an inlet area smaller than an outlet area, the notch 31a may be processed into a triangle, a fan or other shape.

[0058] In further embodiments, see Figure 6 The air supply path T includes a drainage channel T2 provided in the air supply block 31, and the drainage channel T2 is used to supply air toward the notch 31a. A blocking rib 31b is provided at the air outlet end of the notch 31a, and the blocking rib 31b divides the air outlet end of the notch 31a into two outlet air channels k. The blocking rib 31b is arranged at a relative interval with the outlet of the drainage channel T2 to divert the gas blown by the drainage channel T2 to each outlet air channel k for outflow.

[0059] Specifically, the flow blocking rib 31b is located in the notch 31a and is arranged on the inner wall of the notch 31a opposite to the structural end surface. On the gas flow path, the guide channel T2 is located upstream of the notch 31a for conveying gas to the notch 31a.

[0060] The blocking rib 31b is opposite to and spaced from the outlet of the drainage channel T2. The gas blown out through the outlet of the drainage channel T2 will not flow out of the gap 31a directly due to the obstruction of the blocking rib 31b, but will flow out through various outlet flow channels k at the outlet end of the gap 31a under the diversion of the blocking rib 31b.

[0061] In this way, the gas outlet of the injection channel T1 formed by the notch 31 a can be made more uniform and diffuse, and the area of ​​the gas film formed by the injection channel T1 can also be increased.

[0062] For details in the embodiments, please refer to Figure 6 The gap 31a includes a first gap layer a1, which is connected to the outlet of the drainage channel T2, and the blocking rib 31b is arranged on the inner wall of the first gap layer a1. In the air supply direction of the drainage channel T2, the flow area of ​​the first gap layer a1 is arranged to increase away from the outlet of the drainage channel T2, and the cross-sectional area of ​​the blocking rib 31b is increased away from the outlet of the drainage channel T2.

[0063] It should be noted that the air supply direction of the drainage channel T2 refers to the direction in which the outlet of the drainage channel T2 is opened. The blocking rib 31b and the outlet of the drainage channel T2 are arranged at a relative interval in the air supply direction of the drainage channel T2.

[0064] Specifically, the first notch layer a1 and the blocking rib 31b can both be triangular in shape, and the first notch layer a1 is an outwardly expanding trumpet channel. The blocking rib 31b is smaller at one end near the outlet of the drainage channel T2 and larger at the other end. The structure of the blocking rib 31b is adapted to the shape of the first notch layer a1, and two outlet flow channels k with more uniform flow can be formed at the outlet end of the first notch layer a1.

[0065] For further information, please refer to Figure 6 The gap 31a also includes a second gap layer a2 that forms a stepped structure with the first gap layer a1. The second gap layer a2 is located between the first gap layer a1 and the pre-cooling plate 10. The second gap layer a2 is open in the air supply direction of the drainage channel T2 and in a direction intersecting the air supply direction of the drainage channel T2.

[0066] It should be noted that the drainage channel T2 can be directly connected to the second notch layer a2, or can be connected to the second notch layer a2 through the first notch layer a1. The second notch layer a2 is open on at least two sides, and one side is located in the air supply direction of the drainage channel T2, that is, the air is discharged on the same side as the first notch layer a1. Figure 6As shown, the second notch layer a2 is open on three sides, and is open on both the left and right sides of the drainage channel T2 in the air supply direction.

[0067] At this time, the second notch layer a2 can increase the path for gas to be discharged from the notch 31a, expand the diffusion range of the gas, and increase the formation area of ​​the gas film.

[0068] To facilitate the processing of drainage channel T2, please refer to Figure 5 In actual application, a through hole can be processed from one side of the air supply block 31 to the inside of the air supply block 31. Part of the through hole is used as the drainage channel T2, and the other part is used as a sealing hole 31h and a sealing plug is installed to prevent leakage of the drainage channel T2.

[0069] In some embodiments, please combine Figure 1 and Figure 4 The first air supply assembly 30 includes a plurality of air supply blocks 31 arranged side by side, the air supply flow path T includes an air inlet channel 31j provided on each air supply block 31, and the injection channel T1 and the air inlet channel 31j on the same air supply block 31 are connected. The first air supply assembly 30 includes an air supply plate 32 extending along the arrangement direction of the plurality of air supply blocks 31, the air supply flow path T includes an air source interface T3, an air passage T4 and a plurality of air supply parts T5 provided on the air supply plate 32, the air passage T4 is connected to the air source interface T3 and all the air supply parts T5, and each air supply part T5 is connected to the air inlet channel 31j of different air supply blocks 31.

[0070] Understandably, the air inlet channel 31j is used to supply gas to the air supply block 31. On the flow path of the gas, the air inlet channel 31j, the guide channel T2 and the injection channel T1 are connected in sequence. All the air supply blocks 31 are arranged side by side along a direction (the direction can be but is not limited to a straight direction).

[0071] Generally, the air supply plate 32 is roughly in the shape of a strip plate, and its extension direction is basically consistent with the arrangement direction of each air supply block 31. The gas source interface T3 on the air supply plate 32 is used to install the gas source connector 33, and the gas source connector 33 is connected to the gas supply source through a pipeline, and is used to transport the gas through the gas source interface T3 to the air supply plate 32. The gas entering the air supply plate 32 flows to each air supply part T5 under the guidance of the air passage T4, and then flows to the air inlet channel 31j of each air supply block 31 through each air supply part T5.

[0072] Optionally, all the air supply blocks 31 are arranged on the same side of the pre-cooling plate 10 and arranged side by side in a straight line, which not only simplifies the layout of the air supply blocks 31, but also reduces the mutual impact between the gases delivered by the air supply blocks 31, making it easier to form an air film. Of course, all the air supply blocks 31 can also be arranged on different sides of the pre-cooling plate 10.

[0073] The air supply portion T5 is connected to the air inlet channel 31j of the air supply block 31, and is used to supply gas to the air inlet channel 31j. Specifically, the air supply portion T5 may include one or more air supply holes 32c, and the air supply holes 32c are connected to the gas passage T4.

[0074] At this time, the air supply plate 32 is used to supply air to multiple air supply blocks 31 at the same time, which can simplify the structure of the first air supply component 30, reduce the pipeline connection cost, and facilitate the disassembly and assembly of the first air supply component 30.

[0075] In some embodiments, please refer to Figure 7 The air supply plate 32 has a first end surface 32d facing the precooling plate 10, and the first end surface 32d is concave to form an air passage d1 as an air passage T4; the first end surface 32d of the air supply plate 32 is sealed on one side of the precooling plate 10 to close the air passage d1.

[0076] It is understandable that the air passage T4 is usually a long and narrow passage. If the long and narrow passage is directly processed in the air delivery plate 32, the processing difficulty and cost are high. In this case, the air passage T4 is formed by processing the air groove d1 on the first end surface 32d of the air delivery plate 32, and the air groove d1 is closed by cooperating with the pre-cooling plate 10 to close the air passage T4, which can greatly reduce the processing difficulty and processing cost.

[0077] In some embodiments, please refer to Figure 7 The air supply plate 32 has a second end surface 32e facing the air supply block 31. The second end surface 32e is concave to form a plurality of positioning grooves e1. Each air supply block 31 is installed in a positioning groove e1, and the air supply portion T5 passes through the positioning groove e1.

[0078] The air supply hole 32c of the air supply portion T5 passes through the positioning groove e1 and communicates with the air inlet channel 31j of the air supply plate 32 positioned in the positioning groove e1. Figure 4 As shown, in the use state, the air supply block 31 is arranged above the air supply plate 32, and the air inlet channel 31j is connected to the air supply hole 32c in an upper and lower connection.

[0079] At this time, a positioning groove e1 is provided on the second end surface 32e of the air supply plate 32, so that the air supply plate 32 can be quickly positioned, so that the air inlet channel 31j can be smoothly connected with the air supply portion T5.

[0080] In order to fix the air supply block 31, a first fixing hole 31g may be provided on the air supply block 31, and a fastener (such as a bolt, a pin, a rivet, etc.) may be passed through the first fixing hole 31g to lock the air supply block 31 on the air supply plate 32. At the same time, a second fixing hole 32m may be provided on the air supply plate 32, and another fastener may be passed through the second fixing hole 32m to lock the air supply plate 32 on the pre-cooling tray 10.

[0081] In some embodiments, please refer to Figure 1 The precooling device 100 also includes a second air supply component 40, which is used to supply gas to the precooling chamber Q.

[0082] In actual application, the gas blown by the second gas supply component 40 is dry gas. By continuously blowing gas into the precooling chamber Q through the second gas supply component 40, the internal pressure of the precooling chamber Q is increased to discharge other gases, and the stability of the dew point inside the precooling chamber Q can be further improved.

[0083] Specifically in the embodiment, please combine Figure 2 , Figure 8 and Fig. 9 The second air supply assembly 40 includes an air distribution plate 41 and an air supply member 42. The air distribution plate 41 is located inside the precooling tray 10 and is separated from the inner wall of the precooling tray 10 to form a flow distribution channel F. The air distribution plate 41 is separated between the precooling cavity Q and the flow distribution channel F. The end of the air distribution plate 41 forms a flow channel G connecting the flow distribution channel F and the precooling cavity Q. The air supply member 42 is installed on the precooling tray 10 to supply air to the flow distribution channel F.

[0084] Specifically, the air delivery member 42 is installed on the installation wall 11 of the pre-cooling plate 10 , and a gas distribution channel F is formed between the gas distribution plate 41 and the installation wall 11 . The air delivery member 42 is used to deliver gas into the gas distribution channel F.

[0085] The end of the flow channel F forms a flow channel G. Specifically, the flow channel G can be a flow hole formed at the end of the flow channel F, or a flow gap formed between the end of the flow channel F and the inner wall of the precooling plate 10 .

[0086] At this time, under the obstruction of the gas distributor plate 41, the gas delivered by the gas delivery member 42 will not flow directly to the precooling chamber Q, but will first pass through the flow distribution channel F, and then enter the precooling chamber Q through the flow channel G at the end of the flow distribution plate, so that the gas can smoothly enter the precooling chamber Q. During the precooling operation, it can be prevented that the gas delivered by the gas delivery member 42 directly contacts the test pieces in the precooling plate 10, causing uneven heating of the test pieces and affecting the precooling effect of the test pieces.

[0087] Understandably, the air delivery member 42 may be an air delivery connector for connecting a gas supply source. The precooling tray 10 is generally a rectangular parallelepiped structure, and the air delivery member 42 may be disposed on at least one side of the mounting wall 11 in the length direction and / or width direction of the precooling tray 10. The distance between the air distribution plate 41 and the mounting wall 11 is generally small, so as to maximize the space of the precooling cavity Q and improve the operating capacity and operating efficiency of the precooling tray 10.

[0088] In some embodiments, please refer to Figure 2 and Fig. 9A support seat 12 and a baffle plate 13 are provided in the precooling chamber Q. The baffle plate 13 is located at the periphery of the support seat 12 and is arranged on two different sides of the support seat 12 with the air distributor plate 41. The baffle plate 13 at least partially blocks the airflow from the flow channel G to the support seat 12.

[0089] The support seat 12 is located in the precooling chamber Q and is used to support the test piece. The support seat 12 is usually a square seat, and the air distributor plate 41 and the baffle plate 13 are arranged on the intersecting sides of the support seat 12. The air distributor plate 41 blocks the support seat 12 and the air distributor channel F to prevent the airflow delivered by the air delivery member 42 from flowing directly to the space where the support seat 12 is located. The airflow flowing out through the flow channel G at the end of the air distributor plate 41 can be blocked to a certain extent by the baffle plate 13 when flowing to the support seat 12, preventing the gas from blowing directly onto the support seat 12 and causing uneven heating of the test piece to affect the precooling effect. In addition, the baffle plate 13 can also serve as a limit blocking structure for the test piece on the support seat 12.

[0090] In a specific embodiment of the present application, the precooling device 100 includes a precooling plate 10, an opening and closing door 20, a first air supply assembly 30, and a second air supply assembly 40. The first air supply assembly 30 is used to blow gas to the side of the opening and closing door 20 away from the precooling chamber Q to form an air film. Specifically, the first air supply assembly 30 includes an air supply plate 32 and a plurality of air supply blocks 31. The air supply block 31 includes an injection channel T1, a drainage channel T2, and an air inlet channel 31j that are connected in sequence. The air supply plate 32 includes an air source interface T3, an air passage T4, and a plurality of air supply parts T5 that are connected in sequence. Each air supply part T5 is connected to an air inlet channel 31j of a different air supply block 31, so that the air supply plate 32 supplies air to the plurality of air supply parts T5 at the same time. The second air supply component 40 includes an air distribution plate 41 and an air supply component 42. The air distribution plate 41 divides the space inside the pre-cooling chamber Q into a pre-cooling chamber Q and an air distribution channel F. The air supply component 42 supplies air to the air distribution channel F. A flow channel G is formed at the end of the air distribution plate 41. The gas in the air distribution channel F flows to the pre-cooling chamber Q through the flow channel G.

[0091] The precooling device 100 of this embodiment can form an air film on the outside of the opening and closing door 20 through the first air supply component 30 to prevent external gas from entering the precooling chamber Q through the material taking and discharging port L, which is not only conducive to maintaining the dew point stability of the precooling chamber Q, but also reduces the probability of external gas flowing through the opening and closing door 20 and frosting on its surface, and reduces the risk of the opening and closing door 20 not being able to work normally due to frost. In addition, the second air supply component 40 is used to deliver gas to the precooling chamber Q, which can maintain the dew point stability of the precooling chamber Q, and the blocking of the air distribution plate 41 can reduce the risk of uneven heating of the test piece due to the second air supply component 40 directly blowing the test piece, thereby affecting the precooling effect of the test piece.

[0092] In addition, the embodiment of the present application further provides a test device, including a test chamber, a transfer device and the precooling device 100 in the above embodiment, wherein the transfer device is used to transfer the test piece from the precooling chamber Q to the test chamber through the material taking and discharging port L. The test chamber may be, but not limited to, an aging test chamber, etc., and the test device may be a sorting test device, an aging test device, etc. The transfer device is usually, but not limited to, a manipulator.

[0093] The testing device includes all the beneficial effects described above, which will not be described in detail here.

[0094] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0095] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A precooling device (100), characterized in that: The precooling device (100) comprises: A precooling plate (10) having a precooling cavity (Q) and a material taking-in and discharging port (L), wherein the precooling cavity (Q) is connected to the outside through the material taking-in and discharging port (L); An opening and closing door (20) is movably arranged on the pre-cooling plate (10) and is adapted to the material taking and discharging opening (L) and is used to open and close the material taking and discharging opening (L); A first air supply component (30) is arranged on the precooling plate (10) and forms an air supply flow path (T), and is used to blow air along the air supply flow path (T) to a side of the opening and closing door (20) away from the precooling chamber (Q), so as to form an air film at the opening and closing door (20) for preventing external air from entering the precooling chamber (Q) through the material taking and discharging port (L).

2. The precooling device (100) according to claim 1, characterized in that: The first air supply component (30) comprises an air supply block (31) arranged on the top surface of the pre-cooling plate (10), and the air supply block (31) is located on the side of the opening and closing door (20) away from the pre-cooling chamber (Q); the air supply flow path (T) comprises an injection channel (T1) arranged at the air outlet end of the air supply block (31), and the gas can flow to the side of the opening and closing door (20) away from the pre-cooling chamber (Q) through the injection channel (T1).

3. The precooling device (100) according to claim 2, characterized in that: The outlet area of ​​the injection channel (T1) is larger than its inlet area.

4. The precooling device (100) according to claim 2 or 3, characterized in that: The air outlet end of the air supply block (31) is provided with a notch (31a) for forming the injection channel (T1), and a side wall of the notch (31a) is spaced apart from the pre-cooling plate (10) to form an internal space of the injection channel (T1); The air supply path (T) comprises a drainage channel (T2) provided on the air supply block (31), the drainage channel (T2) being used for supplying air toward the notch (31a), a flow blocking rib (31b) being provided at the air outlet end of the notch (31a), the flow blocking rib (31b) being separated at the air outlet end of the notch (31a) to form two air outlet channels (k), the flow blocking rib (31b) being arranged at a relative interval to the outlet of the drainage channel (T2) so as to divert the gas delivered from the drainage channel (T2) to each of the air outlet channels (k) for outflow.

5. The precooling device (100) according to claim 2 or 3, characterized in that: The first air supply assembly (30) comprises a plurality of air supply blocks (31) arranged side by side; the air supply flow path (T) comprises an air intake channel (31j) provided on each of the air supply blocks (31); the injection channel (T1) and the air intake channel (31j) on the same air supply block (31) are connected; The first air supply component (30) comprises an air supply plate (32) extending along the arrangement direction of the plurality of air supply blocks (31); the air supply flow path (T) comprises an air source interface (T3), an air passage (T4) and a plurality of air supply parts (T5) arranged on the air supply plate (32); the air passage (T4) is connected to the air source interface (T3) and all the air supply parts (T5); and each of the air supply parts (T5) is connected to the air inlet channel (31j) of a different air supply block (31).

6. The precooling device (100) according to claim 5, characterized in that: The air delivery plate (32) has a first end surface (32d) disposed facing the pre-cooling plate (10), and the first end surface (32d) is concavely formed with an air passage groove (d1) serving as the air passage channel (T4); the first end surface (32d) of the air delivery plate (32) is sealed to a side surface of the pre-cooling plate (10) to close the air passage groove (d1); The air supply plate (32) has a second end surface (32e) disposed facing the air supply block (31), the second end surface (32e) is concavely formed with a plurality of positioning grooves (e1), each of the air supply blocks (31) is installed in one of the positioning grooves (e1), and the air supply portion (T5) is disposed through the positioning grooves (e1).

7. The precooling device (100) according to claim 1, characterized in that: The precooling device (100) further comprises a second gas supply assembly (40), wherein the second gas supply assembly (40) is used to supply gas to the precooling chamber (Q).

8. The precooling device (100) according to claim 7, characterized in that: The second air delivery component (40) comprises an air distribution plate (41) and an air delivery member (42); The air distribution plate (41) is located inside the pre-cooling plate (10) and is spaced apart from the inner wall of the pre-cooling plate (10) to form a flow distribution channel (F); the air distribution plate (41) separates the pre-cooling cavity (Q) and the flow distribution channel (F); a flow channel (G) connecting the flow distribution channel (F) and the pre-cooling cavity (Q) is formed at the end of the air distribution plate (41); The air delivery member (42) is installed on the pre-cooling plate (10) and is used to deliver air to the flow distribution channel (F).

9. The precooling device (100) according to claim 8, characterized in that: A supporting seat (12) and a baffle (13) are provided in the precooling chamber (Q); The baffle plate (13) is located on the outer periphery of the support seat (12), and is arranged on two different sides of the support seat (12) from the air distributor plate (41); the baffle plate (13) at least partially blocks the airflow on the path from the flow passage (G) to the support seat (12).

10. A testing device, characterized in that: It comprises a test chamber, a transfer device and a precooling device (100) as claimed in any one of claims 1 to 9, wherein the transfer device is used to transfer the test piece from the precooling chamber (Q) to the test chamber through the loading and unloading port (L).

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