Superlens array for dodging

Abstract

The utility model provides a super lens array for dodging, and relates to the technical field of super lenses. Comprising at least two sub-super-lenses which are distributed randomly; each sub-super-lens comprises a substrate and a micro-nano structure arranged on the surface of the substrate; wherein the micro-nano structure is anisotropic, and the micro-nano structure provides different phases through different rotation angles; the phase of the sub-super-lens is regulated and controlled by rotating the micro-nano structure to set an angle, so that the influence of preparation tolerance on the phase of the super-lens in the manufacturing process of the super-lens can be effectively reduced, and the zero-order problem is solved.

Description

Technical Field

[0001] The present application relates to the field of metalens technology, and specifically, to a metalens array for light homogenization. Background Art

[0002] In modern optical technology, superlens, as an advanced optical element, plays an increasingly important role in the field of light homogenization. Through its unique micro-nanostructure design, superlens can finely control the phase of light waves, thereby achieving optical performance that is difficult to achieve with traditional optical elements.

[0003] The phase control of the metalens is usually achieved by adjusting the geometric dimensions of the micro-nanostructure. This method achieves the control of the phase of the light wave by changing the geometric dimensions of the micro-nanostructure. However, there is a significant problem with this phase control method, that is, it is too sensitive to the manufacturing tolerance. In the actual manufacturing process, due to the limitations of process conditions and the existence of errors, it is difficult to ensure that the size of each micro-nanostructure is completely consistent with its set size, which will affect the accuracy of phase control and produce the so-called "zero-order problem". In the application of uniform light, the "zero-order problem" is mainly manifested as the light intensity at the center of the light spot is significantly enhanced, which does not meet the design expectations, affecting the uniform light performance of the metalens.

[0004] Therefore, how to solve the "zero-order problem" of the metalens and improve the light uniformity performance has become an urgent problem that people need to solve. Utility Model Content

[0005] In order to solve the "zero-order problem" in the prior art, the present application provides a super lens array for light homogenization. It includes:

[0006] At least two randomly distributed sub-superlenses; each sub-superlens includes a substrate and a micro-nano structure disposed on a surface of the substrate;

[0007] Among them, the micro-nano structure is anisotropic and provides different phases through different rotation angles.

[0008] Optionally, the micro-nano structure is a nano-fin structure or an elliptical column structure.

[0009] Optionally, at least one of the following parameters of each sub-superlens is randomly distributed: the size of each sub-superlens; the shape of each sub-superlens; the position of each sub-superlens; and the focal length of each sub-superlens.

[0010] Optionally, when the positions of the sub-super lenses are randomly distributed, the phase distribution of the sub-super lenses is:

[0011]

[0012] in, is the phase distribution of the sub-superlens; λ is the central wavelength of the working band of the sub-superlens, and f is the focal length of the sub-superlens; Δx is the offset of the center position of the sub-superlens in the X-axis direction compared with the center position of the sub-superlens before randomization; Δy is the offset of the center position of the sub-superlens in the Y-axis direction compared with the center position of the sub-superlens before randomization.

[0013] Optionally, when the positions of the sub-super lenses are randomly distributed, the phase distribution of the sub-super lenses is:

[0014]

[0015] in, is the phase distribution of the sub-superlens; λ is the central wavelength of the working band of the sub-superlens, and f is the focal length of the sub-superlens; Δx is the offset of the center position of the sub-superlens in the X-axis direction compared with the center position of the sub-superlens before randomization; Δy is the offset of the center position of the sub-superlens in the Y-axis direction compared with the center position of the sub-superlens before randomization; m is inversely correlated with the divergence angle of the target obtained by the output light beam of the sub-superlens in the Y-axis direction.

[0016] Optionally, when the positions of the sub-super lenses are randomly distributed, the offset of the center position of each sub-super lens is within the interval of [-7.5 μm, 7.5 μm].

[0017] Optionally, when the sizes of the sub-super-lenses are randomly distributed, the size difference between different sub-super-lenses is less than or equal to 30 μm.

[0018] Optionally, when the focal lengths of the sub-super lenses are randomly distributed, the focal length difference between different sub-super lenses is less than or equal to 30 μm.

[0019] Optionally, the superlens array includes micro-nano structures of at least two sizes, and all micro-nano structures in the same sub-superlens have the same size.

[0020] Optionally, all micro-nano structures in the superlens array have the same size.

[0021] The technical solution of this application can produce the following beneficial effects:

[0022] This application only uses the geometric phase modulation method to achieve phase modulation by rotating the angle of the micro-nano structure, which can effectively solve the zero-order problem caused by manufacturing tolerance. The zero-order problem usually causes the image center brightness to be too high, affecting the imaging quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The accompanying drawings are included to provide a further understanding of the present application and are incorporated in and constitute a part of this specification. The accompanying drawings illustrate embodiments of the present application and together with the following description serve to explain the principles of the present application.

[0024] Figure 1 The figure shows the light uniforming effect of the concave lens provided in the embodiment of the present application;

[0025] Figure 2 The figure shows the uniform light effect of the convex lens provided in the embodiment of the present application;

[0026] Figure 3 A schematic diagram of a nanofin structure provided in an embodiment of the present application is shown;

[0027] Figure 4 A schematic diagram of an elliptical cylinder structure provided in an embodiment of the present application is shown;

[0028] Figure 5 A schematic diagram of the phase distribution of a metalens array after random distribution provided in an embodiment of the present application is shown;

[0029] Figure 6 A stereogram of the light intensity distribution of the VCSEL light source provided by an embodiment of the present application after passing through the superlens array is shown;

[0030] Figure 7 A plan view of the light intensity distribution of a VCSEL light source provided by an embodiment of the present application after passing through a superlens array is shown;

[0031] Figure 8 The light intensity distribution diagram of the light spot in the X direction after the VCSEL light source provided by the embodiment of the present application passes through the super lens array is shown;

[0032] Fig. 9 The light intensity distribution diagram of the light spot in the Y direction after the VCSEL light source provided by the embodiment of the present application passes through the super lens array is shown;

[0033] Fig.10 A schematic diagram of a nano-cylindrical structural unit provided in an embodiment of the present application is shown;

[0034] Fig.11 A schematic diagram of a nano square column structure unit provided in an embodiment of the present application is shown;

[0035] Fig.12 A schematic diagram of a square arrangement of a superstructure unit provided in an embodiment of the present application is shown;

[0036] Fig.13 A schematic diagram of a hexagonal arrangement of a superstructure unit provided in an embodiment of the present application is shown.

[0037] The reference numerals in the figure represent respectively:

[0038] 15: micro-nano structure; 16: substrate; DETAILED DESCRIPTION

[0039] The present application will now be described more fully below with reference to the accompanying drawings, in which various embodiments are shown. However, the present application can be implemented in many different ways and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that the present application will be exhaustive and complete, and will fully convey the scope of the present application to those skilled in the art. The same reference numerals throughout the text represent the same components. Furthermore, in the accompanying drawings, the thickness, ratios, and sizes of the components are exaggerated for clarity.

[0040] The terms used herein are only used for the purpose of describing specific embodiments and are not intended to be limiting. Unless the context clearly indicates otherwise, "one", "the", "at least one" as used herein do not represent a limitation on quantity, but are intended to include both the singular and the plural. For example, unless the context clearly indicates otherwise, "a component" has the same meaning as "at least one component". "At least one" should not be interpreted as being limited to the number "one". "Or" means "and / or". The term "and / or" includes any and all combinations of one or more of the associated listed items.

[0041] Unless otherwise defined, all terms used herein, including technical and scientific terms, have the same meanings as those generally understood by those skilled in the art. Terms defined in commonly used dictionaries should be interpreted as having the same meanings as in the relevant technical context, and unless clearly defined in the specification, these terms are not interpreted as having formal meanings in an idealized or overly formal sense.

[0042] The meaning of “include” or “comprising” specifies properties, quantities, steps, operations, components, parts or a combination thereof, but does not exclude other properties, quantities, steps, operations, components, parts or a combination thereof.

[0043] Embodiments are described herein with reference to cross-sectional views as idealized embodiments. Thus, variations in shape relative to the illustrated diagram are anticipated as a result of, for example, manufacturing techniques and / or tolerances. Therefore, the embodiments described herein should not be interpreted as being limited to the specific shapes of the regions as shown herein, but should include deviations in shape due to, for example, manufacturing. For example, a region shown or described as flat may typically have rough and / or nonlinear features. Moreover, the sharp angles shown may be rounded. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the precise shape of the regions and are not intended to limit the scope of the claims.

[0044] Based on this, the inventor provides a metalens array for light homogenization. Hereinafter, exemplary embodiments according to the present application will be described with reference to the accompanying drawings.

[0045] Geometric (PB, Pancharatnam-Berry) phase refers to the phase difference caused by the change in the geometric characteristics of the light propagation path during the propagation of the light field. This phase change is closely related to the polarization state of the light and is a special phase phenomenon that occurs during the propagation of light. In the field of metalens phase modulation, geometric phase modulation is a circular polarization-related phase modulation method that can achieve the purpose of phase modulation by simply modulating the rotation angle of the micro-nanostructure in the metalens.

[0046] The relationship between the rotation angle and phase of the micro-nano structure is: The positive and negative signs are related to the circular polarization state of the light source. The geometric phase has opposite phase modulation for left-handed circularly polarized light and right-handed circularly polarized light. The convex lens has a focusing effect on left-handed circularly polarized light, and the concave lens has a diverging effect on right-handed circularly polarized light. In the field of optics, light in any polarization state can be divided into left-handed circularly polarized light and right-handed circularly polarized light. Therefore, Figure 1 and Figure 2 As shown, for the metalens, random metalens arrays, convex lens arrays and concave lens arrays can all achieve the light uniformity effect. Therefore, the metalens that uses geometric phase for phase modulation can achieve the light uniformity effect for both left-handed polarized light and right-handed polarized light.

[0047] At present, the phase modulation method of conventional superlenses is based on the modulation of the transmission phase, in which the micro-nano structure is generally a cylinder, a prism with a square cross-section, etc., and the final modulation effect is achieved by adjusting the geometric dimensions of the micro-nano structure to apply the transmission phase to the incident light. However, this modulation method is sensitive to the manufacturing tolerance. In the field of superlens homogenization, due to the existence of the above-mentioned manufacturing tolerance, a bright spot will appear in the center of the homogenized light spot, that is, the zero-order light spot, thereby affecting the light homogenization effect.

[0048] The metalens array for light homogenization provided in the present application performs phase modulation by using geometric phase modulation. Since the micro-nano structures in each sub-metalens are of equal size and only differ in rotation angle, the sensitivity of the metalens to manufacturing tolerances can be effectively reduced, thereby greatly reducing the impact of manufacturing tolerances on the light homogenization effect and improving the efficiency of light homogenization. In theory, the polarization conversion efficiency of the micro-nano structure can reach 100% through geometric phase modulation, thereby solving the zero-order problem.

[0049] The micro-nanostructure on the metalens is anisotropic, and the micro-nanostructure provides different phases through different rotation angles. Optical anisotropy refers to the difference in the optical properties of the material in different directions. This difference is mainly reflected in the following aspects:

[0050] 1. Birefringence: Birefringence means that a material has different refractive indices for light with different polarization directions. In a micro-nano structure, due to the anisotropic nature, birefringence occurs when light propagates in it, corresponding to the two refractive indices of ordinary light and extraordinary light. The electric vector of ordinary light vibrates perpendicular to the optical axis of the micro-nano structure, while the electric vector of extraordinary light vibrates parallel to the optical axis of the micro-nano structure.

[0051] 2. Optical Rotation: Optical rotation refers to the degree to which a material rotates light about the direction of the polarization plane. This property is usually expressed by specific optical rotation.

[0052] 3. Absorption Spectrum: Anisotropic materials will absorb light of different polarization directions to different degrees, which makes their absorption spectrum anisotropic.

[0053] The embodiment of the present application provides a metalens array for light homogenization. It includes: at least two randomly distributed sub-metallenses; each sub-metallens includes a substrate, and a micro-nano structure arranged on the surface of the substrate; wherein the micro-nano structure is anisotropic, and the micro-nano structure provides different phases through different rotation angles. By modulating the phase of the incident light only by modulating the rotation angle of the micro-nano structure, the size of all micro-nano structures in each sub-metallens remains consistent, which can effectively reduce the impact of the manufacturing tolerance on the light homogenization effect, and can effectively solve the zero-order problem caused by the traditional phase modulation method. By randomly distributing the sub-metallenses, the light passing through the sub-metallenses is modulated into the target area of ​​the target plane through phase modulation, and the divergence angle of the light passing through the sub-metallenses is randomly set so that the divergence angle converges or diverges within a certain range, thereby achieving the effect of light homogenization.

[0054] In some preferred embodiments, the micro-nano structure is a nano-fin structure or an elliptical column structure. In order to achieve the modulation of the geometric phase, the micro-nano structure is required to have anisotropic properties, and both the nano-fin structure and the elliptical column structure have anisotropic properties; it should be understood that other structures that can achieve anisotropy of the micro-nano structure are within the protection scope of this application.

[0055] In order to realize the anisotropy of micro-nano structures, the fast and slow axes should have different complex amplitude responses. Nano-fin structures and elliptical column structures are usually used, such as Figure 3 As shown, it is a schematic diagram of the nanofin structure; Figure 4 The figure shows a schematic diagram of an elliptical cylinder structure. In the micro-nano structure of a superlens, the fast axis refers to the direction in which light propagates faster (i.e., the refractive index is smaller). In contrast to the fast axis, the slow axis refers to the direction in which light propagates slower (i.e., the refractive index is larger) in the micro-nano structure. The light on the fast axis propagates faster, while the light on the slow axis propagates slower. This feature is very important in the design and manufacture of superlenses because it directly affects the focusing and imaging performance of light. The difference in refractive index between the fast axis and the slow axis is the key to the superlens achieving specific optical functions. By precisely controlling the shape and size of the micro-nano structure, the difference in refractive index in different directions can be achieved, thereby achieving precise manipulation of light.

[0056] In some embodiments provided by the present application, at least one of the following parameters of each sub-superlens is randomly distributed: the size of each sub-superlens; the shape of each sub-superlens; the position of each sub-superlens; and the focal length of each sub-superlens.

[0057] In the process of manufacturing the metalens, one or a combination of multiple properties of the above metalens can be selected, and each sub-metalens can be configured by random distribution; each sub-metalens can be set to different sizes, shapes, positions and focal lengths within a specified range; the random distribution setting method makes the divergence angles of the light source when passing through each sub-metalens roughly similar, but there are certain differences, which is conducive to improving the uniform light effect.

[0058] Preferably, before random distribution, each sub-superlens is arranged periodically; when the positions of each sub-superlens are randomly distributed, the phase distribution of the sub-superlens is:

[0059]

[0060] In formula (1), is the phase distribution of the sub-superlens; λ is the central wavelength of the working band of the sub-superlens, and f is the focal length of the sub-superlens; Δx is the offset of the center position of the sub-superlens in the X-axis direction compared with the center position of the sub-superlens before randomization; Δy is the offset of the center position of the sub-superlens in the Y-axis direction compared with the center position of the sub-superlens before randomization.

[0061] When the focal lengths of the sub-superlenses are randomly distributed, if the divergence angle in the X direction is set to be the same as the divergence angle in the Y direction, that is, the divergence is equal in proportion, then the phase of the sub-superlens follows the corresponding relationship of formula (1).

[0062] In some embodiments, when the positions of the sub-superlenses are randomly distributed, the phase distribution of the sub-superlenses is:

[0063]

[0064] In formula (2), is the phase distribution of the sub-superlens; λ is the central wavelength of the working band of the sub-superlens, and f is the focal length of the sub-superlens; Δx is the offset of the center position of the randomized sub-superlens in the X-axis direction compared to the center position of the sub-superlens before randomization; Δy is the offset of the center position of the randomized sub-superlens in the Y-axis direction compared to the center position of the sub-superlens before randomization; m is inversely correlated with the divergence angle of the target obtained by the output light beam of the sub-superlens in the Y-axis direction. If the divergence angle in the X direction is set to be inconsistent with the divergence angle in the Y direction, that is, the divergence angle diverges in non-uniform proportion, the m variable can be adjusted to make the divergence angle in the X direction and the Y direction have a certain difference.

[0065] In some embodiments, optionally, when the positions of each sub-superlens are randomly distributed, compared with the center positions of each sub-superlens before randomization, the offset of the center position of each sub-superlens after randomization is between -7.5 μm and 7.5 μm, that is, greater than or equal to -7.5 μm, and less than or equal to 7.5 μm. Preferably, compared with the center positions of each sub-superlens before randomization, the offset of the center position of each sub-superlens after randomization is between -5 μm and 5 μm, that is, greater than or equal to -5 μm, and less than or equal to 5 μm. When the center positions of each sub-superlens are randomly distributed, the interference fringes caused by the coherent superposition between the array lens beams can be effectively avoided, thereby improving the homogenization effect.

[0066] In some embodiments, optionally, when the size of each sub-superlens is randomly distributed, the size difference between different sub-superlenses is less than or equal to 30 μm; that is, compared with the average size of the sub-superlens, the size difference of each sub-superlens is between -15 μm and 15 μm; preferably, the size difference between different sub-superlenses is less than or equal to 20 μm; that is, compared with the average size of the sub-superlens, the size difference of each sub-superlens is between -10 μm and 10 μm. The size of the sub-superlenses in the randomized superlens array can improve the homogenization effect, mainly because the spot distribution is optimized, the light transmission efficiency and uniformity are improved.

[0067] In some embodiments, optionally, when the focal lengths of the sub-superlenses are randomly distributed, the focal length difference between different sub-superlenses is less than or equal to 30 μm. Preferably, the focal length difference between different sub-superlenses is less than or equal to 20 μm, that is, the difference is between 0 μm and 20 μm. The focal lengths of the sub-superlenses in the randomized superlens array can improve the homogenization effect, mainly due to breaking the periodic focusing, optimizing the focusing depth, and adapting to different object distances.

[0068] Preferably, the metalens array includes micro-nano structures of at least two sizes, and all micro-nano structures in the same sub-metalens are of the same size. That is, in some embodiments, the metalens array includes at least two sub-metalens equipped with micro-nano structures of different sizes, and all micro-nano structures in each sub-metalens are of the same size.

[0069] Preferably, all micro-nano structures in the metalens array have the same size. The same size can effectively reduce the negative impact of manufacturing tolerance on the uniform light effect. That is, in some embodiments, the sizes of all micro-nano structures contained in all sub-metalens in the metalens array are consistent.

[0070] Example 1

[0071] The light source selected in this embodiment is VCSEL (Vertical Cavity Surface Emitting Laser), the central wavelength of the light beam emitted by the VCSEL is 940nm, the micro-nano structure is an elliptical column type, and the micro-nano structure is designed by Lumerical FDTD software to make the micro-nano structure have the effect of a half-slope sheet. The material of the micro-nano structure column is amorphous silicon, and a layer of silicon dioxide is filled on the column surface. The micro-nano structure is set to have a period of 450nm, a height of 640nm, a major axis of 360nm, and a minor axis of 155nm. After testing, the polarization conversion rate of the micro-nano structure is 99.3%.

[0072] The offset, size, position and focal length of the center position of each sub-superlens are randomly set, the shape of the sub-superlens is set to a rectangle, the offset range of the center position of each sub-superlens is set to between -5μm and 5μm, the average size between each sub-superlens is 80μm, the size difference of each sub-superlens is set to between -10μm and 10μm, the average focal length of each sub-superlens is set to 60μm, and the focal length difference of each sub-superlens is set to between -5μm and 5μm; the position of each sub-superlens on the superlens is set within the specified range, and the respective phases are calculated for each sub-superlens according to the phase distribution relationship of the superlens, and phase modulated according to their respective phases, and finally as shown in the figure. Figure 5 shown.

[0073] like Figure 6The figure shows the intensity distribution of the light beam emitted by the VCSEL after passing through the super lens array. As shown in the figure, the light intensity of the homogenized light spot is evenly distributed in the X-axis and Y-axis directions with a divergence angle between 50 degrees and -50 degrees.

[0074] like Figure 7 The figure shows the light intensity distribution plane of the light beam emitted by the VCSEL after passing through the super lens array. As shown in the figure, the light spot shows a homogenization effect in both the X-axis and the axial direction, and the light spot homogenization effect is significant.

[0075] like Figure 8 The figure shows the intensity distribution of the light spot in the X-axis direction after the light beam emitted by the VCSEL passes through the super lens array. As shown in the figure, the light intensity starts to increase at a divergence angle of -50 degrees, reaches a peak at -20 degrees, fluctuates in a small range between -20 degrees and 20 degrees, and starts to decrease at 20 degrees, and returns to 0 at 50 degrees.

[0076] like Fig. 9 The figure shows the intensity distribution of the light spot in the Y direction after the light beam emitted by the VCSEL passes through the super lens array. As shown in the figure, the light intensity starts to increase at a divergence angle of -60 degrees, reaches a peak at -20 degrees, fluctuates in a small range between -20 degrees and 20 degrees, and starts to decrease at 20 degrees, and returns to 0 at 60 degrees.

[0077] In the embodiment of the present application, the micro-nano structure 15 is an all-dielectric structural unit with high transmittance in the visible light band. The optional materials of the micro-nano structure 15 may include: one or more of silicon nitride, titanium oxide, gallium nitride, gallium phosphide and hydrogenated amorphous silicon. Fig.10 A schematic diagram of a nanocolumn structural unit provided in an embodiment of the present application, Fig.11 A schematic diagram of a nanometer square column structure unit provided in an embodiment of the present application. Fig.10 and Fig.11 As shown, the micro-nano structure unit is composed of a micro-nano structure 15 and a substrate 16 corresponding to the micro-nano structure 15 .

[0078] like Fig.12 and Fig.13As shown, the micro-nano structures 15 are arranged periodically and form a superstructure unit, which is a densely packed figure, such as a square, a hexagon or a fan, etc., each period contains a group of micro-nano structures 15, and the vertices and / or centers of the superstructure unit can be provided with micro-nano structures 15, for example. In the case where the superstructure unit is a regular hexagon, at least one micro-nano structure 15 is provided at each vertex and center of the regular hexagon. Or, in the case where it is a square, at least one micro-nano structure 15 is provided at each vertex and center of the square. Ideally, the superstructure unit should be a micro-nano structure 15 arranged at the vertices and center of the hexagon, or a micro-nano structure 15 arranged at the vertices and center of the square. It should be understood that the actual product may lack a micro-nano structure at the edge of the superlens due to the limitation of the shape of the superlens, so that it does not meet the complete hexagon / square. Specifically, the superstructure unit is formed by the micro-nano structure 15 arranged in a regular pattern, and a plurality of superstructure units are arranged in an array to form a supersurface structure.

[0079] like Fig.12 In one embodiment shown, the superstructure unit includes a central micro-nanostructure 15 and four peripheral micro-nanostructures 15 surrounding it and having equal distances therefrom, forming a square.

[0080] like Fig.13 In one embodiment shown, the superstructure unit includes a central micro-nanostructure 15 and six peripheral micro-nanostructures 15 surrounding it and equidistant from it. The peripheral micro-nanostructures 15 are evenly distributed along the circumference to form a regular hexagon, which can also be understood as a combination of regular triangles composed of multiple micro-nanostructures 15.

[0081] It should be noted that the metalens provided in the embodiment of the present application can be processed by semiconductor technology, and has the advantages of light weight, thin thickness, simple structure and process, low cost and high consistency in mass production.

[0082] In summary, the embodiment of the present application provides a metalens array for light homogenization, which randomly distributes the sub-metalenses in the metalens array, calculates and modulates the phase for each sub-metallens, and uses a geometric phase modulation method to achieve phase modulation only by rotating the angle of the sub-metalens micro-nano structure. This can effectively avoid the zero-order problem caused by the preparation tolerance during the transmission phase modulation process and improve the light homogenization effect to a certain extent.

[0083] The optional implementation provided by the present application optimizes the uniform light effect by randomly adjusting the size, shape, position and focal length of the sub-super lens. In addition, the optional implementation provided by the present application can control the divergence angles of the uniform light beam in the X direction and the Y direction respectively while uniform light.

[0084] When randomly adjusting the size, spacing and focal length of the sub-metalens, the optional implementation provided by the present application limits a smaller range. The selection of this range is based on in-depth analysis and calculation of the performance of the optical system, ensuring the accuracy and stability of parameter adjustment. This precise control enables the present application to minimize the impact on other performance parameters of the optical path while ensuring the uniform light effect.

[0085] The above is only a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or replacements within the technical scope disclosed in the embodiment of the present application, which should be included in the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiment of the present application shall be based on the protection scope of the claims.

Claims

1. A super lens array for light homogenization, characterized in that: The superlens array includes at least two randomly distributed sub-superlenses; each sub-superlens includes a substrate and a micro-nano structure arranged on the surface of the substrate; Wherein, the micro-nano structure is anisotropic and provides different phases through different rotation angles.

2. The super lens array for light homogenization according to claim 1, characterized in that: The micro-nano structure is a nano-fin structure or an elliptical column structure.

3. The super lens array for light homogenization according to claim 1, characterized in that: At least one of the following parameters of each sub-superlens is randomly distributed: the size of each sub-superlens; the shape of each sub-superlens; the position of each sub-superlens; and the focal length of each sub-superlens.

4. The super lens array for light homogenization according to claim 1, characterized in that: When the positions of the sub-super lenses are randomly distributed, the phase distribution of the sub-super lenses is: in, is the phase distribution of the sub-superlens; λ is the central wavelength of the working band of the sub-superlens, and f is the focal length of the sub-superlens; Δx is the offset of the center position of the sub-superlens in the X-axis direction compared to the center position of the sub-superlens before randomization; Δy is the offset of the center position of the sub-superlens in the Y-axis direction compared to the center position of the sub-superlens before randomization.

5. The super lens array for light homogenization according to claim 1, characterized in that: When the positions of the sub-super lenses are randomly distributed, the phase distribution of the sub-super lenses is: in, is the phase distribution of the sub-superlens; λ is the central wavelength of the working band of the sub-superlens, and f is the focal length of the sub-superlens; Δx is the offset of the center position of the sub-superlens in the X-axis direction compared with the center position of the sub-superlens before randomization; Δy is the offset of the center position of the sub-superlens in the Y-axis direction compared with the center position of the sub-superlens before randomization; m is inversely correlated with the divergence angle of the target obtained by the light beam output by the sub-superlens in the Y-axis direction.

6. The super lens array for light homogenization according to claim 1, characterized in that: When the positions of the sub-super lenses are randomly distributed, the offset of the center position of each sub-super lens is within the interval of [-7.5 μm, 7.5 μm].

7. The super lens array for light homogenization according to claim 1, characterized in that: When the sizes of the sub-super-lenses are randomly distributed, the size difference between different sub-super-lenses is less than or equal to 30 μm.

8. The super lens array for light homogenization according to claim 1, characterized in that: When the focal lengths of the sub-super lenses are randomly distributed, the focal length difference between different sub-super lenses is less than or equal to 30 μm.

9. The super lens array for light homogenization according to claim 1, characterized in that: The superlens array includes the micro-nano structures of at least two sizes, and all the micro-nano structures in the same sub-superlens have the same size.

10. The super lens array for light homogenization according to claim 1, characterized in that: All the micro-nano structures in the superlens array have the same size.

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