An ion beam limiter

Abstract

The utility model relates to the field of ion mass spectrometer equipment, and in particular to an ion beam limiter, including an aperture seat and a plurality of aperture plates; the aperture seat is provided with a plurality of aperture mounting through holes corresponding to the plurality of aperture plates, and the plurality of aperture plates are sequentially arranged in the plurality of aperture mounting through holes; each aperture plate is provided with an aperture hole, the aperture hole is close to the exit side of the ion beam on the aperture seat, and the aperture of each aperture hole is different. By adjusting the up and down movement of the ion beam limiter, apertures of different apertures can be selected to meet the adjustment requirements of ion beam energy in different occasions. The ion beam limiter of the utility model has the advantages of simple structure, convenient operation, high efficiency, etc., and can solve the technical problem that the traditional ion beam limiter cannot select aperture plates of different specifications and adjust the aperture opening size according to actual needs.

Description

Technical Field

[0001] The utility model relates to the field of ion mass spectrometer equipment, in particular to an ion beam limiter. Background Art

[0002] The aperture is an entity that limits the light beam in an optical system. The aperture that limits the light beam the most in an optical system is called an aperture aperture. The aperture aperture is an important component of an ion mass spectrometer, used to limit the range of the ion beam passing through to obtain an ion beam of the required energy and improve the quality of detection and analysis.

[0003] When using an ion mass spectrometer, it is necessary to select the energy of the required ion beam (i.e., bombarding ions) and the collected target ions to facilitate the adjustment of the ion beam size. The ion beam limiter is a physical device that selects the ion beam size. It changes the number of ion beams through apertures of different apertures, thereby changing the number of ion beams entering the next stage of the optical device.

[0004] Traditional ion beam limiters are usually fixed and can only install aperture plates of one specification. The aperture opening size cannot be adjusted according to actual needs. Therefore, its use effect is limited in different application scenarios and its working efficiency is low. Summary of the invention

[0005] The utility model aims to provide an ion beam limiter, which can solve the technical problem that the traditional ion beam limiter cannot select aperture pieces of different specifications and adjust the aperture opening size according to actual needs.

[0006] To achieve the above-mentioned purpose, the utility model is designed to provide an ion beam limiter, including an aperture seat and a plurality of aperture plates; the aperture seat is provided with a plurality of aperture mounting through holes corresponding to the plurality of aperture plates, and the plurality of aperture plates are sequentially arranged in the plurality of aperture mounting through holes; an aperture hole is provided on each aperture plate, the aperture hole is close to the exit side of the ion beam on the aperture seat, and the aperture of each aperture hole is different.

[0007] As a preferred solution, the aperture mounting through hole is a stepped hole, and the aperture on the ion beam incident side close to the aperture seat is larger than the aperture on the ion beam exit side.

[0008] As a preferred embodiment, the ion beam limiter also includes an aperture cover plate, which covers the top of the aperture piece and is connected to the aperture seat; the aperture cover plate is provided with a plurality of circular holes matching the plurality of aperture pieces, and the outer diameter of each circular hole is smaller than the outer diameter of each aperture piece.

[0009] Furthermore, a cover plate mounting groove is provided on the aperture seat near the ion beam incident side, and the aperture cover plate is arranged in the cover plate mounting groove.

[0010] Furthermore, the aperture seat is also provided with a cover mounting hole, and the cover mounting hole is arranged in the cover mounting groove. The aperture cover is provided with a connecting hole matching the cover mounting hole, and the screws pass through the connecting hole and the cover mounting hole in sequence to connect the aperture cover and the aperture seat.

[0011] As a preferred solution, the aperture seat is further provided with a device mounting hole, and a bolt passes through the device mounting hole to connect the aperture seat to the adjustment mechanism.

[0012] Beneficial effects of the utility model:

[0013] The ion beam limiter of the utility model has the advantages of simple structure, convenient operation, high efficiency, etc., and can solve the technical problem that the traditional ion beam limiter cannot select aperture pieces of different specifications and adjust the aperture opening size according to actual needs.

[0014] By adjusting the up and down movement of the ion beam limiter, apertures of different apertures can be selected to meet the adjustment requirements of ion beam energy in different occasions.

[0015] The evenly distributed aperture mounting through holes on the aperture seat enable apertures of different apertures to be installed on the optical cable seat at the same time, thus improving the switching efficiency of apertures of different apertures. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is an assembly diagram of the utility model.

[0017] Figure 2 It is an explosion diagram of the utility model.

[0018] Figure 3 This is a three-dimensional schematic diagram of the aperture seat.

[0019] Figure 4 A schematic cross-sectional view of the aperture piece.

[0020] Figure 5 It is the principle diagram of the utility model.

[0021] Description of reference numerals:

[0022] Aperture seat 1, aperture mounting through hole 11, cover mounting hole 12, cover mounting groove 13, equipment mounting hole 14, aperture piece 2, aperture small hole 21, aperture cover plate 3, round hole 31, connecting hole 32. DETAILED DESCRIPTION

[0023] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved clearer, the technical solutions of the present invention are further described below in conjunction with the accompanying drawings and through specific implementation methods. It is understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for the convenience of description, only the parts related to the present invention are shown in the accompanying drawings, rather than all of them.

[0024] In order to meet the ion beam energy requirements in different occasions and improve work efficiency, the utility model provides an ion beam limiter suitable for an ion mass spectrometer, which is a highly efficient adjustable aperture device for adjusting and controlling the range and intensity of the ion beam. By selecting the size of apertures with different apertures, effective control of the range and intensity of the ion beam can be achieved, thereby improving the quality and use effect of the ion beam. The limiter can be used to select the required number of ion beams, that is, the energy size. Four micro apertures of different sizes can be installed on the ion beam limiter at the same time, that is, after one installation, there are four sizes of apertures to choose from, thereby improving work efficiency.

[0025] The utility model is further described below in conjunction with the accompanying drawings.

[0026] like Figure 1 , 2 As shown, the utility model relates to an ion beam limiter including an aperture seat 1, an aperture piece 2, and an aperture cover plate 3. There are multiple aperture pieces 2, and the aperture aperture 21 of each aperture piece 2 is different. Each aperture piece 2 is respectively installed in the aperture installation through hole 11 corresponding to the aperture seat 1. The aperture cover plate 3 covers the aperture piece 2 and is connected to the aperture seat 1 by screws so as to fix the aperture piece 2 in the aperture seat 1. The ion beam limiter is arranged on the light path of the ion mass spectrometer device, and the ion beam enters from one side of the aperture seat 1 and exits from the other side. The aperture piece 2 and the aperture cover plate 3 are both installed on the incident side of the ion beam on the aperture seat 1. Figure 1 The direction indicated by the arrow is the incident direction of the ion beam.

[0027] like Figure 3As shown, the aperture seat 1 is a vertical bar structure, and the aperture seat 1 is respectively provided with an aperture mounting through hole 11, a cover plate mounting hole 12 and an equipment mounting hole 14. There are multiple aperture mounting through holes 11, which are evenly distributed in the aperture seat 1. Each aperture mounting through hole 11 is a stepped hole, and the aperture close to the ion beam incident side of the aperture seat is larger than the aperture on the ion beam exit side. The aperture plate 2 is installed in the aperture mounting through hole 11, and the aperture aperture 21 of the aperture plate 2 is close to the ion beam exit side. The aperture mounting through hole 11 is collinear with the center hole of the aperture plate 2, and the outer diameters of the two are matched with each other. A cover plate mounting groove 13 is provided on the incident side of the ion beam on the aperture seat 1, and the aperture mounting through hole 11 and the cover plate mounting hole 12 are both located in the cover plate mounting groove 13. The aperture cover plate 3 is arranged in the cover plate mounting groove 13, and the cover plate mounting hole 12 is connected to the connecting hole 32 on the aperture cover plate 3 by screws. Two bolts pass through two equipment mounting holes 14 to connect the aperture seat 1 with the adjustment mechanism, and the aperture seat 1 can be moved up and down by the adjustment mechanism to select the aperture piece 2 of the appropriate aperture size. The adjustment mechanism of this embodiment is a motor, and the output shaft of the motor is connected to the equipment mounting hole 14 on the aperture seat 1.

[0028] like Figure 2 , 4 As shown, there are multiple aperture pieces 2, and each aperture piece 2 corresponds to each aperture mounting through hole 11 one by one. The aperture piece 2 is a cylindrical thin sheet with an outer diameter of 2 mm and a thickness of 0.6 mm, which is a micro aperture piece. The end face of the aperture piece 2 is provided with a conical groove, and an aperture hole 21 is provided in the center. In this embodiment, there are four aperture pieces 2, and an aperture hole 21 is provided in the center of each aperture piece 2. The diameter range of the aperture hole 21 is 0.07~0.75mm. The purpose of selecting the size of the ion beam is achieved by selecting aperture holes 21 with different apertures, thereby changing the number of ion beams entering the next stage of the ion mass spectrometer equipment. The number of ion beams represents the energy size of the ion mass spectrometer.

[0029] The aperture cover plate 3 is a sheet-like thin plate with a thickness of 0.2 mm. A circular hole 31 and a connecting hole 32 are provided on the aperture cover plate 3. The circular hole 31 matches the aperture mounting through hole 11 and has an aperture of 1.2 mm, which is smaller than the outer diameter of the aperture plate 2. The connecting hole 32 matches the cover plate mounting hole 12. The screws pass through the connecting hole 32 and the cover plate mounting hole 12 in sequence to connect the aperture cover plate 3 to the aperture seat 1. The connecting hole 32 is an oblong hole, and the mounting position can be finely adjusted when it is installed with the aperture seat 1. The aperture cover plate 3 covers the aperture piece 2, and is provided with a circular hole 31 matching each aperture piece. The circular hole 31 is colinear with the central axis of the aperture hole 21, and the outer diameter of the circular hole 31 is smaller than the outer diameter of the aperture piece 2. The bottom of the aperture cover plate 3 fits with the aperture seat 1 and is connected to the aperture seat 1 by screws so as to fix the aperture piece 2 in the aperture seat 1 to prevent the aperture piece 2 from escaping from the aperture seat 1.

[0030] Working principle of the ion beam limiter:

[0031] like Figure 5 As shown, the ion beam limiter adjusts the incident ion beam passing through the circular hole 31 and the aperture mounting through hole 11 to a position parallel to the initial optical axis and at a predetermined distance, so that the incident ion beam passes through the aperture plate 2 and then exits through the aperture aperture 21 on the aperture plate 2, so that the exiting ion beam returns to the position of the initial optical axis. According to the requirements of ion beam energy in different occasions, the ion beam limiter is adjusted to move up and down by the adjustment mechanism, so as to select aperture apertures 21 with different apertures.

[0032] The utility model has the following advantages:

[0033] The ion beam limiter of the utility model has the advantages of simple structure, convenient operation, high efficiency, etc., and can solve the technical problem that the traditional ion beam limiter cannot select aperture pieces of different specifications and adjust the aperture opening size according to actual needs.

[0034] By adjusting the up and down movement of the ion beam limiter, apertures of different apertures can be selected to meet the adjustment requirements of ion beam energy in different occasions.

[0035] The evenly distributed aperture mounting through holes on the aperture seat enable apertures of different apertures to be installed on the optical cable seat at the same time, thus improving the switching efficiency of apertures of different apertures.

[0036] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. An ion beam limiter, characterized in that: The invention comprises an aperture seat (1) and a plurality of aperture pieces (2); the aperture seat (1) is provided with a plurality of aperture mounting through holes (11) corresponding to the plurality of aperture pieces (2); the plurality of aperture pieces (2) are sequentially arranged in the plurality of aperture mounting through holes (11); each aperture piece (2) is provided with an aperture small hole (21), the aperture small hole (21) is close to the ion beam exit side of the aperture seat (1), and the aperture of each aperture small hole (21) is different; The aperture seat (1) is also provided with a device mounting hole (14), and a bolt passes through the device mounting hole (14) to connect the aperture seat (1) to the adjustment mechanism.

2. An ion beam limiter according to claim 1, characterized in that: The aperture mounting through hole (11) is a stepped hole, and the aperture on the ion beam incident side close to the aperture seat (1) is larger than the aperture on the ion beam exit side.

3. An ion beam limiter according to claim 2, characterized in that: The ion beam limiter further comprises an aperture cover plate (3), wherein the aperture cover plate (3) covers the aperture piece (2) and is connected to the aperture seat (1); the aperture cover plate (3) is provided with a plurality of circular holes (31) matching the plurality of aperture pieces (2), and the outer diameter of each circular hole (31) is smaller than the outer diameter of each aperture piece (2).

4. An ion beam limiter according to claim 3, characterized in that: A cover plate mounting groove (13) is provided on the aperture seat (1) close to the ion beam incident side, and the aperture cover plate (3) is arranged in the cover plate mounting groove (13).

5. An ion beam limiter according to claim 4, characterized in that: The aperture seat (1) is also provided with a cover plate mounting hole (12), and the cover plate mounting hole (12) is arranged in a cover plate mounting groove (13). The aperture cover plate (3) is provided with a connecting hole (32) matching the cover plate mounting hole (12), and screws are sequentially passed through the connecting hole (32) and the cover plate mounting hole (12) to connect the aperture cover plate (3) to the aperture seat (1).

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