Square insert type quartz boat

Abstract

The utility model discloses a square inserting piece type quartz boat in the technical field of quartz boats, a bottom plate and the right side of a connecting rod are jointly connected with a right side square frame, T-shaped sliding rods are vertically arranged on the front and rear end faces of the left side of the left side square frame, and connecting blocks are arranged on the tops of the front and rear end faces of the left side of the left side square frame; connecting holes are vertically formed in the left sides of the connecting blocks in a penetrating manner; the T-shaped sliding rod on the left side of the left square frame of one group of quartz boats can be inserted into the T-shaped sliding groove in the right side of the right square frame of the other group of quartz boats, so that the two groups of quartz boats can be preliminarily connected, and then an external bolt is matched with the threaded hole through the connecting hole to fix the connecting block in the mounting groove; therefore, connection of two or more groups of quartz boats can be completed. Firstly, the clamping groove arranged on the connecting rod can play a role in fixing the direction, and secondly, the guide groove on the guide plate can play a role in guiding and limiting when the silicon wafer moves up and down, so that the silicon wafer is prevented from deviating and misplacing.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz boats, in particular to a square insert-type quartz boat. Background Art

[0002] Quartz boat is a high-temperature ceramic product, also called quartz boat wafer boat, quartz wafer boat, quartz glass, etc. The quartz boat has good optical properties due to the special materials it is made of. It not only has excellent light transmittance, but also has excellent ultraviolet and infrared transmittance effects. However, the existing square insert quartz boat still has some disadvantages. For example, the square insert quartz boat does not have the function of assembly and assembly, and two or more groups of square insert quartz boats cannot be connected and combined. At the same time, when the silicon wafer is inserted into the quartz boat, it does not have a guiding function, which causes the silicon wafer to be misaligned or offset during insertion. For this reason, we propose a square insert quartz boat. Utility Model Content

[0003] The utility model aims to provide a square insert type quartz boat to solve the problems raised in the above background technology.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A square insert quartz boat comprises a left square frame, a bottom plate is arranged at the right bottom of the left square frame, connecting rods are arranged on the front and rear end surfaces of the right top of the left square frame, and the right square frame is connected to the bottom plate and the right side of the connecting rod, and a T-shaped sliding rod is vertically arranged on the left front and rear end surfaces of the left square frame, and a connecting block is arranged on the top of the left front and rear end surfaces of the left square frame, and a connecting hole is vertically penetrated on the left side of the connecting block, and a T-shaped sliding groove matching the T-shaped sliding rod is vertically arranged on the right front and rear end surfaces of the right square frame, and a mounting groove matching the connecting block is arranged on the top of the right front and rear end surfaces of the right square frame, and a threaded hole matching the connecting hole is arranged on the left side of the bottom of the inner cavity of the mounting groove, and the top of the T-shaped sliding groove is connected with the right side of the bottom of the inner cavity of the mounting groove, and guide plates are arranged on the front and rear end surfaces of the middle parts of the opposite surfaces of the left square frame and the right square frame, and the opposite surfaces of the connecting rod are sequentially provided with a card slot from left to right, and the top of the bottom plate is sequentially provided with a card slot first matching the card slot from left to right.

[0006] Furthermore: the opposite surfaces of the guide plate are sequentially provided with guide grooves matching with the clamping grooves from left to right, and arc-shaped contact surfaces are provided at both ends of the outer sides of the guide grooves.

[0007] Furthermore: rubber gaskets are bonded to the front and rear end surfaces of the bottom of the left square frame and the right square frame, and the bottoms of the rubber gaskets are provided with anti-slip convex patterns.

[0008] Furthermore: the left square frame and the right square frame have the same size, and handles are arranged on the top of the front and rear end surfaces of the left square frame and the right square frame.

[0009] Furthermore: the angles between the left and right sides of the bottom plate and the left and right square frames are both set to ninety degrees, and the angles between the left and right sides of the connecting rod and the left and right square frames are both set to ninety degrees.

[0010] Furthermore: the length of the guide plate from top to bottom is greater than the length of the connecting rod from top to bottom, and the front and rear end surface guide plates are arranged in parallel in the middle of the opposite surfaces of the left square frame and the right square frame.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] When two or more groups of quartz boats need to be connected, the T-shaped sliding rod on the left side of the left square frame of one group of quartz boats can be inserted into the T-shaped sliding groove on the right side of the right square frame of another group, so that the preliminary connection between the two groups can be completed, and then the external bolts are fixed in the installation groove through the matching of the connecting holes and the threaded holes, so that the connection of the two or more groups of quartz boats can be completed; when the silicon wafer is inserted into the quartz boat, firstly, the card groove arranged on the connecting rod can play the effect of fixing the orientation, and secondly, the guide groove on the guide plate can play the effect of guiding and limiting when the silicon wafer moves up and down, so as to avoid its displacement and dislocation. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure of the utility model;

[0014] Figure 2 This is a schematic diagram of the top view of the connecting rod structure of the utility model;

[0015] Figure 3 It is a schematic diagram of the top view structure of the guide plate of the utility model.

[0016] In the figure: 1. left square frame; 2. bottom plate; 3. connecting rod; 4. right square frame; 5. T-shaped slide bar; 6. connecting block; 7. connecting hole; 8. T-shaped slide groove; 9. mounting groove; 10. threaded hole; 11. guide plate; 12. slot; 13. guide groove; 14. arc-shaped contact surface. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] Embodiment 1:

[0019] See also Figure 1-3 The utility model provides a technical solution: a square insert quartz boat refers to an apparatus for inserting silicon wafers, which is made of quartz glass, so it is called a quartz boat, including a left side square frame 1, a bottom plate 2 is arranged at the right bottom of the left side square frame 1, and connecting rods 3 are arranged on the front and rear end surfaces of the right top of the left side square frame 1. The bottom plate 2 and the right side of the connecting rod 3 are connected to the right side of the square frame 4, and the square frame 1 on the left side, the bottom plate 2 and the two groups of connecting rods 3 and the square frame 4 on the right side are combined into a quartz boat. The front and rear end surfaces of the left side of the square frame 1 are vertically provided with T-shaped sliding rods 5, the tops of the front and rear end surfaces of the left side of the square frame 1 are provided with connecting blocks 6, and the left sides of the connecting blocks 6 are vertically penetrated with connecting holes 7, and the front and rear end surfaces of the right side of the square frame 4 are vertically provided with T-shaped sliding grooves 8 matching the T-shaped sliding rods 5, and the tops of the front and rear end surfaces of the right side of the square frame 4 are provided with mounting grooves 9 matching the connecting blocks 6. The left side of the bottom of the inner cavity is provided with a threaded hole 10 matching the connecting hole 7. When it is necessary to connect two groups of quartz boats together, the T-shaped sliding rod 5 on the left side of the left square frame 1 can be inserted into the T-shaped sliding groove 8 on the right side of the right square frame 4, so that the preliminary connection can be completed, and then the external bolt is fixed in the mounting groove 9 through the matching of the connecting hole 7 and the threaded hole 10, so that the connection of two or more groups of quartz boats can be completed. The top of the T-shaped sliding groove 8 is connected to the right side of the bottom of the inner cavity of the mounting groove 9. The front and rear end surfaces of the middle part of the opposite surfaces of the left square frame 1 and the right square frame 4 are provided with guide plates 11. The guide plates 11 can guide the silicon wafer to move up and down when inserting and removing the silicon wafer. The opposite surfaces of the connecting rod 3 are provided with card slots 12 from left to right in sequence, and the top of the bottom plate 2 is provided with card slots 12 matching the card slots 12 in sequence from left to right. When the silicon wafer is inserted, its front and rear end surfaces will be inserted into the card slot 12, and its bottom will be inserted into the card slot 1.

[0020] Among them, preferably, the opposite surfaces of the guide plate 11 are sequentially provided with guide grooves 13 matching the card slot 12 from left to right, and arc-shaped contact surfaces 14 are provided at both ends of the outer sides of the guide grooves 13. When inserting the silicon wafer, the front and rear end surfaces of the silicon wafer will be inserted into the guide groove 13 of the guide plate 11, and the provided arc-shaped contact surfaces 14 can facilitate the silicon wafer to be quickly and stably inserted into the guide groove 13 at the corresponding position.

[0021] Preferably, rubber gaskets are bonded to the front and rear end surfaces of the bottom of the left square frame 1 and the right square frame 4, and the bottoms of the rubber gaskets are provided with anti-slip convex patterns, which can increase the stability of the entire quartz boat when placed.

[0022] Preferably, the left square frame 1 and the right square frame 4 have the same size, and handles are provided on the tops of the front and rear end surfaces of the left square frame 1 and the right square frame 4, so that the staff can conveniently take and carry the whole quartz boat.

[0023] Embodiment 2:

[0024] Reference Figure 1-3 This embodiment is different from the first embodiment in that: the angles between the left and right sides of the bottom plate 2 and the left square frame 1 and the right square frame 4 are both set to ninety degrees, and the angles between the left and right sides of the connecting rod 3 and the left square frame 1 and the right square frame 4 are both set to ninety degrees. This arrangement can increase the structural stability of the entire quartz boat and avoid shaking; the length of the guide plate 11 from top to bottom is greater than the length of the connecting rod 3 from top to bottom. This arrangement can increase the stability after the silicon wafer is inserted, and the front and rear end guide plates 11 are parallelly arranged in the middle of the opposite surfaces of the left square frame 1 and the right square frame 4. This arrangement can increase the stability of the overall structure.

[0025] The electrical appliances mentioned in this article are all connected to an external power source through wires.

[0026] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A square insert quartz boat, comprising a left square frame (1), characterized in that: A bottom plate (2) is provided at the right bottom of the left square frame (1); a connecting rod (3) is provided at the front and rear end surfaces of the right top of the left square frame (1); a right square frame (4) is connected to the bottom plate (2) and the right side of the connecting rod (3); a T-shaped sliding rod (5) is vertically provided at the front and rear end surfaces of the left side of the left square frame (1); a connecting block (6) is provided at the top of the front and rear end surfaces of the left side of the left square frame (1); a connecting hole (7) is vertically penetrated on the left side of the connecting block (6); and a T-shaped sliding groove matching the T-shaped sliding rod (5) is vertically provided at the front and rear end surfaces of the right side of the right square frame (4). (8), the top of the right front and rear end surfaces of the right side of the square frame (4) are provided with mounting grooves (9) matching the connecting block (6), the left side of the bottom of the inner cavity of the mounting groove (9) is provided with threaded holes (10) matching the connecting hole (7), the top of the T-shaped slide groove (8) is connected to the right side of the bottom of the inner cavity of the mounting groove (9), the front and rear end surfaces of the middle parts of the opposing surfaces of the left square frame (1) and the right square frame (4) are provided with guide plates (11), the opposing surfaces of the connecting rod (3) are provided with card slots (12) in sequence from left to right, and the top of the bottom plate (2) is provided with card slots 1 matching the card slots (12) in sequence from left to right.

2. A square insert type quartz boat according to claim 1, characterized in that: The opposite surfaces of the guide plate (11) are sequentially provided with guide grooves (13) matching with the clamping groove (12) from left to right, and arc-shaped contact surfaces (14) are provided at both ends of the outer sides of the guide groove (13).

3. The square insert quartz boat according to claim 1, characterized in that: The front and rear end surfaces of the bottom of the left square frame (1) and the right square frame (4) are both bonded with rubber gaskets, and the bottoms of the rubber gaskets are both provided with anti-slip convex patterns.

4. The square insert quartz boat according to claim 1, characterized in that: The left square frame (1) and the right square frame (4) have the same size, and handles are provided on the tops of the front and rear end surfaces of the left square frame (1) and the right square frame (4).

5. The square insert quartz boat according to claim 1, characterized in that: The included angles between the left and right sides of the bottom plate (2) and the left square frame (1) and the right square frame (4) are both set to ninety degrees, and the included angles between the left and right sides of the connecting rod (3) and the left square frame (1) and the right square frame (4) are both set to ninety degrees.

6. The square insert quartz boat according to claim 1, characterized in that: The length of the guide plate (11) from top to bottom is greater than the length of the connecting rod (3) from top to bottom, and the front and rear end surfaces of the guide plates (11) are arranged in parallel in the middle of the opposite surfaces of the left square frame (1) and the right square frame (4).

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