Rotary carrying mechanism and silicon wafer processing equipment

Abstract

The utility model discloses a rotary handling mechanism and silicon wafer processing equipment, including rotating subassembly, bearing subassembly, support plate and bearing, rotating subassembly is provided on the support plate, the outer ring of bearing is fixedly connected to one side of support plate, the inner ring of bearing is fixedly connected to bearing subassembly, or, the inner ring of bearing is fixedly connected to one side of support plate, and the bearing is fixedly connected to one side of support plate. The outer ring of the bearing is fixedly connected to the bearing assembly, the rotating assembly is arranged on the other side of the supporting plate, and the driving end of the rotating assembly penetrates through the bearing and is in transmission connection with the bearing assembly. The bearing assembly is connected to the supporting plate in a rotating mode through the bearing, in the rotating process, the supporting plate supports the bearing assembly through the bearing, the rotating assembly only needs to exert force enabling the bearing assembly to rotate, the bearing assembly does not need to be supported, and the situations of mechanism shaking and the like can be effectively avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a rotary transport mechanism and silicon wafer processing equipment. Background Art

[0002] During the processing of solar cell silicon wafers, the silicon wafers need to be loaded onto a graphite boat, and then the graphite boat carrying the silicon wafers is transported to the boat support through translation, rotation and other actions, and then sent into the process furnace for reaction, so that a layer of anti-reflection film is formed on the surface of the silicon wafer to improve the photoelectric conversion efficiency of the silicon wafer.

[0003] The current graphite boat grabbing mechanism usually includes a rotating assembly and a boat grabbing assembly. The rotating assembly is usually directly connected to the boat grabbing assembly by a reducer to drive the boat grabbing assembly to rotate. However, due to the long cantilever of the rotating assembly, the direct transmission method of the reducer is used, which is prone to mechanism shaking during the rotation process, resulting in a high probability of mechanism failure. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the prior art, the present application provides a rotating transport mechanism and a silicon wafer processing device, which can avoid the mechanism shaking during the rotation process.

[0005] This embodiment adopts the following technical solutions:

[0006] A rotary transport mechanism, comprising:

[0007] Support plate;

[0008] A carrying component, used to carry a workpiece or a carrier carrying a workpiece;

[0009] A bearing, wherein the outer ring of the bearing is fixedly connected to one side of the support plate, and the inner ring of the bearing is fixedly connected to the bearing assembly, or the inner ring of the bearing is fixedly connected to one side of the support plate, and the outer ring of the bearing is fixedly connected to the bearing assembly; and

[0010] The rotating assembly is arranged on the other side of the supporting plate, and the driving end of the rotating assembly passes through the bearing and is transmission-connected to the bearing assembly.

[0011] Furthermore, in the rotary transport mechanism, the bearing is a cross roller bearing.

[0012] Furthermore, in the rotating conveying mechanism, the outer ring of the bearing is provided with one or more first fixing holes, and a threaded member is provided in the first fixing hole, so that the outer ring of the bearing is threadedly connected to the support plate or the rotating component, and the inner ring of the bearing is provided with one or more second fixing holes, and a threaded member is also provided in the second fixing hole, so that the inner ring of the bearing is threadedly connected to the support plate or the rotating component.

[0013] Furthermore, in the rotating conveying mechanism, the number of the first fixing holes is multiple, and they are arranged circumferentially on the outer ring of the bearing with the axis of the bearing as the center, and the number of the second fixing holes is multiple, and they are arranged circumferentially on the inner ring of the bearing with the axis of the bearing as the center.

[0014] Furthermore, the rotating conveying mechanism also includes a connecting plate and a positioning block, the bearing is fixedly connected to the connecting plate, the load-bearing assembly is connected to the connecting plate, the positioning block is arranged at the driving end of the rotating assembly, and the positioning block abuts against the connecting plate, so that the connecting plate is driven to rotate when the positioning block rotates.

[0015] Furthermore, in the rotating transport mechanism, a positioning hole or a positioning groove is provided on the connecting plate, and the positioning block is located in the positioning hole or the positioning groove and abuts against a side wall of the positioning hole or the side wall of the positioning groove.

[0016] Furthermore, in the rotary transport mechanism, the positioning block includes two opposite arc-shaped side surfaces and two opposite straight side surfaces.

[0017] Furthermore, in the rotating transport mechanism, a receiving groove is provided on the connecting plate, and the receiving groove and the positioning hole or the positioning groove are arranged in sequence along a direction perpendicular to the surface of the connecting plate, and the bearing is located in the receiving groove.

[0018] Furthermore, the rotating transport mechanism also includes a reducer, which is arranged on one side of the support plate, the input end of the reducer is transmission-connected to the rotating component, and the output end of the reducer passes through the bearing and is transmission-connected to the bearing component.

[0019] A silicon wafer processing device comprises the above-mentioned rotating transport mechanism.

[0020] Compared with the prior art, the present application provides a rotating transport mechanism and silicon wafer processing equipment, in which the load-bearing component is rotatably connected to the support plate through a bearing. During the rotation process, the support plate supports the load-bearing component through the bearing. The rotating component only needs to apply force to the load-bearing component to make it rotate, and there is no need to support the load-bearing component, thereby effectively avoiding the occurrence of mechanism shaking and the like. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the overall structure of a specific embodiment of the rotating transport mechanism provided in this application.

[0022] Figure 2 for Figure 1 Exploded schematic diagram of the rotary transport mechanism shown.

[0023] Figure 3 for Figure 2 A front view of the rotating transport mechanism shown.

[0024] Figure 4 for Figure 1 Schematic diagram of the structure of the bearing in the rotating conveying mechanism shown.

[0025] Figure 5 for Figure 1 The schematic diagram of the structure of the connecting plate in the rotating transport mechanism is shown.

[0026] Figure 6 for Figure 1 The schematic diagram of the structure of the positioning block in the rotating conveying mechanism is shown.

[0027] Among them, 10, rotating component; 20, bearing component; 30, support plate; 40, bearing; 41, first fixing hole; 42, second fixing hole; 50, connecting plate; 51, positioning hole; 52, accommodating groove; 60, positioning block; 61, third fixing hole; 70, reducer; 80, driving component. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and effect of the present application clearer and more specific, the present application is further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application. Without further description, the elements, structures and features in one embodiment can also be beneficially combined with other embodiments.

[0029] It should be noted that when a metastructure is referred to as being "fixed to" or "set on" another metastructure, it may be directly on the other metastructure or indirectly on the other metastructure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features.

[0030] The orientation or positional relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or positional relationship shown in the drawings and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element structure referred to must have a specific orientation, be constructed and operate in a specific orientation.

[0031] See also Figure 1The rotating transport mechanism provided in the present application includes a rotating component 10, a bearing component 20, a support plate 30 and a bearing 40. The rotating component 10 is arranged on the support plate 30, and the bearing component 20 is rotatably connected to the support plate 30 through the bearing 40. The driving end of the rotating component 10 passes through the bearing 40 and is transmission-connected to the bearing component 20.

[0032] The bearing assembly 20 is used to bear a workpiece, which may be a single workpiece, a plurality of workpieces, or a whole consisting of a workpiece and a corresponding carrier, so as to move together with the bearing assembly 20 .

[0033] During implementation, the workpiece or a carrier carrying the workpiece can be installed on the supporting component 20 from the outside manually or through automated equipment; alternatively, the supporting component 20 itself can adopt methods such as grasping, sucking, and picking up to install the workpiece or a carrier carrying the workpiece on the supporting component 20.

[0034] The rotating assembly 10 is used to drive the carrying assembly 20 and the workpiece carried by it to rotate, so as to adjust the position of the workpiece and achieve the purpose of transporting the workpiece.

[0035] The support plate 30 is used to support the rotating assembly 10 and the bearing assembly 20. The bearing assembly 20 is rotatably mounted on one side of the support plate 30, such as the lower surface of the support plate 30, through the bearing 40; the rotating assembly 10 can be directly fixedly mounted on the other side of the support plate 30, such as the upper surface of the support plate 30.

[0036] During implementation, the outer ring of the bearing 40 can be fixedly connected to one side of the support plate 30, and the inner ring of the bearing 40 can be fixedly connected to the bearing assembly 20. Since the inner ring and the outer ring of the bearing 40 can rotate relative to each other along their axis, the bearing assembly 20 and the support plate 30 form a rotational connection relationship.

[0037] Alternatively, the inner ring of the bearing 40 may be fixedly connected to one side of the support plate 30, and the outer ring of the bearing 40 may be fixedly connected to the bearing assembly 20. Similarly, the bearing assembly 20 and the support plate 30 also form a rotational connection relationship.

[0038] At this time, the rotating assembly 10 only needs to apply a force to the bearing assembly 20 to rotate it, without supporting the bearing assembly 20. For example, when the rotation axis of the rotating assembly 10 is in the vertical direction, the gravity of the bearing assembly 20 is completely borne by the bearing 40 and the support plate 30. The rotating assembly 10 only needs to apply a certain torsional force to the bearing assembly 20 to make it rotate quickly and stably, and avoid the occurrence of mechanism shaking.

[0039] In a specific embodiment, the carrying assembly 20 is used to carry a graphite boat carrying solar silicon wafers. Solar silicon wafers are the core material for manufacturing solar cells, and their main purpose is to convert solar energy into electrical energy; the graphite boat is a graphite mold, which is made of artificial graphite through mechanical processing. Because of its boat-shaped shape, it looks like a boat, so it is called a graphite boat.

[0040] The bearing assembly 20 can grab and fix the graphite boat in a grabbing manner, and then rotate the graphite boat to a suitable angle through the rotating assembly 10. In addition, the support plate 30 is arranged at the driving end of the driving device, and the driving device can drive the graphite boat to move to a desired position, for example, placing the graphite boat in the graphite boat holder, and finally inputting the solar silicon wafer into the process furnace for reaction, so that a layer of anti-reflection film is formed on the surface of the silicon wafer to improve the photoelectric conversion efficiency of the silicon wafer.

[0041] When the driving device drives the graphite boat to lift, a longer cantilever may be provided to ensure sufficient lifting stroke. At this time, during the rotation of the graphite boat, if the rotation is not stable enough, the bearing assembly 20 and the graphite boat may easily shake.

[0042] In the related art, the rotating shaft of the rotating assembly 10 is directly connected to the bearing assembly 20 to drive the bearing assembly 20 to rotate. Alternatively, in order to increase the stability of the connection, the rotating assembly 10 and the bearing assembly 20 are connected and driven by a gear bearing 40, but an exposed gear structure is required, which not only increases the volume of the mechanism, but also has the risk of the lubricating grease being thrown out and contaminating the silicon wafer.

[0043] See also Figure 1-Figure 3 In this embodiment, the support plate 30 and the bearing assembly 20 are connected by the bearing 40, which is more stable than the direct connection between the rotating shaft of the rotating assembly 10 and the bearing assembly 20, and can effectively reduce the probability of the bearing assembly 20 and the graphite boat shaking. At the same time, there is no need to increase the volume of the mechanism, and there is no risk of lubricating grease contaminating the silicon wafer.

[0044] In some embodiments, the type of bearing 40 is selected to be a crossed roller bearing.

[0045] The cross roller bearing has a strong, inseparable inner and outer ring structure, which can easily achieve high rigidity and high precision without being affected by the surrounding structure. In addition, the rolling elements of the cross roller bearing are arranged linearly, so that the bearing 40 has a strong anti-overturning ability, and the cross roller bearing can effectively maintain its stability when subjected to large radial and axial loads.

[0046] In order to achieve fixed connection between the cross roller bearing, the support plate 30 and the rotating assembly 10, various common fixed connection methods in the art such as threaded connection and welding may be used.

[0047] For details, please refer to Figure 4 One or more first fixing holes 41 can be opened on the outer ring of the bearing 40, and screws, bolts and other threaded parts can be installed in the first fixing holes 41, and corresponding first threaded holes can be opened on the support plate 30, so that the outer ring of the bearing 40 is threadedly connected to the support plate 30; at the same time, one or more second fixing holes 42 can be opened on the inner ring of the bearing 40, and screws, bolts and other threaded parts can be installed in the second fixing holes 42, and a second threaded hole can be opened at a corresponding position of the bearing component 20, so that the inner ring of the bearing 40 is threadedly connected to the bearing component 20.

[0048] Furthermore, the number of the first fixing holes 41 can be set to be multiple, and the first fixing holes 41 can be arranged circumferentially on the outer ring of the bearing 40 with the axis of the bearing 40 as the center.

[0049] At this time, a fixed connection point is formed at each first fixing hole 41, and multiple fixed connection points arranged circumferentially can effectively improve the stability of the connection between the outer ring of the bearing 40 and the support plate 30, and prevent the outer ring of the bearing 40 from detaching from the support plate 30.

[0050] Similarly, the number of the second fixing holes 42 can be multiple, and they can be arranged circumferentially on the inner ring of the bearing 40 with the axis of the bearing 40 as the center.

[0051] At this time, a fixed connection point is also formed at each second positioning hole 51. The multiple fixed connection points arranged circumferentially can effectively improve the stability of the connection between the inner ring of the bearing 40 and the load-bearing assembly 20, and prevent the inner ring of the bearing 40 from detaching from the load-bearing assembly 20.

[0052] It can be understood that the connection relationship between the inner ring and the outer ring of the bearing 40 can be adjusted according to actual needs. The first fixing hole 41 can be opened in the inner ring of the bearing 40 so that the inner ring of the bearing 40 is threadedly connected to the support plate 30; and the second fixing hole 42 can be opened in the outer ring of the bearing 40 so that the outer ring of the bearing 40 is threadedly connected to the bearing assembly 20.

[0053] In some embodiments, the rotating conveying mechanism also includes a connecting plate 50 and a positioning block 60. The inner ring or outer ring of the bearing 40 is fixedly connected to the connecting plate 50. The load-bearing assembly 20 is connected to the connecting plate 50. The positioning block 60 is arranged at the driving end of the rotating assembly 10. The positioning block 60 abuts against the connecting plate 50, so that when the positioning block 60 rotates, it drives the connecting plate 50 to rotate.

[0054] The connecting plate 50 and the positioning block 60 may form an abutting fit, so that when the rotating assembly 10 drives the positioning block 60 to rotate, the positioning block 60 pushes the connecting plate 50 and the bearing assembly 20 to rotate together.

[0055] For example, a first protrusion may be provided on the connecting plate 50 and a second protrusion may be provided on the positioning block 60. The first protrusion and the second protrusion are adapted in shape and abut against each other, so that the positioning block 60 pushes the connecting plate 50 to rotate.

[0056] In some embodiments, see Figure 5 A positioning hole 51 is provided on the connecting plate 50 , and the positioning block 60 is located in the positioning hole 51 and abuts against the side wall of the positioning hole 51 .

[0057] The positioning block 60 can be set to a suitable shape, so that after the positioning block 60 is inserted into the positioning hole 51, it can abut against the side wall of the positioning hole 51 in the rotation direction, thereby pushing the connecting plate 50 to rotate.

[0058] For details, please refer to Figure 6 The positioning block 60 includes two opposite arc-shaped side surfaces and two opposite straight side surfaces.

[0059] At this time, the end face of the positioning block 60 is in a racetrack shape or an oval shape, that is, the two opposite sides of the rectangle are connected to the two arcs. In this shape, the two arc sides can correspond to the size of the arc surface of the inner ring of the bearing 40, which is convenient for the positioning block 60 to pass through the hollow part of the inner ring of the bearing 40, and the area of ​​the two straight sides of the positioning block 60 is as large as possible, so that when the two straight sides abut against the side walls of the positioning hole 51, the thrust is generated. The area of ​​action is large, which can more stably push the connecting plate 50 to rotate.

[0060] Alternatively, the positioning block 60 and the positioning hole 51 can be pin-matched, that is, a pin hole is opened on the connecting plate 50, the pin hole is connected to the positioning hole 51, and a positioning pin is set on the positioning block 60, so that the positioning pin is inserted into the pin hole, and the positioning pin and the hole wall of the pin hole abut against each other, so that the positioning block 60 pushes the connecting plate 50 to rotate.

[0061] It is understandable that the positioning hole 51 may also be replaced by a positioning groove, so that the positioning block 60 is inserted into the positioning groove and abuts against the side wall of the positioning groove, so as to push the connecting plate 50 to rotate when the positioning block 60 rotates.

[0062] In some embodiments, a receiving groove 52 is provided on the connecting plate 50 , and the bearing 40 can be disposed in the receiving groove 52 , so as to prevent the bearing 40 from being exposed and make the overall structure of the rotating transport mechanism more compact.

[0063] Furthermore, the receiving groove 52 and the positioning hole 51 (or positioning groove) may be arranged in a direction perpendicular to the surface of the connecting plate 50 to further improve the compactness of the rotating transport mechanism.

[0064] In some embodiments, the rotating transport mechanism may further include a reducer 70, which is disposed on one side of the support plate 30, wherein the input end of the reducer 70 is transmission-connected to the rotating assembly 10, and the output end of the reducer 70 passes through the bearing 40 and is transmission-connected to the bearing assembly 20.

[0065] The reducer 70 can play a role in matching the rotation speed, so as to reduce the number of revolutions of the rotating component 10 to a desired number of revolutions and obtain a larger torque, so as to smoothly drive the bearing component 20 and the workpiece to rotate.

[0066] The positioning block 60 may be provided with a third fixing hole 61 for inserting screws, bolts and other threaded parts, so that the positioning block 60 is threadedly connected to the end of the output shaft of the reducer 70. Furthermore, the number of the third fixing holes 61 may be set to be multiple, and they may be arranged in a circumferential manner on the positioning block 60 to improve the stability of the connection with the output shaft of the reducer 70.

[0067] In some embodiments, the rotating transport mechanism may further include a driving assembly 80 , and the rotating assembly 10 is disposed at a driving end of the driving assembly 80 .

[0068] The driving assembly 80 is used to drive the rotating assembly 10 and the bearing assembly 20 to move, so as to move the workpiece on the bearing assembly 20 to a desired position. Specifically, the driving assembly 80 can be a lifting driving assembly 80, which includes a lifting motor, a gear and a rack. The support plate 30 is a vertical long plate, the rack is arranged on the vertical surface of the support plate 30, the rotating assembly 10 and the bearing assembly 20 are arranged at the bottom end of the support plate 30, and the lifting motor drives the gear to rotate. Through the cooperation of the gear and the rack, the support plate 30 drives the rotating assembly 10 and the bearing assembly 20 to be lifted and lowered.

[0069] It is worth mentioning that the driving component 80 can also be driven by other means such as a cylinder, a linear module, a driving platform, etc., and this application does not limit this.

[0070] In some embodiments, the supporting component 20 can carry the workpiece by clamping, and includes a base plate, a clamping drive and two jaws. The base plate is connected to the connecting plate 50, and the two jaws are slidably arranged on the base plate. The clamping drive is used to drive the two jaws to slide towards each other so that the two jaws clamp the two sides of the workpiece, and then drive the workpiece to rotate through the rotating component 10, or drive the workpiece to move through the driving component 80.

[0071] Of course, the carrying assembly 20 may also use other methods to carry the workpiece, such as using a suction cup to absorb the workpiece, using a fork to pick up the workpiece, etc., and this application does not limit this.

[0072] The present application also provides a silicon wafer processing device, comprising the above-mentioned rotating transport mechanism.

[0073] The silicon wafer processing equipment is used to process solar silicon wafers. During the processing, the carrying component 20 can grasp and fix the graphite boat carrying the solar silicon wafer by two clamping claws in a centering grasping manner, and then adjust the position of the graphite boat through the driving component 80, and rotate the graphite boat to a suitable angle through the rotating component 10, so that the graphite boat is placed in the graphite boat holder, and finally the solar silicon wafer is input into the process furnace for reaction, so that a layer of anti-reflection film is generated on the surface of the solar silicon wafer to improve the photoelectric conversion efficiency of the silicon wafer.

[0074] The support plate 30 and the supporting assembly 20 are connected by the bearing 40. When the rotating assembly 10 drives the graphite boat to rotate, the rotating assembly 10 only needs to apply force to the supporting assembly 20 to rotate it, without supporting the supporting assembly 20. Therefore, it is more stable than the rotating assembly 10 directly driving the supporting assembly 20 to rotate, avoiding the situation where the mechanism shakes during the rotation process; and it will not increase the volume of the rotating transport mechanism, making the overall structure of the rotating transport mechanism more compact.

[0075] It is understandable that those skilled in the art can make equivalent substitutions or changes based on the technical solution and application concept of the present application, and all these changes or substitutions should fall within the protection scope of the claims attached to the present application.

Claims

1. A rotary transport mechanism, characterized in that: include: Support plate; A carrying component, used to carry a workpiece or a carrier carrying a workpiece; A bearing, wherein the outer ring of the bearing is fixedly connected to one side of the support plate, and the inner ring of the bearing is fixedly connected to the bearing assembly, or the inner ring of the bearing is fixedly connected to one side of the support plate, and the outer ring of the bearing is fixedly connected to the bearing assembly; and The rotating assembly is arranged on the other side of the supporting plate, and the driving end of the rotating assembly passes through the bearing and is transmission-connected to the bearing assembly.

2. The rotary transport mechanism according to claim 1, characterized in that: The bearing is a crossed roller bearing.

3. The rotary transport mechanism according to claim 2, characterized in that: The outer ring of the bearing is provided with one or more first fixing holes, and a threaded member is provided in the first fixing hole, so that the outer ring of the bearing is threadedly connected to the support plate or the rotating component. The inner ring of the bearing is provided with one or more second fixing holes, and a threaded member is also provided in the second fixing hole, so that the inner ring of the bearing is threadedly connected to the support plate or the rotating component.

4. The rotary transport mechanism according to claim 3, characterized in that: The number of the first fixing holes is multiple, and they are arranged circumferentially on the outer ring of the bearing with the axis of the bearing as the center. The number of the second fixing holes is multiple, and they are arranged circumferentially on the inner ring of the bearing with the axis of the bearing as the center.

5. The rotary transport mechanism according to any one of claims 1 to 4, characterized in that: It also includes a connecting plate and a positioning block, the bearing is fixedly connected to the connecting plate, the load-bearing assembly is connected to the connecting plate, the positioning block is arranged at the driving end of the rotating assembly, and the positioning block abuts against the connecting plate, so that the connecting plate is driven to rotate when the positioning block rotates.

6. The rotary transport mechanism according to claim 5, characterized in that: The connecting plate is provided with a positioning hole or a positioning groove, the positioning block is located in the positioning hole or the positioning groove, and abuts against a side wall of the positioning hole or the side wall of the positioning groove.

7. The rotary transport mechanism according to claim 5, characterized in that: The positioning block comprises two opposite arc-shaped side surfaces and two opposite straight side surfaces.

8. The rotary transport mechanism according to claim 6, characterized in that: The connecting plate is provided with a receiving groove, and the receiving groove and the positioning hole or the positioning groove are sequentially arranged along a direction perpendicular to the surface of the connecting plate, and the bearing is located in the receiving groove.

9. The rotary transport mechanism according to claim 1, characterized in that: It also includes a reducer, which is arranged on one side of the support plate, the input end of the reducer is transmission-connected to the rotating component, and the output end of the reducer passes through the bearing and is transmission-connected to the bearing component.

10. A silicon wafer processing device, characterized in that: It comprises a rotating transport mechanism as described in any one of claims 1 to 9.

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