Transmission device for wet processing equipment

Abstract

The utility model belongs to the technical field of silicon wafer conveying, and particularly relates to a transmission device for wet processing equipment, which comprises a cleaning tank, a pair of cleaning support plates are arranged in the cleaning tank, a plurality of annular first support notches are arranged at the tops of the cleaning support plates, and a cleaning cover plate is arranged at the tops of the cleaning support plates. A plurality of cleaning supporting blocks are arranged at the bottom of the cleaning cover plate, and arc-shaped second supporting notches are formed in the bottoms of the cleaning supporting blocks; transmission shafts are arranged at the two ends of the transmission roller, the diameter of the transmission roller is larger than that of the transmission shafts, the transmission shafts are clamped in the first supporting notches, and the second supporting notches press the tops of the transmission shafts; the transmission shafts at the two ends of the transmission roller can be borne through the first supporting notches formed in the cleaning supporting plate, rotating arrangement of the transmission roller is achieved, the transmission shafts can be arranged from the upper portion in a covering mode in cooperation with the second supporting notches formed in the cleaning cover plate, limiting of the transmission shafts is achieved, and the transmission shafts are prevented from sliding out of the first supporting notches.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer conveying, and in particular relates to a transmission device for wet processing equipment. Background Art

[0002] Wet cleaning is a cleaning method that requires the introduction of a solution, which usually includes steam cleaning, solution immersion cleaning, and rotary spray cleaning;

[0003] In the existing wet cleaning equipment, a plurality of transmission rollers are usually arranged in the cleaning tank. The transmission rollers are arranged above the medium and can contact the medium. Then the silicon wafer is placed on the top of the transmission rollers. The silicon wafer is transported by the rotation of the transmission rollers while the medium is coated on the surface of the silicon wafer. However, when installing the existing transmission rollers, multiple support seats are usually used. The bearings are set on the transmission rollers and then installed in the support seats. This installation method is time-consuming.

[0004] Therefore, it is necessary to provide a transmission device for wet processing equipment that can clamp all transmission rollers in a cleaning tank at one time and then limit them through an integral cover plate to achieve rapid installation of all transmission rollers. Utility Model Content

[0005] The utility model aims to provide a transmission device for wet processing equipment which can clamp all transmission rollers in a cleaning tank at one time and then limit the position through an integral cover plate to realize rapid installation of all transmission rollers.

[0006] In order to solve the above technical problems, the utility model provides a transmission device for wet processing equipment, including: a cleaning tank, a pair of cleaning support plates are arranged in the cleaning tank, a plurality of annular first support notches are opened on the top of the cleaning support plates, a cleaning cover plate is arranged on the top of the cleaning support plates, a plurality of cleaning support blocks are arranged on the bottom of the cleaning cover plate, and an arc-shaped second support notch is opened on the bottom of the cleaning support block; a transmission roller, a transmission shaft is arranged at both ends of the transmission roller, the diameter of the transmission roller is larger than the diameter of the transmission shaft, the transmission shaft is clamped in the first support notch, and the second support notch is pressed on the top of the transmission shaft.

[0007] Preferably, a third support gap is opened in the first support gap, the third support gap is coaxially arranged with the first support gap, and the diameter of the third support gap is larger than the diameter of the first support gap; a bearing is arranged on the transmission shaft, and the end face and side wall of the outer ring of the bearing are respectively fitted in the third support gap.

[0008] Preferably, the thickness of the cleaning support block is equal to the width of the third support gap.

[0009] Preferably, a plurality of cleaning supports are arranged on the outer side of the cleaning support plate, a driving roller is rotatably arranged on the cleaning support, a plurality of driving gears are sleeved on the driving roller; a transmission gear is sleeved on the transmission roller, and the transmission gears are respectively meshed with the driving gears.

[0010] Preferably, the cross section of the driving roller is a regular polygon, and the inner hole of the driving gear is adapted to the cross section of the driving roller.

[0011] Preferably, the cross section of the driving roller is a regular hexagon.

[0012] Preferably, the driving gear and the transmission gear are bevel gears respectively.

[0013] Preferably, the diameter of the driving gear is greater than the diameter of the transmission gear.

[0014] Preferably, a plurality of attachment grooves are arranged on the side wall of the driving roller along the axial direction, and two side walls of the attachment grooves converge inwardly.

[0015] The beneficial effects of the utility model are:

[0016] 1. Set the medium in the cleaning tank, and rotate the transmission roller in the cleaning tank so that the transmission roller contacts the medium, so that the silicon wafer can be transported and covered with the medium to complete the cleaning;

[0017] 2. By arranging a first supporting notch on the cleaning support plate, the transmission shaft at both ends of the transmission roller can be supported to realize the rotation setting of the transmission roller, and the second supporting notch on the cleaning cover plate can be used to cover the transmission shaft from above to limit the transmission shaft and prevent the transmission shaft from slipping out of the first supporting notch.

[0018] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by implementing the present invention.

[0019] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1is a side view of a wet processing apparatus;

[0022] Figure 2 It is a stereogram of a preferred embodiment of the transmission device of the utility model;

[0023] Figure 3 It is a top view of a preferred embodiment of the transmission device of the utility model;

[0024] Figure 4 It is a cross-sectional view of the transmission roller of the utility model.

[0025] In the figure:

[0026] 000, wet process equipment; 001, feed inlet;

[0027] 100, cleaning tank; 101, cleaning support plate; 1011, first support gap; 1012, third support gap; 102, cleaning cover plate; 1021, cleaning support block; 1022, second support gap; 103, cleaning support; 104, driving roller; 1041, driving gear;

[0028] 200, transmission roller; 201, transmission shaft; 202, transmission gear; 203, attachment groove. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] Embodiment 1, as Figure 1-4As shown, a transmission device for wet processing equipment of this embodiment includes: a cleaning tank 100, a pair of cleaning support plates 101 are arranged in the cleaning tank 100, a plurality of annular first support notches 1011 are opened on the top of the cleaning support plate 101, a cleaning cover plate 102 is arranged on the top of the cleaning support plate 101, a plurality of cleaning support blocks 1021 are arranged on the bottom of the cleaning cover plate 102, and an arc-shaped second support notch 1022 is opened on the bottom of the cleaning support block 1021; a transmission roller 200, a transmission shaft 201 is arranged at both ends of the transmission roller 200, the diameter of the transmission roller 200 is larger than the diameter of the transmission shaft 201, the transmission shaft 201 is clamped in the first support notch, and the second support notch 1022 is pressed At the top of the transmission shaft 201; in short, a plurality of feed ports 001 are opened at one end of the wet equipment 000, the entrance of the cleaning tank 100 is opposite to the feed port 001, a medium is set in the cleaning tank 100, and a transmission roller 200 is rotatably set in the cleaning tank 100, so that the transmission roller 200 contacts the medium, and the silicon wafer can be transported and coated with the medium to complete the cleaning; further, by setting a first support notch 1011 on the cleaning support plate 101, the transmission shaft 201 at both ends of the transmission roller 200 can be supported to realize the rotation setting of the transmission roller 200, and in conjunction with the second support notch 1022 on the cleaning cover plate 102, the transmission shaft 201 can be covered from above to realize the limitation of the transmission shaft 201 and prevent the transmission shaft 201 from slipping out of the first support notch 1011.

[0031] A third support gap 1012 is provided in the first support gap 1011, and the third support gap 1012 is coaxially arranged with the first support gap 1011, and the diameter of the third support gap 1012 is larger than the diameter of the first support gap 1011; a bearing is provided on the transmission shaft 201, and the end face and side wall of the outer ring of the bearing are respectively fitted with the third support gap 1012; in short, the third support gap 1012 is provided in the first support gap 1011, which can realize the clamping of the bearing and act as a bearing seat, so that the rotation of the transmission roller 200 is stable and efficient.

[0032] The thickness of the cleaning support block 1021 is equal to the width of the third support gap 1012; in short, the cleaning support block 1021 is completely stuck in the third support gap 1012, which can better limit the bearing.

[0033] A plurality of cleaning supports 103 are arranged on the outer side of the cleaning support plate 101, a driving roller 104 is rotatably arranged on the cleaning support 103, and a plurality of driving gears 1041 are sleeved on the driving roller 104; a transmission gear 202 is sleeved on the transmission roller 200, and the transmission gear 202 is respectively meshed with the driving gear 1041; in short, by driving the driving roller 104 with a motor, the synchronous rotation and stop of all the transmission rollers 200 can be achieved.

[0034] The cross-section of the driving roller is a regular polygon, and the inner hole of the driving gear 1041 is adapted to the cross-section of the driving roller; in short, by designing the cross-section of the driving roller to be a regular polygon, the torque can be transmitted, avoiding the use of keyways and key blocks, and the driving gear 1041 can be quickly installed; further, a retaining spring is mounted on the driving roller to limit the axial movement of the driving gear 1041.

[0035] The cross section of the driving roller is a regular hexagon; in short, by designing the cross section of the driving roller to be a regular hexagon, the stability of torque transmission can be guaranteed.

[0036] The driving gear 1041 and the transmission gear 202 are bevel gears respectively; in short, there are many forms of vertical rotation of gears, and two bevel gears are selected here to facilitate the installation and engagement of the gears.

[0037] The diameter of the driving gear 1041 is greater than the diameter of the transmission gear 202 ; in short, this design can achieve speed reduction and torque increase, effectively ensuring the rotation stability of the transmission roller 200 .

[0038] The side wall of the driving roller 200 is axially provided with a plurality of attachment grooves 203 , and the two side walls of the attachment grooves 203 converge inwardly; in short, the two side walls of the attachment grooves 203 converge inwardly, which can better absorb the medium and coat the medium to the surface of the silicon wafer.

[0039] All devices (parts without specific structure) selected in this application are universal standard parts or parts known to those skilled in the art, and their structures and principles can be known by those skilled in the art through technical manuals or conventional experimental methods. In addition, the software programs involved in this application are all prior art, and this application does not involve any improvement to the software programs.

[0040] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0042] In the several embodiments provided in the present application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of devices or units can be electrical, mechanical or other forms.

[0043] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0044] In addition, each functional unit in each embodiment of the present utility model may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0045] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A transmission device for wet processing equipment, characterized in that: include: A cleaning tank, wherein a pair of cleaning support plates are arranged in the cleaning tank, a plurality of annular first support notches are opened on the top of the cleaning support plates, a cleaning cover plate is arranged on the top of the cleaning support plates, a plurality of cleaning support blocks are arranged on the bottom of the cleaning cover plate, and an arc-shaped second support notch is opened on the bottom of the cleaning support block; A transmission roller, with transmission shafts disposed at both ends of the transmission roller, the diameter of the transmission roller being larger than the diameter of the transmission shaft, the transmission shaft being clamped in the first supporting notch, and the second supporting notch being pressed on the top of the transmission shaft.

2. The transmission device for wet processing equipment according to claim 1, characterized in that: A third support gap is formed in the first support gap, the third support gap is coaxially arranged with the first support gap, and the diameter of the third support gap is greater than the diameter of the first support gap; A bearing is arranged on the transmission shaft, and the end face and the side wall of the outer ring of the bearing are respectively fitted in the third supporting notch.

3. The transmission device for wet processing equipment according to claim 2, characterized in that: The thickness of the cleaning support block is equal to the width of the third support gap.

4. The transmission device for wet processing equipment according to claim 3, characterized in that: A plurality of cleaning supports are arranged on the outer side of the cleaning support plate, a driving roller is rotatably arranged on the cleaning support, and a plurality of driving gears are sleeved on the driving roller; The transmission roller is sleeved with a transmission gear, and the transmission gears are respectively meshed with the driving gears.

5. The transmission device for wet processing equipment according to claim 4, characterized in that: The cross section of the driving roller is a regular polygon, and the inner hole of the driving gear is adapted to the cross section of the driving roller.

6. The transmission device for wet processing equipment according to claim 5, characterized in that: The cross section of the driving roller is a regular hexagon.

7. The transmission device for wet processing equipment according to claim 6, characterized in that: The driving gear and the transmission gear are bevel gears respectively.

8. The transmission device for wet processing equipment according to claim 7, characterized in that: The diameter of the driving gear is greater than the diameter of the transmission gear.

9. The transmission device for wet processing equipment according to claim 1, characterized in that: The side wall of the driving roller is provided with a plurality of attachment grooves along the axial direction, and two side walls of the attachment grooves converge inwardly.

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