Automatic optical detection clamp and equipment thereof
By designing an automatic optical detection fixture and adjusting the four corner heights of the mask plate using the height adjustment parts, the problem of the optical system being unable to focus automatically due to the large gap in the four corner heights of the mask plate is solved, and the effect of reducing false defects is achieved.
Patent Information
- Application Number
- CN202421486406.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-26
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2034-06-26
AI Technical Summary
In automatic optical detection of existing mask plates, due to the large gap in the horizontal height of the four corners, the optical system cannot be automatically focused, resulting in a large number of false defects.
An automatic optical detection fixture is designed, including a first clamp plate and a second clamp plate. The second clamp plate is provided with a clamp groove and a height adjustment thread hole. The height of the mask plate in the clamp groove is adjusted through a height adjustment member to ensure that the horizontal height of the four corners is consistent.
By adjusting the height of the four angles of the mask plate to be consistent with the height of the highest angle, the problem that the optical system cannot focus automatically is solved, and the occurrence of false defects is significantly reduced.
Smart Images
Figure CN222755265U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of fixtures, and in particular to an automatic optical inspection fixture and equipment thereof. Background Art
[0002] After the existing mask is manufactured, it is necessary to inspect the manufactured mask. Before inspecting the mask, the mask needs to be placed in a fixture attached to the AOI (automatic optical inspection) equipment. Figure 1 .
[0003] However, the mask is usually a rectangular plate. Since the fixture usually has processing errors or stress deformation, it is easy to cause the horizontal height difference of the four corners of the mask placed in the fixture to be too large, which affects the autofocus of the optical system and produces a large number of false defects.
[0004] Therefore, the prior art still needs to be improved. Utility Model Content
[0005] The purpose of the present application is to provide an automatic optical inspection fixture and equipment thereof to solve the existing problem that a large number of false defects are generated due to the large difference in the horizontal heights of the four corners of the mask, which makes the optical system unable to automatically focus.
[0006] To achieve the above-mentioned purpose, the first aspect of the embodiment of the present application provides an automatic optical inspection fixture, comprising:
[0007] First splint;
[0008] A second clamping plate, which is arranged on the first clamping plate, the second clamping plate is provided with a clamping groove, the clamping groove is used to clamp the mask, and the second clamping plate is provided with a plurality of height adjustment threaded holes;
[0009] A plurality of height adjustment members are respectively arranged in the corresponding height adjustment threaded holes, one end of the height adjustment member is threaded through the height adjustment threaded hole and is used to press against the upper surface of the first clamping plate to adjust the height of the mask in the clamping groove.
[0010] According to the automatic optical inspection fixture described above, the height adjustment member is configured as a top screw.
[0011] According to the automatic optical inspection fixture described above, an adjustment head is provided at one end of the height adjustment member away from the first clamping plate.
[0012] According to the automatic optical inspection fixture described above, the first clamping plate is provided with a plurality of fixed thread grooves, the second clamping plate is provided with countersunk holes corresponding to the fixed thread grooves, and the automatic optical inspection fixture further comprises:
[0013] One end of a plurality of threaded fasteners passes through the corresponding countersunk holes and is threadedly arranged in the fixed thread groove.
[0014] According to the automatic optical inspection fixture described above, the clamping groove is arranged through the second clamping plate to form a clamping opening, and a support plate is arranged on the second clamping plate at the corner of the clamping opening, and the support plate is an L-shaped support plate.
[0015] According to the automatic optical inspection fixture described above, the length of the clamping opening is greater than the length of the support plate.
[0016] According to the automatic optical inspection fixture described above, a communication port corresponding to the clamping port is formed through the first clamping plate, and the clamping port and the communication port are combined to form a through port and are connected to each other.
[0017] According to the automatic optical inspection fixture described above, a first placement port, a second placement port, a third placement port and a fourth placement port are respectively opened on the four peripheral sides of the through port, the first placement port and the third placement port are symmetrically arranged and connected to the through port, and the second placement port and the fourth placement port are symmetrically arranged and connected to the through port.
[0018] According to the automatic optical inspection fixture described above, the corners of the first clamping plate and the second clamping plate are both configured to be rounded.
[0019] A second aspect of an embodiment of the present application provides an automatic optical inspection device, comprising a platform and the automatic optical inspection fixture as described above, wherein the automatic optical inspection fixture is disposed on the platform.
[0020] The beneficial effects of an automatic optical inspection fixture and its equipment provided by the present application are at least:
[0021] The present application adjusts the height adjustment member corresponding to the lower corner of the mask plate according to the horizontal height difference of the four corners of the mask plate placed in the clamping groove, taking the highest horizontal height of the mask plate as a criterion. The present application rotates the height adjustment member to cause deformation caused by the contact between the height adjustment member and the upper surface of the first clamping plate, so as to increase the height of the second clamping plate at the corner, and then adjust the height of the corner corresponding to the mask plate in the clamping groove on the second clamping plate. It can be foreseen that the present application can make the horizontal heights of the four corners of the mask plate equivalent by adjusting the heights of the remaining corners to the same as the height of the original highest corner of the mask plate, thereby greatly improving the automatic focusing of the optical system. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0023] Figure 1 A schematic diagram of the structure of an existing fixture.
[0024] Figure 2 A schematic structural diagram of an automatic optical inspection fixture is provided for an embodiment of the present application.
[0025] Figure 3 A schematic structural diagram of a first clamping plate in an automatic optical inspection fixture is provided for an embodiment of the present application.
[0026] Among them, the reference numerals in the figure are:
[0027] 1. First clamping plate; 11. Fixed thread groove; 12. Connecting port; 2. Second clamping plate; 21. Through port; 22. Height adjustment thread hole; 23. Countersunk hole; 3. Support plate; 41. First placement port; 42. Second placement port; 43. Third placement port; 44. Fourth placement port; 5. Placement port. DETAILED DESCRIPTION
[0028] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.
[0029] It should be noted that when a component is referred to as being "fixed on" or "disposed on" another component, it may be directly or indirectly located on the other component. When a component is referred to as being "connected to" another component, it may be directly or indirectly connected to the other component. The directions or positions indicated by the terms "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. are based on the directions or positions shown in the accompanying drawings and are only for the convenience of description and cannot be understood as limitations on the present technical solution. The terms "first" and "second" are only used for the convenience of description and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. "Multiple" means two or more, unless otherwise clearly and specifically defined.
[0030] After the existing mask is manufactured, it is necessary to inspect the manufactured mask. Before inspecting the mask, the mask needs to be placed in a fixture attached to the AOI (automatic optical inspection) equipment. Figure 1 .
[0031] However, the mask is usually a rectangular plate. Since the fixture usually has processing errors or stress deformation, it is easy to cause the horizontal height difference of the four corners of the mask placed in the fixture to be too large, which affects the autofocus of the optical system and produces a large number of false defects.
[0032] For this purpose, see Figure 2 and Figure 3 In a first aspect, the present embodiment provides an automatic optical inspection fixture, comprising a first clamping plate 1, a second clamping plate 2 and a plurality of height adjustment members (not shown in the figure), wherein the second clamping plate 2 is arranged on the first clamping plate 1, and a clamping groove (not shown in the figure) is provided on the second clamping plate 2, and the clamping groove is used to clamp a mask plate (not shown in the figure), and a plurality of height adjustment threaded holes 22 are provided on the second clamping plate 2, and the height adjustment members can be top screws or screws, and a plurality of the height adjustment members are respectively arranged in the corresponding height adjustment threaded holes 22, and one end of the height adjustment member is threaded through the height adjustment threaded hole 22 and is used to be tightly pressed against the upper surface of the first clamping plate 1.
[0033] Among them, taking the first clamping plate 1 and the second clamping plate 2 as rectangular plates as an example, the number of the height adjustment threaded holes 22 can be eight, and accordingly, the number of the height adjustment members is eight, and the eight height adjustment threaded holes 22 are respectively opened on the front side, the rear side, the left side and the right side of the second clamping plate 2. It can be understood that the mask plate is also a rectangular plate, and its size is slightly smaller than the clamping groove.
[0034] This embodiment adjusts the height adjustment member corresponding to the lower corner of the mask plate according to the horizontal height difference of the four corners of the mask plate placed in the clamping groove, taking the highest horizontal height of the mask plate as a criterion. This embodiment rotates the height adjustment member to cause deformation caused by the contact between the height adjustment member and the upper surface of the first clamping plate 1, so as to increase the height of the second clamping plate 2 at the corner, and then adjust the height of the corner corresponding to the mask plate in the clamping groove on the second clamping plate 2. It can be foreseen that this embodiment can make the horizontal heights of the four corners of the mask plate equivalent by adjusting the heights of the remaining corners to the same as the height of the original highest corner of the mask plate, thereby greatly improving the automatic focusing of the optical system.
[0035] Optionally, in this embodiment, the height adjustment member is a top screw, and an adjustment head (not shown in the figure) is provided at the end of the height adjustment member facing away from the first splint 1. By providing the adjustment head, this embodiment increases the contact area of the hand-held height adjustment member to facilitate adjustment of the height adjustment member.
[0036] Optional, see Figure 2 and Figure 3 In this embodiment, a plurality of fixed thread grooves 11 are formed on the first clamping plate 1, and a countersunk hole 23 corresponding to the fixed thread groove 11 is formed on the second clamping plate 2. The automatic optical inspection fixture also includes a plurality of threaded fasteners (not shown in the figure), and one end of the plurality of threaded fasteners passes through the corresponding countersunk holes 23 respectively and is threadedly arranged in the fixed thread groove 11, wherein the threaded fasteners can be bolts.
[0037] There is no thread in the countersunk hole 23 of the present embodiment. The present embodiment arranges a threaded fastener, which passes through the countersunk hole 23 without threads and is threadedly connected to the fixed thread groove 11, thereby connecting the first clamping plate 1 and the second clamping plate 2 together. In addition, the present embodiment opens a fixed thread groove 11. Compared with opening a through hole or opening, the fixed thread groove 11 of the present embodiment does not penetrate. It can be foreseen that since the fixed thread groove 11 is not set to penetrate, the threaded fastener cannot pass through the first clamping plate 1, thereby preventing the threaded fastener from passing through the first clamping plate 1 and scratching the automatic optical inspection equipment on the outside of the automatic optical inspection fixture.
[0038] Optional, see Figure 2 In this embodiment, the clamping groove is arranged through the second clamping plate 2 to form a clamping opening, and a support plate 3 is arranged on the second clamping plate 2 at the corner of the clamping opening, and the support plate 3 is an L-shaped support plate, wherein the length of the clamping opening is greater than the length of the support plate 3.
[0039] Compared with placing the entire mask directly in the clamping groove, this embodiment provides a clamping opening and supports 3 at the corners of the clamping opening, so that part of the edge and middle part of the mask do not need to contact the second clamping plate 2, thereby avoiding scratches on part of the edge and middle part of the mask and causing the mask to be scrapped.
[0040] For further information, see Figure 2 and Figure 3 In this embodiment, a communication opening 12 corresponding to the clamping opening is formed through the first clamping plate 1, and the clamping opening and the communication opening 12 are combined to form a through opening 21, and are connected to each other.
[0041] It is worth noting that, see Figure 1The existing fixture usually has placement openings 5 on both sides of its clamping groove. When the mask is placed in the clamping groove, an additional jig is needed to clamp the mask and place it in the clamping groove. The placement openings 5 on both sides just accommodate the jig used to clamp the mask into the clamping groove. However, since both ends of the mask are attached with dust-proof films of a specific size, the jig cannot be used to clamp the two ends of the mask with the dust-proof film. When the mask needs to be rotated 90 degrees and placed in the clamping groove, when the jig is used to clamp the mask into the clamping groove, the placement openings 5 on both sides originally opened can no longer correspond to the jig. In other words, the existing jig cannot be used to rotate the mask 90 degrees and place it in the clamping groove.
[0042] To this end, optionally, referring to Figure 2, in one embodiment, the four peripheral sides of the through-opening 21 are respectively penetrated with a first placement opening 41, a second placement opening 42, a third placement opening 43 and a fourth placement opening 44, the first placement opening 41 and the third placement opening 43 are symmetrically arranged, the second placement opening 42 and the fourth placement opening 44 are symmetrically arranged, and the first placement opening 41, the second placement opening 42, the third placement opening 43 and the fourth placement opening 44 are respectively connected to the through-opening 21.
[0043] It can be understood that when the first placement port 41 and the third placement port 43 are respectively the placement ports 5 on the left and right sides of the automatic optical inspection fixture, this embodiment, on this basis, further provides a second placement port 42 and a fourth placement port 44, wherein the second placement port 42 and the fourth placement port 44 are respectively the placement ports 5 at the front end and the rear end of the automatic optical testing fixture, and through the additionally opened second placement port 42 and fourth placement port 44, the mask can be rotated 90 degrees using a jig and then placed in the clamping groove. At this time, the placement ports 5 at both ends (the second placement port 42 and the fourth placement port 44) just accommodate the jig for clamping the mask into the clamping groove. That is to say, this embodiment solves the problem that the mask with a dust-proof film of a specific size cannot be taken out after being rotated 90 degrees by adding the placement ports 5.
[0044] Optional, see Figure 2 In this embodiment, the corners of the first clamping plate 1 and the second clamping plate 2 are both set to be rounded. Through the above setting, this embodiment can prevent the corners of the automatic optical inspection fixture from injuring the operator.
[0045] A second aspect of the present embodiment provides an automatic optical inspection device, comprising a platform and the automatic optical inspection fixture as described above, wherein the automatic optical inspection fixture is disposed on the platform.
[0046] In summary, the present application provides an automatic optical inspection fixture and equipment thereof, comprising a first clamping plate 1, a second clamping plate 2 and a plurality of height adjustment members, wherein the second clamping plate 2 is arranged on the first clamping plate 1, a clamping groove is provided on the second clamping plate 2, and the clamping groove is used to clamp the mask plate, and a plurality of height adjustment threaded holes 22 are provided on the second clamping plate 2, and the height adjustment member can be a top screw or a screw, and a plurality of the height adjustment members are respectively arranged in the corresponding height adjustment threaded holes 22, and one end of the height adjustment member is threaded through the height adjustment threaded hole 22 and is used to be tightly pressed against the upper surface of the first clamping plate 1. The present application is based on According to the horizontal height difference of the four corners of the mask placed in the clamping groove, the height adjustment member corresponding to the lower corner of the mask is adjusted with the highest horizontal height of the mask as the criterion. The present application rotates the height adjustment member to cause deformation caused by contact between the height adjustment member and the upper surface of the first clamping plate 1, so as to increase the height of the second clamping plate 2 at the corner, and then adjust the height of the corner corresponding to the mask in the clamping groove on the second clamping plate 2. It can be foreseen that the present application can make the horizontal heights of the four corners of the mask equal by adjusting the heights of the remaining corners to the same as the height of the original highest corner of the mask, thereby greatly improving the automatic focusing of the optical system.
[0047] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims
1. An automatic optical inspection fixture, characterized in that: include: First splint; A second clamping plate, which is arranged on the first clamping plate, the second clamping plate is provided with a clamping groove, the clamping groove is used to clamp the mask, and the second clamping plate is provided with a plurality of height adjustment threaded holes; A plurality of height adjustment members are respectively arranged in the corresponding height adjustment threaded holes, one end of the height adjustment member is threaded through the height adjustment threaded hole and is used to press against the upper surface of the first clamping plate to adjust the height of the mask in the clamping groove.
2. The automatic optical inspection fixture according to claim 1, characterized in that: The height adjustment member is configured as a top screw.
3. The automatic optical inspection fixture according to claim 2, characterized in that: An adjusting head is disposed at one end of the height adjusting member away from the first clamping plate.
4. The automatic optical inspection fixture according to claim 1, characterized in that: The first clamping plate is provided with a plurality of fixed thread grooves, the second clamping plate is provided with countersunk holes corresponding to the fixed thread grooves, and the automatic optical inspection fixture further comprises: One end of a plurality of threaded fasteners passes through the corresponding countersunk holes and is threadedly arranged in the fixed thread groove.
5. The automatic optical inspection fixture according to claim 1, characterized in that: The clamping groove is arranged through the second clamping plate to form a clamping opening, and a support plate is arranged on the second clamping plate at the corner of the clamping opening, and the support plate is an L-shaped support plate.
6. The automatic optical inspection fixture according to claim 5, characterized in that: The length of the clamping opening is greater than the length of the support plate.
7. The automatic optical inspection fixture according to claim 5, characterized in that: The first clamping plate is provided with a communication port corresponding to the clamping port, and the clamping port and the communication port are combined to form a through port, and are connected to each other.
8. The automatic optical inspection fixture according to claim 7, characterized in that: The four circumferential sides of the through opening are respectively penetrated with a first placement opening, a second placement opening, a third placement opening and a fourth placement opening, the first placement opening and the third placement opening are symmetrically arranged and communicated with the through opening, and the second placement opening and the fourth placement opening are symmetrically arranged and communicated with the through opening.
9. The automatic optical inspection fixture according to claim 1, characterized in that: The corners of the first clamping plate and the second clamping plate are both configured to be rounded.
10. An automatic optical inspection device, characterized in that: It comprises a platform and the automatic optical inspection fixture as described in any one of claims 1 to 9, wherein the automatic optical inspection fixture is arranged on the platform.