Silicon wafer loading and unloading device
By designing a silicon wafer loading and unloading device including a positioning table, a hoisting seat, a hoisting bar, a lower support seat and a silicon wafer storage rack, the problem that the existing devices cannot successfully load and unload two and a half pieces is solved, and the safe and efficient loading and unloading of silicon wafers are achieved.
Patent Information
- Application Number
- CN202421237344.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-03
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2034-06-03
AI Technical Summary
The existing silicon wafer loading and unloading devices cannot successfully load and unload the two sets of half pieces, resulting in the inability to effectively transfer and process the silicon wafers.
A silicon wafer loading and unloading device is designed, including a positioning table, a hoisting seat, a hoisting strip, a lower support seat and a silicon wafer storage rack. There is a support groove on the lifting bar, a positioning groove on the lower support base, and a side support rod and support groove are provided in the silicon wafer storage frame to ensure that the silicon wafer will not be damaged during loading and unloading.
This device can easily load and unload two and a half pieces, avoid wear of the silicon wafer, ensure the quality of the silicon wafer, and improve the production efficiency of the silicon wafer.
Smart Images
Figure CN222757421U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon slice transfer, in particular to a silicon slice loading and unloading device. Background Art
[0002] During the production process, silicon wafers need to be transferred, and in order to achieve continuous production of silicon wafers, a device similar to a transfer station is required. The first batch of silicon wafers are first placed in the device through the previous station, and then the second batch of silicon wafers are processed at the previous station. At the same time, the next station takes out the silicon wafers in the device for processing. When the device is empty, the second batch of silicon wafers at the previous station are ready to be put in. The existing common silicon wafers are in the form of whole wafers, and the silicon wafers are lifted and lowered by lifting bars. However, some customers have different requirements for silicon wafers, which are in the form of two half wafers. After the half wafers at the previous station overlap, two groups need to be put in at the same time. The existing device cannot smoothly load and unload the two groups of half wafers. Summary of the invention
[0003] In order to solve the above technical problems, the utility model provides a silicon wafer loading and unloading device, which can conveniently realize the loading and unloading of two groups of half wafers without damaging the silicon wafers.
[0004] The technical solution is as follows: a silicon wafer loading and unloading device, which includes a positioning table, a lifting seat is provided on the positioning table, and two rows of lifting bars with support grooves on the top are provided on the lifting seat. It is characterized in that there are two lifting seats and lower support seats are provided on the same side of the two lifting seats, and a row of positioning grooves matching the support grooves are provided on the lower support seats. Two silicon wafer storage racks are also provided on the positioning table. When the silicon wafer is located in the storage rack, it is in an inclined state and one side is supported by one of the side support rods of the silicon wafer storage rack, and the bottom is supported by the support groove.
[0005] It is further characterized in that a positioning combing device is arranged above the positioning platform, and the positioning combing device comprises positioning combing strips installed on both sides of the top frame and a middle strip installed in the middle of the top frame, and the positioning combing strip is connected to the lateral driving mechanism and has spaced-apart partition columns arranged inside;
[0006] The longitudinal section of the middle bar is rhombus-shaped and one end of the middle bar is connected to a rotation driving mechanism.
[0007] After adopting the utility model, the lifting bar is lifted up when the silicon wafers are loaded, and the two groups of silicon wafers can be placed in the supporting grooves of the two groups of lifting bars respectively, and enter the silicon wafer storage rack as the supporting bars descend, and the silicon wafers are arranged obliquely and supported by two fulcrums on the side and the bottom. When the silicon wafers need to be taken out, the lifting bar will first drive the side close to the side support rod to flip away from the side support rod, and then lift it up, which will not cause wear on the side of the silicon wafer, thereby ensuring the quality of the silicon wafer; further, the presence of the positioning and combing device can perform centering and positioning of the silicon wafers before they enter the silicon wafer storage rack, ensuring that the silicon wafers are arranged and enter the silicon wafer storage rack. BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Figure 1 This is a schematic diagram of the utility model from the first perspective;
[0009] Figure 2 This is a schematic diagram of the second viewing angle of the utility model;
[0010] Figure 3 This is a schematic diagram of a silicon wafer storage rack;
[0011] Figure 4 It is a schematic diagram of the state of a silicon wafer in a silicon wafer storage rack;
[0012] Figure 5 This is a schematic diagram of the changes in the middle bar. DETAILED DESCRIPTION
[0013] See Figure 1 , Figure 2 , Figure 3 As shown, a silicon wafer loading and unloading device comprises a positioning platform 1, on which two lifting seats 2 are arranged, each lifting seat 2 is provided with two rows of lifting bars 3 with support grooves on the top, each lifting seat 2 corresponds to two rows of silicon wafer storage areas on each silicon wafer storage rack 4, and lower support seats 5 are respectively arranged on the same side of the two lifting seats 2, and a row of positioning grooves matching the support grooves are provided on the lower support seats 5, and two silicon wafer storage racks 4 are also arranged on the positioning platform. Figure 3 The silicon wafer storage rack shown in the figure is in a state after being flipped 90° during storage. When the silicon wafer is located in the storage rack, it is in an inclined state and one side is supported by one of the side support rods of the silicon wafer storage rack 4 and the bottom is supported in the support groove of the support seat 5. The state at this time is as shown in FIG. Figure 4 As shown, Figure 4 Only two supporting points 6 are provided. In this state, when the silicon wafer needs to be taken out, the lifting bar 3 starts to rise, and the lifting bar 3 near the side support rod will first contact the silicon wafer, and will turn from the inclined state to the vertical state, so that it will be separated from the side support rod, until both lifting bars 3 contact the silicon wafer, and then the silicon wafer can be driven to rise and be ejected from the silicon wafer storage rack 4. In the lifting state, no friction will occur on the side of the silicon wafer, so the quality of the silicon wafer is guaranteed.
[0014] A positioning combing device 7 is arranged above the positioning platform 1. The positioning combing device 7 includes positioning combing strips 7-2 installed on both sides of the top frame 7-1 and a middle strip 7-3 installed in the middle of the top frame. The positioning combing strips 7-2 are connected to the lateral drive mechanism 7-4 and are provided with spaced partition columns 7-5 on the inner side. The middle strip 7-3 has a diamond-shaped longitudinal section and one end of the middle strip 7-3 is connected to the rotation drive mechanism, which can realize 90° rotation. When the silicon wafers are sent over and enter the front of the silicon wafer storage rack 4, the positioning combing operation can be performed first to center the two rows of silicon wafers. At this time, the middle strip is in Figure 5 In state A, the long diagonal line of the middle bar is horizontal, and the width of the middle bar in the horizontal direction is the largest. At the same time, the positioning combing strips 7-2 on both sides move toward the middle synchronously, driving the inner side of the two rows of silicon wafers to press against the middle bar 7-3 at the same time to achieve the centering operation; then the silicon wafers are allowed to move downward into the silicon wafer storage rack 4, and the middle bar 7-3 rotates 90° to state B. At this time, the short diagonal line of the middle bar is horizontal, and the width of the middle bar in the horizontal direction is the smallest, so the silicon wafers will not rub against the middle bar when they descend.
Claims
1. A silicon wafer loading and unloading device, comprising a positioning platform, a lifting seat is arranged on the positioning platform, and two rows of lifting bars with support grooves on the top are arranged on the lifting seat, characterized in that: There are two lifting seats and lower support seats are respectively arranged on the same side of the two lifting seats. A row of positioning grooves cooperating with the supporting grooves are provided on the lower support seats. Two silicon wafer storage racks are also arranged on the positioning platform. When the silicon wafer is located in the storage rack, it is in an inclined state and one side is supported by one of the side support rods of the silicon wafer storage rack, and the bottom is supported by the supporting groove.
2. A silicon wafer loading and unloading device according to claim 1, characterized in that: A positioning combing device is arranged above the positioning platform, and the positioning combing device includes positioning combing strips installed on both sides of the top frame and a middle strip installed in the middle of the top frame. The positioning combing strips are connected to the lateral driving mechanism and are provided with spaced-apart partition columns on the inner side.
3. A silicon wafer loading and unloading device according to claim 2, characterized in that: The longitudinal section of the middle bar is rhombus-shaped and one end of the middle bar is connected to a rotation driving mechanism.