Chip pickup device and system thereof
By simplifying the gas path of the chip pickup device and improving the air tightness, the problem of complex gas paths in the existing devices is solved, resulting in difficult to ensure air tightness, and more efficient control and lower defect rate are achieved.
Patent Information
- Application Number
- CN202421580772.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-04
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2034-07-04
AI Technical Summary
The existing chip pickup device has a long and complex air passage, which makes it difficult to ensure air tightness, and gas leakage is prone to occur, which will affect the downforce control during chip bonding, resulting in an increase in product defect rate.
A chip pickup device is designed to simplify the gas path, improve air tightness and control accuracy through a hollow rotating motor, telescopic connector and multi-channel switching structure.
It has achieved simplification of the gas path and improved air tightness, improved the operating efficiency and control accuracy of the device, and reduced the product defect rate.
Smart Images
Figure CN222757473U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of chip manufacturing, in particular to a chip picking device and a system thereof. Background Art
[0002] In the integrated circuit manufacturing process, the chip needs to be picked up from the carrier film, and then the chip needs to be transferred to the target area and then the appropriate downward pressure needs to be applied to make it fit stably with the target area. However, due to the small size and brittle texture of the chip, the industry usually uses a pickup device to pick it up, place it, and move it. Currently, most pickup devices use pneumatic structures. However, the existing structure has the problem of long and complex air paths, and the air tightness of the structure is difficult to ensure. Therefore, gas leakage is prone to occur, making it difficult to accurately control the downward pressure during chip bonding, and the product defect rate increases. Utility Model Content
[0003] Based on this, the purpose of the utility model is to provide a chip picking device and a system thereof, which have the advantages of simple gas path and high response efficiency.
[0004] A chip picking device comprises a shell, on which a hollow rotating motor is arranged, and the hollow rotating motor drives a suction nozzle to rotate through a connecting piece, a first connecting rod, a telescopic connecting piece, a second connecting rod, a turntable and a main shaft in sequence, a shaft sleeve is arranged inside the shell, and the main shaft is movably arranged in the shaft sleeve, a suction nozzle is arranged at one end of the main shaft, and the other end is fixedly connected to the second connecting rod through the turntable, one end of the connecting piece passes through the hollow rotating motor, and the other end is connected to the first connecting rod, an axially penetrating channel is opened inside the connecting piece, a through hole connected to the channel is opened in the first connecting rod, the second connecting rod is spaced opposite to the first rod body, and the telescopic connecting piece is clamped between the first connecting rod and the second connecting rod, and its inner cavity is connected to the through hole.
[0005] The chip picking device described in the utility model is directly connected to the outside through the inner cavity of the telescopic connector, which reduces the length and complexity of the gas path and improves the operation efficiency and control accuracy of the device.
[0006] Furthermore, the telescopic connection is an airbag, which is a closed cylindrical structure that is telescopic along the axial direction. It has a simple structure and can be compressed along the axial direction while rigidly rotating along the circumferential direction, which is equivalent to a flexible coupling and can play the role of automatic stripping, mitigating impact and absorbing vibration.
[0007] Furthermore, the first connecting rod includes a first rod body and an abutting portion provided on the first rod body, the second connecting rod includes a second rod body opposite to the first rod body and a pushing portion provided on the second rod body, and the airbag is sleeved outside the first connecting rod and the second connecting rod, and is sealed and connected to the abutting portion and the pushing portion. This structure ensures the airtightness and stability of the device and improves the control accuracy of the downward pressure of the suction nozzle.
[0008] Furthermore, the hollow rotating motor, the connecting piece, the first connecting rod, the airbag, the second connecting rod, the turntable, the main shaft and the suction nozzle are coaxially arranged, so that the operation of the device is more stable.
[0009] Furthermore, an observation port is provided on the housing, and a sensor is also provided on the housing, and the sensor detects the position of the second connecting rod through the observation port. This structure can improve the maintenance convenience of the sensor and reduce the cost.
[0010] A chip picking system comprises the chip picking device as described above and a control device for inputting high-pressure gas into the channel of the chip picking device. The system has a light structure and high operating efficiency.
[0011] Furthermore, the control device includes a total air source, a pick-up proportional valve, a fitting proportional valve, a switching solenoid valve and a pressure relief valve. The input ends of the pick-up proportional valve and the fitting proportional valve are connected to the total air source to form a parallel structure, and the output ends are respectively connected to the two input ports of the switching solenoid valve. The output end of the switching solenoid valve is connected to the channel of the chip pick-up device through the pressure relief valve. This structure can increase the air pressure switching speed and meet the requirements for the airbag inner cavity pressure under different states.
[0012] Furthermore, the control device also includes a pressure regulating valve and a control solenoid valve, the input end of the pressure regulating valve is connected to the total air source, the other end and the output end of the switching solenoid valve are respectively connected to the two input ports of the control solenoid valve, and the output end of the control solenoid valve is connected to the pressure relief valve. This structure can keep the air pressure inside the airbag stable during the movement of the chip picking device, and avoid the change of the nozzle height affecting the placement of the chip.
[0013] Furthermore, the control device further comprises a pressure gauge, and the channel of the chip picking device is connected to the pressure relief valve through the pressure gauge. This structure monitors the air pressure to ensure that the air pressure reaches a preset value.
[0014] In order to better understand and implement the present invention, the present invention is described in detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a schematic diagram of the chip picking system of the utility model;
[0016] Figure 2 It is a cross-sectional view of the chip pickup device of the utility model;
[0017] Explanation of the reference numerals in the accompanying drawings: 11. total air source; 12. pick-up proportional valve; 13. fitting proportional valve; 14. pressure regulating valve; 15. switching solenoid valve; 16. control solenoid valve; 17. pressure relief valve; 18. pressure gauge; 2. chip picking device; 21. housing; 211. observation port; 22. driving source; 23. connecting piece; 231. channel; 241. first rod body; 242. abutment part; 243. through hole; 25. air bag; 261. second rod body; 262. pushing part; 27. turntable; 28. main shaft; 29. suction nozzle; 30. bushing. DETAILED DESCRIPTION
[0018] See also Figure 1 , Figure 1 The schematic diagram of the chip picking system of the utility model is shown in FIG. The utility model discloses a chip picking system, which comprises a chip picking device 2 and a control device for inputting a control air pressure into the chip picking device 2 .
[0019] The control device includes a total gas source 11, a pick-up proportional valve 12, a fitting proportional valve 13, a pressure regulating valve 14, a switching solenoid valve 15, a control solenoid valve 16, a pressure relief valve 17 and a pressure gauge 18. The input ends of the pick-up proportional valve 12, the fitting proportional valve 13 and the pressure regulating valve 14 are all connected to the total gas source 11 to form a parallel structure, wherein the output ends of the pick-up proportional valve 12 and the fitting proportional valve 13 are connected to the switching solenoid valve 15, and when the switching solenoid valve 15 switches between two states, the switching of the gas path between the pick-up proportional valve 12 and the fitting proportional valve 13 can be achieved. The output ends of the switching solenoid valve 15 and the pressure regulating valve 14 are connected to the control solenoid valve 16, and when the control solenoid valve 16 switches between two states, the switching of the gas path between the switching solenoid valve 15 and the pressure regulating valve 14 can be achieved. The output end of the control solenoid valve 16 is connected to the pressure gauge 18 through the pressure relief valve 17, and the pressure gauge 18 can monitor the air pressure in real time, so as to stabilize the air pressure. The output end of the pressure gauge 18 is connected to the channel 231 of the chip picking device 2 to input high-pressure gas to the chip picking device 2 .
[0020] See also Figure 2 , Figure 2It is a cross-sectional view of the chip pickup device 2 of the utility model. The chip pickup device 2 includes a housing 21, a driving source 22 arranged at the top of the housing 21, an adjusting component inserted in the housing 21, and a suction nozzle 29 arranged at the bottom of the housing 21. The driving source 22 drives the suction nozzle 29 to rotate through the adjusting component. The structure of the suction nozzle 29 is a common structural form in the field and is not described here. An adsorption channel 231 is opened inside the suction nozzle 29, so that a negative pressure is formed in the adsorption channel 231 through an independent external air valve, thereby realizing the adsorption and release of the chip.
[0021] The adjustment assembly includes a connector 23, a first connecting rod, an airbag 25, a second connecting rod and a turntable 27 coaxially arranged with the hollow rotating motor. The driving source 22 is a hollow rotating motor, wherein the shaft is provided with an axially penetrating cavity. The connector 23 is rotatably arranged in the housing 21, and a channel 231 penetrating along the axial direction is provided in the middle. One end of the connector 23 penetrates into the cavity of the hollow rotating motor and is fixedly connected to the output structure of the hollow motor, and the hollow rotating motor can drive the connector 23 to rotate. The top end of the connector 23 passes through the cavity, so that the channel 231 is connected to the external air source, and the bottom end extends downward and is threadedly connected to the first connecting rod. The first connecting rod includes a first rod body 241 and an abutment portion 242 arranged on the first rod body 241, and a through hole 243 communicating with the channel 231 is provided in the first rod body 241. The second connecting rod is spaced apart from the first connecting rod along the axial direction. The second connecting rod includes a second rod body 261 opposite to and coaxial with the first rod body 241 , and a pushing portion 262 disposed on the second rod body 261 .
[0022] The airbag 25 is a closed cylindrical structure that can be extended and retracted in the axial direction. It can be compressed in the axial direction and rigidly rotated in the circumferential direction, thereby driving the second connecting rod to rotate and realize transmission. The airbag 25 is sleeved outside the first connecting rod and the second connecting rod, and its top is sealed and connected to the abutment portion 242, and its bottom is sealed and connected to the pushing portion 262, so that it is clamped between the abutment portion 242 and the pushing portion 262, and the cavity inside the airbag 25 is connected to the through hole 243. The airbag 25 is equivalent to a flexible coupling, which can play the role of automatic stripping, mitigation of impact and absorption of vibration. When in use, after the high-pressure gas is released from the external gas source, it passes through the connecting piece 23 and the first connecting rod in turn and enters the airbag 25, so that the required air pressure is formed inside the airbag 25.
[0023] One end of the turntable 27 is fixed to the second connecting rod, and the other end is fixed to the main shaft 28. A sleeve 30 is provided between the main shaft 28 and the housing 21, and the main shaft 28 can move up and down along the axial direction and rotate circumferentially relative to the sleeve 30. In the initial state, the turntable 27 abuts against the sleeve 30. The suction nozzle 29 is fixedly connected to the main shaft 28, so as to move with the main shaft 28.
[0024] Preferably, an observation port 211 is provided on the housing 21 , and a sensor (not shown) is also provided on the housing 21 , which detects the position of the second connecting rod through the observation port 211 to determine whether the suction nozzle 29 is in contact with the chip.
[0025] When the chip is sucked, the pressure relief valve 17 is in a state of connecting the control solenoid valve 16 with the pressure gauge 18. The switching solenoid valve 15 is switched to a state where the pick-up proportional valve 12 is connected to the control solenoid valve 16, so that the total gas source 11 inputs a small amount of gas into the airbag 25. At this time, the air pressure inside the airbag 25 is relatively low, and the turntable 27 abuts against the shell. In this process, the chip picking device 2 descends and approaches the chip. When the suction nozzle 29 contacts the chip, the negative pressure formed inside it causes the chip to be adsorbed onto the suction nozzle 29. At the same time, the chip provides a reverse thrust to the suction nozzle 29, so that the suction nozzle 29 drives the main shaft 28 and the turntable 27 to move upward, and then drives the second connecting rod to move upward to compress the airbag 25. At this time, due to the low air pressure inside the airbag 25 and the small resistance, the airbag 25 is easily compressed, so that the sensor can easily detect the movement of the second connecting rod, thereby judging that the chip has been sucked.
[0026] After the chip is sucked, the chip pickup device 2 moves to bring the chip to the target area. At this time, the control solenoid valve 16 switches state, closes the connection between the pressure relief valve 17 and the switching solenoid valve 15, and makes the pressure regulating valve 14 connected to the pressure relief valve 17 through the control solenoid valve 16. The pressure regulating valve 14 keeps the air pressure inside the airbag 25 at a stable value, so that when the chip pickup device 2 is lifted and the chip is separated from the original carrier, the reverse thrust disappears, and the airbag 25 extends to push the second connecting rod, the turntable 27, the main shaft 28 and the suction nozzle 29 to reset, while ensuring that the height of the suction nozzle 29 relative to the housing 21 remains stable during the movement of the chip pickup device 2.
[0027] When the chip picking device 2 descends and attaches the chip to the target position, the control solenoid valve 16 and the switching solenoid valve 15 switch states, so that the total gas source 11 is connected to the control solenoid valve 16 through the attaching proportional valve 13 and the switching solenoid valve 15. At this time, the total gas source 11 fills the airbag 25 with high-pressure gas, so that a high-pressure state is formed inside the airbag 25. At this time, when the suction nozzle 29 descends with the chip picking device 2 and presses the chip to the target position, the high air pressure inside the airbag 25 forms a large obstacle to the lifting of the second connecting rod, so that sufficient downward pressure can be applied to the chip to avoid the change in the height of the suction nozzle 29 and affect the downward pressure, thereby ensuring the bonding quality.
[0028] The chip picking device and system described in the utility model are directly connected to the external gas source through the inner cavity of the telescopic connector, which reduces the length and complexity of the gas path, improves the operating efficiency and control accuracy of the device, and makes the overall structure lighter. At the same time, the system adopts a multi-channel switching structure, which can greatly improve the air pressure switching speed and meet the requirements of equipment operating efficiency.
[0029] In the description of the present application, it should be understood that if the terms "center", "upper", "lower", "top", "bottom", "inner", "outer", "axial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.
[0030] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0031] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.
[0032] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, and the utility model is also intended to include these modifications and modifications.
Claims
1. A chip picking device, characterized in that: It includes an outer shell, on which a hollow rotating motor is arranged, and the hollow rotating motor drives a suction nozzle to rotate through a connecting piece, a first connecting rod, a telescopic connecting piece, a second connecting rod, a turntable and a main shaft in sequence, a shaft sleeve is arranged inside the outer shell, and the main shaft is movably arranged in the shaft sleeve, a suction nozzle is arranged at one end of the main shaft, and the other end is fixedly connected to the second connecting rod through the turntable, one end of the connecting piece passes through the hollow rotating motor, and the other end is connected to the first connecting rod, an axially penetrating channel is opened inside the connecting piece, a through hole connected to the channel is opened in the first connecting rod, the second connecting rod is spaced opposite to the first connecting rod, and the telescopic connecting piece is clamped between the first connecting rod and the second connecting rod, and its inner cavity is connected to the through hole.
2. A chip picking device according to claim 1, characterized in that: The telescopic connecting piece is an airbag, and the airbag is a closed cylindrical structure that is telescopic along the axial direction.
3. A chip picking device according to claim 2, characterized in that: The first connecting rod includes a first rod body and an abutment portion arranged on the first rod body, the second connecting rod includes a second rod body opposite to the first rod body, and a pushing portion arranged on the second rod body, the airbag is sleeved outside the first connecting rod and the second connecting rod, and is sealed and connected to the abutment portion and the pushing portion.
4. A chip picking device according to claim 3, characterized in that: The hollow rotating motor, the connecting piece, the first connecting rod, the air bag, the second connecting rod, the rotating disk, the main shaft and the suction nozzle are coaxially arranged.
5. A chip picking device according to claim 4, characterized in that: An observation port is provided on the shell, and a sensor is also provided on the shell. The sensor detects the position of the second connecting rod through the observation port.
6. A chip picking system, characterized in that: The invention comprises a chip picking device as claimed in any one of claims 1 to 5, and a control device for inputting high-pressure gas into the channel of the chip picking device.
7. A chip picking system according to claim 6, characterized in that: The control device includes a total air source, a picking proportional valve, a fitting proportional valve, a switching solenoid valve and a pressure relief valve. The input ends of the picking proportional valve and the fitting proportional valve are connected to the total air source to form a parallel structure, and the output ends are respectively connected to the two input ports of the switching solenoid valve. The output end of the switching solenoid valve is connected to the channel of the chip picking device through the pressure relief valve.
8. A chip picking system according to claim 7, characterized in that: The control device also includes a pressure regulating valve and a control solenoid valve, wherein the input end of the pressure regulating valve is connected to the total gas source, and the other end and the output end of the switching solenoid valve are respectively connected to the two input ports of the control solenoid valve, and the output end of the control solenoid valve is connected to the pressure relief valve.
9. A chip picking system according to claim 8, characterized in that: The control device further comprises a pressure gauge, and the channel of the chip picking device is connected with the pressure relief valve through the pressure gauge.