Paddle position adjusting mechanism suitable for PECVD (plasma enhanced chemical vapor deposition) equipment

Abstract

The utility model discloses a paddle position adjusting mechanism suitable for PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment. The paddle position adjusting mechanism comprises a boat pushing paddle assembly, a furnace tube, a first supporting rod, racks arranged at two ends of the furnace tube, an adjusting mechanism and a bracket positioning mechanism, the support positioning mechanism comprises a square flange arranged on the rack, a support metal plate and two sets of positioning ropes arranged on the support metal plate in a penetrating mode, and the adjusting mechanism comprises a supporting base arranged on the rack, a fixing block fixedly installed on the supporting base, a follow-up block arranged on the supporting base in a sliding mode and a second supporting rod connected with the follow-up block. An adjusting screw is arranged on the fixing block, the front end of the adjusting screw is connected with the follow-up block, and the adjusting screw can drive the second supporting rod to move horizontally so as to adjust the position of the furnace tube in the horizontal direction and the position of the furnace tube in the vertical direction. Adjusting time is reduced, equipment service time is prolonged, and production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of tubular PECVD furnace tubes, in particular to an adjusting paddle position mechanism suitable for PECVD equipment. Background Art

[0002] In the process of automated production of process furnaces, a boat pusher (usually a silicon carbide paddle) is required to place the silicon wafer boat into the quartz furnace tube for the process, and then take out the silicon wafer boat after the process is completed. The current paddle for sending the graphite boat into the furnace tube has limited operating space and the paddle has an arc surface, which is not convenient for measurement and is very time-consuming and labor-intensive to debug. The previous structure was too complicated, and debugging was inconvenient and time-consuming. Utility Model Content

[0003] In view of the deficiencies in the prior art, the utility model provides an adjustment paddle position mechanism suitable for PECVD equipment, which can quickly adjust the relative positions of the transmission paddle rod and the furnace body, is convenient to debug and operate, reduces adjustment time, improves production efficiency, is simple to manufacture, does not require complicated processing structures, and is easy to operate.

[0004] In order to solve the above technical problems, the technical solution adopted by the utility model is a paddle position adjustment mechanism suitable for PECVD equipment, comprising: a boat pusher assembly, a furnace tube, a first support rod arranged in the furnace tube for carrying a graphite boat, a frame, two groups of adjustment mechanisms arranged on the frame for adjusting the position of the furnace tube, and a bracket positioning mechanism arranged on the frame; the bracket positioning mechanism comprises a square flange arranged on the frame, a bracket sheet metal symmetrically arranged on the square flange, and two groups of positioning ropes passed through the bracket sheet metal, the adjustment mechanism comprises a support seat arranged on the frame, a fixed block fixedly mounted on the support seat, a follower block slidably arranged on the support seat, and a second support rod connected to the follower block, the fixed block is provided with an adjusting screw, the front end of the adjusting screw is connected to the follower block and can drive the second support rod to move horizontally to adjust the horizontal and vertical positions of the furnace tube.

[0005] In a preferred embodiment of the utility model, the adjusting screw has a head and a rod, a limit block is arranged on the rod, a threaded portion is arranged at the front end of the limit block, the rod is threadedly connected to the follower block and can drive the follower block to move horizontally.

[0006] In a preferred embodiment of the present invention, the furnace tube is arranged on two groups of second support rods, and the furnace tube can be raised or lowered by adjusting the horizontal movement of the second support rod on one side.

[0007] In a preferred embodiment of the utility model, the boat pusher paddle assembly includes a plurality of groups of transmission paddle rods arranged side by side and round rod shafts connected to the transmission paddle rods, and the plurality of groups of transmission paddle rods are connected via auxiliary measuring blocks.

[0008] In a preferred embodiment of the utility model, the auxiliary measurement block includes an upper block and a lower block connected by screws, and the upper block and the lower block are assembled to form a connecting hole for the transmission paddle rod to pass through, and the diameter of the connecting hole is larger than the diameter of the transmission paddle rod.

[0009] In a preferred embodiment of the utility model, a limited gap is provided on the bracket sheet metal, and both ends of the positioning rope are respectively clamped and wound in the limited gap. During the debugging process, two groups of positioning ropes are respectively located on both sides of the transmission paddle rod.

[0010] In a preferred embodiment of the present invention, the positioning rope is made of flexible material.

[0011] The beneficial effects of the utility model are as follows: the utility model is suitable for the adjustment paddle position mechanism of PECVD equipment, can quickly adjust the relative position of the transmission paddle rod and the furnace body, has convenient debugging operation, reduces the adjustment time, has simple tooling production, does not require complicated processing structure, is simple to operate, increases the equipment use time, and improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative work, among which:

[0013] Figure 1 This is a schematic diagram of the structure of the paddle position adjustment mechanism of the utility model;

[0014] Figure 2 This is a schematic diagram of the structure of the push boat paddle assembly before entering the furnace tube in the utility model;

[0015] Figure 3 This is a schematic diagram of the structure of the push boat paddle assembly after entering the furnace tube in the utility model;

[0016] Figure 4 It is a structural schematic diagram of the bracket positioning mechanism in the utility model;

[0017] Figure 5 It is a structural schematic diagram of the adjustment mechanism in the utility model;

[0018] Figure 6 It is a structural schematic diagram of the adjusting screw in the utility model;

[0019] Figure 7 It is a structural schematic diagram of the auxiliary measurement card block in the utility model. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] See also Figure 1-5 The utility model discloses an adjustment paddle position mechanism suitable for PECVD equipment, comprising: a boat pusher paddle assembly 1, a furnace tube 2, a first support rod 3 arranged in the furnace tube for carrying a graphite boat 7, a frame 4, two groups of adjustment mechanisms 5 arranged on the frame for adjusting the position of the furnace tube, and a bracket positioning mechanism 6 arranged on the frame, wherein the bracket positioning mechanism comprises a square flange 61 arranged on the frame, a bracket sheet metal 62 symmetrically arranged on the square flange, and two groups of positioning ropes 63 penetrated on the bracket sheet metal, the two groups of square flanges are mirror-imaged, a limited gap is provided on the bracket sheet metal, the two ends of the positioning rope are respectively clamped and wound in the limited gap, the two groups of positioning ropes are respectively located on both sides of the transmission paddle rod, it should be noted that the positioning rope uses a flexible material, and a rigid material is easy to damage the quartz tube, and the distance between the positioning rope and the transmission paddle rod is proportional to the distance between the first support rod in the furnace tube and the transmission paddle rod after the installation is completed.

[0022] Specifically, the adjustment mechanism 5 includes a support seat 51 arranged on the frame, a fixed block 52 fixedly installed on the support seat, a follower block 53 slidably arranged on the support seat, and a second support rod 54 connected to the follower block. An adjusting screw 55 is arranged on the fixed block. The front end of the adjusting screw is connected to the follower block and can drive the second support rod to move horizontally to adjust the horizontal and vertical positions of the furnace tube. When adjusting the position of the furnace tube, the fastening screw on the support seat is loosened to adjust the support seat to a suitable position and then fixed to the frame again. The adjusting screw is limited by the fixed block. When the adjusting screw is rotated, the follower block is driven to move. The second support rods located on both sides of the furnace tube move horizontally under the action of the follower block, which plays a role in adjusting the horizontal direction of the furnace tube. It should be noted that when it is necessary to adjust the vertical position of the furnace tube, the adjusting screw on one side can be adjusted separately, so that the spacing between the two second support rods increases or decreases, so that the furnace tube placed between the two second support rods will also be lowered or raised accordingly. The operation is simple and convenient, and the relative position of the conveying paddle and the furnace body can be quickly adjusted.

[0023] like Figure 6As shown, the adjusting screw has a head 551 and a rod 552, a limiting block 553 is integrally formed on the rod, a threaded portion 554 is arranged on the front end of the limiting block on the rod, the rod is threadedly connected to the follower block and can drive the follower block to move horizontally, the furnace tube is arranged on two sets of second support rods, and the horizontal movement of the second support rod on one side can adjust the raising or lowering of the furnace tube.

[0024] like Figure 7 As shown, the boat pusher paddle assembly includes a plurality of groups of transmission paddle rods 11 arranged side by side and a round rod shaft 12 connected to the transmission paddle rods. The plurality of transmission paddle rods are connected by auxiliary measuring blocks 13. A plurality of auxiliary measuring blocks are arranged at intervals along the length direction of the transmission paddle. The auxiliary measuring blocks include an upper block 14 and a lower block 15 connected by screws. The upper block and the lower block are assembled to form a clamping hole 16 for the transmission paddle rod to pass through. The diameter of the clamping hole is slightly larger than the diameter of the transmission paddle rod for easy disassembly and assembly.

[0025] When the transmission paddle is adjusted horizontally and vertically at the clean bench, it will enter the furnace tube. The distance between the positioning rope on the left side of the bracket mechanism and the auxiliary measuring block A of the paddle should be equal to the distance between the positioning rope on the right side of the bracket mechanism and the auxiliary measuring block B of the paddle head. When the paddle is debugged, the paddle head should be slightly higher than the horizontal position of the paddle tail. When the paddle enters half of the furnace tube, the distance between the positioning ropes on both sides and the auxiliary measuring block in the middle of the paddle should also be equal. When the paddle enters the mechanical position, re-measure the distance between the auxiliary measuring block of the paddle head and the two positioning ropes. When the value deviates, the adjustment mechanism should be enabled for adjustment. When the adjusting screw is adjusted in one direction, the furnace tube will rise or fall accordingly. When the adjusting screw is adjusted in the same direction, the furnace tube can be translated. After the adjustment, the auxiliary measuring block and the bracket mechanism are removed and can be reused.

[0026] The beneficial effects of the utility model are: the relative position of the conveying paddle and the furnace body can be quickly adjusted, the debugging operation is convenient, the adjustment time is reduced, the tooling is simple to make, no complicated processing structure is required, the operation is simple, the equipment use time is increased, and the production efficiency is improved.

[0027] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A paddle position adjustment mechanism suitable for PECVD equipment, characterized in that: include: A boat pusher paddle assembly, a furnace tube, a first support rod arranged in the furnace tube for carrying a graphite boat, a frame, two groups of adjustment mechanisms arranged on the frame for adjusting the position of the furnace tube, and a bracket positioning mechanism arranged on the frame; the bracket positioning mechanism includes a square flange arranged on the frame, a bracket sheet metal symmetrically arranged on the square flange, and two groups of positioning ropes passing through the bracket sheet metal, the adjustment mechanism includes a support seat arranged on the frame, a fixed block fixedly mounted on the support seat, a follower block slidably arranged on the support seat, and a second support rod connected to the follower block, the fixed block is provided with an adjusting screw, the front end of the adjusting screw is connected to the follower block and can drive the second support rod to move horizontally to adjust the horizontal and vertical positions of the furnace tube.

2. The paddle position adjustment mechanism for PECVD equipment according to claim 1, characterized in that: The adjusting screw comprises a head and a rod, a limiting block is arranged on the rod, a threaded portion is arranged at the front end of the limiting block, the rod is threadedly connected with the follower block and can drive the follower block to move horizontally.

3. The paddle position adjustment mechanism for PECVD equipment according to claim 1, characterized in that: The furnace tube is arranged on two groups of second support rods, and the furnace tube can be raised or lowered by adjusting the horizontal movement of the second support rod on one side.

4. The paddle position adjustment mechanism for PECVD equipment according to claim 1, characterized in that: The boat pusher paddle assembly comprises a plurality of groups of transmission paddle rods arranged side by side and round rod shafts connected to the transmission paddle rods, and the plurality of groups of transmission paddle rods are connected via auxiliary measuring blocks.

5. The paddle position adjustment mechanism for PECVD equipment according to claim 4, characterized in that: The auxiliary measurement block comprises an upper block and a lower block connected by screws, wherein the upper block and the lower block are assembled to form a connection hole for the transmission paddle rod to pass through, and the diameter of the connection hole is larger than the diameter of the transmission paddle rod.

6. The paddle position adjustment mechanism for PECVD equipment according to claim 4, characterized in that: A limited gap is provided on the bracket sheet metal, and two ends of the positioning rope are respectively clamped and wound in the limited gap, and two groups of positioning ropes are respectively located on both sides of the transmission paddle rod.

7. The paddle position adjustment mechanism for PECVD equipment according to claim 6, characterized in that: The positioning cord is made of flexible material.

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