Furnace cover window structure of single crystal furnace

Abstract

The utility model belongs to the technical field of single crystal furnaces, and discloses a single crystal furnace cover window structure which comprises a furnace cover, a window platform arranged on the furnace cover and an observation through hole formed in the window platform, the upper surface of the window platform is in threaded connection with a fixing piece, and a fixing cap is fixed to the upper surface of the fixing piece. A first sealing ring is arranged on the upper surface of the window platform, a first quartz lens is arranged on the upper surface of the first sealing ring, a first observation hole is formed in the fixing cap, and a blocking assembly used for protecting the first quartz lens is arranged on the window platform. The application has the effect of prolonging the use experience of the device.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace cover window structure. Background Art

[0002] Sapphire has good optical, mechanical, chemical and electrical properties, and is widely used in microwave electron tube media, waveguide laser cavities, precision bearings, high-intensity laser window materials, and heat sinks for LCD projectors. During the growth of sapphire single crystals, a high vacuum state needs to be maintained for a long time. The staff needs to observe the growth process of the sapphire crystal through the viewing window to adjust the parameters and obtain high-precision sapphire single crystals.

[0003] A Chinese utility model patent with publication number CN201648563U discloses a gold-plated heat-insulating single crystal furnace viewing window, including an upper furnace cover, quartz glass and gold-plated glass, a flange is fixedly and sealedly installed on the viewing window of the upper furnace cover, the quartz glass and gold-plated glass are installed on the flange facing the viewing window, the quartz glass is arranged in the inner layer close to the viewing window, a sealing ring is arranged between the quartz glass and the flange, and the gold-plated glass is arranged in the outer layer away from the viewing window. The outer layer glass of the gold-plated heat-insulating single crystal furnace viewing window of the utility model adopts gold-plated glass, which has a strong reflection ability for heat radiation and infrared rays, ensuring that the high temperature in the single crystal furnace will not cause harm to the observer; and in the utility model, the viewing window is sealed with the inner layer of quartz glass in combination with the sealing ring, the inner and outer layers of glass are air, and the temperature difference between the two sides of the inner layer of quartz glass is small, avoiding the dangerous accident caused by the inner layer of quartz glass breaking due to the double-layer water cooling structure.

[0004] With respect to the above-mentioned related technologies, the inventors believe that the following defects exist: during the sapphire seeding process, the furnace cover window needs to be subjected to long-term radiation heating, which can easily cause the quartz lens in the furnace cover window to crack, thereby causing poor vacuum. The above-mentioned device observes the growth process of the sapphire single crystal through a single layer of gold-coated glass. When the gold-coated glass is damaged, the growth furnace is easily damaged due to poor vacuum. Utility Model Content

[0005] In order to solve the above problems, the utility model provides a single crystal furnace cover window structure.

[0006] The above technical objectives of the utility model are achieved through the following technical solutions: a single crystal furnace cover window structure, including a furnace cover, a window platform arranged on the furnace cover and an observation through hole arranged on the window platform, the upper surface of the window platform is threadedly connected with a fixing plate, the upper surface of the fixing plate is fixed with a fixing cap, the upper surface of the window platform is provided with a first sealing ring, the upper surface of the first sealing ring is provided with a first quartz lens, the fixing cap is provided with a first observation hole, and the window platform is provided with a barrier component for protecting the first quartz lens.

[0007] By adopting the above technical solution, when the furnace cover window is subjected to long-term radiation heating, the quartz lens may crack. When the second quartz lens on the barrier assembly is damaged, the staff only needs to turn the connection cap to remove the connection cap, which makes it easier for the staff to replace the second quartz lens. At this time, the staff can continue to observe through the first quartz lens, thereby reducing the probability of vacuum failure in the growth furnace and improving the staff's user experience.

[0008] Furthermore, the barrier assembly includes a barrier piece threadedly connected to the upper surface of the window platform, a connecting cap fixed on the upper surface of the barrier piece, an annular rod arranged on the upper surface of the window platform, a second sealing ring arranged on the upper surface of the annular rod, and a second quartz lens arranged on the second sealing ring, and a second observation hole is opened on the connecting cap.

[0009] By adopting the above technical solution, when the furnace cover window is subjected to long-term radiation heating, the second quartz lens may crack, and the staff needs to replace the second quartz lens. At this time, the staff only needs to turn the connecting cap to separate the barrier sheet and the window platform from each other, and then remove the connecting cap. Afterwards, the staff only needs to remove the second quartz lens and replace the lens, and then observe through the second observation hole again. In addition, during this process, if the staff does not have new accessories at hand, the staff can observe through the first observation hole, thereby improving the staff's user experience.

[0010] Furthermore, blocking sheets for blocking the second sealing ring are provided on the inner wall and the outer wall of the annular rod.

[0011] By adopting the above technical solution, the difficulty of workers in installing the second sealing ring is reduced, thereby improving the use experience of the workers.

[0012] Furthermore, the inner diameter of the annular rod is smaller than the inner diameter of the second sealing ring, and the outer diameter of the annular rod is larger than the outer diameter of the second sealing ring.

[0013] By adopting the above technical solution, the probability of the second sealing ring expanding and pressing against the blocking piece after the staff installs the connecting cap is reduced, thereby reducing the probability of the blocking piece being damaged, thereby improving the stability of the device.

[0014] Furthermore, a rubber plug for closing the second observation hole is provided on the second observation hole.

[0015] By adopting the above technical solution, when the staff does not need to use the second observation hole, the staff only needs to connect the rubber plug and the second observation hole to each other, so that the rubber plug can seal the second observation hole, thereby reducing the probability of dust entering the second observation hole, thereby improving the staff's usage experience.

[0016] Furthermore, a silicone pad is provided on the upper surface of the connecting cap to improve the user experience of the staff.

[0017] By adopting the above technical solution, when the staff uses the second observation hole, the silicone pad supports the staff's eye sockets, thereby reducing the staff's pain and improving the staff's user experience.

[0018] Furthermore, the upper end of the connecting cap is provided with anti-slip grooves for improving the use experience of the staff.

[0019] Furthermore, the connecting cap is made of PC.

[0020] In summary, the utility model has the following beneficial effects:

[0021] 1. In this application, when the furnace cover window is subjected to long-term radiation heating, the quartz lens may crack. When the second quartz lens on the barrier component is damaged, the staff only needs to turn the connection cap to remove the connection cap, which makes it easier for the staff to replace the second quartz lens. At this time, the staff can continue to observe through the first quartz lens, thereby reducing the probability of vacuum failure in the growth furnace and improving the staff's user experience;

[0022] 2. In this application, when the furnace cover window is subjected to long-term radiation heating, the second quartz lens may crack, and the staff needs to replace the second quartz lens. At this time, the staff only needs to turn the connecting cap to separate the barrier plate and the window platform from each other, and then remove the connecting cap. Afterwards, the staff only needs to remove the second quartz lens and replace the lens, and then observe through the second observation hole again. In addition, during this process, if the staff does not have new accessories at hand, the staff can observe through the first observation hole, thereby improving the staff's user experience;

[0023] 3. In the present application, when the staff does not need to use the second observation hole, the staff only needs to connect the rubber plug to the second observation hole so that the rubber plug can seal the second observation hole, thereby reducing the probability of dust entering the second observation hole, thereby improving the staff's usage experience. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the utility model;

[0025] Figure 2 This is a schematic diagram of a barrier sheet and its connection structure according to an embodiment of the utility model;

[0026] Figure 3 This is a schematic diagram of the second sealing ring and its connection structure in an embodiment of the utility model;

[0027] Figure 4 It is a schematic diagram of a blocking sheet and its connection structure according to an embodiment of the utility model.

[0028] In the figure: 1. furnace cover; 11. window platform; 2. observation hole; 21. fixing plate; 3. fixing cap; 31. first sealing ring; 4. first quartz lens; 41. first observation hole; 5. barrier assembly; 51. barrier plate; 52. connecting cap; 53. annular rod; 54. second sealing ring; 55. second quartz lens; 6. second observation hole; 61. blocking plate; 7. rubber plug; 8. silicone pad; 9. anti-slip pattern. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application without making creative work are within the scope of protection of the present application.

[0030] like Figure 1-4 As shown, the embodiment of the present application discloses a window structure of a single crystal furnace cover, including a furnace cover 1, a window platform 11, a fixing plate 21, a fixing cap 3, a first sealing ring 31, a first quartz lens 4, a barrier assembly 5, a blocking plate 61, a rubber plug 7 and a silicone pad 8. The window platform 11 is arranged on the furnace cover 1, and an observation through hole 2 is arranged on the window platform 11. The fixing plate 21 is a sheet structure, and the fixing plate 21 is threadedly connected to the upper surface of the window platform 11. The fixing cap 3 is fixed on the upper surface of the fixing plate 21, and a first observation hole 41 is opened on the fixing cap 3. The first sealing ring 31 is arranged on the upper surface of the window platform 11, and is used to improve the airtightness of the device, and the first quartz lens 4 is arranged on the upper surface of the first sealing ring 31.

[0031] The fixing cap 3 is provided with a first observation hole 41. The barrier assembly 5 is arranged on the window platform 11 to protect the first quartz lens 4. The barrier assembly 5 includes a barrier sheet 51, a connecting cap 52, an annular rod 53, a second sealing ring 54 and a second quartz lens 55. The barrier sheet 51 is a sheet-like structure, and the barrier sheet 51 is threadedly connected to the upper surface of the window platform 11. The connecting cap 52 is fixed to the upper surface of the barrier sheet 51. The annular rod 53 is a rod-like structure with a circular cross section, and the annular rod 53 is arranged on the upper surface of the window platform 11. The second sealing ring 54 is arranged on the upper surface of the annular rod 53, and the second quartz lens 55 is arranged on the second sealing ring 54, and the connecting cap 52 is provided with a second observation hole 6.

[0032] When the window of the furnace cover 1 is subjected to long-term radiation heating, the second quartz lens 55 may crack, and the staff needs to replace the second quartz lens 55. At this time, the staff only needs to rotate the connecting cap 52 to separate the barrier sheet 51 from the window platform 11, and then remove the connecting cap 52. Afterwards, the staff only needs to remove the second quartz lens 55 and replace the lens, and then observe through the second observation hole 6 again. In addition, during this process, if the staff does not have new accessories at hand, the staff can observe through the first observation hole 41, thereby improving the staff's use experience.

[0033] The blocking sheet 61 is a sheet structure with a circular cross section, and two blocking sheets 61 are provided and are respectively arranged on the inner wall and the outer wall of the annular rod 53, and are used to block the second sealing ring 54. The blocking sheet 61 reduces the difficulty of the staff to install the second sealing ring 54, thereby improving the staff's use experience.

[0034] In order to improve the stability of the device, the inner diameter of the annular rod 53 is smaller than the inner diameter of the second sealing ring 54, and the outer diameter of the annular rod 53 is larger than the outer diameter of the second sealing ring 54. This arrangement reduces the probability that the second sealing ring 54 expands and presses against the blocking sheet 61 after the worker installs the connecting cap 52, thereby reducing the probability of the blocking sheet 61 being damaged, thereby improving the stability of the device.

[0035] In order to improve the user experience of the staff, a rubber plug 7 for closing the second observation hole 6 is provided on the second observation hole 6. When the staff does not need to use the second observation hole 6, the staff only needs to connect the rubber plug 7 with the second observation hole 6 to make the rubber plug 7 close the second observation hole 6, thereby reducing the probability of dust entering the second observation hole 6, thereby improving the user experience of the staff.

[0036] In order to improve the user experience of the staff, a silicone pad 8 is provided on the upper surface of the connection cap 52. When the staff uses the second observation hole 6, the silicone pad 8 supports the eye socket of the staff, thereby alleviating the pain of the staff and improving the user experience of the staff.

[0037] In order to reduce the difficulty for the staff to rotate the connecting cap 52, the upper end of the connecting cap 52 is provided with anti-slip grooves 9 for improving the use experience of the staff, and the connecting cap 52 is made of PC.

[0038] The use principle of the window structure of the furnace cover 1 of a single crystal furnace in this embodiment is as follows: when the window of the furnace cover 1 is subjected to long-term radiation heating, the quartz lens may crack. When the second quartz lens 55 on the barrier component 5 is damaged, the staff only needs to rotate the connection cap 52 to remove the connection cap 52, thereby facilitating the staff to replace the second quartz lens 55. At this time, the staff can continue to observe through the first quartz lens 4, thereby reducing the probability of vacuum failure in the growth furnace and improving the staff's use experience.

[0039] The above is only a preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A single crystal furnace cover window structure, comprising a furnace cover (1), a window platform (11) arranged on the furnace cover (1), and an observation through hole (2) arranged on the window platform (11), wherein: The upper surface of the window platform (11) is threadedly connected with a fixing plate (21), the upper surface of the fixing plate (21) is fixed with a fixing cap (3), the upper surface of the window platform (11) is provided with a first sealing ring (31), the upper surface of the first sealing ring (31) is provided with a first quartz lens (4), the fixing cap (3) is provided with a first observation hole (41), and the window platform (11) is provided with a barrier component (5) for protecting the first quartz lens (4); The barrier assembly (5) comprises a barrier sheet (51) threadedly connected to the upper surface of the window platform (11), a connection cap (52) fixed to the upper surface of the barrier sheet (51), an annular rod (53) arranged on the upper surface of the window platform (11), a second sealing ring (54) arranged on the upper surface of the annular rod (53), and a second quartz lens (55) arranged on the second sealing ring (54); and a second observation hole (6) is formed on the connection cap (52).

2. The single crystal furnace cover window structure according to claim 1 is characterized in that: The inner wall and the outer wall of the annular rod (53) are both provided with blocking sheets (61) for blocking the second sealing ring (54).

3. The single crystal furnace cover window structure according to claim 2 is characterized in that: The inner diameter of the annular rod (53) is smaller than the inner diameter of the second sealing ring (54), and the outer diameter of the annular rod (53) is larger than the outer diameter of the second sealing ring (54).

4. The single crystal furnace cover window structure according to claim 3 is characterized in that: The second observation hole (6) is provided with a rubber plug (7) for closing the second observation hole (6).

5. The single crystal furnace cover window structure according to claim 4 is characterized in that: The upper surface of the connection cap (52) is provided with a silica gel pad (8) for improving the user experience of the staff.

6. The single crystal furnace cover window structure according to claim 5 is characterized in that: The upper end of the connection cap (52) is provided with anti-slip patterns (9) for improving the user experience of the staff.

7. The single crystal furnace cover window structure according to claim 6 is characterized in that: The connecting cap (52) is a connecting cap (52) made of PC.

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