Shielding case with mounting structure

Abstract

The utility model discloses a shielding cover with a mounting structure, which comprises a shielding cover and a mounting beam frame which are of a split structure, and a vertical column and a lifting sliding table cylinder which are fixedly connected, the mounting beam frame comprises a fixed beam and a fixed plate which are of a split structure, the fixed beam is provided with an adjusting assembly, and the adjusting assembly is provided with an adjusting groove. The adjusting assembly comprises a two-way screw rod and symmetrically distributed sliding blocks, the two-way screw rod penetrates through the sliding blocks, the two-way screw rod is installed in the fixed beam, and positioning columns are arranged on the sliding blocks; limiting lugs on a stand column are embedded into a fixing beam, when a two-way screw rotates, symmetrical sliding blocks slide, and a positioning column penetrates through the limiting lugs, so that the stand column is fixed, the stand column is easy to install, the stand column and a shielding protective cover can be disassembled and assembled, the shielding protective cover is driven by a lifting sliding table air cylinder to ascend, and taking, placing and adjusting of workpieces are not affected; the shielding shield shields internal detection devices and workpieces of the semiconductor detection equipment and prevents the internal devices and the workpieces from being interfered by external impurities.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing equipment, and in particular relates to a shielding cover with a mounting structure. Background Art

[0002] Semiconductor equipment generally refers to production equipment used for processing and producing various types of semiconductor products. The Chinese utility model patent application number CN202122960299.3 discloses a special protective component for semiconductor equipment processing. Semiconductor equipment is processing equipment used for semiconductor production; semiconductor testing equipment is a semiconductor processing equipment that detects production products, mainly using electron microscopes, X-ray detectors, infrared thermal imagers and other methods to detect the quality and performance of semiconductor products;

[0003] When performing performance testing on semiconductor products, the operator generally places the workpiece inside the semiconductor testing equipment, and the operator operates the button control program to automatically perform the test. However, during the automatic testing operation, in order to facilitate the operator to take and place the workpiece or adjust the workpiece position, the internal testing device of the testing equipment is in an exposed state, and the internal testing device and the workpiece are in an unshielded state. When external impurities adhere to the surface of the workpiece, the test results are prone to errors. When the semiconductor testing equipment detects the workpiece, there is a problem that the internal testing device and the workpiece are in an unshielded state. For this reason, the present application proposes a shielding cover with a mounting structure. Utility Model Content

[0004] The utility model aims to provide a shielding cover with a mounting structure to solve the problem in the background art that the internal detection device and the workpiece of the semiconductor detection equipment are in an unshielded state.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a shielding cover with a mounting structure, comprising a shielding cover and a mounting beam frame with a split structure, and a fixedly connected column and a lifting slide cylinder, the mounting beam frame comprises a fixed beam and a fixed plate with a split structure, the fixed beam is provided with an adjustment component, the adjustment component comprises a bidirectional screw and symmetrically distributed sliders, the bidirectional screw passes through the slider, the bidirectional screw is installed inside the fixed beam, a positioning column is provided on the slider, a limiting ear embedded in the fixed beam is provided on the side of the column, a connecting plate connected to the shielding cover is provided on the lifting slide cylinder, and a guide block is provided on the opposite surface of the shielding cover.

[0006] Preferably, the fixed beam is an inverted "U"-shaped structure, a rectangular movable groove is opened on the opposite surface of the fixed beam, the bidirectional screw and the slider are installed inside the movable groove, a fixing ring passes through the center position of the bidirectional screw, and a rectangular groove opposite to the fixing ring is opened on the surface of the fixing plate.

[0007] Preferably, a limiting hole communicating with the movable groove is opened on the side surface of the fixed beam, and the limiting ear cooperates with the limiting hole.

[0008] Preferably, a through hole is provided on the surface of one end of the limiting ear, and the positioning column is clearance-matched with the through hole.

[0009] Preferably, the connecting plate is an "L"-shaped structure, and a square plate that fits the surface of the shielding cover is provided on one end of the connecting plate.

[0010] Preferably, the guide block on the opposite surface of the shielding cover is in the shape of a rectangular parallelepiped, and a guide groove adapted to the guide block is provided on the surface of the column facing the shielding cover.

[0011] Preferably, an opening and closing assembly and a rectangular observation port are provided on the side of the shielding shield, and the opening and closing assembly includes an opening and closing plate and a rotating cylinder that are fixedly connected, as well as a stabilizing column and a reset spring. The stabilizing column that passes through the rotating cylinder and the reset spring is installed in the observation port of the shielding shield, and the two ends of the reset spring are respectively connected to the inner wall of the shielding shield and the opening and closing plate.

[0012] Preferably, a limiting column is rotatably connected to the surface of the shielding cover, a pinch rod is vertically provided on the limiting column, and the limiting column is tangent to the side surface of the shielding cover.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] In the utility model, the limiting ears on the column are embedded in the fixed beam. When the bidirectional screw rotates, the symmetrical sliders slide, and the positioning column penetrates the limiting ears to fix the column. The installation method of the column is simple, and the column and the shielding cover can be disassembled and assembled. The shielding cover is driven to rise by the lifting slide cylinder, which does not affect the placement and adjustment of the workpiece. The shielding cover shields the internal detection devices and workpieces of the semiconductor detection equipment to prevent the internal devices and workpieces from being interfered by external impurities. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the structure of the utility model;

[0016] Figure 2 For the utility model Figure 1 A schematic diagram of the enlarged structure of the middle part A;

[0017] Figure 3 It is a three-dimensional structural schematic diagram of the installation beam frame of the utility model;

[0018] Figure 4 For the utility model Figure 3 The enlarged structural diagram of the middle B part;

[0019] Figure 5 For the utility model Figure 4 Schematic diagram of the CC direction structure of the middle fixed beam;

[0020] Figure 6 It is a three-dimensional structural schematic diagram of the column of the utility model;

[0021] Figure 7 It is a three-dimensional structural schematic diagram of the shielding cover of the utility model;

[0022] Figure 8 For the utility model Figure 7 Schematic diagram of the enlarged structure of D in the middle;

[0023] In the figure: 1. Shielding cover; 2. Mounting beam; 3. Column; 4. Lifting slide cylinder; 5. Connecting plate; 11. Limiting column; 12. Opening and closing plate; 13. Guide block; 14. Stabilizing column; 15. Reset spring; 21. Fixed beam; 22. Fixed plate; 31. Limiting ear; 32. Guide groove; 121. Rotating cylinder; 211. Limiting hole; 212. Bidirectional screw; 213. Sliding block; 2131. Positioning column. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] Example 1

[0026] See also Figures 1 to 7The utility model provides a technical solution: a shielding cover with a mounting structure, comprising a shielding cover 1 with a split structure and a mounting beam frame 2, as well as a fixedly connected column 3 and a lifting slide cylinder 4, wherein the shielding cover 1 shields the internal detection device and the workpiece of the semiconductor detection equipment to prevent the internal device and the workpiece from being interfered by external impurities, resulting in large errors in the detection data; the mounting beam frame 2 comprises a fixed beam 21 and a fixed plate 22 with a split structure, wherein the fixed beam 21 is screwed together with the housing of the semiconductor detection equipment by screws, and the fixed beam 21 is screwed together with the housing of the semiconductor detection equipment by screws. 21 and the fixed plate 22 are screwed together, the column 3 is a rectangular parallelepiped structure, the column 3 and the lifting slide cylinder 4 are screwed together, and the lifting slide cylinder 4 is in operation. When the slide on the lifting slide cylinder 4 moves vertically upward, the connecting plate 5 and the shielding cover 1 move vertically upward, which does not affect the inspection personnel to take and place the workpiece or adjust the workpiece angle; the fixed beam 21 is provided with an adjustment component, which includes a bidirectional screw 212 and a symmetrically distributed slider 213, the bidirectional screw 212 passes through the slider 213, and the bidirectional screw 212 is installed on the fixed beam 21, the slider 213 is connected to the bidirectional screw 212 by screw thread, the bidirectional screw 212 is connected to the fixed beam 21 by a bearing, when the bidirectional screw 212 rotates, the symmetrical slider 213 slides, the slider 213 is provided with a positioning column 2131, the positioning column 2131 is perpendicular to the slider 213, the positioning column 2131 is connected to the slider 213 by screw thread, and the side of the column 3 is provided with a limiting ear 31 embedded in the fixed beam 21, the limiting ear 31 is connected to the column 3 by welding, and the limiting ear 31 is embedded in the fixed beam 21, the positioning column 2131 passes through the limiting ear 31 to fix the column 3. The installation method of the column 3 is simple, and the column 3 can be disassembled. The lifting slide cylinder 4 is provided with a connecting plate 5 connected with the shielding cover 1. The connecting plate 5 is connected to the lifting slide cylinder 4 and the shielding cover 1 by screws. The shielding cover 1 can be disassembled. A guide block 13 is provided on the opposite surface of the shielding cover 1. The guide block 13 is connected to the shielding cover 1 by screws. The guide block 13 is embedded in the column 3, and the guide block 13 plays the role of guiding the column 3.

[0027] In this embodiment, the fixed beam 21 is an inverted "U"-shaped structure, and a rectangular movable groove is provided on the opposite surface of the fixed beam 21, and the bidirectional screw 212 and the slider 213 are installed inside the movable groove. A fixing ring is passed through the center position of the bidirectional screw 212, and the fixing ring and the bidirectional screw 212 are connected by welding. The bidirectional screw 212 and the fixing ring rotate in the same direction, and a rectangular groove opposite to the fixing ring is provided on the surface of the fixed plate 22. The fixing ring and the bidirectional screw 212 can be moved to rotate, and a limiting hole 211 connected to the movable groove is provided on the side of the fixed beam 21, and the limiting ear 31 cooperates with the limiting hole 211. A through hole is provided on the surface of one end of the limiting ear 31, and the positioning column 2131 cooperates with the through hole gap. The bidirectional screw 212 rotates and causes the slider 213 to slide, and the positioning column 2131 passes through the limiting hole 211 to position the limiting ear 31.

[0028] In this embodiment, the connecting plate 5 is an "L"-shaped structure. A square plate that fits the surface of the shielding cover 1 is provided on one end of the connecting plate 5. One end of the connecting plate 5 is screwed together with the slide on the lifting slide cylinder 4. The shielding cover 1 is connected to the square plate. The slide on the lifting slide cylinder 4, the connecting plate 5 and the shielding cover 1 are lifted and lowered in the same direction.

[0029] In this embodiment, the guide block 13 on the opposite surface of the shielding shield 1 is in the shape of a rectangular parallelepiped, and a guide groove 32 adapted to the guide block 13 is opened on the surface of the column 3 facing the shielding shield 1. The guide block 13 is embedded in the guide groove 32, and the column 3 is in a fixed state. When the shielding shield 1 is driven to rise by the lifting slide cylinder 4, the guide block 13 is restricted by the column 3, so that the shielding shield 1 remains in a stable state during the upward movement process.

[0030] To sum up: the limiting ear 31 on the column 3 is embedded in the fixed beam 21. When the bidirectional screw 212 rotates, the symmetrical slider 213 slides, and the positioning column 2131 passes through the limiting ear 31, so that the column 3 is fixed. The installation method of the column 3 is simple, and the column 3 and the shielding cover 1 can be disassembled and assembled. The shielding cover 1 is driven to rise by the lifting slide cylinder 4, which does not affect the placement and adjustment of the workpiece. The shielding cover 1 shields the internal detection devices and workpieces of the semiconductor detection equipment to prevent the internal devices and workpieces from being interfered by external impurities.

[0031] Example 2

[0032] See also Figures 1 to 8 , which is the second embodiment of the utility model. This embodiment is based on the previous embodiment. In order to facilitate the observation of the workpiece, an opening and closing component and a rectangular observation port are provided on the side of the shielding cover 1. The opening and closing component includes an opening and closing plate 12 and a rotating cylinder 121 that are fixedly connected, as well as a stabilizing column 14 and a reset spring 15. The stabilizing column 14 that passes through the rotating cylinder 121 and the reset spring 15 is installed in the observation port of the shielding cover 1. The stabilizing column 14 is screwed together with the shielding cover 1 by screws. The two ends of the reset spring 15 are respectively connected to the inner wall of the shielding cover 1 and the opening and closing plate 12. When the opening and closing plate 12 is closed, the reset spring 15 is in a compressed state and generates elastic force. When the opening and closing plate 12 is opened outward, under the action of the elastic force of the reset spring 15, the opening and closing plate 12 is opened outward. At this time, the detection device and the workpiece state inside the semiconductor detection equipment can be observed.

[0033] In this embodiment, a limiting column 11 is rotatably connected to the surface of the shielding shield 1. A rotating column passes through one end of the limiting column 11. The rotating column is connected to the surface of the shielding shield 1. The limiting column 11 rotates around the rotating column. A pinch rod is vertically provided on the limiting column 11. The limiting column 11 is tangent to the side of the shielding shield 1. The limiting column 11 plays a role in blocking the opening and closing plate 12. The surface opening and closing plate 12 opens outward under the elastic force of the reset spring 15.

[0034] In summary, the opening and closing plate 12 can be opened without raising the shielding cover 1, and the states of the detection devices and workpieces inside the semiconductor detection equipment can be observed through the observation port on the shielding cover 1, which is convenient for operation.

[0035] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A shielding cover with a mounting structure, comprising a shielding cover (1) of a split structure and a mounting beam (2), and a fixedly connected column (3) and a lifting slide cylinder (4), characterized in that: The mounting beam frame (2) comprises a fixed beam (21) and a fixed plate (22) of a split structure, the fixed beam (21) is provided with an adjustment component, the adjustment component comprises a bidirectional screw (212) and a symmetrically distributed slider (213), the bidirectional screw (212) passes through the slider (213), the bidirectional screw (212) is installed inside the fixed beam (21), the slider (213) is provided with a positioning column (2131), the side of the column (3) is provided with a limiting ear (31) embedded in the fixed beam (21), the lifting slide cylinder (4) is provided with a connecting plate (5) connected to the shielding cover (1), and the shielding cover (1) is provided with a guide block (13) on the opposite surface.

2. The shielding cover with a mounting structure according to claim 1, characterized in that: The fixed beam (21) is an inverted "U"-shaped structure. A rectangular movable groove is provided on the opposite surface of the fixed beam (21). The bidirectional screw (212) and the slider (213) are installed inside the movable groove. A fixing ring is passed through the center of the bidirectional screw (212). A rectangular groove opposite to the fixing ring is provided on the surface of the fixed plate (22).

3. The shielding cover with a mounting structure according to claim 2, characterized in that: A limiting hole (211) communicating with the movable groove is provided on the side of the fixed beam (21), and the limiting ear (31) cooperates with the limiting hole (211).

4. The shielding cover with a mounting structure according to claim 1, characterized in that: A through hole is provided on the surface of one end of the limiting ear (31), and the positioning column (2131) is loosely matched with the through hole.

5. The shielding cover with a mounting structure according to claim 1, characterized in that: The connecting plate (5) is an "L"-shaped structure, and one end of the connecting plate (5) is provided with a square plate that fits the surface of the shielding cover (1).

6. The shielding cover with a mounting structure according to claim 1, characterized in that: The guide block (13) on the opposite surface of the shielding cover (1) is in the shape of a rectangular parallelepiped, and a guide groove (32) adapted to the guide block (13) is provided on the surface of the column (3) facing the shielding cover (1).

7. The shielding cover with a mounting structure according to claim 1, characterized in that: An opening and closing assembly and a rectangular observation port are provided on the side of the shielding shield (1), and the opening and closing assembly comprises an opening and closing plate (12) and a rotating cylinder (121) that are fixedly connected, as well as a stabilizing column (14) and a reset spring (15). The stabilizing column (14) that passes through the rotating cylinder (121) and the reset spring (15) is installed in the observation port of the shielding shield (1), and the two ends of the reset spring (15) are respectively connected to the inner wall of the shielding shield (1) and the opening and closing plate (12).

8. The shielding cover with a mounting structure according to claim 1, characterized in that: A limiting column (11) is rotatably connected to the surface of the shielding cover (1), a pinching rod is vertically provided on the limiting column (11), and the limiting column (11) is tangent to the side surface of the shielding cover (1).

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