Waste liquid collecting device for silicon wafer cleaning machine

Abstract

The utility model relates to the technical field of silicon wafer cleaning, and discloses a waste liquid collecting device for a silicon wafer cleaning machine, which comprises a cleaning machine main body and a base, one side of the upper end of the base is fixedly connected with a fixing frame, one side of the fixing frame is fixedly provided with a conveying pump, a conveying pipe is fixedly connected between the conveying pump and the cleaning machine main body, and the conveying pipe is fixedly connected with the base. The upper end of the fixing frame is fixedly connected with a filter box, a discharging pipe is fixedly connected between the conveying pump and the filter box, and the filter box and the fixing frame are arranged in a penetrating mode. According to the waste liquid collecting device, when waste water in the corresponding liquid storage barrel is accumulated to a certain degree, the driving motor can be started to enable the rotating base to rotate, and then the unoccupied liquid storage barrel can be rotated to the position below the filtering box, so that the barrel replacing time is fully shortened, and the waste liquid collecting efficiency is improved; therefore, fixed limitation on the liquid storage barrel needing to be transferred can be removed, and the liquid storage barrel can be transferred immediately.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer cleaning, in particular to a waste liquid collecting device used for a silicon wafer cleaning machine. Background Art

[0002] In order to ensure the cleanliness of the silicon wafer surface, it is necessary to use cleaning equipment to clean the silicon wafer. The relevant silicon wafer cleaning machine will produce certain waste liquid and pollutants during use. In order to avoid direct discharge and pollution of the environment, a waste liquid collection device is usually used to effectively collect the waste liquid generated during the cleaning process, so that the wastewater can be uniformly transferred later and sent to the corresponding treatment equipment or treatment system for further treatment.

[0003] The existing waste liquid collection device, when in use, has a waste liquid holding portion in the collection device that is usually single-positioned. When the waste liquid accumulates to a certain level, the collection device needs to be stopped and the holding portion needs to be transported and replaced. This process consumes a lot of time and affects the waste liquid collection efficiency. Therefore, those skilled in the art provide a waste liquid collection device for a silicon wafer cleaning machine to solve the problems raised in the above-mentioned background technology. Utility Model Content

[0004] The purpose of the utility model is to solve the shortcomings of the prior art and to propose a waste liquid collection device for a silicon wafer cleaning machine. When the waste water in the corresponding liquid storage barrel accumulates to a certain extent, the driving motor can be started to rotate the rotating seat, and the empty liquid storage barrel can be transferred to the bottom of the filter box, which can fully reduce the barrel changing time and improve the waste liquid collection efficiency.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a waste liquid collection device for a silicon wafer cleaning machine, comprising a cleaning machine body and a base, a fixing frame is fixedly connected to one side of the upper end of the base, a delivery pump is fixedly arranged on one side of the fixing frame, a delivery pipe is fixedly connected between the delivery pump and the cleaning machine body, a filter box is fixedly connected to the upper end of the fixing frame, a discharge pipe is fixedly connected between the delivery pump and the filter box, the filter box and the fixing frame are connected, a rotating seat is rotatably connected to the middle part of the upper end of the base, a plurality of placement grooves are opened on the upper end of the rotating seat, and liquid storage barrels are arranged inside the plurality of placement grooves;

[0006] A plurality of the placement grooves are provided with a force return groove on one side of the inner wall, a plurality of the force return grooves are provided with a locking block movably disposed inside the plurality of the force return grooves, a plurality of force return springs are fixedly connected between the plurality of the locking blocks and the inner wall on the opposite side of the corresponding force return grooves, a plurality of the outer walls of the liquid storage barrels are provided with a locking groove at the upper part of one side, a plurality of the force return grooves are provided with a first movable groove on the inner wall at the lower end, a plurality of the locking blocks are fixedly connected with a movable block at the lower end, a plurality of the first movable grooves are provided with a second movable groove on one side of the inner wall, and a plurality of the movable blocks are fixedly connected with a movable rod on one side;

[0007] Through the above technical scheme, when the wastewater in the corresponding liquid storage barrel accumulates to a certain extent, the empty liquid storage barrel can be turned under the filter box by controlling the rotation of the rotating seat, which can fully reduce the barrel changing time and improve the waste liquid collection efficiency. When the liquid storage barrel containing wastewater needs to be transferred, the corresponding locking block can be controlled to disengage from the locking groove by squeezing the movable rod, thereby releasing the fixed restriction on the liquid storage barrel to be transferred, and it can be transferred immediately. The overall operation is simple and fast, and the stable placement and fixed unlocking of the liquid storage barrel can be quickly achieved.

[0008] Furthermore, a filter screen is fixedly arranged inside the filter box, and electric telescopic rods are fixedly arranged at the front and rear of one side of the filter box, and the output ends of the two electric telescopic rods penetrate the filter box and are fixedly connected with a scrub brush, and the scrub brush is located above the filter screen and is arranged in contact with the filter screen;

[0009] Through the above technical scheme, by providing a filter net, the passing waste liquid can be filtered, so as to intercept solid impurities that may exist in the waste liquid, and by providing an electric telescopic rod and a brush, the brush can be reciprocated by starting the electric telescopic rod, so that the filter net can be cleaned, so that the solid impurities are swept aside, and the fluidity of the filter net is effectively maintained.

[0010] Furthermore, a fixing groove is provided inside the base, a driving motor is fixedly arranged inside the fixing groove, and an output end of the driving motor passes through the base and is fixedly connected to the rotating seat;

[0011] According to the above technical solution, a driving motor is provided, and the output end of the driving motor is fixedly connected to the rotating seat, so that the rotating seat can be rotated by starting the driving motor.

[0012] Furthermore, an annular groove is provided at the upper end of the base near the rotating seat, and support blocks are fixedly connected to both sides of the lower end of the rotating seat, and the two support blocks are slidably arranged in the annular groove;

[0013] Through the above technical solution, by providing the support block and the annular groove, the rotation process of the rotating seat is made more stable.

[0014] Furthermore, the plurality of movable blocks are movably arranged in the corresponding first movable grooves, the plurality of movable rods are movably arranged in the corresponding second movable grooves, and one end of the plurality of movable rods passes through the rotating seat to the outside;

[0015] Through the above technical solution, by movably setting multiple movable blocks in the corresponding first movable grooves, and movably setting multiple movable rods in the corresponding second movable grooves, the corresponding movable blocks can be moved by squeezing the movable rods, thereby controlling the corresponding locking blocks to move.

[0016] Furthermore, the plurality of locking blocks are all engaged and arranged in corresponding locking grooves;

[0017] Through the above technical solution, by engaging and setting a plurality of locking blocks in corresponding locking grooves, the liquid storage barrel can be restricted and fixed on the rotating seat, thereby ensuring working stability.

[0018] Furthermore, the front end of the filter box is hingedly connected with a sealing door;

[0019] According to the technical solution, by providing a sealing door, the inside of the filter box can be cleaned by opening the sealing door.

[0020] Furthermore, two grooves are provided at the upper part of the outer walls of the plurality of liquid storage barrels;

[0021] Through the above technical solution, the groove is provided, thereby facilitating the movement of the liquid storage barrel.

[0022] The utility model has the following beneficial effects:

[0023] 1. The utility model proposes a waste liquid collection device for a silicon wafer cleaning machine. When the waste water in the corresponding liquid storage barrel accumulates to a certain extent, the driving motor can be started to rotate the rotating seat, and the empty liquid storage barrel can be transferred to the bottom of the filter box, which can fully reduce the barrel replacement time and improve the waste liquid collection efficiency. In the drainage process, a filter net is provided in the filter box, so that the passing waste liquid can be filtered, thereby intercepting the solid impurities that may exist in the waste liquid. In addition, an electric telescopic rod and a brush are provided, and the brush can be reciprocated by starting the electric telescopic rod, so that the filter net can be cleaned, so that the solid impurities are swept aside, and the fluidity of the filter net is effectively maintained.

[0024] 2. The utility model proposes a waste liquid collection device for a silicon wafer cleaning machine. When it is necessary to transfer a liquid storage barrel containing waste water, the corresponding movable block can be moved by squeezing the movable rod, and then the corresponding locking block can be controlled to move and disengage from the locking groove, thereby releasing the fixed restriction on the liquid storage barrel to be transferred, and then it can be transferred. The overall operation is simple and quick, and the stable placement and fixed unlocking of the liquid storage barrel can be quickly achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is an axonometric schematic diagram of a waste liquid collection device for a silicon wafer cleaning machine proposed by the utility model;

[0026] Figure 2 This is a front cross-sectional schematic diagram of a waste liquid collection device for a silicon wafer cleaning machine proposed by the utility model;

[0027] Figure 3 for Figure 2 A schematic diagram of the structure enlargement at the center A;

[0028] Figure 4 This is a top cross-sectional schematic diagram of a waste liquid collection device for a silicon wafer cleaning machine proposed by the utility model;

[0029] Figure 5 The utility model is a partial front section schematic diagram of a waste liquid collection device for a silicon wafer cleaning machine.

[0030] Legend:

[0031] 1. Cleaning machine body; 2. Base; 3. Fixed frame; 4. Delivery pump; 5. Delivery pipe; 6. Discharge pipe; 7. Filter box; 8. Rotating seat; 9. Placement slot; 10. Liquid storage barrel; 11. Fixed slot; 12. Driving motor; 13. Filter screen; 14. Electric telescopic rod; 15. Brush; 16. Back-force slot; 17. Locking block; 18. Back-force spring; 19. Locking slot; 20. First movable slot; 21. Movable block; 22. Second movable slot; 23. Movable rod; 24. Support block; 25. Annular slot; 26. Groove; 27. Sealing door. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the specific implementation of the utility model to clearly and completely describe the technical solutions in the specific implementation of the utility model. Obviously, the specific implementation described is only a part of the specific implementation of the utility model, not all of the specific implementation. Based on the specific implementation of the utility model, all other specific implementations obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0033] Reference Figure 1-5The utility model provides a specific embodiment: a waste liquid collection device for a silicon wafer cleaning machine, comprising a cleaning machine body 1 and a base 2, a fixing frame 3 is fixedly connected to one side of the upper end of the base 2, a delivery pump 4 is fixedly arranged on one side of the fixing frame 3, a delivery pipe 5 is fixedly connected between the delivery pump 4 and the cleaning machine body 1, a filter box 7 is fixedly connected to the upper end of the fixing frame 3, a discharge pipe 6 is fixedly connected between the delivery pump 4 and the filter box 7, the filter box 7 and the fixing frame 3 are connected, a filter screen 13 is fixedly arranged inside the filter box 7, and one side of the filter box 7 is fixed at the front and rear. An electric telescopic rod 14 is fixedly provided, and the output ends of the two electric telescopic rods 14 both penetrate the filter box 7 and are fixedly connected with a scrub brush 15. The scrub brush 15 is located above the filter screen 13 and is arranged in contact with the filter screen 13. By providing the filter screen 13, the passing waste liquid can be filtered, so that solid impurities that may exist in the waste liquid can be intercepted. By providing the electric telescopic rod 14 and the scrub brush 15, the scrub brush 15 can be reciprocated by starting the electric telescopic rod 14, so that the filter screen 13 can be cleaned, so that the solid impurities are swept aside, and the filter screen 13 can be effectively maintained. The flowability of the filter screen 13, the front end hinge of the filter box 7 is connected with a sealing door 27, and the sealing door 27 is provided, and the inside of the filter box 7 can be cleaned by opening the sealing door 27. The middle part of the upper end of the base 2 is rotatably connected with a rotating seat 8, and the upper end of the rotating seat 8 is provided with a plurality of placement grooves 9, and the interiors of the plurality of placement grooves 9 are all provided with liquid storage barrels 10. The interior of the base 2 is provided with a fixed groove 11, and the interior of the fixed groove 11 is fixedly provided with a driving motor 12, and the output end of the driving motor 12 passes through the base 2 and is fixedly connected to the rotating seat 8. The output end of the driving motor 12 is fixedly connected to the rotating seat 8, and the rotating seat 8 can be rotated by starting the driving motor 12. An annular groove 25 is provided at the upper end of the base 2 near the rotating seat 8. Support blocks 24 are fixedly connected to both sides of the lower end of the rotating seat 8. The two support blocks 24 are slidably arranged in the annular groove 25. The support blocks 24 and the annular groove 25 make the rotation process of the rotating seat 8 more stable. Two grooves 26 are provided at the upper part of the outer wall of the plurality of liquid storage barrels 10. The grooves 26 facilitate the movement of the liquid storage barrels 10.

[0034] A plurality of restoring grooves 16 are provided on one side of the inner wall of each placement groove 9, and a locking block 17 is movably provided inside each of the plurality of restoring grooves 16, and a plurality of restoring springs 18 are fixedly connected between each of the plurality of locking blocks 17 and the inner wall on the opposite side of the corresponding restoring groove 16, and a locking groove 19 is provided on one side of the outer wall of each of the plurality of liquid storage barrels 10, and the plurality of locking blocks 17 are engaged in the corresponding locking groove 19, and the liquid storage barrel 10 can be restricted and fixed on the rotating seat 8 by engaging the plurality of locking blocks 17 in the corresponding locking groove 19, so as to ensure working stability, and a first movable groove 20 is provided on the inner wall at the lower end of each of the plurality of restoring grooves 16, and the lower ends of the plurality of locking blocks 17 are A movable block 21 is fixedly connected, and a second movable groove 22 is opened on the inner wall of one side of multiple first movable grooves 20. A movable rod 23 is fixedly connected to one side of multiple movable blocks 21. Multiple movable blocks 21 are movably set in the corresponding first movable grooves 20, and multiple movable rods 23 are movably set in the corresponding second movable grooves 22. One end of multiple movable rods 23 penetrates the rotating seat 8 to the outside. By movably setting multiple movable blocks 21 in the corresponding first movable grooves 20 and movably setting multiple movable rods 23 in the corresponding second movable grooves 22, the corresponding movable block 21 can be moved by squeezing the movable rod 23, thereby controlling the corresponding locking block 17 to move.

[0035] Working principle: When in use, the waste liquid generated by the cleaning machine body 1 can be transported to the filter box 7 by starting the delivery pump 4, and the waste liquid can be filtered by the filter screen 13, so that solid impurities that may exist in the waste liquid can be intercepted, and the electric telescopic rod 14 and the brush 15 can be started to make the brush 15 move back and forth, so that the filter screen 13 can be cleaned, so that the solid impurities are swept aside, and the flowability of the filter screen 13 is effectively maintained. The filtered waste water will be directly discharged into the liquid storage barrel 10 for collection. When the corresponding liquid storage barrel 10 When the wastewater accumulates to a certain extent, the driving motor 12 can be started to rotate the rotating seat 8, and the empty liquid storage barrel 10 can be transferred to the bottom of the filter box 7, which can substantially reduce the barrel changing time and improve the waste liquid collection efficiency. When the liquid storage barrel 10 containing wastewater needs to be transferred, the corresponding movable block 21 can be moved by squeezing the movable rod 23, and then the corresponding locking block 17 can be controlled to move and disengage from the locking groove 19, thereby releasing the fixed restriction on the liquid storage barrel 10 to be transferred, and then it can be transferred. The overall operation is simple and fast, and the stable placement and fixed unlocking of the liquid storage barrel 10 can be quickly achieved.

[0036] Finally, it should be noted that the above is only a preferred specific implementation method of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned specific implementation methods, those skilled in the art can still modify the technical solutions recorded in the aforementioned specific implementation methods, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A waste liquid collection device for a silicon wafer cleaning machine, comprising a cleaning machine body (1) and a base (2), characterized in that: A fixed frame (3) is fixedly connected to one side of the upper end of the base (2), a delivery pump (4) is fixedly arranged on one side of the fixed frame (3), a delivery pipe (5) is fixedly connected between the delivery pump (4) and the cleaning machine body (1), a filter box (7) is fixedly connected to the upper end of the fixed frame (3), a discharge pipe (6) is fixedly connected between the delivery pump (4) and the filter box (7), the filter box (7) and the fixed frame (3) are connected, a rotating seat (8) is rotatably connected to the middle part of the upper end of the base (2), a plurality of placement grooves (9) are provided at the upper end of the rotating seat (8), and a liquid storage barrel (10) is arranged inside each of the plurality of placement grooves (9); A plurality of the placement grooves (9) are provided with a force return groove (16) on one side of the inner wall, a plurality of the force return grooves (16) are provided with a locking block (17) movably arranged inside, a plurality of the force return springs (18) are fixedly connected between the plurality of the locking blocks (17) and the inner wall of the corresponding force return groove (16) on the opposite side, a plurality of the outer walls of the liquid storage barrels (10) are provided with a locking groove (19) on the upper side, a plurality of the force return grooves (16) are provided with a first movable groove (20) on the inner wall at the lower end, a plurality of the locking blocks (17) are fixedly connected with a movable block (21) at the lower end, a plurality of the first movable grooves (20) are provided with a second movable groove (22) on one side of the inner wall, and a plurality of the movable blocks (21) are fixedly connected with a movable rod (23) on one side.

2. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: A filter screen (13) is fixedly arranged inside the filter box (7), and electric telescopic rods (14) are fixedly arranged at the front and rear positions of one side of the filter box (7). The output ends of the two electric telescopic rods (14) penetrate the filter box (7) and are fixedly connected to a scrub brush (15). The scrub brush (15) is located above the filter screen (13) and is arranged in contact with the filter screen (13).

3. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: A fixing groove (11) is provided inside the base (2), a driving motor (12) is fixedly arranged inside the fixing groove (11), and an output end of the driving motor (12) passes through the base (2) and is fixedly connected to the rotating seat (8).

4. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: An annular groove (25) is provided at the upper end of the base (2) near the rotating seat (8), and support blocks (24) are fixedly connected to both sides of the lower end of the rotating seat (8), and the two support blocks (24) are slidably arranged in the annular groove (25).

5. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: The plurality of movable blocks (21) are all movably arranged in the corresponding first movable grooves (20), the plurality of movable rods (23) are all movably arranged in the corresponding second movable grooves (22), and one end of the plurality of movable rods (23) passes through the rotating seat (8) to the outside.

6. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: The plurality of locking blocks (17) are all snap-fitted into corresponding locking grooves (19).

7. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: The front end of the filter box (7) is hingedly connected with a sealing door (27).

8. The waste liquid collection device for a silicon wafer cleaning machine according to claim 1, characterized in that: Two grooves (26) are provided at the upper part of the outer walls of the plurality of liquid storage barrels (10).

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