Adjustable crystal oscillator switching structure

Abstract

The utility model discloses an adjustable crystal oscillator switching structure, which comprises a mounting plate, a probe seat, a driving mechanism and a separation blade, the mounting plate is mounted outside the evaporator; the probe seat is mounted in the evaporator, a pair of crystal oscillator probes is mounted on the probe seat, a connecting end is mounted on the mounting plate, and a pair of first transmission lines are connected between the probe seat and the connecting end; the driving mechanism is mounted on the mounting plate and comprises a second bracket, the second bracket is arranged outside the evaporator, a first cylinder is mounted on the second bracket, an output end of the first cylinder is connected with a magnetic fluid, the magnetic fluid is connected with the mounting plate, the magnetic fluid is connected with a connecting hose, and the connecting hose is connected with the probe seat; and the separation blade is arranged on the connecting hose and is rotationally connected with the probe seat. According to the utility model, the gap between the rotatable separation blade and the crystal oscillator probe can be reduced, so that steam is not easy to attach to the crystal oscillator probe, the probability that the crystal oscillator probe is coated with a film can be reduced, and the vacuum evaporator can be stably used.

Description

Technical Field

[0001] The utility model belongs to the technical field of vapor deposition machines, and in particular relates to an adjustable crystal oscillator switching structure. Background Art

[0002] Vacuum evaporation machine is a device for manufacturing thin films. It heats metal or materials in a high vacuum environment to change them from solid to gas, then forms a thin film on the surface of the substrate and attaches it to another substrate to improve the properties of the substrate. Vacuum evaporation machine has a wide range of applications, such as being used to manufacture high-quality metal films for use as electronic devices, optical devices and heat converters; can be used for electroplating, coatings, multi-layer metal films and UV protection, etc.

[0003] When the vacuum evaporation machine is in use, a crystal oscillator probe is required. When the crystal oscillator probe continuously detects the evaporation amount of the target material in the evaporator, its surface is easily coated with a film, which will affect the normal use of the crystal oscillator probe. For this reason, some crystal oscillator probes are provided with a rotatable baffle to reduce the probability of the crystal oscillator probe being coated. However, when the rotatable baffle is in use, there is still a gap between it and the crystal oscillator probe, which makes it easy for steam to enter the gap between the baffle and the crystal oscillator probe and adhere to the surface of the crystal oscillator probe, resulting in relatively poor protection effect.

[0004] The information disclosed in this background technology section is only intended to increase the understanding of the overall background of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to a person skilled in the art. Utility Model Content

[0005] The utility model aims to provide an adjustable crystal oscillator switching structure, which can solve the problem that the rotatable baffle of a vacuum evaporation machine has a poor protective effect on the crystal oscillator probe.

[0006] In order to achieve the above purpose, the technical solution provided by a specific embodiment of the utility model is as follows:

[0007] An adjustable crystal oscillator switching structure includes: a mounting plate, a probe seat, a driving mechanism and a baffle;

[0008] The mounting plate is mounted outside the evaporation machine;

[0009] The probe seat is installed in the evaporation machine, a pair of crystal oscillator probes are installed on the probe seat, a connecting end is installed on the mounting plate, and a pair of first transmission lines are connected between the probe seat and the connecting end;

[0010] The driving mechanism is mounted on the mounting plate, the driving mechanism comprises a second bracket, the second bracket is arranged outside the vapor deposition machine, a first cylinder is mounted on the second bracket, a magnetic fluid is connected to an output end of the first cylinder, the magnetic fluid is connected to the mounting plate, a connecting hose is connected to the magnetic fluid, and the connecting hose is connected to the probe seat;

[0011] The baffle is installed on the connecting hose and is rotatably connected to the probe base. The baffle corresponds to the crystal oscillator probe, and a sealing protection mechanism is installed on the baffle.

[0012] In one or more embodiments of the present invention, a pair of joints are installed on the probe seat, and each of the pair of joints is connected to a water cooling pipe, and a coolant can flow in the water cooling pipe to cool the probe seat.

[0013] In one or more embodiments of the utility model, a first bracket is installed on the mounting plate, and the first bracket is used to install the amplifier;

[0014] A pair of amplifiers are installed on the first bracket, and a second transmission line is connected between the pair of amplifiers and the connecting end respectively. The data measured by the crystal oscillator probe is transmitted to the connecting end through the first transmission line, and then transmitted to the amplifier through the second transmission line, and the amplifier is used to amplify the signal output.

[0015] In one or more embodiments of the utility model, the sealing protection mechanism includes a second cylinder, the second cylinder is fixedly mounted on the baffle, and the second cylinder is used to control the movement of the contact plate, so that the baffle is not easy to collide with the crystal oscillator probe when rotating, thereby reducing the probability of damage to the crystal oscillator probe;

[0016] The free end of the second cylinder is connected with a contact plate, which is used to be close to the crystal oscillator probe, thereby reducing the gap between the baffle and the crystal oscillator probe, making it difficult for steam to pass through the gap and coat the surface of the crystal oscillator probe.

[0017] In one or more embodiments of the utility model, an elastic protective part and a sealing ring are installed on the contact plate, and the sealing ring is arranged on the outside of the elastic protective part. The elastic protective part corresponds to the crystal oscillator probe. The elastic protective part is used to increase the contact effect between the contact plate and the crystal oscillator probe, and further reduce the gap between the crystal oscillator probe and the baffle. The sealing ring is used to further seal the gap, so that steam is not easy to enter the gap, thereby reducing the probability of the crystal oscillator probe being coated.

[0018] In one or more embodiments of the present invention, the elastic protective member and the sealing ring are both made of rubber material. Rubber has the property of high temperature resistance, thereby ensuring the protective effect on the crystal oscillator probe.

[0019] In one or more embodiments of the present invention, a telescopic protective sleeve is installed on the outer side of the second cylinder, the telescopic protective sleeve is arranged between the baffle and the contact plate, and is used to protect the second cylinder.

[0020] In one or more embodiments of the utility model, a pair of guide rods are fixedly connected to the contact plate, the pair of guide rods are symmetrical about the second cylinder, and the guide rods are slidably connected to the baffle. Through the setting of the pair of guide rods, the contact plate is more stable when sliding, thereby ensuring the protective effect of the contact plate on the second bracket.

[0021] In one or more embodiments of the utility model, a limiting column is connected to one end of the guide rod away from the contact plate, and the diameter of the limiting column is larger than that of the guide rod. The limiting column is used to limit the sliding of the guide rod and the contact plate, so that the contact plate is not easy to produce hard contact with the probe seat, thereby reducing the probability of the crystal oscillator probe being damaged by the contact plate, thereby ensuring the safety of the crystal oscillator probe.

[0022] In one or more embodiments of the utility model, a cover plate is slidably connected to the probe seat, and the cover plate can further protect the crystal oscillator probe;

[0023] A pair of extension tubes are installed on the cover plate, and the pair of extension tubes respectively correspond to the pair of crystal oscillator probes. The baffle is arranged between the crystal oscillator probe and the cover plate. The arrangement of the extension tubes can further reduce the influence of steam on the crystal oscillator probe.

[0024] Compared with the prior art, the adjustable crystal oscillator switching structure of the utility model can reduce the gap between the rotatable baffle and the crystal oscillator probe, making it difficult for steam to adhere to the crystal oscillator probe, thereby reducing the probability of the crystal oscillator probe being coated and ensuring that the vacuum evaporation machine can be used stably. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 A three-dimensional diagram of an adjustable crystal oscillator switching structure in an embodiment of the utility model;

[0027] Figure 2 for Figure 1 Schematic diagram of the structure at A in the middle;

[0028] Figure 3Another perspective view of the adjustable crystal oscillator switching structure in one embodiment of the utility model;

[0029] Figure 4 It is a partial structural diagram of an adjustable crystal oscillator switching structure in one embodiment of the utility model;

[0030] Figure 5 for Figure 4 Schematic diagram of the structure at B in the middle;

[0031] Figure 6 for Figure 4 Schematic diagram of the structure at point C in the middle.

[0032] Description of main reference numerals:

[0033] 1-mounting plate, 2-probe seat, 201-crystal oscillator probe, 202-first transmission line, 203-connecting end, 204-first bracket, 205-amplifier, 206-second transmission line, 3-driving mechanism, 301-second bracket, 302-first cylinder, 303-magnetic fluid, 304-connecting hose, 4-blocking piece, 401-second cylinder, 402-contact plate, 403-elastic protective piece, 404-telescopic protective cover, 405-sealing ring, 406-guide rod, 407-limiting column, 5-cover plate, 501-extension tube. DETAILED DESCRIPTION

[0034] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0035] like Figure 1-Figure 6 As shown, the adjustable crystal oscillator switching structure in an embodiment of the utility model includes a mounting plate 1, a probe seat 2, a driving mechanism 3 and a baffle 4.

[0036] The mounting plate 1 is installed outside the vapor deposition machine, and the mounting plate 1 is used to install the driving mechanism 3 and the first bracket 204 .

[0037] like Figure 1-Figure 6 As shown, the probe holder 2 is installed in the evaporation machine, and a pair of crystal oscillator probes 201 are installed on the probe holder 2. The crystal oscillator probes 201 can be used to detect the evaporation amount of the target material of the evaporator.

[0038] A connection terminal 203 is installed on the mounting plate 1 , a pair of first transmission lines 202 are connected between the probe base 2 and the connection terminal 203 , and data measured by the crystal oscillator probe 201 is transmitted to the connection terminal 203 through the first transmission line 202 .

[0039] In addition, a pair of joints are installed on the probe base 2 , and water cooling pipes are connected to the pair of joints. Cooling liquid can flow in the water cooling pipes to cool the probe base 2 .

[0040] Specifically, a first bracket 204 is installed on the mounting plate 1, and the first bracket 204 is used to install an amplifier 205. A pair of amplifiers 205 are installed on the first bracket 204, and a second transmission line 206 is respectively connected between the pair of amplifiers 205 and the connection end 203. The data measured by the crystal oscillator probe 201 is transmitted to the connection end 203 through the first transmission line 202, and then transmitted to the amplifier 205 through the second transmission line 206, and the amplifier 205 amplifies the signal for output.

[0041] like Figure 1-Figure 6 As shown, the driving mechanism 3 is installed on the mounting plate 1 , and the driving mechanism 3 is used to drive the baffle 4 to rotate so that the baffle 4 can be used to cover different crystal oscillator probes 201 .

[0042] Among them, the driving mechanism 3 includes a second bracket 301, the second bracket 301 is arranged outside the evaporation machine, and a first cylinder 302 is installed on the second bracket 301. The output end of the first cylinder 302 is connected to a magnetic fluid 303, and the magnetic fluid 303 is connected to the mounting plate 1. A connecting hose 304 is connected to the magnetic fluid 303, and the connecting hose 304 is connected to the probe seat 2.

[0043] like Figure 1-Figure 6 As shown, the baffle 4 is installed on the connecting hose 304 and is rotatably connected to the probe holder 2. When one of the crystal oscillator probes 201 is not in use, the baffle 4 can be used to shield the unused crystal oscillator probe 201, thereby reducing the probability of the baffle 4 being coated.

[0044] The baffle 4 corresponds to the crystal oscillator probe 201 , and a sealing protection mechanism is installed on the baffle 4 . The sealing protection mechanism can reduce the gap between the baffle 4 and the crystal oscillator probe 201 to ensure the protection effect of the baffle 4 on the crystal oscillator probe 201 .

[0045] like Figure 1-Figure 6 As shown, the sealing protection mechanism includes a second cylinder 401, which is fixedly mounted on the baffle 4. The second cylinder 401 is used to control the movement of the contact plate 402, so that the baffle 4 is not easy to collide with the crystal oscillator probe 201 when rotating, thereby reducing the probability of damage to the crystal oscillator probe 201.

[0046] The free end of the second cylinder 401 is connected to a contact plate 402 , which is used to be close to the crystal oscillator probe 201 , thereby reducing the gap between the baffle 4 and the crystal oscillator probe 201 , making it difficult for steam to pass through the gap and coat the surface of the crystal oscillator probe 201 .

[0047] In addition, an elastic protective member 403 and a sealing ring 405 are installed on the contact plate 402. The sealing ring 405 is arranged on the outside of the elastic protective member 403. The elastic protective member 403 corresponds to the crystal oscillator probe 201. The elastic protective member 403 is used to increase the contact effect between the contact plate 402 and the crystal oscillator probe 201, and further reduce the gap between the crystal oscillator probe 201 and the baffle 4. The sealing ring 405 is used to further seal, so that steam is not easy to enter the gap, thereby reducing the probability of the crystal oscillator probe 201 being coated.

[0048] Preferably, the elastic protective member 403 and the sealing ring 405 are both made of rubber, which has the property of being resistant to high temperatures, thereby ensuring the protective effect on the crystal oscillator probe 201 .

[0049] Specifically, a telescopic protective cover 404 is installed on the outer side of the second cylinder 401 . The telescopic protective cover 404 is disposed between the blocking piece 4 and the contact plate 402 . The telescopic protective cover 404 is used to protect the second cylinder 401 .

[0050] like Figure 1-Figure 6 As shown, a pair of guide rods 406 are fixedly connected to the contact plate 402, and the pair of guide rods 406 are symmetrical about the second cylinder 401. The guide rods 406 are slidably connected to the baffle 4. Through the setting of the pair of guide rods 406, the contact plate 402 is more stable when sliding, thereby ensuring the protection effect of the contact plate 402 on the second bracket 301.

[0051] The end of the guide rod 406 away from the contact plate 402 is connected to a limiting post 407, and the diameter of the limiting post 407 is larger than the diameter of the guide rod 406. The limiting post 407 is used to limit the sliding of the guide rod 406 and the contact plate 402, so that the contact plate 402 is not easy to have a hard contact with the probe seat 2, thereby reducing the probability of the crystal oscillator probe 201 being damaged by the contact plate 402, and ensuring the safety of the crystal oscillator probe 201.

[0052] like Figure 1-Figure 6 As shown, a cover plate 5 is slidably connected to the probe base 2 , and the cover plate 5 can further protect the crystal oscillator probe 201 .

[0053] A pair of extension tubes 501 are installed on the cover plate 5, and the pair of extension tubes 501 correspond to the pair of crystal oscillator probes 201 respectively, and the baffle 4 is arranged between the crystal oscillator probes 201 and the cover plate 5. The arrangement of the extension tubes 501 can further reduce the influence of steam on the crystal oscillator probes 201.

[0054] In specific use, when one of the crystal oscillator probes 201 is not in use, the second cylinder 401 is controlled to extend, and the second cylinder 401 drives the contact plate 402 to fit the crystal oscillator probe 201 until the elastic protective member 403 contacts the crystal oscillator probe 201. At this time, the sealing ring 405 will be fixed between the baffle 4 and the probe seat 2. The present application can reduce the gap between the baffle 4 and the crystal oscillator probe 201 by utilizing the mutual cooperation of the contact plate 402, the elastic protective member 403 and the sealing ring 405, thereby reducing the probability of steam coating on the crystal oscillator probe 201 through the gap, thereby ensuring the protection effect of the crystal oscillator probe 201.

[0055] When the contact plate 402 slides, the guide rod 406 and the limit column 407 can be used to limit the sliding distance of the contact plate 402, so that the contact plate 402 is not easily hard squeezed with the probe seat 2, thereby reducing the probability of the probe seat 2 being damaged by the contact plate 402, ensuring that the crystal oscillator probe 201 can be used safely.

[0056] When the baffle 4 needs to be rotated, the second cylinder 401 is controlled to contract first, and the second cylinder 401 drives the contact plate 402, the elastic protective member 403 and the sealing ring 405 away from the probe base 2. When the distance between the contact plate 402 and the probe base 2 is greater than 5 cm, the first cylinder 302 can drive the baffle 4 to rotate through the magnetic fluid 303, which is convenient for using different crystal oscillator probes 201 for detection.

[0057] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0058] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. Adjustable crystal oscillator switching structure, characterized in that: include: A mounting plate, mounted outside the vapor deposition machine; A probe seat is installed in the evaporation machine, a pair of crystal oscillator probes are installed on the probe seat, a connecting end is installed on the mounting plate, and a pair of first transmission lines are connected between the probe seat and the connecting end; A driving mechanism is mounted on the mounting plate, the driving mechanism includes a second bracket, the second bracket is arranged outside the vapor deposition machine, a first cylinder is mounted on the second bracket, an output end of the first cylinder is connected to a magnetic fluid, the magnetic fluid is connected to the mounting plate, a connecting hose is connected to the magnetic fluid, and the connecting hose is connected to the probe seat; A baffle is installed on the connecting hose and is rotatably connected to the probe seat. The baffle corresponds to the crystal oscillator probe and a sealing protection mechanism is installed on the baffle.

2. The adjustable crystal oscillator switching structure according to claim 1, characterized in that: A pair of joints are installed on the probe seat, and water cooling pipes are connected to the pair of joints.

3. The adjustable crystal oscillator switching structure according to claim 2, characterized in that: A first bracket is installed on the installation plate, a pair of amplifiers is installed on the first bracket, and a second transmission line is respectively connected between the pair of amplifiers and the connection end.

4. The adjustable crystal oscillator switching structure according to claim 1, characterized in that: The sealing protection mechanism comprises a second cylinder, the second cylinder is fixedly mounted on the baffle, and a contact plate is connected to a free end of the second cylinder.

5. The adjustable crystal oscillator switching structure according to claim 4, characterized in that: An elastic protective member and a sealing ring are installed on the contact plate. The sealing ring is arranged on the outside of the elastic protective member. The elastic protective member corresponds to the crystal oscillator probe.

6. The adjustable crystal oscillator switching structure according to claim 5, characterized in that: The elastic protective member and the sealing ring are both made of rubber.

7. The adjustable crystal oscillator switching structure according to claim 5, characterized in that: A telescopic protective sleeve is installed on the outer side of the second cylinder, and the telescopic protective sleeve is arranged between the blocking piece and the contact plate.

8. The adjustable crystal oscillator switching structure according to claim 7, characterized in that: A pair of guide rods are fixedly connected to the contact plate, the pair of guide rods are symmetrical with respect to the second cylinder, and the guide rods are slidably connected to the baffle.

9. The adjustable crystal oscillator switching structure according to claim 8, characterized in that: One end of the guide rod away from the contact plate is connected to a limiting column, and the diameter of the limiting column is larger than the diameter of the guide rod.

10. The adjustable crystal oscillator switching structure according to claim 1, characterized in that: A cover plate is slidably connected to the probe seat, a pair of extension tubes is installed on the cover plate, the pair of extension tubes respectively correspond to a pair of crystal oscillator probes, and the baffle is arranged between the crystal oscillator probes and the cover plate.

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