Three-cavity superconductive strip roll-to-roll vacuum coating equipment

Abstract

The utility model discloses three-chamber superconductive tape roll-to-roll vacuum coating equipment, which comprises an unwinding chamber, a coating chamber, a winding chamber and an equipment base, the unwinding chamber, the coating chamber and the winding chamber are sequentially arranged on the equipment base, two sides of the coating chamber are respectively provided with a first chamber connecting pipe and a second chamber connecting pipe, and the first chamber connecting pipe and the second chamber connecting pipe are connected with the equipment base. The coating chambers are respectively connected to the unwinding chamber and the winding chamber through the first chamber connecting pipe and the second chamber connecting pipe, the equipment is mainly used for vacuum deposition of an oxide film layer on the surface of the superconducting strip, the left coating chamber and the right coating chamber are arranged, the winding system drives the steel strip to move, the automation degree is high, procedures and flow steps are reduced, the production efficiency is improved, and the production cost is reduced. And the working efficiency is improved, the working hours are shortened, the cost and damage caused by manual misoperation are reduced, the cost is saved, the utilization rate is high, and environmental protection is achieved.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating equipment, and particularly relates to a three-chamber superconducting tape roll-to-roll vacuum coating equipment. Background Art

[0002] High-temperature superconducting tape is a superconducting tape that has been developed in recent years and has great application prospects. It is widely used in superconducting current limiters, nuclear magnetic resonance, superconducting magnets, power cables, military industry and other industries. The typical structure of the second-generation high-temperature superconducting tape consists of four major structures: metal base tape, buffer layer, superconducting layer, and stabilization layer. Each layer is prepared by many complex processes. Each layer of unqualified process will have a great impact on the performance of the superconducting tape. However, due to the large size of the equipment and high energy consumption. The direct ultraviolet light type is facing the trend of elimination due to its low output and short life; we hope to improve the efficiency of heat treatment and save costs. To this end, a three-chamber superconducting tape roll-to-roll vacuum coating equipment is proposed. Utility Model Content

[0003] The utility model provides a safe and stable three-chamber superconducting tape roll-to-roll vacuum coating device which improves work efficiency, ensures production quality, reduces costs and manual operations, and can be used for coating superconducting tapes.

[0004] In order to achieve the above-mentioned purpose, the utility model provides a three-chamber superconducting tape roll-to-roll vacuum coating equipment, including an unwinding chamber, a coating chamber, a winding chamber and an equipment base, wherein the unwinding chamber, the coating chamber and the winding chamber are arranged on the equipment base in sequence, and chamber connecting pipe 1 and chamber connecting pipe 2 are respectively provided on both sides of the coating chamber, and the coating chamber is connected to the unwinding chamber and the winding chamber respectively through chamber connecting pipe 1 and chamber connecting pipe 2, and the equipment is mainly used for vacuum deposition of oxide film layers on the surface of superconducting tapes.

[0005] Preferably, the coating chamber is a square cavity structure, and the vacuum exhaust port of the equipment is at the back of the coating chamber. A U-shaped cooling water tank is partially welded on the outer wall of the coating chamber to cool the coating chamber with circulating water. The coating chamber has double doors on the front, and target doors 1 and 2 are respectively provided on both sides of the coating chamber. The coating chamber is divided into two in the middle, and a left coating chamber and a right coating chamber are provided.

[0006] Preferably, a high-temperature heater 1 is provided in the left coating chamber, which can heat the coated steel strip to a maximum of 900°C; magnetron palladium 1 and magnetron palladium 2 are installed on the side of the left coating chamber; magnetron palladium 1 and magnetron palladium 2 are arranged up and down and installed on a target door 1; target door 1 can be opened to facilitate target material replacement and equipment maintenance; magnetron palladium 1 and magnetron palladium 2 are also equipped with movable devices to adjust the target-substrate distance, and the adjustment distance is 80mm to 140mm; an upper water-cooled baffle 1 and a lower water-cooled baffle 1 are symmetrically provided at the upper and lower ends of the left coating chamber; the upper water-cooled baffle 1 and the lower water-cooled baffle 1 are respectively arranged above and below the high-temperature heater 1.

[0007] Preferably, a high-temperature heater 2 is provided in the right coating chamber, and magnetron palladium 3 and magnetron palladium 4 are installed on the side of the right coating chamber. Magnetron palladium 3 and magnetron palladium 4 are arranged up and down and installed on target door 2. Target door 2 can be opened to facilitate target material replacement and equipment maintenance. Magnetron palladium 3 and magnetron palladium 4 are also equipped with movable devices to adjust the target-substrate distance, and the adjustment distance is 80mm to 140mm. An upper water-cooled partition 2 and a lower water-cooled partition 2 are symmetrically provided at the upper and lower ends of the right coating chamber, and the upper water-cooled partition 2 and the lower water-cooled partition 2 are respectively arranged above and below the high-temperature heater 2.

[0008] Preferably, the unwinding chamber is a square cavity structure, the unwinding chamber is a front-opening door arrangement, a steel strip guide roller, a tension sensor roller and a steel strip guide roller are installed in the unwinding chamber, and the steel strip unwinding rollers are provided in three groups and are driven by a servo motor.

[0009] Preferably, the winding chamber is a square cavity structure, the unwinding chamber is a front-opening door arrangement, and the unwinding chamber is equipped with two steel belt guide rollers, two tension sensor rollers and two steel belt guide rollers. The steel belt unwinding rollers are provided in three groups and are driven by two servo motors.

[0010] Preferably, the left coating chamber and the right coating chamber are both provided with steel belt winding rollers, and there are five groups of steel belt winding rollers, which can allow the steel belt to move vertically in 10 lanes in a uniform speed in front of the magnetron target for coating. A servo motor 2 is provided outside the coating chamber, and a transmission sprocket is connected to one end of the steel belt winding roller located outside the coating chamber of the steel belt winding roller, and the transmission sprocket is driven by servo motor 2.

[0011] The beneficial effects of the utility model are:

[0012] The utility model provides left and right coating chambers and drives the steel strip to move through a winding system, so the degree of automation is high, the process and process steps are reduced, the work efficiency is improved, the working hours are shortened, the cost and damage caused by improper human operation are reduced, the cost is saved, the utilization rate is high and the environment is environmentally friendly. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the three-chamber superconducting tape roll-to-roll vacuum coating equipment of the utility model.

[0014] Figure 2 It is a top view structural schematic diagram of a three-chamber superconducting tape roll-to-roll vacuum coating device of the utility model.

[0015] In the figure: 1. unwinding chamber; 2. coating chamber; 3. winding chamber; 4. equipment base; 5. chamber connecting pipe 1; 6. chamber connecting pipe 2; 7. target door 1; 8. target door 2; 9. left coating chamber; 10. right coating chamber; 11. high temperature heater 1; 12. magnetron palladium 1; 13. magnetron palladium 2; 14. upper water-cooled partition 1; 15. high temperature heater 2; 16. magnetron palladium 3; 17. magnetron palladium 4; 18. upper water-cooled partition 2; 19. steel belt guide roller 1; 20. tension sensor roller 1; 21. steel belt guide roller 1; 22. steel belt guide roller 2; 23. tension sensor roller 2; 24. steel belt guide roller 2; 25. steel belt winding roller; 26. servo motor 1; 27. servo motor 3; 28. servo motor 2; 29. ​​transmission sprocket; 30. lower water-cooled partition 1; 31. lower water-cooled partition 2. DETAILED DESCRIPTION

[0016] The following is combined with Figure 1-2 , clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of them. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc. indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, specific orientation structure and operation, and therefore should not be understood as a limitation on the present invention.

[0018] The present embodiment provides a three-chamber superconducting tape roll-to-roll vacuum coating equipment, including an unwinding chamber, a coating chamber, a winding chamber and an equipment base, wherein the unwinding chamber, the coating chamber and the winding chamber are sequentially arranged on the equipment base, and chamber connecting pipe 1 and chamber connecting pipe 2 are respectively provided on both sides of the coating chamber, and the coating chamber is connected to the unwinding chamber and the winding chamber through chamber connecting pipe 1 and chamber connecting pipe 2 respectively. The equipment is mainly used for vacuum deposition of an oxide film layer on the surface of a superconducting tape.

[0019] In one embodiment, specifically, the coating chamber is arranged as a square cavity structure, a double door is arranged on the front of the coating chamber, a target door 1 and a target door 2 are arranged on both sides of the coating chamber respectively, and the coating chamber is divided into two in the middle to form a left coating chamber and a right coating chamber.

[0020] In one embodiment, specifically, a high-temperature heater 1 is provided in the left coating chamber, magnetron palladium 1 and magnetron palladium 2 are installed on the side of the left coating chamber, an upper water-cooled partition 1 and a lower water-cooled partition 1 are symmetrically provided at the upper and lower ends of the left coating chamber, and the upper water-cooled partition 1 and the lower water-cooled partition 1 are respectively provided above and below the high-temperature heater 1.

[0021] In one embodiment, specifically, a high-temperature heater 2 is provided in the right coating chamber, magnetron palladium 3 and magnetron palladium 4 are installed on the side of the right coating chamber, and an upper water-cooled partition 2 and a lower water-cooled partition 2 are symmetrically provided at the upper and lower ends of the right coating chamber, and the upper water-cooled partition 2 and the lower water-cooled partition 2 are respectively arranged above and below the high-temperature heater 2.

[0022] In one embodiment, specifically, the unwinding chamber is a square cavity structure, the unwinding chamber is a front-opening door arrangement, a steel strip guide roller, a tension sensor roller and a steel strip guide roller are installed in the unwinding chamber, and three groups of steel strip unwinding rollers are provided and driven by a servo motor.

[0023] In one embodiment, specifically, the winding chamber is a square cavity structure, the unwinding chamber is a front-opening door arrangement, and the unwinding chamber is equipped with two steel belt guide rollers, two tension sensor rollers and two steel belt guide rollers. There are three groups of steel belt unwinding rollers and they are driven by two servo motors.

[0024] In one embodiment, specifically, steel belt winding rollers are provided in the left coating chamber and the right coating chamber, and five groups of steel belt winding rollers are provided. Servo motor 2 is provided outside the coating chamber. A transmission sprocket is connected to one end of the steel belt winding roller located outside the coating chamber of the steel belt winding roller, and the transmission sprocket is driven by servo motor 2.

[0025] The working process of the three-chamber superconducting tape roll-to-roll vacuum coating equipment in this embodiment is as follows: the steel strip is threaded and the door is closed to evacuate the strip. While evacuating the strip, high-temperature heater 1 and high-temperature heater 2 start to heat and increase the temperature. When the vacuum degree and heating temperature reach the coating process requirements, servo motor 1, servo motor 2 and servo motor 3 drive the steel strip to move, and through magnetron palladium 1, magnetron palladium 2, magnetron palladium 3 and magnetron palladium 4, the required film layer is vacuum deposited on the surface of the steel strip.

[0026] The above contents are merely examples and explanations of the structure of the utility model. The technicians in this technical field may make various modifications or additions to the specific embodiments described or replace them in a similar manner. As long as they do not deviate from the structure of the utility model or exceed the scope defined in the claims, they should all fall within the protection scope of the utility model.

Claims

1. A three-chamber superconducting tape roll-to-roll vacuum coating equipment, characterized in that: The invention comprises an unwinding chamber, a coating chamber, a winding chamber and an equipment base, wherein the unwinding chamber, the coating chamber and the winding chamber are arranged on the equipment base in sequence, and chamber connecting pipe 1 and chamber connecting pipe 2 are respectively arranged on both sides of the coating chamber, and the coating chamber is connected to the unwinding chamber and the winding chamber respectively through chamber connecting pipe 1 and chamber connecting pipe 2, and the equipment is mainly used for vacuum deposition of oxide film layer on the surface of superconducting tape.

2. The three-chamber superconducting tape roll-to-roll vacuum coating equipment according to claim 1 is characterized in that: The coating chamber is arranged in a square cavity structure, with double doors on the front of the coating chamber, target door 1 and target door 2 are arranged under the two sides of the coating chamber respectively, and the coating chamber is divided into two in the middle to form a left coating chamber and a right coating chamber.

3. The three-chamber superconducting tape roll-to-roll vacuum coating equipment according to claim 2 is characterized in that: A high-temperature heater 1 is arranged in the left coating chamber, and magnetron palladium 1 and magnetron palladium 2 are installed on the side of the left coating chamber. An upper water-cooled baffle 1 and a lower water-cooled baffle 1 are symmetrically arranged at the upper and lower ends of the left coating chamber, and the upper water-cooled baffle 1 and the lower water-cooled baffle 1 are respectively arranged above and below the high-temperature heater 1.

4. The three-chamber superconducting tape roll-to-roll vacuum coating equipment according to claim 2, characterized in that: A high-temperature heater No. 2 is arranged in the right coating chamber, and magnetron palladium No. 3 and magnetron palladium No. 4 are installed on the side of the right coating chamber. An upper water-cooled baffle No. 2 and a lower water-cooled baffle No. 2 are symmetrically arranged at the upper and lower ends of the right coating chamber, and the upper water-cooled baffle No. 2 and the lower water-cooled baffle No. 2 are respectively arranged above and below the high-temperature heater No.

2.

5. The three-chamber superconducting tape roll-to-roll vacuum coating equipment according to claim 1, characterized in that: The unwinding chamber is a square cavity structure, and the unwinding chamber is arranged with a front door. A steel strip guide roller, a tension sensor roller and a steel strip guide roller are installed in the unwinding chamber. Three groups of steel strip unwinding rollers are provided and driven by a servo motor.

6. The three-chamber superconducting tape roll-to-roll vacuum coating equipment according to claim 1, characterized in that: The winding chamber is a square cavity structure, and the unwinding chamber is a front-opening door arrangement. Two steel strip guide rollers, two tension sensor rollers and two steel strip guide rollers are installed in the unwinding chamber. Three groups of steel strip unwinding rollers are provided and are driven by two servo motors.

7. The three-chamber superconducting tape roll-to-roll vacuum coating equipment according to claim 2, characterized in that: The left coating chamber and the right coating chamber are both provided with steel strip winding rollers, and there are five groups of steel strip winding rollers. Two servo motors are provided outside the coating chamber. One end of the steel strip winding roller located outside the coating chamber of the steel strip winding roller is connected with a transmission sprocket, and the transmission sprocket is driven by two servo motors.

Images