Crucible / furnace tube cleaning machine structure

Abstract

The utility model discloses a crucible / furnace tube cleaning machine structure which comprises a cabinet body made of a corrosion-resistant material, an operation table arranged in the cabinet body, a corrosion cleaning cavity with the bottom arranged in an inverted-T shape and provided with a liquid outlet, and a liquid outlet formed in the bottom of the corrosion cleaning cavity. The corrosion cleaning device is used for performing corrosion cleaning on the inner and outer surfaces of the crucible / furnace tube; the mechanical arm is used for placing the crucible / furnace tube on the corrosion cleaning device; the liquid medicine device, the pure water device and the nitrogen device are connected with the corrosion cleaning device through a four-way pipe. The corrosion cleaning device is arranged, the dynamic and inner and outer wall corrosion comprehensive cleaning technology is adopted, the cleaning effect is good, and the defects that in the past, the old furnace tube statically soaks stains, and the stains are left and cannot be cleaned thoroughly are overcome. The cleaning efficiency and quality are greatly improved, and the harm of corrosion to personnel is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of crucible / furnace tube corrosion cleaning, in particular to a crucible / furnace tube cleaning machine structure. Background Art

[0002] At present, most glass devices such as crucible long tubes, quartz long tubes, ball head long tubes, large and small heads in the semiconductor and microelectronics industries are difficult to clean, especially the narrow inner wall stains of crucible furnace tubes are difficult to remove. Many places still use primitive manual methods to soak and clean the workpieces with high-concentration liquid, which troubles the workers about the hazards of high-concentration liquid corrosion and the impact on the environment.

[0003] Therefore, the utility model provides a crucible / furnace tube cleaning machine structure to solve the above technical problems. Utility Model Content

[0004] Purpose of the utility model: To solve the problem that it is difficult to remove stains on the narrow inner wall of the crucible furnace tube in the prior art, and that many places still use primitive manual methods to soak and clean the workpieces with high-concentration liquid medicine, which troubles the workers about the hazards of high-concentration liquid medicine corrosion and the impact on the environment.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A crucible / furnace tube cleaning machine structure includes a cabinet made of corrosion-resistant material, an operating table is arranged in the cabinet, and further includes:

[0007] A corrosion cleaning chamber, wherein the corrosion cleaning chamber is opened on the operating table, the bottom of the corrosion cleaning chamber is arranged in a "convex" shape, and a drainage port is arranged at the bottom of the corrosion cleaning chamber;

[0008] A corrosion cleaning device, the corrosion cleaning device is arranged inside the corrosion cleaning chamber, and the corrosion cleaning device is used to perform corrosion cleaning on the inner and outer surfaces of the crucible / furnace tube;

[0009] A mechanical arm, which is arranged on an operating table and is used to place the crucible / furnace tube on the corrosion cleaning device;

[0010] A liquid medicine device, which is used to pump liquid medicine into the corrosion cleaning device to corrode the crucible / furnace tube;

[0011] A pure water device, which is used to pump pure water into the corrosion cleaning device to clean the crucible / furnace tube after the chemical solution is corroded;

[0012] A nitrogen device, which is used to transport heated nitrogen to the corrosion cleaning device to dry the crucible / furnace tube after pure water cleaning;

[0013] The liquid medicine device, the pure water device and the nitrogen device are connected to the corrosion cleaning device through a four-way pipe.

[0014] Furthermore, the corrosion cleaning device comprises:

[0015] A rotating disc, which is arranged at the bottom of the corrosion cleaning chamber and is driven to rotate by a motor;

[0016] A gas-liquid pipeline, which is arranged in a grid matrix at the bottom of the rotating disc, is connected to the liquid medicine device, the pure water device and the nitrogen device, and is interconnected. A main pipe is also arranged on the gas-liquid pipeline, and the main pipe extends to the outside through the corrosion cleaning chamber, and a pump is arranged on the main pipe;

[0017] A high-pressure spray column, wherein the interior of the high-pressure spray column is hollow and a plurality of the high-pressure spray columns are arranged in a matrix on the rotating disc, and spray holes are evenly arranged on the surface; the bottom of the high-pressure spray column is sealed and connected with the gas-liquid pipeline through a connector;

[0018] An annular spray pipe is arranged at the upper end of the rotating disc and is connected with the liquid medicine device, the pure water device and the nitrogen device.

[0019] Furthermore, the corrosion cleaning device also includes: an auxiliary clamp, which is an arc-shaped clamp set at the bottom of the high-pressure spray column; a basket rack, which is used to place the crucible / furnace tube and insert the crucible / furnace tube upside down on the high-pressure spray column.

[0020] Furthermore, a cover plate is provided on the surface of the corrosion cleaning box.

[0021] Furthermore, the liquid medicine device comprises:

[0022] A liquid medicine storage box, wherein a liquid medicine pipeline is provided on the liquid medicine storage box, and the liquid medicine pipeline is connected to a main pipe on the gas-liquid pipeline;

[0023] A medicine liquid control valve is arranged at the connection between the medicine liquid pipeline and the gas-liquid pipeline.

[0024] Furthermore, the pure water device comprises:

[0025] A pure water storage box, wherein a pure water pipeline is arranged on the pure water storage box, and the pure water pipeline is connected with a main pipe on the gas-liquid pipeline; a pure water valve, wherein the pure water valve is arranged at the connection between the liquid medicine pipeline and the gas-liquid pipeline.

[0026] Further, the nitrogen device comprises: a nitrogen heater, the nitrogen heater is connected to the nitrogen bottle, and after heating the nitrogen, the hot nitrogen is transported to the high-pressure spray column and the annular spray pipe through the nitrogen pipe;

[0027] A nitrogen valve is arranged at the connection between the nitrogen pipe and the gas-liquid pipeline.

[0028] Furthermore, an exhaust port is arranged on the side wall of the operating table, and the exhaust port is externally connected to an ion exchange technology purification device. An air purification system is arranged on the top of the cabinet to provide downward-blown clean air for the operating table.

[0029] Furthermore, the cabinet also includes: a waste liquid tank, which is used to collect waste liquid discharged from the drain port at the bottom of the corrosion cleaning chamber; a control system, which is used to perform PLC control on the robot arm of the liquid medicine device, pure water device, and nitrogen device and provide feedback through a human-machine interface; and a spray gun, which is used for secondary cleaning when the cleaning does not meet the standards.

[0030] Compared with the prior art, the beneficial effects of the utility model are:

[0031] The present application sets up a corrosion cleaning device and adopts dynamic and internal and external wall corrosion comprehensive cleaning technology, which has a good cleaning effect and changes the disadvantages of the old furnace tube static immersion stains remaining and not being cleaned. It greatly improves the cleaning efficiency and quality and reduces the harm of corrosion to personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0033] Figure 2 It is a schematic diagram of the local structure of the utility model;

[0034] Figure 3 for Figure 2 The structure of the is trying;

[0035] Figure 4 It is a front cross-sectional view of the corrosion cleaning device in the utility model;

[0036] Figure 5 It is a top view of the cross-section of the corrosion cleaning device in the utility model.

[0037] In the figure: 1. cabinet; 2. operating table; 3. corrosion cleaning chamber; 301. drain port; 4. robotic arm; 501. rotating disc; 502. motor; 503. gas-liquid pipeline; 504. main pipe; 505. pump; 506. high-pressure spray column; 507. annular spray pipe; 601. liquid medicine storage tank; 602. liquid medicine control valve; 701. pure water storage tank; 702. pure water valve; 801. nitrogen bottle; 802. nitrogen heater; 803. nitrogen valve; 9. exhaust port; 10. air purification system; 11. waste liquid tank; 12. human-machine interface. DETAILED DESCRIPTION

[0038] In the following description, a large number of specific details are given to provide a more thorough understanding of the utility model. However, it is obvious to those skilled in the art that the utility model can be implemented without one or more of these details. In other examples, in order to avoid confusion with the utility model, some technical features known in the art are not described.

[0039] The applicant believes that it is difficult to remove stains from the narrow inner wall of the crucible furnace tube in the prior art, and many places still use primitive manual methods to soak and clean the extracted workpieces with high-concentration liquid medicine, which troubles the workers about the hazards of high-concentration liquid medicine corrosion and the impact on the environment.

[0040] To this end, the applicant designed Figure 1-5 The structure of a crucible / furnace tube cleaning machine shown in the figure includes a cabinet 1 made of corrosion-resistant material, an operating table 2 is arranged in the cabinet 1, and also includes: a corrosion cleaning chamber 3, the corrosion cleaning chamber 3 is opened on the operating table 2, the bottom of the corrosion cleaning chamber 3 is arranged in a "convex" shape, and a drainage port 301 is arranged at the bottom of the corrosion cleaning chamber 3; a corrosion cleaning device, the corrosion cleaning device is arranged inside the corrosion cleaning chamber 3, and the corrosion cleaning device is used to perform corrosion cleaning on the inner and outer surfaces of the crucible / furnace tube; a mechanical arm 4, the mechanical arm 4 is arranged on the operating table 2, and is used to place the crucible / furnace tube on the corrosion cleaning device; a liquid medicine device, the liquid medicine device is used to pump 505 liquid medicine into the corrosion cleaning device to corrode the crucible / furnace tube; a pure water device, the pure water device is used to pump 505 pure water into the corrosion cleaning device to clean the crucible / furnace tube after liquid medicine corrosion; a nitrogen device, the nitrogen device is used to transport heated nitrogen to the corrosion cleaning device after pure water cleaning to dry the crucible / furnace tube; the liquid medicine device, the pure water device and the nitrogen device are connected to the corrosion cleaning device through a four-way pipe.

[0041] Further optionally, the crucible / furnace tube cleaning machine structure of this embodiment, the corrosion cleaning device includes: a rotating disc 501, the rotating disc 501 is arranged at the bottom of the corrosion cleaning chamber 3, and is driven to rotate by a motor 502; a gas-liquid pipeline 503, the gas-liquid pipeline 503 is arranged in a matrix at the bottom of the rotating disc 501, the gas-liquid pipeline 503 is connected with the liquid medicine device, the pure water device and the nitrogen device, and the gas-liquid pipelines 503 are interconnected, and a main pipe 504 is also arranged on the gas-liquid pipeline 503, and the main pipe 504 passes through the corrosion cleaning chamber 3. The corrosion cleaning chamber 3 extends to the outside, and a pump 505 is arranged on the main pipe 504; a high-pressure spray column 506, which is hollow inside and is arranged in a matrix through the rotating disc 501, and injection holes are evenly arranged on the surface; the bottom of the high-pressure spray column 506 is sealed and connected with the gas-liquid pipeline 503 through a connecting piece; an annular spray pipe 507, which is arranged at the upper end of the rotating disc 501, and is connected with the liquid medicine device, the pure water device and the nitrogen device.

[0042] In this embodiment, the high-pressure spray column 506 is made of polytetrafluoroethylene material with good chemical and physical properties such as high temperature resistance, wear resistance, and corrosion resistance. The four sides are rounded, there are no burrs to scratch the workpiece, and the service life is long. The high-pressure spray column 506 is easy to disassemble and assemble with the rotating disc 501, and the paths at the bottom of the rotating disc 501 are connected. A leakage sensor is provided at the junction between the bottom of the corrosion cleaning chamber 3 and the motor 502. When leakage occurs, the human-machine interface 12 alarms, and the motor 502 automatically stops running. Normal operation is restored after the fault is eliminated. The gas-liquid pipeline 503 has a self-cleaning function. When the frequency of use is high or the cleaning quality decreases, the comprehensive situation diagnosis can be performed, and the pipeline and cavity can be self-cleaned periodically to ensure the smooth path and cleanliness of each pipeline. The entire corrosion cleaning device is safe, practical, and has high cleaning quality and cleaning efficiency, providing quality and efficiency guarantees for the subsequent process.

[0043] Further optionally, the corrosion cleaning device also includes: an auxiliary clamp, which is an arc-shaped clamp arranged at the bottom of the high-pressure spray column 506 (not shown in the attached drawings). If a narrow and long workpiece is to be cleaned, a fluorine elastic O-ring or a ferrule disk can be used to fasten or position the end of the arc-shaped clamp; a basket rack, which is used to place the crucible / furnace tube, and the crucible / furnace tube is inserted upside down on the high-pressure spray column 506. The robotic arm loads the basket rack into the corrosion cleaning chamber 3. After the basket rack chuck is in place, the robotic arm withdraws and stands by (the basket rack structure is not an improvement point and is not shown in the attached drawings).

[0044] Further optionally, a cover plate is provided on the surface of the corrosion cleaning box, and the cover plate can be controlled to switch through a circuit.

[0045] Further optionally, the medicine liquid device of this embodiment includes: a medicine liquid storage box 601, on which a medicine liquid pipeline is provided, and the medicine liquid pipeline is connected to the gas-liquid pipeline 503; and a medicine liquid control valve 602, which is provided at the connection between the medicine liquid pipeline and the gas-liquid pipeline 503.

[0046] The pure water device includes: a pure water storage box 701 , on which a pure water pipeline is arranged, and the pure water pipeline is connected to the gas-liquid pipeline 503 ; a pure water valve 702 , which is arranged at the connection between the liquid medicine pipeline and the gas-liquid pipeline 503 .

[0047] The nitrogen device includes: a nitrogen heater 802, which is connected to a nitrogen bottle 801, and heats the nitrogen and then transports the hot nitrogen to a high-pressure spray column 506 and an annular spray pipe 507 through a nitrogen pipe; a nitrogen valve 803, which is arranged at the connection between the nitrogen pipe and the gas-liquid pipeline 503.

[0048] In the crucible / furnace tube cleaning machine structure of this embodiment, an exhaust port 9 is arranged on the side wall of the operating table 2, and the exhaust port 9 is externally connected to an ion exchange technology purification device. An air purification system 10 is arranged on the top of the cabinet 1 for providing downwardly blown clean gas for the operating table 2.

[0049] The air purification and filtration system ensures a clean airflow environment and prevents the temporary storage space of cleaned workpieces from being contaminated again. The exhaust port 9 is equipped with a pollution-free emission device after the exhaust gas and harmful particles are purified by ion exchange technology.

[0050] The crucible / furnace tube cleaning machine structure of this embodiment also includes in the cabinet 1: a waste liquid tank 11, which is used to collect waste liquid discharged from the drain port 301 at the bottom of the corrosion cleaning chamber 3; a control system, which is used to perform PLC control on the liquid device, pure water device, and nitrogen device robot 4 and provide feedback through the human-machine interface 12; and a spray gun, which is used for secondary cleaning when the cleaning does not meet the standards.

[0051] Working principle: the operator inserts the crucible hollow pipe upside down on the high-pressure spray column 506 in the corrosion cleaning chamber 3, starts the flap device to automatically close the flap, and then uses it after closed liquid corrosion, pure water cleaning, and nitrogen drying; when the equipment starts to run, the liquid is sprayed from the annular spray pipe 507 at the top of the corrosion cleaning chamber 3 and the grid matrix gas-liquid pipeline 503 at the bottom of the disc at the bottom of the cleaning tank injects the liquid through the spray holes on the high-pressure spray column 506 to thoroughly corrode and clean the inner and outer walls of the workpiece; at the same time , the rotation of the disc drives the liquid medicine to flow, so that the crucible furnace pipe fittings can be effectively corroded and cleaned from different angles and strengths; the liquid medicine is repeatedly corroded and cleaned, and finally pumped back to the liquid medicine barrel through pump 505; the liquid medicine valve is automatically closed, and then switched to inject deionized water or pure water for cleaning, and the above liquid medicine cleaning process is repeated. Finally, the quick drain valve drains the sewage, the pure water valve 702 is automatically closed, and the nitrogen valve 803 is automatically switched, and then the hot nitrogen is heated by the nitrogen heater 802 and injected into the hot nitrogen to dry the inner and outer walls of the pipe fittings. Finally, the automatic flip cover is opened, and the intelligent mechanical arm is used to grab the basket frame and transport it to the table platform of the operation area to prevent the risk of workers directly going to the cleaning chamber to take the parts. At the same time, the air purification system 10 is kept blowing clean new airflow in the cleaning machine operation area, and the vertical airflow pressure is pressed down to discharge the table or the harmful substances that are about to rise from the bottom of the punching table to prevent the workpieces that have been cleaned and nitrogen dried to be taken from being contaminated again. The harmful gases generated during the corrosion cleaning process in the corrosion cleaning chamber 3 are purified by the ion exchange technology purification device and discharged to the outside through the pollution-free exhaust duct. The operating table 2 adopts a CNC punching table to keep the operating table 2 dry and clean. Spray guns are arranged on the left and right to blow the workpiece. The cabinet 1 is also provided with a sliding door in the operating area. The sliding door in the operating area adopts an anti-pinch infrared sensor automatic lifting protective window to ensure efficient and convenient operation.

[0052] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A crucible / furnace tube cleaning machine structure, comprising a cabinet made of corrosion-resistant material, in which an operating table is arranged, characterized in that: Also includes: A corrosion cleaning chamber, wherein the corrosion cleaning chamber is opened on the operating table, the bottom of the corrosion cleaning chamber is arranged in a "convex" shape, and a drainage port is arranged at the bottom of the corrosion cleaning chamber; A corrosion cleaning device, the corrosion cleaning device is arranged inside the corrosion cleaning chamber, and the corrosion cleaning device is used to perform corrosion cleaning on the inner and outer surfaces of the crucible / furnace tube; A mechanical arm, which is arranged on an operating table and is used to place the crucible / furnace tube on the corrosion cleaning device; A liquid medicine device, which is used to pump liquid medicine into the corrosion cleaning device to corrode the crucible / furnace tube; A pure water device, which is used to pump pure water into the corrosion cleaning device to clean the crucible / furnace tube after the chemical solution is corroded; A nitrogen device, which is used to transport heated nitrogen to the corrosion cleaning device to dry the crucible / furnace tube after pure water cleaning; The liquid medicine device, the pure water device and the nitrogen device are connected to the corrosion cleaning device through a four-way pipe.

2. A crucible / furnace tube cleaning machine structure according to claim 1, characterized in that: The corrosion cleaning device comprises: A rotating disc, which is arranged at the bottom of the corrosion cleaning chamber and is driven to rotate by a motor; A gas-liquid pipeline, which is arranged in a grid matrix at the bottom of the rotating disc, is connected to the liquid medicine device, the pure water device and the nitrogen device, and is interconnected. A main pipe is also arranged on the gas-liquid pipeline, and the main pipe extends to the outside through the corrosion cleaning chamber, and a pump is arranged on the main pipe; A high-pressure spray column, wherein the interior of the high-pressure spray column is hollow and a plurality of the high-pressure spray columns are arranged in a matrix on the rotating disc, and spray holes are evenly arranged on the surface; the bottom of the high-pressure spray column is sealed and connected with the gas-liquid pipeline through a connector; An annular spray pipe is arranged at the upper end of the rotating disc and is connected with the liquid medicine device, the pure water device and the nitrogen device.

3. A crucible / furnace tube cleaning machine structure according to claim 2, characterized in that: The corrosion cleaning device also includes: an auxiliary fixture, which is a bow-shaped fixture arranged at the bottom of the high-pressure spray column; a basket rack, which is used to place the crucible / furnace tube and insert the crucible / furnace tube upside down on the high-pressure spray column.

4. A crucible / furnace tube cleaning machine structure according to any one of claims 2-3, characterized in that: A cover plate is arranged on the surface of the corrosion cleaning box.

5. The crucible / furnace tube cleaning machine structure according to claim 2, characterized in that: The liquid medicine device comprises: A liquid medicine storage box, wherein a liquid medicine pipeline is provided on the liquid medicine storage box, and the liquid medicine pipeline is connected to a main pipe on the gas-liquid pipeline; A medicine liquid control valve is arranged at the connection between the medicine liquid pipeline and the gas-liquid pipeline.

6. The crucible / furnace tube cleaning machine structure according to claim 2, characterized in that: The pure water device comprises: A pure water storage box, wherein a pure water pipeline is provided on the pure water storage box, and the pure water pipeline is connected to a main pipe on the gas-liquid pipeline; A pure water valve is arranged at the connection between the liquid medicine pipeline and the gas-liquid pipeline.

7. The crucible / furnace tube cleaning machine structure according to claim 2, characterized in that: The nitrogen device comprises: A nitrogen heater, which is connected to a nitrogen bottle, heats the nitrogen and then delivers the hot nitrogen to the high-pressure spray column and the annular spray pipe through a nitrogen pipe; A nitrogen valve is arranged at the connection between the nitrogen pipe and the gas-liquid pipeline.

8. The crucible / furnace tube cleaning machine structure according to claim 1, characterized in that: An exhaust port is arranged on the side wall of the operating table, and the exhaust port is externally connected to an ion exchange technology purification device. An air purification system is arranged on the top of the cabinet to provide downwardly blown clean air for the operating table.

9. The crucible / furnace tube cleaning machine structure according to claim 1, characterized in that: The cabinet also includes: a waste liquid tank, which is used to collect waste liquid discharged from the drain port at the bottom of the corrosion cleaning chamber; a control system, which is used to perform PLC control on the liquid medicine device, pure water device, and nitrogen device robotic arm and provide feedback through a human-machine interface; and a spray gun, which is used for secondary cleaning when the cleaning does not meet the standards.

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