Electrostatic chuck water channel anti-corrosion machining equipment

Abstract

The utility model discloses electrostatic chuck water channel anticorrosion processing equipment, which comprises a chuck installation seat, a cleaning tank, a decontamination tank and an oxidation tank, the chuck installation seat is used for fixing an electrostatic chuck, and a liquid inlet pipe and a liquid outlet pipe are arranged on the chuck installation seat and correspond to a liquid inlet and a liquid outlet on the electrostatic chuck. Liquid inlets and liquid outlets of the cleaning tank, the decontamination tank and the oxidation tank are respectively connected with a liquid inlet pipe and a liquid outlet pipe through pipelines to form three parallel loops, the cleaning tank is filled with cleaning liquid, the decontamination tank is filled with decontamination liquid, and the oxidation tank is filled with film forming liquid; the device has the beneficial effects that surface oxidation liquid is circularly introduced through the special interface, so that an anti-corrosion layer is formed in the water channel, and the effects of corrosion prevention and life prolonging are achieved; the device comprises a plurality of three-way pipes and can be seamlessly switched among processes such as pure water cleaning, air purging and surface treatment.

Description

Technical Field

[0001] The utility model relates to the technical field of electrostatic chucks, in particular to electrostatic chuck waterway anti-corrosion processing equipment. Background Art

[0002] Electrostatic chuck, also known as electrostatic suction cup, is a new type of suction cup that uses the principle of electrostatic adsorption to grab objects. Different from vacuum suction cup, electrostatic chuck can also effectively grab objects in a vacuum environment. It has better application prospects in high-end industries such as wafer processing and photovoltaic processing.

[0003] The structure of the electrostatic chuck used in the field of semiconductor wafer processing is equipped with a cooling channel, and air cooling or water cooling is used to control the temperature of the wafer. However, the efficiency of air cooling is limited. Water cooling is now mostly used, that is, coolant is passed into the coolant channel and the coolant is cooled by an external refrigerator to achieve the effect of controlling the temperature of the wafer adsorbed on the upper surface of the electrostatic chuck. At present, the metal base is mainly an aluminum base. The coolant will corrode the built-in water channel of the aluminum base, which will affect the heat dissipation capacity of the base and even block the water channel in severe cases. Utility Model Content

[0004] (I) Technical solution

[0005] In order to solve the above technical problems, the utility model provides an electrostatic chuck waterway anti-corrosion processing equipment.

[0006] The specific technical solutions are:

[0007] An electrostatic chuck waterway anti-corrosion processing equipment comprises a chuck mounting seat, a cleaning tank, a decontamination tank and an oxidation tank, wherein the chuck mounting seat is used to fix the electrostatic chuck, and the chuck mounting seat is provided with a liquid inlet pipe and a liquid outlet pipe, corresponding to the liquid inlet and liquid outlet on the electrostatic chuck, the liquid inlet and liquid outlet of the cleaning tank, the decontamination tank and the oxidation tank are respectively connected to the liquid inlet pipe and the liquid outlet pipe through pipelines to form three parallel circuits, the cleaning tank is filled with cleaning liquid, the decontamination tank is filled with decontamination liquid, and the oxidation tank is filled with film-forming liquid.

[0008] Furthermore, the film-forming liquid is Alodine 1200s.

[0009] Furthermore, the cleaning liquid is deionized water and the decontamination liquid is sodium hydroxide solution.

[0010] Furthermore, the liquid outlet pipelines of the cleaning tank, the decontamination tank and the oxidation tank are all connected to the wastewater pool through a three-way valve.

[0011] Furthermore, solenoid valves are provided on the liquid inlet pipelines of the cleaning tank, the decontamination tank and the oxidation tank.

[0012] Furthermore, the liquid inlet pipeline and the liquid outlet pipeline of the cleaning tank, the decontamination tank and the oxidation tank are respectively connected to the liquid inlet pipe and the liquid outlet pipe through a four-way pipe.

[0013] Furthermore, the liquid inlet pipe and the liquid outlet pipe are also connected to an air compressor and an exhaust pipe.

[0014] Furthermore, pH meters are provided on the pipelines of the cleaning tank, the decontamination tank and the oxidation tank.

[0015] (II) Beneficial effects

[0016] Compared with the prior art, the technical solution proposed by the utility model has the following advantages:

[0017] (1) This equipment circulates surface oxidation liquid through a special interface to produce an anti-corrosion layer inside the waterway, thereby achieving the effect of anti-corrosion and life extension;

[0018] (2) This equipment contains multiple three-way pipes, which can seamlessly switch between pure water cleaning, air purging, surface treatment and other processes;

[0019] (3) This equipment includes a waste liquid recovery device, which can improve the efficiency of surface treatment liquid use and protect the environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0021] Figure 1 This is a schematic diagram of the pipeline structure of Example 1;

[0022] In the figure: 1-chuck mounting seat, 2-cleaning tank, 3-decontamination tank, 4-oxidation tank, 5-liquid inlet pipe, 6-liquid outlet pipe, 7-three-way valve, 8-wastewater tank, 9-four-way pipe, 10-air compressor, 11-exhaust pipe, 12-pH meter, 13-solenoid valve. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the utility model embodiments to clearly and completely describe the technical solutions in the utility model embodiments. The described embodiments are only part of the utility model embodiments, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] In the related prior art, the coolant will corrode the built-in water channel of the aluminum base, which will affect the heat dissipation capacity of the base and even block the water channel in severe cases.

[0025] In order to solve the problems existing in the related prior art, the utility model proposes an electrostatic chuck waterway anti-corrosion processing equipment. The principle and structure of the utility model are described in detail below in conjunction with the drawings and embodiments.

[0026] Embodiment 1

[0027] See also Figure 1 The utility model proposes an electrostatic chuck waterway anti-corrosion processing equipment, including a chuck mounting seat 1, a cleaning tank 2, a decontamination tank 3 and an oxidation tank 4. The chuck mounting seat 1 is used to fix the electrostatic chuck, and the chuck mounting seat 1 is provided with a liquid inlet pipe 5 and a liquid outlet pipe 6, which correspond to the liquid inlet and liquid outlet on the electrostatic chuck. When the chuck is in use, the coolant passes through the pipeline inside the chuck to realize the temperature control of the wafer on the chuck. The liquid inlets and liquid outlets of the cleaning tank 2, the decontamination tank 3 and the oxidation tank 4 are respectively connected to the liquid inlet pipe 5 and the liquid outlet pipe 6 through pipelines to form three parallel loops. The cleaning tank 2 is filled with cleaning liquid, the decontamination tank 3 is filled with decontamination liquid, and the oxidation tank 4 is filled with film-forming liquid. The cleaning liquid is used to remove small particles appearing during processing inside the channel, the decontamination liquid is used to remove oil stains during processing, and the film-forming liquid is used to passivate and oxidize the film inside the channel to achieve a protective effect.

[0028] Specifically, the liquid outlet pipelines of the cleaning tank 2, the decontamination tank 3 and the oxidation tank 4 are all connected to the wastewater pool 8 through the three-way valve 7, and the liquid inlet pipelines of the cleaning tank 2, the decontamination tank 3 and the oxidation tank 4 are all provided with solenoid valves 13. In this way, when the cleaning liquid in the cleaning tank 2 needs to be passed into the channel, the three-way valves and the solenoid valve at both ends of the cleaning tank are ensured to be opened, and the valves at both ends of the other two tanks are closed to realize the circuit. Similarly, when the decontamination liquid of the decontamination tank 3 needs to be passed into the interior, the three-way valves and the solenoid valve at both ends of the decontamination tank 3 are opened, and the valves at both ends of the other tanks are closed to achieve the decontamination effect, and the oxidation passivation film is performed in the same way.

[0029] The liquid inlet and outlet pipelines of the cleaning tank 2, the decontamination tank 3 and the oxidation tank 4 are respectively connected to the liquid inlet pipe 5 and the liquid outlet pipe 6 through the four-way pipe 9, so that the three pipelines are connected to the same structure of the pipeline, the number of interfaces is reduced, and subsequent maintenance and overhaul are convenient.

[0030] Please continue reading Figure 1 The liquid inlet pipe 5 and the liquid outlet pipe 6 are also connected to an air compressor 10 and an exhaust pipe 11. After the oxidation passivation film is formed, air is introduced through the air compressor 10 to blow out the excess film-forming liquid in the pipeline to prevent blockage caused by excessive oxidation.

[0031] The liquid inlet pipelines of the cleaning tank 2, the decontamination tank 3 and the oxidation tank 4 are all provided with a pH meter 12. Since the film-forming reaction of the oxidation liquid mainly requires the control of the pH value during the reaction, the pH value in the pipeline is monitored in real time to ensure effective film formation.

[0032] Specifically, the film-forming liquid is Alodine 1200s, the cleaning liquid is deionized water, and the decontamination liquid is a sodium hydroxide solution, wherein Alodine 1200s is a commercially available drug, a Henkel series product, and is used herein.

[0033] The specific working principle is as follows. When in use, first add deionized water to the cleaning tank 2, add sodium hydroxide solution to the decontamination tank 3, and add Alodine solution to the oxidation tank 4. The specific concentration of Alodine 1200s is 7.5-22.5g / L. Add nitric acid to adjust the pH value to 1.3-1.8 and the temperature to 20-35°C. When in use, first install the electrostatic chuck on the chuck mounting seat, and then control the valves at both ends of the cleaning tank 2 to be connected with the liquid inlet pipe 5 and the liquid outlet pipe 6, and disconnect the valves at both ends of the decontamination tank 3 and the oxidation tank 4 from the pipeline, so that the cleaning liquid circulates through the internal channel of the chuck, and the circulation time is 3-5min. Then control the valves at both ends of the cleaning tank 2 to be closed, and the three-way valve 7 on the liquid inlet pipe 5 and the liquid outlet pipe 6 allows the air compressor 10 to blow out the excess water vapor in the pipeline, and then the valves at both ends of the decontamination tank 3 are connected with the liquid inlet pipe 5 and the liquid outlet pipe 6, and the valves at both ends of the cleaning tank 2 and the oxidation tank 4 are closed. The sodium hydroxide solution is circulated in the pipeline with a circulation time of 1-3 minutes. Sodium hydroxide can effectively remove the oil attached to the surface of the internal channel of the chuck during the processing. When the specified time is reached, the valves at both ends of the decontamination tank 3 are closed, and the three-way valve 7 on the inlet pipe 5 and the outlet pipe 6 allows the air compressor 10 to blow out the excess decontamination liquid in the pipeline. Finally, the valves at both ends of the oxidation tank 4 are opened to connect with the inlet pipe 5 and the outlet pipe 6 to form a circulation loop, so that Alodine 1200s is passed into the interior of the chuck with a circulation time of 3-4 minutes. Then the valves at both ends of the oxidation tank 4 are closed, and the three-way valve 7 on the inlet pipe 5 and the outlet pipe 6 is controlled to allow the air compressor 10 to pass air into the interior of the pipeline to blow out the residual liquid to prevent damage to the membrane layer caused by excessive reaction. At the same time, the pressure of the gas blown out by the air compressor is controlled at 0.1-0.12Mpa. Excessive pressure will cause friction and break, resulting in reduced corrosion resistance.

[0034] During use, the pH meter can effectively monitor the pH value in the internal circulation channel when each pipeline is working. When the internal pH value is abnormal, the wastewater tank is connected to the pipeline through the three-way valve 7, and the liquid medicine is discharged into the wastewater tank for centralized treatment. At the same time, the corresponding liquid medicine is added to the corresponding tank to continue working.

[0035] During the specific operation, multiple groups of simultaneously working pipelines can be set up to connect multiple chuck mounting seats at the same time, and the corresponding valve bodies can be controlled by time relays. After the set time is reached, the pipelines are automatically adjusted to achieve automatic regulation.

[0036] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. An electrostatic chuck waterway anti-corrosion processing equipment, characterized in that: The invention comprises a chuck mounting seat (1), a cleaning tank (2), a decontamination tank (3) and an oxidation tank (4); the chuck mounting seat (1) is used to fix an electrostatic chuck, and the chuck mounting seat (1) is provided with a liquid inlet pipe (5) and a liquid outlet pipe (6) corresponding to a liquid inlet and a liquid outlet on the electrostatic chuck; the liquid inlets and liquid outlets of the cleaning tank (2), the decontamination tank (3) and the oxidation tank (4) are respectively connected to the liquid inlet pipe (5) and the liquid outlet pipe (6) through pipelines to form three parallel circuits; the cleaning tank (2) is filled with a cleaning liquid, the decontamination tank (3) is filled with a decontamination liquid, and the oxidation tank (4) is filled with a film-forming liquid.

2. The electrostatic chuck waterway anti-corrosion processing equipment according to claim 1, characterized in that: The film-forming liquid is Alodine 1200s.

3. The electrostatic chuck waterway anti-corrosion processing equipment according to claim 1, characterized in that: The cleaning liquid is deionized water, and the decontamination liquid is sodium hydroxide solution.

4. The electrostatic chuck waterway anti-corrosion processing equipment according to claim 1, characterized in that: The liquid outlet pipelines of the cleaning tank (2), the decontamination tank (3) and the oxidation tank (4) are all connected to the wastewater tank (8) via a three-way valve (7).

5. The electrostatic chuck waterway anti-corrosion processing equipment according to claim 4, characterized in that: Solenoid valves (13) are provided on the liquid inlet pipelines of the cleaning tank (2), the decontamination tank (3) and the oxidation tank (4).

6. The electrostatic chuck waterway anti-corrosion processing equipment according to claim 5, characterized in that: The liquid inlet pipelines and liquid outlet pipelines of the cleaning tank (2), the decontamination tank (3) and the oxidation tank (4) are respectively connected to the liquid inlet pipe (5) and the liquid outlet pipe (6) through a four-way pipe (9).

7. The electrostatic chuck waterway anti-corrosion processing equipment according to claim 6, characterized in that: The liquid inlet pipe (5) and the liquid outlet pipe (6) are also connected to an air compressor (10) and an exhaust pipe (11).

8. The electrostatic chuck waterway anti-corrosion processing equipment according to claim 7, characterized in that: A pH meter (12) is provided on the pipelines of the cleaning tank (2), the decontamination tank (3) and the oxidation tank (4).

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