Device for separating assembled products
By designing a separation device for semiconductor equipment, using vacuum suction cup components, inductors, robots and drive units, the JIG magnetic enhancement problem caused by product iteration is solved, efficient physical separation and rapid feedback are achieved, separation alarm failures are significantly reduced, and the stability and efficiency of production needs are met.
Patent Information
- Application Number
- CN202421296129.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-07
- Publication Date
- 2025-04-22
- Estimated Expiration
- 2034-06-07
AI Technical Summary
In the field of semiconductor equipment, with the iteration of products, the SUB substrate becomes thinner and thinner, resulting in the increase in magnetic force between JIGs. The existing compressed air separation method cannot meet production needs, resulting in frequent separation alarm failures and affecting normal production.
A device for separating and assembled products is designed, including a vacuum suction cup assembly, a sensor, a robot and a drive unit. By installing a robot on the vacuum suction cup assembly and adjusting the position of the robot using the drive unit, adaptability adjustment to different JIGs is achieved, instead of vacuum adsorption separation, physical separation is achieved and the grabbing effect is quickly feedback through the sensor.
It effectively solves the problems caused by vacuum adsorption abnormalities, realizes physical separation and improves the separation effect, reduces separation alarm faults, and meets production needs stably and efficiently.
Smart Images

Figure CN222785279U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of semiconductor equipment, in particular to the technical field of clamp separation, and specifically is a device for separating assembled products. Background Art
[0002] The mainstream technology currently used in the front-end packaging of our company is flip-chip mounting technology, which realizes the communication function through the welding of the substrate and the chip. First, the SUB substrate is placed on a specific Jig base, and then enters the placement machine for chip mounting and welding. After completion, the product and the JIG are separated. However, in the separation process, affected by product iterations, the SUB substrate of the iterative product will become thinner and thinner, resulting in stronger and stronger magnetic force between the JIGs. The separation of products by compressed air can no longer meet the actual production requirements of the production line. There are a large number of separation alarm failures, which seriously affect normal production.
[0003] Iterative upgrades are necessary means and methods to maintain technological advancement. The difficulties encountered in the process of product upgrades need to be solved by us to improve the engineering problems that plague them.
[0004] In this iteration, the product has gone from 8G→16G→24G, and the SUB substrate has become thinner, from 265um→170um, so the magnetic force between the top JIG and the bottom JIG base has become stronger and stronger, causing the separation structure to be affected by the magnetic force during the upward movement, and fall during the suction process, generating a large number of alarms.
[0005] The resulting waste of production efficiency and manpower is becoming more and more serious and occurs more frequently. In view of this, it is necessary to improve the problem points of the products after separation and assembly to meet normal production needs. Summary of the invention
[0006] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a device for separating assembled products to solve the difficulties of the prior art.
[0007] In order to achieve the above-mentioned and other related purposes, the utility model provides a device for separating assembled products, comprising:
[0008] A vacuum suction cup assembly, wherein the JIG to be separated is sucked on the bottom of the vacuum suction cup assembly;
[0009] The sensor 1 is installed at one end of the axial direction of the vacuum suction cup assembly, and the direction of the sensor head corresponds to the JIG setting to be separated at the bottom;
[0010] A pair of manipulators 2 are arranged front and back along the axial direction of the vacuum suction cup assembly. During the separation process, the bottom of the manipulator 2 contacts the JIG to be separated. The inner side of the bottom of the manipulator 2 is in a stepped structure and is bent toward the internal JIG.
[0011] A driving unit, the top of the manipulator 2 is mounted on the driving unit, and the driving unit drives the manipulator 2 to separate and adjust its upper and lower positions.
[0012] According to the preferred embodiment, the vacuum suction cup assembly includes an air circuit mounting plate 3 and a vacuum suction cup 4 mounted below the air circuit mounting plate 3, wherein the surrounding dimensions of the air circuit mounting plate 3 are larger than the dimensions of the vacuum suction cup 4;
[0013] The sensor 1 is installed on one axial side of the vacuum suction cup 4;
[0014] The gas path installation plate 3 is provided with a first groove 5 on both sides of the surface perpendicular to the installation position of the sensor 1 and corresponding to the manipulator 2 .
[0015] According to a preferred solution, in the initial state, the outer side surface of the manipulator 2 is located in the first groove 5 .
[0016] According to a preferred embodiment, a manipulator 2 is installed on the top of the vacuum suction cup assembly through a connecting plate assembly, and the connecting plate assembly includes:
[0017] A lower connecting plate 6, which is arranged parallel to the upper side of the gas path mounting plate 3, and the two are fastened and disassembled by a lock 7;
[0018] An upper connecting plate 8, the upper connecting plate 8 is arranged parallel to the upper part of the lower connecting plate 6, and a buffer bolt 9 is provided between the upper connecting plate 8 and the buffer bolt 9 is provided with a spring 15;
[0019] The upper connecting plate 8, the lower connecting plate 6 and the gas path mounting plate 3 are fastened by bolts passing through the central axis.
[0020] According to a preferred solution, the surrounding dimensions of the connecting plate assembly are smaller than those of the gas path mounting plate 3, and a manipulator 2 is disposed at the position of the size difference.
[0021] According to a preferred embodiment, the drive unit comprises:
[0022] A vertically movable module 10, wherein the vertically movable module 10 is vertically mounted on the top of the upper connecting plate 8;
[0023] The balancing jaw cylinder 11 has a vertical side connected to the slider of the up-and-down moving module 10, and adjusts its position up and down as the up-and-down moving module 10 moves. The bottom claw of the balancing jaw cylinder 11 passes through the upper connecting plate 8 and is connected to the manipulators 2 on both sides.
[0024] According to the preferred embodiment, the bottom claw piece of the balancing claw cylinder 11 and the manipulator 2 are connected via an L-shaped connector 12, the vertical end of the L-shaped connector 12 is mounted on the bottom claw piece, and the horizontal end is connected to the guide rail 13 below via a slider;
[0025] The guide rail 13 is mounted on the lower connecting plate 6 .
[0026] According to a preferred embodiment, a through hole 14 is provided on the upper connecting plate 8 located between the buffer bolt 9 and the up-and-down moving module 10 to pass through the bottom claw piece of the balancing clamping jaw cylinder 11 .
[0027] According to the preferred solution, a second groove 16 for installing the guide rail 13 is provided on the structure of the lower connecting plate 6 located between the manipulators 2 on both sides.
[0028] According to the preferred solution, the structural thickness of the upper connecting plate 8 and the lower connecting plate 6 located between the two side manipulators 2 is smaller than the thickness of the remaining structures, and a space for accommodating the guide rail 13 and the L-shaped connector 12 is formed therebetween.
[0029] The utility model installs a pair of manipulators front and back on the basis of a vacuum suction cup assembly, and utilizes the up and down movement module and the balancing claw cylinder that drive the manipulator to achieve the purpose of adjusting the height and grasping position corresponding to different JIG adaptability, effectively replaces vacuum adsorption separation, and thoroughly solves the problems caused by abnormal vacuum adsorption. While realizing physical separation, the synergy of the sensor is utilized to quickly feedback the effect of grasping the JIG, and the purpose of improving the separation effect is stably and effectively achieved.
[0030] The best embodiment of the present invention will be described in more detail below in conjunction with the accompanying drawings so that the features and advantages of the present invention can be easily understood. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] Figure 1 The display is a three-dimensional structural schematic diagram of the utility model;
[0032] Figure 2 Shown is a three-dimensional structural schematic diagram of a vacuum suction cup assembly in the present utility model;
[0033] Figure 3 Shown is a partial three-dimensional structural schematic diagram of the utility model;
[0034] Figure 4The display is an enlarged schematic diagram of the three-dimensional structure of the driving unit and the manipulator in the present utility model;
[0035] Figure 5 Shown is an enlarged schematic diagram of the three-dimensional structure of the upper connecting plate in the present utility model;
[0036] Figure 6 Shown is an enlarged schematic diagram of the three-dimensional structure of the lower connecting plate in the present utility model;
[0037] Figure 7 Shown is an enlarged schematic diagram of the three-dimensional structure of the robot in the present utility model;
[0038] Description of symbols
[0039] 1. Sensor; 2. Robot; 3. Air circuit mounting plate; 4. Vacuum suction cup; 5. No. 1 groove; 6. Lower connecting plate; 7. Lock; 8. Upper connecting plate; 9. Buffer bolt; 10. Up and down moving module; 11. Balance clamp cylinder; 12. L-shaped connector; 13. Guide rail; 14. Through hole; 15. Spring; 16. No. 2 groove. DETAILED DESCRIPTION
[0040] In order to make the purpose, technical solution and advantages of the technical solution of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described in conjunction with the drawings of the specific embodiments of the utility model. The same figure marks in the drawings represent the same parts. It should be noted that the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the described embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0041] Compared with the embodiments shown in the drawings, feasible implementations within the scope of protection of the present invention may have fewer components, other components not shown in the drawings, different components, differently arranged components, or differently connected components, etc. In addition, two or more components in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.
[0042] Unless otherwise defined, the technical terms or scientific terms used herein shall have the usual meanings understood by persons with ordinary skills in the field to which the utility model belongs. The words "first", "second" and similar words used in the specification and claims of the utility model patent application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not necessarily indicate quantity restrictions. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.
[0043] The utility model provides a device for separating assembled products, which is used in the process of separating assembled products. The utility model does not limit the type of products, but the structure of the device for separating assembled products is particularly suitable for separating products and bases in flip-chips.
[0044] In general, the device for separating assembled products proposed in the present invention mainly includes a vacuum suction cup assembly, a sensor 1, a manipulator 2 and a drive unit. Figure 1 , which shows the arrangement relationship of the vacuum suction cup assembly, the sensor 1, the manipulator 2 and the driving unit.
[0045] In order to achieve the purpose of changing the separation mode and the hardware design and stability of the separation mode change, and to solve the problem in the background technology that different processes such as stamping and forming need to be replaced with different machine models and molds, in the technical solution provided in this embodiment, a pair of manipulators 2 are installed front and back on the basis of the vacuum suction cup assembly, and the up and down moving module 10 and the balancing clamping cylinder 11 of the driving manipulator 2 are used to achieve the purpose of adjusting the height and grasping position corresponding to different JIG adaptability, effectively replace vacuum adsorption separation, and completely solve the problems caused by vacuum adsorption abnormalities. While achieving physical separation, the coordination of the sensor 1 is used to quickly feedback the effect of grasping the JIG, and stably and effectively achieve the purpose of improving the separation effect.
[0046] Specifically, Figure 1As shown, the vacuum suction cup assembly is arranged at the bottom, and the JIG to be separated is adsorbed at the bottom. A manipulator 2 is installed on the top of the vacuum suction cup assembly through a connecting plate assembly. A pair of manipulators 2 are arranged front and back along the axial direction of the vacuum suction cup assembly and are connected to a driving unit. During use, the driving unit drives the manipulator 2 to separate and adjust the up and down positions. The inner side of the bottom of the manipulator 2 is a stepped structure and is bent toward the internal JIG. During the separation process, the bottom of the manipulator 2 contacts the JIG to be separated to achieve the effect of separating the JIG. During the separation, since the sensor 1 is installed at one end of the axial direction of the vacuum suction cup assembly, the direction of the sensor head corresponds to the JIG to be separated at the bottom, and can be bound to the device through the sensor 1. When the signal of the sensor 1 is abnormal, such as a height difference, the device receives the signal, alarms and automatically stops the operation.
[0047] As mentioned above, the vacuum suction cup assembly provided in this embodiment includes an air circuit mounting plate 3 and a vacuum suction cup 4 installed below the air circuit mounting plate 3. Since the four sides of the air circuit mounting plate 3 are larger than the size of the vacuum suction cup 4, the sensor 1 can be installed on one axial side of the vacuum suction cup 4, and the sensing head of the sensor 1 faces the JIG below to detect the separation status in real time; in addition, a No. 1 groove 5 is provided on both side surfaces of the air circuit mounting plate 3 perpendicular to the installation position of the sensor 1 corresponding to the manipulator 2. When the equipment is in the initial state, the outer side surface of the manipulator 2 is located in the No. 1 groove 5, which can effectively protect the manipulator 2.
[0048] It should be specifically explained that the manipulator 2 is installed on the top of the vacuum suction cup assembly through a connecting plate assembly, and the connecting plate assembly is sequentially provided with a lower connecting plate 6 and an upper connecting plate 8 along the top of the air path mounting plate 3, and the upper connecting plate 8, the lower connecting plate 6 and the air path mounting plate 3 are arranged in parallel and fastened by bolts passing through the center axis; specifically, since the connecting plate assembly is a structural member added after the vacuum suction cup assembly, on the basis of being fastened by bolts, in order to facilitate disassembly and ensure stability after installation, the lower connecting plate 6 is arranged in parallel above the air path mounting plate 3, and the two are fastened and disassembled by a lock buckle 7; in addition, as shown in the accompanying drawings, a driving unit for driving the manipulator 2 to move is installed on the connecting plate assembly, and the driving unit will generate vibration during movement, but the influence of the vibration on the vacuum suction cup assembly should be avoided, so on the basis of the upper connecting plate 8 being arranged in parallel above the lower connecting plate 6, it is preferred that a gap is set between the two through a buffer bolt 9, and a spring 15 is provided on the outer sleeve of the buffer bolt 9, and the spring 15 is used to offset the direct influence from the driving unit, and also eliminate the influence of the bottom JIG adsorption and removal.
[0049] On this basis, it is considered to make the manipulator 2 as universal as possible. For this purpose, a driving unit is installed on the connecting plate assembly to realize the adjustment of the manipulator 2 in the vertical and horizontal directions, wherein the up and down moving module 10 in the driving unit is vertically installed on the top of the upper connecting plate 8, and then the vertical side of the balancing jaw cylinder 11 is connected to the slider of the up and down moving module 10, and the position is adjusted up and down with the movement of the up and down moving module 10. The bottom claw of the balancing jaw cylinder 11 passes through the upper connecting plate 8 and is connected to the manipulators 2 on both sides, thus realizing the effect of adjusting the up and down position and the horizontal opening and closing position of the manipulator 2 by the driving unit, which can achieve the effect of matching JIGs of various sizes, with a high degree of automation and high effect.
[0050] However, considering the reasonable arrangement of the manipulator 2 integrated on the connecting plate assembly and the vacuum suction cup assembly and the driving unit driving the manipulator 2, on the one hand, a groove 5 is provided on both sides of the gas path mounting plate 3 perpendicular to the installation position of the sensor 1, corresponding to the manipulator 2. Similarly, the surrounding dimensions of the connecting plate assembly are smaller than the dimensions of the gas path mounting plate 3, and the manipulator 2 is arranged at the position of the size difference, and the avoidance structure in the size structure is used to achieve the effect of providing the installation position of the manipulator 2, while also avoiding the protruding installation effect of the manipulator 2, thereby playing an effective protective role;
[0051] On the other hand, since the bottom claw of the balancing jaw cylinder 11 is vertically arranged, in order to achieve the effect of horizontal movement of the manipulator 2 toward both sides, the bottom claw and the manipulator 2 are connected by an L-shaped connector 12. The vertical end of the L-shaped connector 12 is installed on the bottom claw, and the horizontal end is connected to the manipulator 2. It can be seen from the accompanying drawings that the above structure is bound to pass through the upper connecting plate 8 and the lower connecting plate 6. For this purpose, the upper connecting plate 8 is located between the buffer bolt 9 and the up and down moving module 10. A through hole 14 is provided on the structure that passes through the bottom claw of the balancing jaw cylinder 11. At the same time, the structural thickness of the upper connecting plate 8 and the lower connecting plate 6 located between the manipulators 2 on both sides is less than the thickness of the remaining structures, and a space for accommodating the guide rail 13 and the L-shaped connector 12 is formed between the two.
[0052] On this basis, the present embodiment also provides a guide rail structure for guiding the horizontal movement of the manipulator 2, wherein the horizontal end of the L-shaped connecting piece 12 is connected to the guide rail 13 below through a slider, and a corresponding second groove 16 for installing the guide rail 13 is provided on the structure of the lower connecting plate 6 located between the manipulators 2 on both sides, and the guide rail 13 is installed on the lower connecting plate 6. When in use, the manipulator 2 moves horizontally in a straight line toward both sides along the direction of the guide rail 13, which is also beneficial for a pair of manipulators 2 on the left and right sides to form a structure suitable for JIG at the bottom, so that the JIG will not be damaged.
[0053] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.
Claims
1. A device for separating assembled products, characterized in that: include: A vacuum suction cup assembly, wherein the JIG to be separated is sucked on the bottom of the vacuum suction cup assembly; A sensor (1), wherein the sensor (1) is mounted on one axial end of the vacuum chuck assembly, and the direction of the sensor head corresponds to the JIG to be separated at the bottom; A pair of manipulators (2) are arranged front and back along the axis of the vacuum suction cup assembly. During the separation process, the bottom of the manipulator (2) contacts the JIG to be separated. The inner side of the bottom of the manipulator (2) is in a stepped structure and is bent toward the internal JIG. A driving unit, the top of the manipulator (2) is mounted on the driving unit, and the driving unit drives the manipulator (2) to separate and adjust its upper and lower positions.
2. The device for separating assembled products according to claim 1, characterized in that: The vacuum suction cup assembly comprises an air path mounting plate (3) and a vacuum suction cup (4) mounted below the air path mounting plate (3), and the dimensions of the air path mounting plate (3) are all larger than the dimensions of the vacuum suction cup (4); The sensor (1) is mounted on one axial side of the vacuum suction cup (4); The gas path installation plate (3) is provided with a first groove (5) on both side surfaces perpendicular to the installation position of the sensor (1) and corresponding to the manipulator (2).
3. The device for separating assembled products according to claim 2, characterized in that: A manipulator (2) is installed on the top of the vacuum suction cup assembly via a connecting plate assembly, and the connecting plate assembly comprises: A lower connecting plate (6), the lower connecting plate (6) being arranged parallel to the upper part of the gas path mounting plate (3), and the two are fastened and disassembled by means of a lock buckle (7); An upper connecting plate (8), the upper connecting plate (8) being arranged parallel to the upper part of the lower connecting plate (6), with a gap between the upper connecting plate and the lower connecting plate being provided with a buffer bolt (9) therebetween, wherein a spring (15) is provided on an outer sleeve of the buffer bolt (9); The upper connecting plate (8), the lower connecting plate (6) and the gas path mounting plate (3) are fastened by bolts through which the central axis passes.
4. The device for separating assembled products according to claim 3, characterized in that: The driving unit comprises: A vertically movable module (10), wherein the vertically movable module (10) is vertically mounted on the top of the upper connecting plate (8); A balancing jaw cylinder (11), wherein the vertical side of the balancing jaw cylinder (11) is connected to a slider of an up-and-down moving module (10), and the position is adjusted up and down as the up-and-down moving module (10) moves, and the bottom claw piece of the balancing jaw cylinder (11) passes through an upper connecting plate (8) and is connected to the manipulators (2) on both sides.
5. The device for separating assembled products according to claim 4, characterized in that: The bottom claw piece of the balancing claw cylinder (11) and the manipulator (2) are connected via an L-shaped connecting piece (12), the vertical end of the L-shaped connecting piece (12) is mounted on the bottom claw piece, and the horizontal end is connected to the guide rail (13) below via a slider; The guide rail (13) is mounted on the lower connecting plate (6).
6. The device for separating assembled products according to claim 5, characterized in that: The upper connecting plate (8) is located between the buffer bolt (9) and the up-and-down moving module (10) and is provided with a through hole (14) that passes through the bottom claw piece of the balancing clamping claw cylinder (11).
7. The device for separating assembled products according to claim 6, characterized in that: The lower connecting plate (6) is located between the two side manipulators (2) and is provided with a second groove (16) for installing the guide rail (13).