Ultrahigh vacuum sample transfer equipment

Abstract

The utility model relates to ultrahigh vacuum sample transfer equipment, and relates to the technical field of high vacuum processing. The ultrahigh vacuum sample transfer equipment comprises a first pipe part, a second pipe part and a third pipe part, the end part of the first pipe part is communicated with the end part of the second pipe part, at least one of the first pipe part and the second pipe part is communicated with the third pipe part, and the third pipe part is clamped between the first pipe part and the second pipe part; the sample transfer unit is connected to one end, far away from the second pipe part, of the first pipe part; the sample storage unit is connected to one end, far away from the first pipe part, of the second pipe part; and the vacuum pump is connected to the third pipe part. Compared with the mode that the first pipe part is communicated with the middle of the second pipe part, the ultrahigh vacuum sample transfer equipment has the advantages that the first pipe part is communicated with the end of the second pipe part, so that the length of the second pipe part is shortened, the volume of the ultrahigh vacuum sample transfer equipment is reduced, and the ultrahigh vacuum sample transfer equipment can be more conveniently used in a narrow space.

Description

Technical Field

[0001] The utility model relates to the technical field of high vacuum processing, in particular to an ultra-high vacuum sample transfer device. Background Art

[0002] In the field of surface physics and chemistry, in order to prevent the sample surface structure from changing under complex atmospheric conditions, it is necessary to complete related preparation and analysis work in an ultra-high vacuum environment. In order to adapt to the transfer of materials in an ultra-high vacuum and avoid affecting the properties of the sample surface during the transfer process, the transfer of materials in an ultra-high vacuum environment is currently mostly achieved through an ultra-high vacuum sample transfer device (UHVSuitcase).

[0003] In the related art, in order to facilitate the transfer of materials, Chinese patent document CN 113340813 A discloses a portable ultra-vacuum low-temperature observation chamber and operation method with micro-area characterization function. The vacuum environment of the chamber is maintained by an aspirator pump, and the sample transfer rod is used to complete the storage of samples into the sample storage rod and the removal of samples from the sample storage rod. The sample transfer between two vacuum environments is convenient.

[0004] However, the volume of the cavity in the current ultra-high vacuum sample transfer equipment is relatively large, which not only requires high transportation space, but also makes it difficult to complete material transfer operations in a small space. Utility Model Content

[0005] The utility model provides an ultra-high vacuum sample transfer device, which is used for optimizing the structure of a cavity and reducing the volume of the cavity.

[0006] The utility model provides an ultra-high vacuum sample transfer device, comprising a first tube portion, a second tube portion and a third tube portion, wherein the end of the first tube portion is connected to the end of the second tube portion, at least one of the first tube portion and the second tube portion is connected to the third tube portion, and the third tube portion is clamped between the first tube portion and the second tube portion; a sample transfer unit, which is connected to an end of the first tube portion away from the second tube portion; a sample storage unit, which is connected to an end of the second tube portion away from the first tube portion; and a vacuum pump, which is connected to the third tube portion.

[0007] In one embodiment, the axes of the first tube portion, the second tube portion and the third tube portion are located in the same plane.

[0008] In one embodiment, the third tube portion is connected to the longer one of the first tube portion and the second tube portion.

[0009] In one embodiment, the third tube portion is connected to the second tube portion, and the third tube portion is parallel to the first tube portion, and the distance between the outer wall of the third tube portion and the outer wall of the first tube portion is 20 mm-25 mm.

[0010] In one embodiment, the first tube portion is perpendicular to the second tube portion.

[0011] In one embodiment, the cavity is further provided with an injection port, and a first valve is provided at the injection port, and the first valve is used to adjust the opening and closing state of the injection port.

[0012] In one embodiment, the injection port is opened in the second tube portion and is located on a side of the second tube portion away from the first tube portion, and the axis of the injection port is colinear with the axis of the first tube portion.

[0013] In one embodiment, the first tube portion is further provided with an observation window, through which the connection between the first tube portion and the second tube portion can be observed.

[0014] In one embodiment, the sample storage unit includes a second push rod and a sample rack, which is installed on the second push rod and can drive the sample rack to move along the axis of the second tube portion; the sample transmission unit includes a first push rod and a grabbing head, which is installed on the first push rod and can drive the grabbing head to move along the axis of the first tube portion, and the grabbing head is a claw-type grabbing head or a rotating grabbing head.

[0015] In one embodiment, the vacuum pump is a getter pump.

[0016] Compared with the prior art, the advantage of the utility model is that, since the third tube portion provided with a vacuum pump is connected to at least one of the first tube portion or the second tube portion, the vacuum pump can be used to evacuate the cavity to maintain the vacuum environment inside the cavity. And the third tube portion provided with a vacuum pump is sandwiched between the first tube portion and the second tube portion, by connecting the ends of the first tube portion and the second tube portion. Compared with setting the third tube portion at the end of the second tube portion and connecting the first tube portion to the middle of the second tube portion, the length of the second tube portion is shortened, so that the volume of the ultra-high vacuum sample transfer device is reduced, and it can be used more conveniently in a small space. The length of the second tube portion is shortened, thereby reducing the volume of the cavity. The requirements for transportation space are reduced, and it can better adapt to small spaces. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention will be described in more detail below based on embodiments and with reference to the accompanying drawings.

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the ultra-high vacuum sample transfer device in the embodiment of the utility model;

[0019] Figure 2 It is a schematic diagram of the main structure of the ultra-high vacuum sample transfer device in an embodiment of the utility model;

[0020] Figure 3 It is a bottom-up structural schematic diagram of an ultra-high vacuum sample transfer device in an embodiment of the utility model;

[0021] Figure 4 yes Figure 3 Schematic diagram of the cross-sectional structure of the AA section;

[0022] Figure 5 yes Figure 4 Schematic diagram of the cross-sectional structure of the middle BB section;

[0023] Figure 6 A vacuum sample transfer device provided in the related art;

[0024] Figure 7 It is a schematic diagram of the main structure of the sample holder grasped in the embodiment of the utility model;

[0025] Figure 8 It is a schematic diagram of the main structure of the claw-type grabbing head in the closed state in the embodiment of the utility model;

[0026] Fig. 9 It is a left-side structural schematic diagram of the claw-type grabbing head in the closed state in the embodiment of the utility model;

[0027] Fig.10 It is a schematic diagram of the main structure of the claw-type grabbing head in the embodiment of the utility model when it is in an expanded state;

[0028] Fig.11 It is a schematic diagram of the main structure of the rotary grabbing head in the embodiment of the utility model;

[0029] Fig.12 It is a right side structural schematic diagram of the rotary grabbing head in the embodiment of the utility model.

[0030] Reference numerals:

[0031] 1. cavity; 11. first tube; 12. second tube; 13. third tube; 14. injection port;

[0032] 2. Sample transfer unit; 21. First push rod; 22. Grabbing head; 221. First mounting bracket; 222. Claw body; 223. Transmission inner shaft; 224. Slot; 3. Sample storage unit; 31. Second push rod; 32. Sample rack; 4. Vacuum pump; 5. First valve; 6. Observation window;

[0033] 71. Sample transfer pipeline; 72. Sample storage pipeline; 73. Vacuum extraction pipeline;

[0034] 8. Sample holder; 81. Sample holder body; 82. Grasping protrusion. DETAILED DESCRIPTION

[0035] The utility model will be further described below in conjunction with the accompanying drawings.

[0036] See also Figure 6 As shown, an ultra-high vacuum sample transfer device in the related art adopts a multi-tube cavity structure, wherein the cavity has a sample transfer pipe 71, a sample storage pipe 72 and a vacuum pipe 73. In order to enable the sample transfer rod in the sample transfer pipe 71 to place the collected sample on the sample storage end of the sample storage rod, the sample transfer pipe 71 and the sample storage pipe 72 are intersected, and the telescopic ends of the sample transfer rod and the sample storage rod are moved to the intersection of the sample transfer pipe 71 and the sample storage pipe 72, so as to place the collected sample on the sample storage end of the sample storage rod.

[0037] In order to meet the extension and retraction of the sample storage rod and the sample transfer rod, there are certain requirements for the length of the sample storage pipe 72 and the sample transfer pipe 71. However, in the prior art, the sample storage pipe 72 is extended to connect with the vacuum pump 4. As a result, the sample storage pipe 72 is too long and is not convenient for use in a narrow space.

[0038] In particular, since the sample storage pipe 72 is extended, when using this type of ultra-high vacuum sample transfer equipment, even if the vacuum pipe end of the sample storage pipe 72 is placed on the ground or the vacuum pipe is at the same height as the sample, the sample transfer pipe 71 will still maintain a large height difference with the sample to be captured, making it difficult to transfer low-position samples and having a narrow range of use.

[0039] In order to solve the defects of the ultra-high vacuum sample transfer equipment in the related art that is large in size and inconvenient to use in a small space, the present application provides an ultra-high vacuum sample transfer equipment.

[0040] See also Figure 1 and Figure 2 As shown, an ultra-high vacuum sample transfer device provided by the present application includes a cavity 1, the cavity 1 forms a vacuum chamber, and the cavity 1 includes a first tube portion 11, a second tube portion 12, and a third tube portion 13. A sample transfer unit 2 is installed on the first tube portion 11, a sample storage unit 3 is installed on the second tube portion 12, and a vacuum pump 4 is installed on the third tube portion 13.

[0041] The end of the first tube 11 is connected to the end of the second tube 12 , and at least one of the first tube 11 and the second tube 12 is connected to the third tube 13 . The third tube 13 is sandwiched between the first tube 11 and the second tube 12 .

[0042] The sample transfer unit 2 is connected to one end of the first tube 11 away from the second tube 12, and the sample storage unit 3 is connected to one end of the second tube 12 away from the first tube 11. By sandwiching the third tube 13 between the first tube 11 and the second tube 12, it is not necessary to extend the second tube 12 to meet the setting of the vacuum pump 4, so that the end of the second tube 12 exceeds the first tube 11. The overall length of the ultra-high vacuum sample transfer device is shortened, the transportation difficulty is reduced, and it is more suitable for the transfer of materials in a narrow space.

[0043] Figure 1 The third tube portion 13 is connected to the second tube portion 12 . In other implementations, the third tube portion 13 may also be connected to the first tube portion 11 .

[0044] Since the end of the second tube portion 12 is connected to the end of the first tube portion 11, when using the ultra-high vacuum sample transfer equipment provided in the present application to transfer samples on a plane, the end of the second tube portion 12 connected to the first tube portion 11 can be placed on a plane used to carry the sample. At this time, the height of the second tube portion 12 is slightly different from the height of the sample, which makes it easier to take the sample.

[0045] In some implementations, the axes of the first tube 11, the second tube 12, and the third tube 13 are located in the same plane. This enables the thickness of the ultra-high vacuum sample transfer device to be mainly determined by the outer diameter of the tube or the radial width of the vacuum pump 4, thereby avoiding radial pipeline deviation caused by the tubes being located in different planes, and reducing the thickness of the ultra-high vacuum sample transfer device. This is suitable for sample transfer in narrow spaces.

[0046] like Figure 1 and Figure 2 As shown, the third tube portion 13 is connected to the longer one of the first tube portion 11 and the second tube portion 12. By connecting the third tube portion 13 to the longer tube portion, sufficient space can be left on the tube portion for the connection of the third tube portion 13, and the other tube portion can be set shorter, so that the total length of the first tube portion 11 and the second tube portion 12 is shorter. This is conducive to the miniaturization of the ultra-high vacuum sample transfer equipment.

[0047] like Figure 1 and Figure 4 As shown, the sample storage unit 3 has a flange structure, which is sealed and connected to the cavity 1, so that the sample holder 32 of the sample storage unit 3 can extend into the vacuum environment formed by the cavity 1. Similarly, the sample transfer unit 2 and the vacuum pump 4 also have a flange structure that is sealed and connected to the cavity 1. And the first push rod 21 of the sample transfer unit 2 can move relative to the flange structure along the axis of the first tube 11. By operating the part of the first push rod 21 extending out of the cavity 1, the grab head 22 in the displacement cavity 1 can be driven to move.

[0048] like Figure 1 , Figure 2 and Figure 3 As shown, in some implementations, the third tube portion 13 is connected to the second tube portion 12, and the third tube portion 13 is parallel to the first tube portion 11. By connecting the third tube portion 13 for connecting the vacuum pump 4 to the second tube portion 12 for connecting the sample storage unit 3, the length of the first tube portion 11 is shortened compared to connecting the third tube portion 13 to the first tube portion 11. It is understandable that when using the ultra-high vacuum sample transfer device of the present application, the first tube portion 11 is generally set horizontally, and the sample is collected by operating the sample transfer unit 2 connected to the first tube portion 11. Since the third tube portion 13 is not connected to the first tube portion 11, the length of the first tube portion 11 can be shortened, which is better adapted to the sampling operation in a narrow space. For the second tube portion 12, its mounting component is the sample storage unit 3. The sample rack 32 of the sample storage unit 3 only needs to be moved a short distance, and the requirement for operating space is relatively small. Moreover, the space in the vertical direction is generally larger. Even if the second tube portion 12 is lengthened after being connected to the third tube portion 13 (in fact, the second tube portion 12 is shortened compared to arranging the sample storage unit 3 and the vacuum pump 4 on both sides of the first tube portion 11), the impact on the sample storage unit 3 is relatively small.

[0049] The distance between the outer wall of the third tube part 13 and the outer wall of the first tube part 11 is 20mm-25mm, which can leave a certain gap to facilitate the operation of the sample transfer unit 2, and the distance between the two tube parts is small, which is conducive to the miniaturization of the transfer equipment.

[0050] See also Figure 2 and Figure 4 As shown, the first tube 11 is perpendicular to the second tube 12. When the first tube 11 is adjusted to a horizontal state, the second tube 12 can be adjusted to a vertical state. During operation, the distance between the sample storage unit 3 and the sample transmission unit 2 is large, which is more convenient to use.

[0051] See also Figure 1 and Figure 4 As shown, the cavity 1 is also provided with an injection port 14, and a first valve 5 is provided at the injection port 14, and the first valve 5 is used to adjust the opening and closing state of the injection port 14. When it is necessary to use the ultra-high vacuum sample transfer device to transfer high vacuum materials, the injection port 14 in the closed state is connected to the vacuum space where the material is stored, and then the vacuum pump 4 is used to evacuate the inside of the cavity 1, and then the first valve 5 is opened to achieve the connection between the cavity 1 and the vacuum space. The sample transfer unit 2 extends into the vacuum space containing the material through the injection port 14 to achieve the capture of the sample.

[0052] Continue to refer Figure 4The injection port 14 is provided in the second tube portion 12, and the injection port 14 is located on the side of the second tube portion 12 away from the first tube portion 11, and the axis of the injection port 14 is colinear with the axis of the first tube portion 11. By arranging the injection port 14 in the above manner, the grab head 22 only needs to move along the axis of the first tube portion 11 to enter and exit the injection port 14, thereby collecting the sample. The movement trajectory of the grab head 22 is simple.

[0053] like Figure 1 and Figure 5 As shown, in some implementations, the first tube portion 11 is further provided with an observation window 6, through which the connection between the first tube portion 11 and the second tube portion 12 can be observed. Through the observation window 6, it can be observed whether the grabbing head 22 transfers the collected material to the sample rack 32.

[0054] like Figure 4 and Figure 5 As shown, the sample storage unit 3 includes a second push rod 31 and a sample rack 32, the sample rack 32 is installed on the second push rod 31, and the second push rod 31 can drive the sample rack 32 to move along the axis of the second tube portion 12; the sample transmission unit 2 includes a first push rod 21 and a grabbing head 22, the grabbing head 22 is installed on the first push rod 21, and the first push rod 21 can drive the grabbing head 22 to move along the axis of the first pipeline.

[0055] When in use, the grab head 22 is driven to move by the first push rod 21, specifically, the first push rod 21 itself can be moved, or the first push rod 21 can be extended to achieve the movement of the grab head 22. The grab head 22 can be extended out of the injection port 14 to collect samples and complete the sampling work. The sample rack 32 is moved by the second push rod 31, and the height of the sample rack 32 can be adjusted so that the sample rack 32 is at the same height as the grab head 22, so that the grab head 22 can place the collected samples on the sample rack 32.

[0056] In order to facilitate the description of the grabbing action of the grabbing head on the sample, the sample to be grabbed is first described here. The ultra-high vacuum sample transfer device provided by this application is mainly used for copper, silver, gold and other metal single crystals, graphite single crystals, etc. commonly used in the field of surface physical chemistry. It is generally fixed on the customized sample holder 8 by electric welding. The sample holder 8 used can be seen Figure 7 It includes a sample holder body 81, and a grab convex portion 82 is provided on one side of the sample holder body 81. The grab head grabs the convex portion 82 to grab the sample holder 8, and at the same time, the sample on the sample holder 8 is transferred.

[0057] like Figure 9-11As shown, in some implementations, the grabbing head 22 is a claw grabbing head, and the first push rod 21 includes an outer rod, and an inner rod is installed in the outer rod, and the inner rod can be extended relative to the axis of the outer rod. The claw grabbing head includes a first mounting bracket 221 connected to the outer rod of the first push rod 21, and two claw bodies 222 are rotatably connected to the first mounting bracket 221, and the two claw bodies 222 are simultaneously rotatably connected to the transmission inner shaft 223, and the transmission inner shaft 223 is connected to the inner rod of the first push rod 21. When in use, the claw grabbing head can be driven to move as a whole by the outer rod, and when it is necessary to grab a sample, the inner rod will be driven to extend, so that the two claw bodies 222 are relatively opened, and then the position of the claw grabbing head is adjusted. After the claw grabbing head is moved to the position, the inner rod is retracted, and the two claw bodies 222 are driven to close, so as to realize the grabbing action of the sample tray 8. A groove is also provided on the claw body 222, and the grabbing protrusion of the sample tray 8 will be embedded in the groove during the process of the clamping claw, so as to realize the locking of the sample tray 8. The release of the sample tray 8 can refer to the grasping process of the sample tray 8. After the sample tray 8 is moved into position, the inner rod is extended to drive the two claws 222 to open, and the sample tray 8 can be released.

[0058] like Fig.11 and Fig.12 As shown, in some implementations, the gripping head 22 is a rotary gripping head, and a slot 224 is formed in the center hole of the gripping head 22. When the rotary gripping head is used to grip the sample holder 8, the rotary gripping head is first adjusted to the level of the slot 224, and the rotary gripping head is horizontally moved to insert the gripping protrusion 82 into the slot 224, and then the rotary gripping head is driven to rotate to lock the gripping protrusion 82 in the slot 224.

[0059] like Figure 4 and Figure 5 As shown, the sample rack 32 has multiple layers of storage space, and the sample trays collected by the gripping head 22 can be placed in storage spaces of different layers of the sample rack 32 by adjusting the height of the sample rack 32 .

[0060] In the present application, the sample transfer unit 2 can generate different magnetic fields to achieve sample grabbing and separation. In some implementations, the grabbing head 22 of the sample transfer unit 2 can also adopt a mechanical claw structure to achieve sample collection through clamping action. Of course, the magnetic field adsorption and mechanical grabbing structure can also be integrated on the grabbing head 22 at the same time to achieve various forms of sample collection.

[0061] The sample storage unit 3 can also generate a magnetic field. The magnetic field generated by the sample rack 32 is used to adsorb samples to prevent the samples placed on the sample rack 32 from being separated from the sample rack 32 during the movement of the ultra-high vacuum sample transfer device.

[0062] In some implementations, the vacuum pump 4 is a getter pump. The getter pump refers to a getter ion pump, which can ionize the pumped gas molecules and transport them to the adsorption surface of the pump under the action of an electromagnetic field or an electric field to be captured by the getter. The ultimate pressure of the getter pump can reach 10 -7 ~10 -9 Pa.

[0063] Although the present invention has been described with reference to preferred embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, the various technical features mentioned in the various embodiments may be combined in any manner as long as there is no structural conflict. The present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. An ultra-high vacuum sample transfer device, characterized in that: It includes: A cavity body having a vacuum chamber is formed, the cavity body comprising a first tube portion, a second tube portion and a third tube portion, the end of the first tube portion is connected to the end of the second tube portion, at least one of the first tube portion and the second tube portion is connected to the third tube portion, and the third tube portion is sandwiched between the first tube portion and the second tube portion; A sample transfer unit connected to an end of the first tube portion away from the second tube portion; a sample storage unit connected to an end of the second tube portion away from the first tube portion; and A vacuum pump is connected to the third pipe portion.

2. The ultra-high vacuum sample transfer device according to claim 1, characterized in that: The axes of the first tube portion, the second tube portion and the third tube portion are located in the same plane.

3. The ultra-high vacuum sample transfer device according to claim 1 or 2, characterized in that: The third tube portion is connected to the longer one of the first tube portion and the second tube portion.

4. The ultra-high vacuum sample transfer device according to claim 1 or 2, characterized in that: The third tube portion is connected to the second tube portion, and the third tube portion is parallel to the first tube portion, and the distance between the outer wall of the third tube portion and the outer wall of the first tube portion is 20 mm-25 mm.

5. The ultra-high vacuum sample transfer device according to claim 1 or 2, characterized in that: The first tube portion is perpendicular to the second tube portion.

6. The ultra-high vacuum sample transfer device according to claim 1 or 2, characterized in that: The cavity is also provided with an injection port, and a first valve is provided at the injection port. The first valve is used to adjust the opening and closing state of the injection port.

7. The ultra-high vacuum sample transfer device according to claim 6, characterized in that: The injection port is opened in the second tube part and is located at a side of the second tube part away from the first tube part, and the axis of the injection port is colinear with the axis of the first tube part.

8. The ultra-high vacuum sample transfer device according to claim 1, characterized in that: The first tube portion is further provided with an observation window, through which the connection between the first tube portion and the second tube portion can be observed.

9. The ultra-high vacuum sample transfer device according to claim 1, characterized in that: The sample storage unit comprises a second push rod and a sample rack, wherein the sample rack is mounted on the second push rod, and the second push rod can drive the sample rack to move along the axis of the second tube portion; The sample transfer unit includes a first push rod and a grabbing head. The grabbing head is installed on the first push rod, and the first push rod can drive the grabbing head to move along the axis of the first tube. The grabbing head is a claw-type grabbing head or a rotary grabbing head.

10. The ultra-high vacuum sample transfer device according to claim 1, characterized in that: The vacuum pump is a getter pump.

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