Novel replaceable resistance furnace graphite heater device

Abstract

The utility model relates to the technical field of graphite heater devices, and discloses a novel replaceable resistance furnace graphite heater device, which comprises an equipment main body, a lifting mechanism, a rotating mechanism and a graphite pot mechanism, and is characterized in that the top end of the equipment main body is fixedly connected with the bottom end of the lifting mechanism; the bottom end of the rotating mechanism is movably connected with the top end of the lifting mechanism, the side face of the graphite pot mechanism is movably connected with the inner wall of the side face of the equipment body, and the equipment body comprises a bottom plate. The two graphite pot mechanisms are installed in the containing base and the resistance furnace body respectively, in the using process, the graphite pot mechanisms are lifted through the lifting mechanism and the lifting hooks at the bottom of the cantilever, and the graphite pot mechanisms are placed in the resistance furnace body and the containing base; the resistance furnace main body heats the graphite pot mechanism, and meanwhile, the graphite pot mechanism is cooled and cleaned through the placing seat, so that continuous operation of the equipment is realized, and the working efficiency is favorably improved.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite heater devices, and more specifically to a novel replaceable resistance furnace graphite heater device. Background Art

[0002] Silicon crystal is a commonly used semiconductor material, widely used in the manufacture of semiconductor devices, solar cells, chips, etc. In the production process of silicon crystal, the raw materials are mostly heated by a resistive graphite heating device, and then the silicon crystal is obtained by crystal growth. The graphite heater has good thermal conductivity and electrical resistance, so it heats quickly, the good thermal conductivity makes the heating uniform, and it has strong corrosion resistance and other characteristics.

[0003] Deficiencies of existing technology: When the resistance furnace graphite heater device is in use, after the crystal growth is completed, the inside of the graphite is still in a high temperature state. To ensure safety, it needs to be cooled, and then the finished single crystal silicon is removed and the graphite is cleaned and reused; the existing equipment cools the graphite by natural cooling when in use, which wastes time, cannot achieve continuous operation of the equipment, and affects work efficiency. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, the utility model provides a novel replaceable resistance furnace graphite heater device to solve the problems existing in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a novel replaceable resistance furnace graphite heater device, comprising an equipment main body, and also comprising: a lifting mechanism, a rotating mechanism and a graphite pot mechanism, the top of the equipment main body is fixedly connected to the bottom end of the lifting mechanism, the bottom end of the rotating mechanism is movably connected to the top of the lifting mechanism, the side of the graphite pot mechanism is movably connected to the side inner wall of the equipment main body, the equipment main body comprises a bottom plate, the top of the bottom plate is fixedly connected to the resistance furnace main body, the top of the bottom plate is fixedly connected to a placement seat, the graphite pot mechanism comprises a fixing ring, the bottom end of the fixing ring is fixedly connected to the graphite pot main body, the side of the graphite pot main body is movably connected to the side inner wall of the placement seat, and the placement seat and the resistance furnace main body are symmetrical along the center of the lifting mechanism.

[0006] Furthermore, the lifting mechanism includes a base, the bottom end of the base is fixedly connected to the top of the bottom plate, the top of the base is movably connected to a telescopic frame through a pin, the rotating mechanism includes a cantilever, the bottom end of the cantilever is fixedly connected to a rotating shaft, the bottom end of the rotating shaft is movably sleeved with a lifting platform, the bottom end of the lifting platform is movably connected to the top of the telescopic frame through a pin, and the bottom end of the cantilever is fixedly connected to a hook.

[0007] Furthermore, a second motor is fixedly connected to the top of the lifting platform, an output shaft of the second motor is fixedly connected to a second worm, a second worm gear is fixedly sleeved on the side of the rotating shaft, and a side of the second worm gear meshes with a side of the second worm.

[0008] Furthermore, the top end of the telescopic frame is movably connected to the first connecting block through a pin, the bottom end of the lifting platform is provided with a second slide groove, the side of the second slide groove is movably connected to the side of the first connecting block, the top end of the base is provided with a first slide groove, the bottom end of the telescopic frame is movably connected to the second connecting block through a pin, and the side of the second connecting block is movably connected to the side of the first slide groove.

[0009] Furthermore, a connecting rod is provided at the top of the base, a first motor is fixedly connected to the side of the connecting rod, a first worm is fixedly connected to the output shaft of the first motor, a threaded rod is movably sleeved on the top of the base, a connecting rod is threadedly connected to the side of the threaded rod, the side of the connecting rod is fixedly connected to the side of the second connecting block, a first worm gear is fixedly sleeved on the side of the threaded rod, and the bottom end of the first worm gear is meshed with the top end of the first worm.

[0010] Furthermore, a heat exchange tube is fixedly connected to the interior of the placement seat, the heat exchange tube is a spiral structure, and the inner wall of the side of the placement seat is made of heat-conducting material.

[0011] Furthermore, a mounting groove is provided on a side surface of the fixing ring, and a lifting ring is movably connected to the side surface of the mounting groove through a pin.

[0012] Technical effects and advantages of the utility model:

[0013] 1. The utility model provides two graphite pot mechanisms which are respectively installed in a placement seat and a resistance furnace body. During use, the graphite pot mechanism is lifted and lowered by a lifting mechanism and hoisted by a hook at the bottom of the cantilever, and the graphite pot mechanism is placed in the resistance furnace body and the placement seat. The resistance furnace body heats the graphite pot mechanism, and the placement seat cools and cleans the graphite pot mechanism, thereby realizing continuous operation of the equipment and improving work efficiency.

[0014] 2. The utility model drives the second worm to rotate through the second motor, and the second worm and the second worm gear engage with each other to drive the rotating shaft to rotate, thereby driving the cantilever to rotate, so that the two hooks are respectively moved to the placement seat and directly above the resistance furnace body, and the lifting mechanism drives the rotating mechanism to rise and fall, and the graphite pot mechanism is hoisted and changed, which is beneficial to improve the safety of the operator. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the placement seat of the utility model;

[0017] Figure 3 This is a schematic diagram of the heat exchange tube structure of the utility model;

[0018] Figure 4 It is a partial structural schematic diagram of the rotating mechanism of the utility model;

[0019] Figure 5 This is a schematic diagram of the lifting mechanism structure of the utility model;

[0020] Figure 6 For the utility model Figure 5 Schematic diagram of the structure at A.

[0021] The accompanying drawings are marked as follows: 1. Equipment body; 101. Bottom plate; 102. Resistance furnace body; 103. Placement seat; 104. Heat exchange tube; 2. Lifting mechanism; 201. Base; 202. Telescopic frame; 203. First connecting block; 204. First motor; 205. First slide; 206. Connecting rod; 207. Second connecting block; 208. Threaded rod; 209. First worm gear; 210. First worm; 3. Rotating mechanism; 301. Cantilever; 302. Lifting platform; 303. Hook; 304. Rotating shaft; 305. Second worm gear; 306. Second motor; 307. Second worm; 308. Second slide; 4. Graphite pot mechanism; 401. Fixed ring; 402. Graphite pot body; 403. Lifting ring; 404. Mounting groove. DETAILED DESCRIPTION

[0022] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the present invention. In addition, the forms of the various structures recorded in the following embodiments are merely illustrative. The novel replaceable resistance furnace graphite heater device involved in the present invention is not limited to the various structures recorded in the following embodiments. All other implementations obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention.

[0023] Reference Figures 1 to 6The utility model provides a novel replaceable resistance furnace graphite heater device, comprising a device body 1, and also comprising: a lifting mechanism 2, a rotating mechanism 3 and a graphite pot mechanism 4, the top of the device body 1 is fixedly connected to the bottom of the lifting mechanism 2, the bottom end of the rotating mechanism 3 is movably connected to the top of the lifting mechanism 2, the side of the graphite pot mechanism 4 is movably connected to the side inner wall of the device body 1, the device body 1 comprises a bottom plate 101, the top of the bottom plate 101 is fixedly connected to the resistance furnace body 102, the top of the bottom plate 101 is fixedly connected to the placement seat 103, the graphite pot mechanism 4 comprises a fixing ring 401, the bottom end of the fixing ring 401 is fixedly connected to the graphite pot body 4 02, the side of the graphite pot body 402 is movably connected to the inner wall of the side of the placement seat 103, the placement seat 103 and the resistance furnace body 102 are symmetrical along the center of the lifting mechanism 2, and two graphite pot mechanisms 4 are respectively installed in the placement seat 103 and the resistance furnace body 102. During use, the lifting mechanism 2 is lifted and lowered and the graphite pot mechanism 4 is hoisted by the hook 303 at the bottom of the cantilever 301, and the graphite pot mechanism 4 is placed in the resistance furnace body 102 and the placement seat 103. The resistance furnace body 102 heats the graphite pot mechanism 4, and the placement seat 103 cools and cleans the graphite pot mechanism 4, so as to realize continuous operation of the equipment.

[0024] Among them, the lifting mechanism 2 includes a base 201, the bottom end of the base 201 is fixedly connected to the top of the bottom plate 101, the top of the base 201 is movably connected to the telescopic frame 202 through a pin, the rotating mechanism 3 includes a cantilever 301, the bottom end of the cantilever 301 is fixedly connected to the rotating shaft 304, the bottom end of the rotating shaft 304 is movably sleeved with a lifting platform 302, the bottom end of the lifting platform 302 is movably connected to the top of the telescopic frame 202 through a pin, the bottom end of the cantilever 301 is fixedly connected to a hook 303, the telescopic frame 202 is extended and retracted to drive the lifting platform 302 to move up and down, and the rotation of the rotating shaft 304 drives the cantilever 301 to rotate in a horizontal plane.

[0025] Among them, the top of the lifting platform 302 is fixedly connected with a second motor 306, the output shaft of the second motor 306 is fixedly connected with a second worm 307, the side of the rotating shaft 304 is fixedly sleeved with a second worm gear 305, the side of the second worm gear 305 is meshed with the side of the second worm 307, the second motor 306 drives the second worm 307 to rotate, and the second worm 307 and the second worm gear 305 are meshed with each other to drive the rotating shaft 304 to rotate, thereby driving the cantilever 301 to rotate.

[0026] Among them, the top of the telescopic frame 202 is movably connected to the first connecting block 203 through a pin, the bottom end of the lifting platform 302 is provided with a second slide groove 308, the side of the second slide groove 308 is movably connected to the side of the first connecting block 203, the top of the base 201 is provided with a first slide groove 205, the bottom end of the telescopic frame 202 is movably connected to the second connecting block 207 through a pin, the side of the second connecting block 207 is movably connected to the side of the first slide groove 205, the second connecting block 207 slides along the first slide groove 205 to extend and retract the telescopic frame 202, and at the same time, the first connecting block 203 slides along the side of the second slide groove 308 to push the lifting platform 302 to move up and down.

[0027] Among them, a connecting rod 206 is provided at the top of the base 201, and the side of the connecting rod 206 is fixedly connected to the first motor 204, and the output shaft of the first motor 204 is fixedly connected to the first worm 210. A threaded rod 208 is movably sleeved on the top of the base 201, and the side of the threaded rod 208 is threadedly connected to the connecting rod 206. The side of the connecting rod 206 is fixedly connected to the side of the second connecting block 207, and the side of the threaded rod 208 is fixedly sleeved with a first worm gear 209. The bottom end of the first worm gear 209 is meshed with the top of the first worm 210. The first motor 204 drives the first worm 210 to rotate, and the threaded rod 208 is driven to rotate through the mutual meshing of the first worm 210 and the first worm gear 209, and the connecting rod 206 is driven to move laterally through the thread.

[0028] Among them, the interior of the placement seat 103 is fixedly connected with a heat exchange tube 104, the heat exchange tube 104 is a spiral structure, the side inner wall of the placement seat 103 is made of heat-conducting material, and cooling water flows through the two ends of the heat exchange tube 104 and flows through the interior of the placement seat 103 to cool the graphite pot mechanism 4.

[0029] A mounting groove 404 is provided on the side of the fixing ring 401 , and a lifting ring 403 is movably connected to the side of the mounting groove 404 through a pin, and the lifting hook 303 passes through the lifting ring 403 to lift the graphite pot mechanism 4 .

[0030] The working principle of the utility model is as follows: the second motor 306 is started to drive the second worm 307 to rotate, and the second worm 307 is meshed with the second worm gear 305 to drive the rotating shaft 304 to rotate, thereby driving the cantilever 301 to rotate, so that the two hooks 303 are respectively moved to the placement seat 103 and the upper part of the resistance furnace body 102, and the first motor 204 is started to drive the first worm 210 to rotate, and the first worm 210 is meshed with the first worm gear 209 to drive the threaded rod 208 to rotate, and the connecting rod 206 is driven to move horizontally through the thread, so as to drive the second connecting block 207 to slide along the first slide groove 205, so that the telescopic frame 202 is contracted, and at the same time, the first connecting block 203 is moved along the side of the second slide groove 308 The surface slides to push the lifting platform 302 downward, so that the hook 303 moves to a suitable height, and the hook 303 passes through the lifting ring 403, and the first motor 204 is started in reverse, so that the telescopic frame 202 pushes the lifting platform 302 upward, so that the graphite pot bodies 402 on both sides are moved out of the placement seat 103 and the resistance furnace body 102 respectively, and the second worm gear 305 is started to exchange the positions of the two graphite pot bodies 402, and put them into the placement seat 103 and the resistance furnace body 102 respectively, and the resistance furnace body 102 heats the graphite pot body 402, and the cooling water flows through the two ends of the heat exchange tube 104 through the placement seat 103 to cool the graphite pot mechanism 4, and then the residual silicon raw materials inside are poured out and cleaned.

[0031] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A novel replaceable resistance furnace graphite heater device, comprising a device body (1), characterized in that: Also includes: A lifting mechanism (2), a rotating mechanism (3) and a graphite pot mechanism (4); the top of the equipment body (1) is fixedly connected to the bottom of the lifting mechanism (2); the bottom of the rotating mechanism (3) is movably connected to the top of the lifting mechanism (2); the side of the graphite pot mechanism (4) is movably connected to the side inner wall of the equipment body (1); the equipment body (1) comprises a bottom plate (101); the top of the bottom plate (101) is fixedly connected to the resistance furnace body (102); the top of the bottom plate (101) is fixedly connected to the placement seat (103); the graphite pot mechanism (4) comprises a fixing ring (401); the bottom of the fixing ring (401) is fixedly connected to the graphite pot body (402); the side of the graphite pot body (402) is movably connected to the side inner wall of the placement seat (103); the placement seat (103) and the resistance furnace body (102) are symmetrical along the center of the lifting mechanism (2).

2. A novel replaceable resistance furnace graphite heater device according to claim 1, characterized in that: The lifting mechanism (2) comprises a base (201), the bottom end of the base (201) is fixedly connected to the top end of the bottom plate (101), the top end of the base (201) is movably connected to a telescopic frame (202) through a pin, and the rotating mechanism (3) comprises a cantilever (301), the bottom end of the cantilever (301) is fixedly connected to a rotating shaft (304), the bottom end of the rotating shaft (304) is movably sleeved with a lifting platform (302), the bottom end of the lifting platform (302) is movably connected to the top end of the telescopic frame (202) through a pin, and the bottom end of the cantilever (301) is fixedly connected to a hook (303).

3. A novel replaceable resistance furnace graphite heater device according to claim 2, characterized in that: The top of the lifting platform (302) is fixedly connected to a second motor (306), the output shaft of the second motor (306) is fixedly connected to a second worm gear (307), the side of the rotating shaft (304) is fixedly sleeved with a second worm gear (305), and the side of the second worm gear (305) is meshed with the side of the second worm gear (307).

4. A novel replaceable resistance furnace graphite heater device according to claim 2, characterized in that: The top end of the telescopic frame (202) is movably connected to the first connecting block (203) through a pin, the bottom end of the lifting platform (302) is provided with a second slide groove (308), and the side of the second slide groove (308) is movably connected to the side of the first connecting block (203), the top end of the base (201) is provided with a first slide groove (205), the bottom end of the telescopic frame (202) is movably connected to the second connecting block (207) through a pin, and the side of the second connecting block (207) is movably connected to the side of the first slide groove (205).

5. A novel replaceable resistance furnace graphite heater device according to claim 4, characterized in that: A connecting rod (206) is provided at the top of the base (201), a first motor (204) is fixedly connected to the side of the connecting rod (206), an output shaft of the first motor (204) is fixedly connected to a first worm gear (210), a threaded rod (208) is movably sleeved at the top of the base (201), a connecting rod (206) is threadedly connected to the side of the threaded rod (208), a side of the connecting rod (206) is fixedly connected to the side of the second connecting block (207), a first worm gear (209) is fixedly sleeved to the side of the threaded rod (208), and a bottom end of the first worm gear (209) is meshed with a top end of the first worm gear (210).

6. A novel replaceable resistance furnace graphite heater device according to claim 1, characterized in that: A heat exchange tube (104) is fixedly connected to the interior of the placement seat (103), and the heat exchange tube (104) is a spiral structure. The inner wall of the side of the placement seat (103) is made of heat-conducting material.

7. A novel replaceable resistance furnace graphite heater device according to claim 1, characterized in that: A mounting groove (404) is provided on the side of the fixing ring (401), and a lifting ring (403) is movably connected to the side of the mounting groove (404) via a pin.

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