Substrate cleaning and drying device

Abstract

The utility model relates to the technical field of substrate cleaning, and provides a substrate cleaning and drying device which is used for cleaning a substrate by using cleaning liquid and comprises a rotating shaft, one end of the rotating shaft is rotatably arranged in a containing groove, the other end of the rotating shaft is rotatably and slidably arranged on a fixed seat, the rotating shaft sequentially penetrates through a limiting groove and a cleaning groove, and a spiral guide groove is formed in the circumferential side wall of the rotating shaft; one end of the protrusion abuts against the interior of the spiral guide groove in a sliding mode, and the protrusion drives the rotating shaft to rotate after sliding along the spiral guide groove. And the turbulent flow blade is arranged at one end, extending into the cleaning tank, of the rotating shaft and is used for stirring the cleaning liquid in the cleaning tank. By means of the technical scheme, the problem that in the prior art, cleaning is conducted in the mode that water is sprayed to the surface of the substrate for washing or soaking, and the cleaning effect is poor is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate cleaning, and in particular to a substrate cleaning and drying device. Background Art

[0002] Substrate cleaning and drying is a crucial production process in the semiconductor, optoelectronics, microelectronics, flat panel display and other industries. It is mainly used to remove impurities, particles, organic matter and metal ions on the surface of the substrate to ensure the high cleanliness of the substrate to meet the strict requirements of subsequent processes. The cleaned substrate needs to be dried to remove moisture from the surface and micropores to prevent water stains and oxidation.

[0003] However, the existing substrate cleaning and drying devices usually use water spraying or immersion to clean the substrate surface. Flushing can easily damage the substrate and easily leave water stains. Immersion not only slows down the cleaning process but also has a poor cleaning effect. Utility Model Content

[0004] The utility model provides a substrate cleaning and drying device, which solves the problem in the related art that the cleaning is usually performed by spraying water on the substrate surface or soaking it, but the cleaning effect is poor.

[0005] The technical solution of the utility model is as follows:

[0006] A substrate cleaning and drying device, which uses a cleaning liquid to clean a substrate, comprises:

[0007] A chassis having a receiving slot;

[0008] A cleaning tank, slidably disposed in the receiving tank, the cleaning tank having a cleaning tank;

[0009] A substrate placement rack is arranged in the cleaning tank, the substrate placement rack has a slot, and the substrate is arranged in the slot;

[0010] A sliding seat, slidably arranged on the chassis, the sliding seat having a bearing surface, the cleaning pool being arranged on the bearing surface, and the bearing surface having a limiting groove;

[0011] A lifting member, disposed on the chassis, and used for lifting the substrate placement rack;

[0012] A fixed seat, arranged on the sliding seat and located at the bottom of the limiting groove, the fixed seat having a protrusion;

[0013] A rotating shaft, one end of which is rotatably disposed in the receiving groove, and the other end of which is rotatably and slidably disposed on the fixing seat, the rotating shaft sequentially passes through the limiting groove and the cleaning groove, a spiral guide groove is provided on the circumferential side wall of the rotating shaft, one end of the protrusion is slidably abutted in the spiral guide groove, and after the protrusion slides along the spiral guide groove, the rotating shaft is driven to rotate;

[0014] A spoiler blade is arranged at one end of the rotating shaft extending into the cleaning tank, and the spoiler blade is used to stir the cleaning liquid in the cleaning tank.

[0015] Preferably, it also includes:

[0016] A ventilation cover is slidably arranged on the chassis, the ventilation cover is used to cover the receiving slot, the ventilation cover has an air outlet channel, and the air outlet channel is used to transport hot air into the receiving slot.

[0017] Preferably, it also includes:

[0018] A guide rail, arranged on the chassis;

[0019] A sliding seat, slidably disposed on the guide rail, the sliding seat having a bearing surface, and the cleaning tank is disposed on the bearing surface;

[0020] A driving member is arranged on the chassis, the driving member has a driving end, the sliding seat is arranged on the driving end, and the driving member is used to drive the sliding seat to move back and forth linearly along the guide rail.

[0021] Preferably, the cleaning tank has a water inlet, the containing tank has a water outlet, and further comprises:

[0022] A liquid injection box, arranged in the chassis;

[0023] A liquid injection hose has one end connected to the liquid injection box and the other end connected to the water inlet. The liquid injection box is used to provide the cleaning liquid to the cleaning tank.

[0024] Preferably, it also includes:

[0025] A support plate is disposed in the cleaning tank, the support plate has a through groove, and the support plate divides the cleaning tank into a placement area and a liquid flow area;

[0026] A column, arranged on the support plate;

[0027] The substrate placement rack comprises:

[0028] A bottom plate having a connection hole, wherein the bottom plate is slidably disposed on the column through the connection hole;

[0029] A handle is arranged on the bottom plate, and the handle is detachably arranged on the lifting member.

[0030] Preferably, it also includes:

[0031] A hot air blower is arranged in the chassis, and the air outlet channel is connected to the hot air blower;

[0032] A power member is arranged on the chassis, the ventilation cover is arranged on the power member, and the power member is used to drive the power member to close or open.

[0033] Preferably, the lifting member comprises:

[0034] A bracket, slidably disposed on the chassis;

[0035] A screw motor is arranged on the bracket;

[0036] A hydraulic rod, arranged on the screw motor;

[0037] The connecting block has a slot, the handle is detachably arranged in the slot, the ventilation cover has a first groove, and the hydraulic rod enters the cleaning tank through the first groove.

[0038] Preferably, the substrate placement rack comprises:

[0039] frame;

[0040] There are a plurality of fixing rods, which are arranged in the frame at intervals, with a gap between two adjacent fixing rods, the slots are arranged on the fixing rods at intervals, and the substrate is clamped in the slots of two adjacent fixing rods.

[0041] Preferably, the ventilation cover plate further has a second groove, and the sliding seat is slidably disposed in the second groove, and the sliding seat moves the second groove into the cleaning tank.

[0042] Preferably, the driving member comprises:

[0043] A driver, disposed in the chassis;

[0044] a disc, disposed on the driver;

[0045] A first connecting rod, one end of which is eccentrically hinged to the disc;

[0046] A cross bar is slidably arranged on the guide rail, the sliding seat is arranged on the cross bar, and the other end of the first connecting rod is hinged on the cross bar.

[0047] The working principle and beneficial effects of the utility model are:

[0048] In the utility model, during the cleaning stage, when the sliding seat or the substrate placement rack moves, the protrusion on the fixed seat slides along the spiral guide groove, and this movement is converted into the rotation of the rotating shaft. The rotation of the rotating shaft drives the spoiler blades to stir the cleaning liquid, forming a vortex, enhancing the fluidity and mixing degree of the cleaning liquid, and ensuring that the surface of the substrate is cleaned evenly and thoroughly. The mechanical spoiler function of the cleaning liquid is realized, and the cleaning efficiency and cleaning quality are improved. The linkage design of the limit groove, the fixed seat, the rotating shaft and the spoiler blades not only enhances the fluidity of the cleaning liquid, but also simplifies the device structure and reduces energy consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] The preferred implementation modes will be described below in a clear and understandable manner with reference to the accompanying drawings to further illustrate the above-mentioned characteristics, technical features, advantages and implementation methods of the present utility model.

[0050] Figure 1 This is a schematic diagram of the structure of the cleaning and drying device of the utility model;

[0051] Figure 2 This is a schematic diagram of the internal structure of the cleaning and drying device of the utility model;

[0052] Figure 3 This is a schematic diagram of the structure of the rotating shaft, the fixing seat and the spoiler blades of the utility model;

[0053] Figure 4 This is a schematic diagram of the internal structure of the cleaning tank of the utility model;

[0054] Figure 5 for Figure 2 A partial enlarged view of point B in the middle;

[0055] Figure 6 This is a schematic diagram of the structure of the cleaning pool of the utility model;

[0056] Figure 7 This is a schematic diagram of the internal structure of the receiving tank of the utility model;

[0057] Figure 8 This is a schematic diagram of the structure of the substrate placement rack of the utility model;

[0058] Fig. 9 For this utility model Figure 1 A partial enlarged view of the middle part;

[0059] Fig.10 It is a schematic diagram of the back structure of the cleaning and drying device of the utility model.

[0060] In the figure: 1, chassis; 2, receiving tank; 201, water outlet; 3, cleaning tank; 301, cleaning tank; 302, water inlet; 4, lifting member; 401, bracket; 402, screw motor; 403, hydraulic rod; 404, connecting block; 405, slot; 5, ventilation cover; 501, first groove; 502, second groove; 6, air outlet channel; 7, sliding seat; 8, guide rail; 9, driving member; 901, driver; 902, disc; 903, first connecting rod; 904, cross bar ; 10. hot air blower; 11. liquid filling box; 12. rotating shaft; 1201. spiral guide groove; 13. fixed seat; 14. protrusion; 15. spoiler blade; 16. substrate placement rack; 1601. frame; 1602. fixing rod; 1603. slot; 17. substrate; 18. support plate; 1801. through groove; 19. column; 20. connecting hole; 21. handle; 22. limit groove; 23. placement area; 24. liquid filling hose; 25. liquid flow area; 26. bottom plate; 27. power parts. DETAILED DESCRIPTION

[0061] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the specific implementation methods of the utility model will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings and other implementation methods can be obtained based on these drawings without creative work.

[0062] In order to simplify the drawings, only the parts related to the utility model are schematically shown in each figure, and they do not represent the actual structure of the product. In addition, in order to simplify the drawings and facilitate understanding, in some figures, only one of the parts with the same structure or function is schematically shown, or only one of them is marked. In this article, "one" not only means "only one", but also means "more than one", and "several" includes "two" and "more than two".

[0063] In this article, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0064] In addition, in the description of the present application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0065] Reference Figure 1 to Figure 10 , which is an embodiment of the utility model, proposes a substrate cleaning and drying device, which uses a cleaning liquid to clean a substrate 17, including: a chassis 1, having a receiving slot 2; a cleaning pool 3, which is slidably arranged in the receiving slot 2, and the cleaning pool 3 has a cleaning slot 301; a substrate placement rack 16, which is arranged in the cleaning slot 301, the substrate placement rack 16 has a slot 1603, and the substrate 17 is arranged in the slot 1603, and there is a gap between the substrate placement rack 16 and the ventilation cover plate; after the substrate 17 is cleaned, the cleaning liquid is cleaned The pool 3 overflows into the accommodating groove 2; a lifting member 4 is arranged on the chassis 1, and the lifting member 4 is used to lift the substrate placement rack 16; a limiting groove 22 is provided on the bearing surface, and also includes: a fixed seat 13, which is arranged on the sliding seat 7 and is located at the bottom of the limiting groove 22, and the fixed seat 13 has a protrusion 14; a rotating shaft 12, one end of which is rotatably arranged in the accommodating groove 2, and the other end is rotatably and slidably arranged on the fixed seat 13, one end of the rotating shaft 12 is rotatably arranged in the accommodating groove, and the other end passes through the fixed seat and is rotatably and slidably connected with the fixed seat. The rotating shaft 12 passes through the limiting groove 22 and the cleaning groove 301 in sequence. A spiral guide groove 1201 is provided on the circumferential side wall of the rotating shaft 12. One end of the protrusion 14 slides and abuts against the spiral guide groove 1201. After the protrusion 14 slides along the spiral guide groove 1201, the rotating shaft 12 is driven to rotate; the spoiler blade 15 is arranged at one end of the rotating shaft 12 extending into the cleaning groove 301, and the spoiler blade 15 is used to stir the cleaning liquid in the cleaning groove 301.

[0066] The chassis 1 is the main frame 1601 of the whole device, and is provided with a receiving groove 2 inside for accommodating the cleaning pool 3. A ventilated cover 5 that can be slidably opened or closed can be installed on the corresponding receiving groove 2. The cleaning pool 3 is slidably arranged in the receiving groove 2 of the chassis 1, and has a cleaning groove 301, which is used to hold cleaning liquid for cleaning the substrate 17. The cleaning pool 3 is designed to be slidable, which is convenient for the disturbance of cleaning liquid, overflow and water flow and the cleaning of the cleaning pool 3 in the later stage. The substrate placement rack 16 is arranged in the cleaning groove 301 of the cleaning pool 3, and has a slot 1603 for fixing the substrate 17, ensuring the stability of the substrate 17 during the cleaning process, and preventing the substrate 17 from falling off from the slot 1603 of the substrate placement rack 16 during the cleaning process. The lifting member 4 is arranged on the chassis 1, and is used to lift the substrate placement rack 16, so as to realize the lifting and lowering of the substrate 17 during the cleaning and drying process, further increase the turbulence effect on the cleaning liquid, and avoid the pollution risk caused by manual operation.

[0067] A limiting groove 22 is provided on the bearing surface to limit the deviation of the rotating shaft 12 and ensure its stable rotation in the longitudinal direction. The fixed seat 13 is arranged on the sliding seat 7, located at the bottom of the limiting groove 22, and has a protrusion 14, which is used to cooperate with the spiral guide groove 1201 on the rotating shaft 12. The rotating shaft 12 is rotatably and slidably arranged on the fixed seat 13, one end of which passes through the limiting groove 22 and the cleaning tank 301 in sequence, and the spiral guide groove 1201 is processed on its circumferential side wall. When the sliding seat 7 moves on the guide rail 8 or the lifting member 4 drives the substrate placement rack 16 to move up and down, the protrusion 14 on the fixed seat 13 slides along the spiral guide groove 1201 to drive the rotating shaft 12 to rotate. The spoiler blade 15 is arranged at one end of the rotating shaft 12 extending into the cleaning tank 301. When the cleaning tank 3 moves up and down, the rotating shaft 12 rotates to drive the spoiler blade 15 to stir the cleaning liquid in the cleaning tank 301, generate vortex, enhance the fluidity and stirring effect of the liquid, and improve the cleaning efficiency and the cleaning uniformity of the surface of the substrate 17. This embodiment can directly dry the substrate 17 after cleaning, avoiding secondary pollution during the transportation process, and improving the cleanliness and production efficiency of the substrate 17. The chassis 1 is the main frame 1601 of the entire device, and is provided with a receiving slot 2 inside, which is used to accommodate the cleaning pool 3. A ventilated cover 5 that can be slidably opened or closed can be installed on the corresponding receiving slot 2. The cleaning pool 3 is slidably arranged in the receiving slot 2 of the chassis 1, and has a cleaning slot 301, which is used to hold cleaning liquid for cleaning the substrate 17. The cleaning pool 3 is designed to be slidable, which is convenient for the disturbance of cleaning liquid, overflow and water flow, and the cleaning of the cleaning pool 3 in the later stage. The substrate placement rack 16 is arranged in the cleaning slot 301 of the cleaning pool 3, and has a slot 1603, which is used to fix the substrate 17, ensure the stability of the substrate 17 during the cleaning process, and prevent the substrate 17 from falling off from the slot 1603 of the substrate placement rack 16 during the cleaning process. The lifting member 4 is arranged on the chassis 1, and is used to lift the substrate placement rack 16, so as to realize the lifting and lowering of the substrate 17 during the cleaning and drying process, further increasing the turbulence effect on the cleaning liquid, and avoiding the risk of contamination caused by manual operation.

[0068] Working principle: in the cleaning stage, when the sliding seat 7 or the substrate placement rack 16 moves, the protrusion 14 on the fixed seat 13 slides along the spiral guide groove 1201, and this movement is converted into the rotation of the rotating shaft 12. The rotation of the rotating shaft 12 drives the spoiler blade 15 to stir the cleaning liquid, forming a vortex, enhancing the fluidity and mixing degree of the cleaning liquid, and ensuring that the surface of the substrate 17 is evenly and thoroughly cleaned. Through the above design, the substrate 17 cleaning and drying device of the utility model realizes the mechanical spoiler function of the cleaning liquid, improves the cleaning efficiency and cleaning quality. The linkage design of the limit groove 22, the fixed seat 13, the rotating shaft 12 and the spoiler blade 15 not only enhances the fluidity of the cleaning liquid, but also simplifies the device structure and reduces energy consumption.

[0069] Further, the ventilation cover plate 5 is slidably arranged on the chassis 1, and the ventilation cover plate 5 is used to block the receiving slot 2. The ventilation cover plate 5 has an air outlet channel 6, and the air outlet channel 6 is used to transport hot air into the receiving slot 2. The ventilation cover plate 5 is slidably arranged on the chassis 1 to block the receiving slot 2 to prevent external dust from entering. The ventilation cover plate 5 is also provided with an air outlet channel 6 for transporting hot air into the receiving slot 2 to dry the cleaned substrate 17. Working principle, the substrate 17 is placed in the slot 1603 of the placement rack, and the placement rack is immersed in the cleaning liquid of the cleaning pool 3 for cleaning. After the cleaning is completed, the lifting member 4 pulls the placement rack to rise slowly or rises in a gap to prevent residual water stains on the substrate 17 until the substrate 17 completely leaves the cleaning liquid. During the slow or intermittent rise of the substrate placement rack 16, the air outlet channel 6 of the ventilation cover plate 5 is opened, and hot air enters the receiving slot 2 to dry the substrate 17 until the substrate 17 is completely dry. The whole process does not require manual intervention, avoiding secondary pollution during transportation. The automatic loading substrate 17 cleaning and drying device of the utility model effectively avoids secondary contamination of the substrate 17 during transportation by integrating cleaning and drying functions, improves the cleanliness of the substrate 17, and at the same time, the automated operation reduces the uncertainties caused by manual operation, thereby improving production efficiency and product quality.

[0070] Furthermore, it also includes: a guide rail 8, which is arranged on the chassis 1; a sliding seat 7, which is slidably arranged on the guide rail 8, the sliding seat 7 has a bearing surface, and the cleaning tank 3 is arranged on the bearing surface; a driving member 9, which is arranged on the chassis 1, the driving member 9 has a driving end, the sliding seat 7 is arranged on the driving end, and the driving member 9 is used to drive the sliding seat 7 to move back and forth in a straight line along the guide rail 8.

[0071] In the above scheme, in order to further improve the automation and operation efficiency of the substrate 17 cleaning and drying device, the utility model designs a guide rail 8, a sliding seat 7 and a driving member 9. The guide rail 8 is arranged on the chassis 1, and serves as a guide structure of the sliding seat 7, ensuring that the sliding seat 7 can move up and down along the guide rail 8 in a straight line, so as to realize the positioning and movement of the cleaning pool 3 in the receiving tank 2. The sliding seat 7 is slidably arranged on the guide rail 8, and has a bearing surface, and the cleaning pool 3 is arranged on the bearing surface. The sliding seat 7 allows the cleaning pool 3 to move back and forth along the guide rail 8 in a straight line under the drive of the driving member 9, which can not only realize the disturbance of the water flow and accelerate the cleaning speed, but also realize the automatic switching during the cleaning and drying process, thereby improving the automation level of the operation. The driving member 9 is arranged on the chassis 1, and has a driving end, and the sliding seat 7 is arranged on the driving end. The driving member 9 can be an electric motor, a hydraulic cylinder or a cylinder, etc., which is used to provide power to drive the sliding seat 7 to move back and forth along the guide rail 8 in a straight line, so as to realize the automatic movement of the cleaning pool 3, thereby completing the cleaning and drying work.

[0072] Working principle: During the cleaning stage, the substrate placement rack 16 is immersed in the cleaning liquid for cleaning. During the cleaning process, the sliding seat 7 drives the cleaning pool 3 to move slowly or move in gaps. After the cleaning is completed, the driving member 9 drives the sliding seat 7 to move up slowly or move up in gaps along the guide rail 8. At this time, the air outlet channel 6 of the ventilation cover 5 discharges air to the cleaning pool 3, and the hot air enters the receiving tank 2 through the air outlet channel 6 to dry the substrate 17. After the drying is completed, the substrate placement rack 16 is taken out, and the driving member 9 runs in reverse to move the sliding seat 7 and the cleaning pool 3 back to the cleaning position to prepare for the next cleaning cycle. The substrate 17 cleaning and drying device of the utility model realizes the automatic switching of the cleaning and drying processes, avoids manual intervention, reduces the risk of operating errors and secondary pollution, and improves production efficiency and the cleanliness of the substrate 17. The use of the guide rail 8 and the sliding seat 7 ensures the stability and accuracy of the movement of the cleaning pool 3, and the introduction of the driving member 9 realizes the automatic control of the entire operation process.

[0073] Furthermore, the cleaning tank 301 has a water inlet 302, the receiving tank 2 has a water outlet 201, and also includes: a liquid injection box 11, which is arranged in the chassis 1; a liquid injection hose 24, one end of which is connected to the liquid injection box 11, and the other end is connected to the water inlet 302, and the liquid injection box 11 is used to provide cleaning liquid to the cleaning tank 301.

[0074] In the above scheme, the injection tank 11 is arranged inside the chassis 1 for storing cleaning liquid, and the injection tank 11 has a water pump. The injection tank 11 ensures sufficient supply of cleaning liquid and improves work efficiency. One end of the injection hose 24 is connected to the injection tank 11, and the other end is connected to the water inlet 302 of the cleaning pool 3, forming an automatic supply of cleaning liquid. The use of the injection hose 24 not only realizes the automatic transmission of cleaning liquid from the injection tank 11 to the cleaning pool 3, ensuring the continuity and stability of the cleaning process, but also ensures stable and continuous liquid supply while the cleaning pool 3 moves up and down.

[0075] Working principle: During the cleaning stage, the liquid injection tank 11 can continuously supply liquid to the cleaning pool 3, so that the cleaning liquid in the liquid supply pool overflows and the cleaning is achieved. When injecting liquid, the liquid injection tank 11 is opened, and the cleaning liquid is automatically supplied to the cleaning pool 3 through the liquid injection hose 24 between the liquid injection tank 11 and the cleaning pool 3. Even in long-term continuous operation, sufficient supply of cleaning liquid can be ensured, avoiding the decline in cleaning effect caused by untimely manual liquid addition. The substrate 17 cleaning and drying device of the utility model realizes the automatic replenishment of cleaning liquid, reduces manual intervention, and improves the automation level and production efficiency of the operation. The use of the liquid injection tank 11 and the liquid injection hose 24 ensures the continuous supply of cleaning liquid, avoids cleaning interruptions, and improves the continuity and stability of cleaning.

[0076] Furthermore, it also includes: a support plate 18, which is arranged in the cleaning tank 301 and has a through groove. The support plate 18 divides the cleaning tank 301 into a placement area 23 and a liquid flow area; a column 19, which is arranged on the support plate 18; the substrate placement rack 16 includes: a bottom plate, which has a connecting hole 20, and the bottom plate is slidably arranged on the column 19 through the connecting hole 20; a handle 21, which is arranged on the bottom plate, and the handle 21 is detachably arranged on the lifting member 4. After the ventilation cover 5 is closed, the bottom plate is pulled to move up and down.

[0077] In the above scheme, the support plate 18 is arranged in the cleaning tank 301, and has a through groove, which divides the cleaning tank 301 into a placement area 23 and a liquid flow area. The setting of the support plate 18 not only plays a separation role, but also ensures the free flow of the cleaning liquid in the cleaning tank 301 and the effect of slight disturbance through the through groove, improves the recycling rate of the cleaning liquid, and enhances the cleaning effect. The column 19 is arranged on the support plate 18, which is used to support and guide the substrate placement rack 16, ensures the stable positioning of the substrate placement rack 16 in the cleaning tank 301, and also provides a connection point for the lifting member 4, which is convenient for the vertical lifting of the substrate placement rack 16. The bottom plate has a connecting hole 20, which is slidably arranged on the column 19 through the connecting hole 20. The bottom plate is used to carry the substrate 17, and the substrate placement rack 16 moves up and down on the column 19, which is convenient for adjusting the position of the substrate placement rack 16 during the cleaning and drying process, and can also increase the cleaning effect.

[0078] Working principle: During the cleaning stage, the substrate 17 is placed on the substrate placement rack 16, and the substrate placement rack 16 is placed in the cleaning liquid through the handle 21 for cleaning. During the cleaning process, the substrate placement rack 16 can be repeatedly lifted and lowered through the lifting rack to increase the turbulence effect and improve the cleaning speed. After the cleaning is completed, the ventilation cover 5 is closed, and the lifting member 4 is clamped on the handle 21, driving the entire substrate placement rack 16 to move up and down, and cooperating with the ventilation cover 5, it is convenient to dry the substrate 17.

[0079] Furthermore, it also includes: a hot air blower 10, which is arranged in the chassis 1, and the air outlet channel 6 is connected to the hot air blower 10; a power part, which is arranged on the chassis 1, and the ventilation cover 5 is arranged on the power part, and the power part is used to drive the ventilation part to close or open.

[0080] In the above scheme, the hot air blower 10 is arranged inside the chassis 1 to generate hot air. The air outlet channel 6 is connected to the hot air blower 10 to ensure that the hot air can directly enter the receiving tank 2 to dry the substrate 17. The use of the hot air blower 10 realizes the high efficiency and speed of the drying process and improves the quality of drying the substrate 17. The power part is arranged on the chassis 1, and the ventilation cover 5 is arranged on the power part. The power part is used to drive the ventilation cover 5 to close or open, thereby realizing the automatic control of the ventilation cover 5. Through the control of the power part, the state of the ventilation cover 5 can be automatically adjusted at different stages of cleaning and drying to ensure the ventilation of the drying process.

[0081] Working principle: During the drying stage, the hot air blower 10 is started to generate hot air, and the hot air enters the receiving tank 2 through the air outlet channel 6 to dry the cleaned substrate 17. At this time, the power component drives the ventilation cover 5 to close, forming a closed space to ensure the effective use of hot air. During the drying process, the lifting component 4 drives the substrate placement rack 16 to slowly move up from the liquid surface or move up in the gap to prevent water stains from remaining on the substrate 17 during the drying process. Through the above design, the substrate 17 cleaning and drying device of the utility model realizes efficient, fast and automatic control of the drying process. The introduction of the hot air blower 10 ensures an adequate supply of hot air and improves the drying efficiency. The linkage design of the power component and the ventilation cover 5 realizes the automatic control of the ventilation cover 5, simplifies the operating process, and improves the production efficiency and the quality of the drying of the substrate 17.

[0082] Furthermore, the lifting member 4 includes: a bracket 401, which is slidably arranged on the chassis 1; a screw motor 402, which is arranged on the bracket 401; a hydraulic rod 403, which is arranged on the screw motor 402; a connecting block 404, which has a slot 405, and the handle 21 is detachably arranged in the slot 405, and the ventilation cover 5 has a first groove 501, and the hydraulic rod 403 enters the cleaning tank 301 through the first groove 501.

[0083] In the above scheme, the bracket 401 is slidably arranged on the chassis 1 to support other components of the lifting member 4. The hydraulic rod 403 realizes the vertical lifting of the substrate placement rack 16. The screw motor 402 is arranged on the bracket 401 as the main power source of the lifting member 4. The screw motor 402 drives the hydraulic rod 403 connected thereto to move up and down by rotating the screw, thereby realizing the lifting and lowering of the substrate placement rack 16. The connecting block 404 has a slot 405, and the handle 21 is detachably arranged in the slot 405. The slot 405 ensures the stable connection of the handle 21 and facilitates the disassembly of the connecting block 404 and the handle 21. The ventilation cover 5 has a first groove 501, and the hydraulic rod 403 enters the cleaning tank 301 through the first groove 501, thereby realizing the automatic opening and closing of the ventilation cover 5. The first groove 501 enables the hydraulic rod 403 to smoothly enter the cleaning tank 301 without interfering with the normal opening and closing of the ventilation cover 5, thereby realizing its function.

[0084] Working principle: In the cleaning or drying stage, the lead screw motor 402 is started, and by rotating the lead screw, the bracket 401 and other components connected thereto are driven to move up and down, thereby realizing the lifting and lowering of the substrate placement rack 16. The operator can also manually adjust the position of the substrate placement rack 16 through the handle 21, which increases the flexibility and convenience of the device. The substrate 17 cleaning and drying device of the utility model realizes the linkage control of the lifting member 4 and the ventilation cover plate 5, thereby improving the automation level and convenience of the operation.

[0085] Furthermore, the substrate placement rack 16 includes: a frame 1601; a plurality of fixing rods, which are spaced apart in the frame 1601, with a gap between two adjacent fixing rods, and slots 1603 are spaced apart on the fixing rods, and the substrate 17 is snapped into the slots 1603 of two adjacent fixing rods.

[0086] In the above scheme, there are a plurality of fixing rods, which are arranged at intervals in the frame 1601, and a gap is left between two adjacent fixing rods. The fixing rods not only provide support points for the substrate 17, but also allow the cleaning liquid and hot air to flow freely through the gaps between them, thereby improving the uniformity of cleaning and drying. The slots 1603 are arranged at intervals on the fixing rods, which are used to clamp the substrate 17, ensuring the stable fixation of the substrate 17 during the cleaning and drying process, and also facilitating the rapid loading and unloading of the substrate 17, thereby improving the operating efficiency.

[0087] Working principle: During the cleaning or drying stage, the substrate 17 is placed in the slot 1603 of the substrate placement rack 16, and the stability of the substrate 17 is ensured by the support of the fixed rod. The cleaning liquid evenly covers the surface of the substrate 17 through the gaps between the fixed rods, thereby improving the uniformity of cleaning. During drying, hot air also blows the substrate 17 evenly through these gaps, thereby ensuring comprehensive and uniform drying, and avoiding the situation of local over-wetting or over-drying. The substrate 17 cleaning and drying device of the utility model realizes the optimization of the substrate placement rack 16, improves the carrying capacity of the substrate 17 and the uniformity of cleaning and drying. The combined design of the fixed rod and the slot 1603 not only ensures the stability of the substrate 17 during the cleaning and drying process, but also improves the efficiency and quality of cleaning and drying.

[0088] Furthermore, the ventilation cover plate 5 also has a second groove 502 , and the sliding seat 7 is slidably disposed in the second groove 502 , and the sliding seat 7 moves the second groove 502 into the cleaning tank 301 .

[0089] In the above solution, the ventilation cover 5 also has a second groove 502 for accommodating the sliding seat 7. The second groove 502 ensures that the sliding seat 7 can still slide smoothly when the ventilation cover 5 is closed, without affecting the sealing of the cleaning tank 3, and at the same time provides a guiding and limiting function for the sliding seat 7. The sliding seat 7 is slidably arranged in the second groove 502, so that the sliding seat 7 can move freely between the cleaning tank 301 and the drying area without being restricted by the ventilation cover 5.

[0090] Working principle: During the cleaning stage, the ventilation cover 5 is opened and the substrate 17 is placed in the cleaning tank 3 for cleaning. After cleaning, the ventilation cover 5 is closed to form a closed space, and hot air enters through the air outlet channel 6 of the ventilation cover 5 to dry the substrate 17. The whole process does not require manual intervention and has a high degree of automation, ensuring the continuity and efficiency of cleaning and drying of the substrate 17.

[0091] Furthermore, the driving member 9 includes: a driver 901, which is arranged in the chassis 1; a disk 902, which is arranged on the driver 901; a first connecting rod, one end of which is eccentrically hinged to the disk 902; a cross bar 904, which is slidably arranged on the guide rail 8, and the sliding seat 7 is arranged on the cross bar 904, and the other end of the first connecting rod is hinged to the cross bar 904.

[0092] In the above scheme, the driver 901 is driven by a motor, and the disc 902 can also be replaced by a cam. One end of the first connecting rod 903 is eccentrically arranged with the disc 902. When the disc 902 rotates, the first connecting rod 903 moves with the disc 902, and then the first connecting rod 903 transmits power to the cross bar 904, thereby realizing the up and down movement of the sliding seat 7.

[0093] It should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the utility model, which should be included in the scope of the claims of the utility model.

[0094] It should be noted that the above embodiments are only used to illustrate the technical solution of the utility model rather than to limit it. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the utility model, which should be included in the scope of the claims of the utility model.

Claims

1. A substrate cleaning and drying device, for cleaning a substrate (17) with a cleaning liquid, characterized in that: include: A chassis (1) having a receiving slot (2); A cleaning tank (3) is slidably disposed in the containing tank (2), and the cleaning tank (3) has a cleaning tank (301); A substrate placement rack (16) is arranged in the cleaning tank (301), the substrate placement rack (16) has a slot (1603), and the substrate (17) is arranged in the slot (1603); A sliding seat (7) is slidably arranged on the chassis (1), the sliding seat (7) has a bearing surface, the cleaning pool (3) is arranged on the bearing surface, and the bearing surface has a limiting groove (22); A lifting member (4) is arranged on the chassis (1), and the lifting member (4) is used to lift the substrate placement rack (16); A fixed seat (13) is arranged on the sliding seat (7) and is located at the bottom of the limiting groove (22), and the fixed seat (13) has a protrusion (14); A rotating shaft (12), one end of which is rotatably disposed in the containing groove (2), and the other end of which is rotatably and slidably disposed on the fixing seat (13); the rotating shaft (12) sequentially passes through the limiting groove (22) and the cleaning groove (301); a spiral guide groove (1201) is provided on the circumferential side wall of the rotating shaft (12); one end of the protrusion (14) is slidably abutted in the spiral guide groove (1201); after the protrusion (14) slides along the spiral guide groove (1201), the rotating shaft (12) is driven to rotate; A spoiler blade (15) is arranged at one end of the rotating shaft (12) extending into the cleaning tank (301), and the spoiler blade (15) is used to stir the cleaning liquid in the cleaning tank (301).

2. A substrate cleaning and drying device according to claim 1, characterized in that: Also includes: A ventilation cover plate (5) is slidably arranged on the chassis (1), the ventilation cover plate (5) is used to cover the receiving slot (2), the ventilation cover plate (5) has an air outlet channel (6), and the air outlet channel (6) is used to transport hot air into the receiving slot (2).

3. A substrate cleaning and drying device according to claim 2, characterized in that: Also includes: A guide rail (8) is arranged on the chassis (1); A sliding seat (7) is slidably arranged on the guide rail (8), the sliding seat (7) having a bearing surface, and the cleaning pool (3) is arranged on the bearing surface; A driving member (9) is arranged on the chassis (1), the driving member (9) having a driving end, the sliding seat (7) being arranged on the driving end, and the driving member (9) being used for driving the sliding seat (7) to move linearly back and forth along the guide rail (8).

4. A substrate cleaning and drying device according to claim 1, characterized in that: The cleaning tank (301) has a water inlet (302), the containing tank (2) has a water outlet (201), and further comprises: A liquid injection box (11) is arranged in the chassis (1); A liquid injection hose (24) is connected to the liquid injection box (11) at one end and to the water inlet (302) at the other end. The liquid injection box (11) is used to provide the cleaning liquid to the cleaning tank (301).

5. The substrate cleaning and drying device according to claim 2, characterized in that: Also includes: A support plate (18) is arranged in the cleaning tank (301), the support plate (18) having a through groove, and the support plate (18) divides the cleaning tank (301) into a placement area (23) and a liquid flow area; A column (19) is arranged on the support plate (18); The substrate placement rack (16) comprises: A bottom plate (26) having a connection hole (20), wherein the bottom plate (26) is slidably disposed on the column (19) through the connection hole (20); A handle (21) is arranged on the bottom plate, and the handle (21) is detachably arranged on the lifting member (4).

6. A substrate cleaning and drying device according to claim 2, characterized in that: Also includes: A hot air blower (10) is arranged in the chassis (1), and the air outlet channel (6) is connected to the hot air blower (10); A power member (27) is arranged on the chassis (1), the ventilation cover plate (5) is arranged on the power member (27), and the power member (27) is used to drive the power member (27) to close or open.

7. The substrate cleaning and drying device according to claim 5, characterized in that: The lifting member (4) comprises: A bracket (401) is slidably disposed on the chassis (1); A screw motor (402) is arranged on the bracket (401); A hydraulic rod (403) is arranged on the screw motor (402); The connecting block (404) has a slot (405), the handle (21) is detachably arranged in the slot (405), the ventilation cover plate (5) has a first groove (501), and the hydraulic rod (403) enters the cleaning tank (301) through the first groove (501).

8. The substrate cleaning and drying device according to claim 1, characterized in that: The substrate placement rack (16) comprises: Frame(1601); There are a plurality of fixing rods (1602), wherein the fixing rods (1602) are arranged at intervals in the frame (1601), and a gap is left between two adjacent fixing rods (1602). The slots (1603) are arranged at intervals on the fixing rods (1602), and the substrate (17) is snap-connected to the slots (1603) of two adjacent fixing rods (1602).

9. The substrate cleaning and drying device according to claim 3, characterized in that: The ventilation cover plate (5) also has a second groove (502), and the sliding seat (7) is slidably disposed in the second groove (502), and the sliding seat (7) allows the second groove (502) to enter the cleaning tank (301).

10. The substrate cleaning and drying device according to claim 3, characterized in that: The driving member (9) comprises: A driver (901) is arranged in the chassis (1); A disc (902) is disposed on the driver (901); A first connecting rod (903), one end of which is eccentrically hinged to the disc (902); The cross bar (904) is slidably arranged on the guide rail (8), the sliding seat (7) is arranged on the cross bar (904), and the other end of the first connecting rod (903) is hinged on the cross bar (904).

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