Substrate bearing device

Abstract

The utility model provides a substrate bearing device. The substrate bearing device comprises a supporting base and a supporting top seat which are arranged at an interval, the at least one supporting frame is arranged between the supporting top seat and the supporting bottom seat at intervals; the connecting pieces penetrate through the supporting frame and are connected to the supporting top seat and / or the supporting base in parallel at intervals; a plurality of supporting parts are arranged on the connecting piece at intervals in the axial direction; when the substrate bearing device loads a target substrate, the target substrate enters the space between the multiple connecting pieces from one side of the substrate bearing device in the feeding and discharging direction, and the periphery of the target substrate is supported on the supporting parts, at the same height, of the connecting pieces. According to the substrate bearing device provided by the utility model, the supporting part for bearing the substrate is arranged on the connecting piece which is detachably connected between the supporting frame and the supporting top seat as well as between the supporting frame and the supporting bottom seat, only the corresponding connecting piece needs to be replaced when the supporting part is broken, and the whole substrate bearing device does not need to be replaced, so that the use cost is reduced. The connecting pieces are short and can be quickly disassembled and assembled between the supporting frame and the supporting top base or the supporting base, and the maintenance efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cells, in particular to a substrate carrying device. Background Art

[0002] As the global demand for renewable energy continues to increase, the solar photovoltaic cell industry has developed rapidly. In the production and manufacturing process of solar cells, a wafer boat is usually used as a carrier for silicon wafer transmission, cleaning and processing. The wafer boat is equipped with multiple sets of wafer slots, and multiple silicon wafers are positioned and placed in each set of wafer slots.

[0003] Some existing wafer boats adopt a horizontal structure, which has the disadvantages of large site area, low production space utilization and low transmission and transfer efficiency. Although some wafer boats adopt a vertical structure, which improves space utilization and transmission and transfer efficiency, this type of vertical wafer boat usually includes a bottom plate and a vertical plate arranged opposite to each other, and a plurality of slotted columns connected between the bottom plate and the vertical plate. The peripheral edge of the silicon wafer is clamped between the slots of the same height of the plurality of slotted columns to achieve the bearing function of the silicon wafer.

[0004] However, because the traditional vertical wafer boat has grooves on the side of the column, the thickness of the column in the horizontal direction at the groove becomes thinner and the structural strength is reduced. Therefore, the connecting entity part of the column on the side of the groove is easily broken due to the weight of the upper part of the column and the gravity of the silicon wafers carried. The traditional vertical wafer boat directly connects the connector between the top plate and the bottom plate. In order to improve the loading efficiency, the height of the wafer boat is relatively large, resulting in a long column length and inconvenient disassembly and assembly between the top and bottom plates. Therefore, the traditional vertical wafer boat often uses an integral frame that is fixedly connected to each other by the vertical plate, the bottom plate and the connector. Once the structure breaks at the column groove, the entire wafer boat needs to be replaced, which increases the production cost.

[0005] In addition, to ensure structural strength and hardness, the columns are usually made of silicon carbide material. However, the columns made of silicon carbide are highly brittle and lack toughness, which increases the difficulty of precision machining of the wafer boat. In the actual process of using the wafer boat to transport silicon wafers, the slots of the silicon carbide columns used to support the silicon wafers are prone to structural fractures due to the impact of the silicon wafers. Utility Model Content

[0006] The utility model proposes a substrate carrying device to solve the technical problem that the conventional vertical wafer boat in the prior art adopts an integral frame structure in which slotted columns are fixedly connected to the top plate and the bottom plate, resulting in the need to replace the substrate carrying device as a whole when the slot of the column breaks, and the substrate carrying device has a high cost of use.

[0007] In order to solve the above problems, the technical solution adopted by the utility model is:

[0008] The utility model provides a substrate carrying device, comprising:

[0009] Support base;

[0010] A support top seat is spaced apart from the support base;

[0011] At least one support frame is spaced between the support top seat and the support base;

[0012] A plurality of connecting members are arranged through the supporting frame and are detachably connected to the supporting top seat and / or the supporting base in parallel and at intervals;

[0013] The connecting member is provided with a plurality of supporting parts at intervals along the axial direction thereof;

[0014] When the substrate carrying device is loaded with a target substrate, the target substrate enters between the multiple connecting members from one side of the substrate carrying device along the feeding and discharging direction, and the periphery of the target substrate is supported on the supporting parts of the same height of each connecting member.

[0015] Preferably, the connecting member is made of a tough material and is detachably connected to the supporting top seat and / or the supporting base, and the supporting portion is integrally arranged in a supporting groove of the connecting member.

[0016] Preferably, the support base, the support top seat and the support frame are arranged in parallel, the connecting piece is provided with a clamping groove extending along its axial direction, the supporting part is a clamping block detachably connected to the clamping groove, and the clamping block is made of a tough material.

[0017] Preferably, the cross section of the clamping groove is T-shaped, one end of the clamping block is a connecting end matching the shape of the clamping groove, and the clamping block is installed on the connecting piece through the clamping engagement of the connecting end with the clamping groove.

[0018] Preferably, the other end of the clamping block is a supporting end with a triangular cross section, and the periphery of the target substrate is supported on the corresponding supporting ends of the supporting parts of each connecting member at the same height.

[0019] Preferably, the connecting member comprises:

[0020] At least two middle partitions are arranged through the middle of the support frame and spaced apart along the material feeding and discharging direction, and a pair of clamping grooves are provided, and the pair of clamping grooves are respectively corresponding to the two sides of the connecting piece in the material feeding and discharging direction and extend parallel to the axial direction of the connecting piece;

[0021] At least two pairs of side limiters are matched with the two middle partitions and are arranged at intervals on both sides of the support frame in the material feeding and discharging direction;

[0022] At least two end stoppers are provided through one end of the support frame in the material feeding and discharging direction;

[0023] The middle partition piece and the side limit pieces and the end limit pieces on both sides thereof correspond to form a pair of silo areas;

[0024] When the substrate carrying device is loaded with target substrates, two groups of target substrates enter the corresponding silo area from the opposite side of the end limiter along the material inlet and outlet direction respectively, and the periphery of the target substrate is supported on the clamping blocks at the same height of the middle partition, side limiter and end limiter in the corresponding silo area.

[0025] Preferably, the connecting member is a quartz connecting column.

[0026] Preferably, the connecting piece is made of silicon carbide, and the clamping block is made of quartz.

[0027] Furthermore, the substrate supporting device further comprises:

[0028] At least one reinforcing member is arranged through the supporting frame and is connected to the supporting top seat and / or the supporting base in parallel and at intervals.

[0029] Preferably, the connecting member passes through the supporting frame, and two ends of the connecting member are respectively connected to the supporting top seat and the supporting base.

[0030] Furthermore, the substrate supporting device further comprises:

[0031] Hanging ears, installed on both sides of the support frame in the material feeding and discharging direction, used to connect with the substrate conveying device;

[0032] The docking piece is installed at one end of the support frame in the material feeding and discharging direction and is used for docking with the substrate transfer device.

[0033] Preferably, the substrate is a silicon wafer.

[0034] Compared with the prior art, the utility model has the following beneficial effects:

[0035] The substrate carrying device provided by the utility model has at least one supporting frame arranged between the supporting top seat and the supporting base of the vertical substrate carrying device, and then a plurality of connecting pieces are detachably connected in parallel between the supporting frame and the supporting top seat or the supporting base, and the supporting part for carrying the target substrate is arranged on the connecting piece, thereby shortening the length of the connecting piece. When a structural fracture occurs in the supporting part of the connecting piece, it is only necessary to directly remove and replace the corresponding connecting piece with the structural fracture, thereby avoiding the technical problem that the traditional vertical substrate carrying device adopts an integral frame structure in which the slotted column is fixedly connected to the top plate and the bottom plate, resulting in the need to replace the substrate carrying device as a whole when the slot of the column is broken. At the same time, the substrate carrying device provided by the utility model has a shorter connecting piece that can be quickly disassembled and assembled between the supporting frame and the supporting top seat or the supporting base, thereby improving the replacement and maintenance efficiency of the connecting piece.

[0036] The substrate bearing device provided by the utility model can adopt quartz connecting columns as its connecting parts, and the supporting part is a supporting groove integrally provided with the quartz connecting columns, and the quartz connecting columns and the supporting grooves provided therein are used as the bearing and force-bearing structure of the silicon wafer, thereby avoiding the problem that the traditional substrate bearing device adopts an integral silicon carbide frame with high brittleness, which leads to the problem that the frame column bearing the substrate is prone to structural fracture, and reduces the processing difficulty and production cost of the substrate bearing device. If the quartz connecting column breaks at the supporting groove, only the corresponding quartz connecting column needs to be replaced, and there is no need to replace the supporting frame, supporting top seat, supporting base and other quartz connecting columns of the substrate bearing device as a whole.

[0037] The substrate supporting device provided by the utility model can also use silicon carbide connecting columns for connecting parts to ensure strength, and the supporting part can use a quartz clamping block that is detachably connected to the silicon carbide connecting column. When only the quartz clamping block is broken and the silicon carbide connecting column is not broken, it is only necessary to replace the corresponding clamping block without replacing the entire silicon carbide connecting column, which also reduces the use and maintenance costs of the substrate supporting device. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solution proposed by the present invention, a detailed description is given below in combination with embodiments and drawings. It should be understood that the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, these drawings can be changed under the concept of the present invention.

[0039] Figure 1 A front view of the assembly structure of the first embodiment of the substrate carrying device provided by the utility model;

[0040] Figure 2 for Figure 1 A schematic diagram of the local enlarged structure of the D region;

[0041] Figure 3 for Figure 1 A schematic cross-sectional structural diagram of the substrate supporting device along the AA direction;

[0042] Figure 4 for Figure 1 A schematic cross-sectional structural diagram of the substrate supporting device along the BB direction;

[0043] Figure 5 for Figure 1 A schematic diagram of the local enlarged structure of the E region;

[0044] Figure 6 for Figure 1 A schematic cross-sectional structural diagram of the substrate supporting device along the CC direction;

[0045] Figure 7A front view of the assembly structure of the second embodiment of the substrate carrying device provided by the utility model;

[0046] Figure 8 A top view of the assembly structure of the second embodiment of the substrate carrying device provided by the utility model;

[0047] Fig. 9 for Figure 7 A schematic cross-sectional structural diagram of the substrate supporting device along the FF direction;

[0048] Fig.10 for Fig. 9 Schematic diagram of the local enlarged structure of the G area in FIG.

[0049] Among them, the main marks of the drawings in the figure are as follows:

[0050] 1. Support base; 2. Support top seat; 3. Support frame; 4. Connector; 41. Snap-in groove; 42. Middle partition; 43. Side limiter; 44. End limiter; 5. Support part; 51. Support groove; 52. Snap-in block; 521. Connecting end; 522. Support end; 6. Target substrate; 7. Reinforcement member; 8. Hanging ear; 9. Docking member.

[0051] Among them, other annotations in the figure are as follows:

[0052] H. Material inlet and outlet direction; I. Silo area; J. Loading range. DETAILED DESCRIPTION

[0053] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the following is a summary of the technical problems, technical solutions and beneficial effects to be solved by the present invention. Figure 1-10 And embodiments, the utility model is further described in detail.

[0054] Please also read Figure 1-10 The substrate carrying device provided by the utility model comprises:

[0055] A support base 1; a support top seat 2, which is spaced apart from the support base 1; at least one support frame 3, which is spaced apart between the support top seat 2 and the support base 1; a plurality of connecting members 4, which are passed through the support frame 3 and are detachably connected to the support top seat 2 and / or the support base 1 in parallel and spaced apart; a plurality of supporting portions 5 are spaced apart along the axial direction of the connecting member 4;

[0056] When the substrate supporting device is loaded with a target substrate 6, the target substrate 6 enters between the multiple connecting members 4 from one side of the substrate supporting device along the feeding and discharging direction H, and the periphery of the target substrate 6 is supported on the supporting portions 5 of the same height of each connecting member 4, and the multiple target substrates 6 are successively supported on the supporting portions 5 of each height of each connecting member 4, thereby completing the feeding operation of the substrate supporting device.

[0057] When the substrate carrying device moves each target substrate 6 into place along with the substrate conveying device, the target substrate 6 is pulled out from the substrate carrying device along the feeding and discharging direction H from the same side of the substrate carrying device and between multiple connecting members 4, and the multiple target substrates 6 are taken out in turn and placed on the supporting parts 5 at each height of each connecting member 4, completing the discharging (unloading) operation of the substrate carrying device.

[0058] The substrate carrying device provided by the utility model adopts a split-type design for its supporting structure body, which is composed of a supporting base 1, a supporting top seat 2 and at least one supporting frame 3 arranged between the supporting top seat 2 and the supporting base 1, and a plurality of connecting members 4 which are inserted through the supporting frame 3 and are detachably connected to the supporting top seat 2 or the supporting base 1 in parallel and at intervals. A plurality of supporting portions 5 for directly carrying substrates are arranged at intervals in the axial direction of the connecting members 4. A target substrate 6 enters between the plurality of connecting members 4 from one side along a material feeding and discharging direction H, and its periphery is supported on the supporting portions 5 of the same height of each connecting member 4, thereby shortening the length of the connecting member 4.

[0059] When the supporting part 5 of the connector 4 is structurally broken, it is only necessary to directly remove and replace the corresponding connector 4 with the structural break, thereby avoiding the technical problem that the substrate bearing device needs to be replaced as a whole when the slot of the column is broken, because the traditional vertical substrate bearing device adopts an integral frame structure in which the slotted column is fixedly connected to the top plate and the bottom plate. At the same time, the substrate bearing device provided by the utility model has a shorter connector 4 that can be quickly disassembled and assembled between the support frame 3 and the support top seat 2 or the support base 1, thereby improving the replacement and maintenance efficiency of the connector 4.

[0060] Please also read Figure 1-6 In the first embodiment of the substrate supporting device provided by the utility model:

[0061] The connecting member 4 is made of a tough material, and the supporting portion 5 is integrally arranged in a supporting groove 51 of the connecting member 4. The shape of the supporting groove 51 matches the peripheral shape of the target substrate 6. The periphery of the target substrate 6 is supported on the supporting grooves 51 at the same height of each connecting member 4, thereby achieving stable support for the target substrate 6.

[0062] Please also read Figure 1-6 As a preferred implementation of Example 1, the connecting member 4 is a quartz connecting column and is detachably connected to the support top seat 2 and / or the support base 1, and the supporting portion 5 is a supporting groove 51 integrally arranged on the side of the quartz connecting column, that is, the connecting member 4 is a slotted quartz connecting column, which is made of quartz material as a whole and has the advantages of good stability and easy precision processing.

[0063] In the first embodiment of the substrate supporting device provided by the utility model, its connecting piece 4 adopts a quartz connecting column, and the supporting part 5 is a supporting groove integrally arranged with the quartz connecting column, and the quartz connecting column and the supporting groove opened therein are used as the bearing and force-bearing structure of the silicon wafer, that is, the supporting frame 3 with high hardness and brittleness (such as silicon carbide material) is not used to directly carry the target substrate 6 (such as silicon wafer), but serves as the intermediate transition part of the substrate supporting device, and the supporting part 5 for directly carrying the substrate is arranged on the connecting piece 4 (quartz connecting column) passed through the supporting frame 3 and the supporting top seat 2 and the supporting base 1, and the supporting part 5 (supporting groove) is made of tough material (quartz), thereby avoiding the problem that the traditional substrate supporting device adopts an integral silicon carbide frame with high brittleness, which leads to the problem that the frame column is prone to structural fracture at the substrate supporting position, thereby improving the service life of the substrate supporting device and reducing the processing difficulty and production cost of the substrate supporting device.

[0064] If the connector 4 (quartz connector column) has structural fractures at the support portion 5 (support groove), only the corresponding connector 4 (quartz connector column) needs to be replaced, without replacing the supporting frame 3, supporting top seat 2, supporting base 1 and other connectors 4 (quartz connector columns) of the substrate supporting device as a whole, thereby reducing the use cost of the substrate supporting device.

[0065] As a preferred implementation manner of Example 1, the connecting member 4 is detachably connected to the support frame 3, the support top seat 2 and / or the support base 1 by means of threads (screw or bolt connection) or rivets. If the connecting member 4 (slotted quartz connecting column) has a structural fracture, it is only necessary to replace the damaged or defective corresponding connecting member 4, without replacing the support frame 3, the support top seat 2 and the support base 1 of the entire substrate supporting device, thereby facilitating the rapid maintenance of the substrate supporting device and reducing its use cost.

[0066] Please also read Figure 1-6 As a preferred implementation of Example 1, the connecting member 4 is a cylindrical quartz connecting column, and the supporting portion 5 is a supporting groove 51 that is fan-shaped or semicircular along the axial projection of the quartz connecting column.

[0067] Please also read Figure 1-6 As a better implementation scheme of Example 1, two support frames 3 are provided, and the two support frames 3 are arranged in parallel and spaced apart between the support top seat 2 and the support base 1; four connecting members 4 are provided, and the four connecting members 4 are connected along their axial projections to form a rectangle and penetrate the two support frames 3, and are connected to the support top seat 2 and the support base 1 in parallel and spaced apart; or twelve connecting members 4 are provided, and each group of four connecting members 4 forms a group, and each group of four connecting members 4 is respectively connected to adjacent support frames 3, between one of the support frames 3 and the support base 1, and between another of the support frames 3 and the support top seat 2, and the four connecting members 4 in each group are coaxially arranged one by one.

[0068] The substrate carrying device is separated from the four connecting members 4 to form three carrying intervals J between adjacent supporting frames 3, between one of the supporting frames 3 and the supporting base 1, and between another of the supporting frames 3 and the supporting top seat 2. When the substrate carrying device is loaded with a target substrate 6, the target substrate 6 enters the carrying interval J between the multiple connecting members 4 along the feeding and discharging direction H from one side of the substrate carrying device and between two adjacent spaced connecting members 4.

[0069] The connecting member 4 is a cylindrical quartz connecting column. Among the four connecting members 4 located in the bearing interval J, two adjacent connecting members 4 close to the side where the target substrate 6 enters the bearing interval J are provided with semicircular supporting grooves 51. The supporting grooves 51 are supporting grooves 51 extending forward and backward and penetrating along the feeding and discharging direction H, so that when the target substrate 6 enters the bearing interval J, the target substrate 6 on both sides in the feeding and discharging direction H can pass through a pair of semicircular supporting grooves 51 of the same height of two adjacent connecting members 4, and the target substrate 6 is bidirectionally limited in the horizontal direction perpendicular to the feeding and discharging direction H.

[0070] Among the four connectors 4 located in the load-bearing interval J, the other two adjacently spaced connectors 4 on the side away from the target substrate 6 entering the load-bearing interval J are provided with fan-shaped support grooves 51, and the support grooves 51 are support grooves 51 with a closed front end and an open (semi-closed) rear end in the feeding and discharging direction H, so that when the target substrate 6 enters the load-bearing interval J, the target substrate 6 on both sides in the feeding and discharging direction H, after passing through a pair of semicircular support grooves 51 at the same height of two adjacently spaced connectors 4, can continue to approach a pair of fan-shaped support grooves 51 at the same height of two adjacently spaced connectors 4 along the feeding and discharging direction H, until the target substrate 6 on both sides in the feeding and discharging direction H enters and abuts against a pair of fan-shaped support grooves 51 at the same height of two adjacently spaced connectors 4, so as to perform unidirectional limiting on the target substrate 6 in the horizontal direction parallel to the feeding and discharging direction H.

[0071] As another implementation of the first embodiment (not shown in the figure), the connecting member 4 is a cylindrical quartz connecting column, and the four connecting members 4 located in the bearing area J are all provided with a semicircular supporting groove 51 .

[0072] Please also read Figure 1-6 As a preferred implementation scheme of Example 1, the support base 1 and the support top seat 2 are in the shape of solid horizontal plates or hollow frames, and the support frame 3 can also be in the shape of solid horizontal plates or hollow frames. The support base 1, the support top seat 2 and the support frame 3 are arranged horizontally and in parallel, and the connecting member 4 is perpendicular to the support base 1, the support top seat 2 and the support frame 3, that is, the connecting member 4 extends up and down in the vertical direction.

[0073] As another implementation of the first embodiment, the connecting member 4 may also be made of ceramic or graphite.

[0074] Please also read Figure 7-10 In the second embodiment of the substrate supporting device provided by the utility model:

[0075] The support base 1 and the support top seat 2 are in the shape of a solid horizontal plate or a hollow frame, and the support frame 3 can also be in the shape of a solid horizontal plate or a hollow frame. The support base 1, the support top seat 2 and the support frame 3 are arranged horizontally and in parallel, and the connecting member 4 is perpendicular to the support base 1, the support top seat 2 and the support frame 3, that is, the connecting member 4 extends up and down in the vertical direction. The connecting member 4 is a connecting column, and the connecting member 4 is provided with a clamping groove 41 extending up and down along its axial direction (vertical direction), and the support portion 5 is a clamping block 52 detachably connected to the clamping groove 41, and the clamping block 52 is made of a tough material.

[0076] As a preferred implementation of Example 2, the connector 4 is made of silicon carbide and the clamping block 52 is made of quartz. While ensuring that the clamping block 52 that directly supports the target substrate 6 is made of tough material, the overall structural strength of the connector 4 and the substrate supporting device is taken into account. In addition, the clamping block 52 is made of quartz to facilitate high-precision processing.

[0077] In the second embodiment of the substrate supporting device provided by the utility model, its connecting member 4 adopts a silicon carbide connecting column to ensure strength, and the supporting part 5 adopts a quartz clamping block 52 which is detachably connected to the silicon carbide connecting column. When only the quartz clamping block 52 is broken and the silicon carbide connecting column is not broken, it is only necessary to replace the corresponding clamping block 52 without replacing the entire silicon carbide connecting column, which also reduces the use and maintenance cost of the substrate supporting device.

[0078] As another implementation of the second embodiment, the clamping block 52 may also be made of ceramic or graphite.

[0079] Please also read Figure 7-10 As a preferred implementation of the second embodiment, as a preferred implementation of the first embodiment, the connector 4 (connection column) is detachably connected to the support frame 3, the support top seat 2 and / or the support base 1 by thread (screw or bolt connection) or riveting, the cross section of the clamping groove 41 is T-shaped, one end of the clamping block 52 is a connection end 521 matching the shape of the clamping groove 41, and the clamping block 52 is quickly disassembled and assembled to the connector 4 by clamping the connection end 521 with the clamping groove 41. The clamping block 52 is detachably connected to the connector 4. When only the quartz clamping block 52 is structurally broken and the silicon carbide connector 4 (connection column) is not broken, only the damaged or defective corresponding clamping block 52 needs to be replaced, and the entire connector 4 does not need to be replaced.

[0080] Please also read Figure 7-10As a preferred implementation of Example 2, the other end of the clamping block 52 is a supporting end 522 with a triangular cross-section, and the periphery of the target substrate 6 is supported on the corresponding supporting ends 522 of the supporting parts 5 of each connecting member 4 at the same height.

[0081] Please also read Figure 7-10 As a preferred implementation of Example 2, the connecting member 4 includes:

[0082] At least two middle partitions 42 are arranged through the middle of the support frame 3 and are arranged at intervals along the feeding and discharging direction H. A pair of clamping grooves 41 are provided, and the pair of clamping grooves 41 are respectively arranged to correspond to the two sides of the connecting member 4 in the feeding and discharging direction H and extend parallel to the axial direction of the connecting member 4; at least two pairs of side limiters 43 are arranged to match the two middle partitions 42 and are arranged at intervals on the two sides of the support frame 3 in the feeding and discharging direction H; at least two end limiters 44 are arranged through one end of the support frame 3 in the feeding and discharging direction H; the middle partition 42 and the side limiters 43 and the end limiters 44 on both sides thereof respectively enclose a pair of silo areas I;

[0083] When the substrate carrying device is loaded with target substrates 6, two groups of target substrates 6 enter the corresponding silo area I along the feeding and discharging direction H from the opposite side of the end limit piece 44 respectively, and the periphery of the target substrate 6 is supported on the clamping blocks 52 at the same height of the middle partition piece 42, the side limit piece 43 and the end limit piece 44 in the corresponding silo area I, so that the substrate carrying device can carry two stacks of target substrates 6 at a time, thereby improving its carrying and transportation efficiency.

[0084] As another implementation of Example 2 (not shown in the figure), the connecting member 4 only includes at least two pairs of side limit members 43 and at least two end limit members 44, that is, the side limit members 43 and the end limit members 44 form a single silo area I equivalent to the above-mentioned carrying interval J, and the substrate carrying device carries a single stack of target substrates 6 at a time.

[0085] Please also read Figure 1-6 As a common implementation of the first and second embodiments, the substrate supporting device further includes:

[0086] At least one reinforcing member 7 is disposed through the supporting frame 3 and is connected to the supporting top seat 2 and / or the supporting base 1 in parallel and at intervals.

[0087] As a preferred embodiment common to the first and second embodiments, the reinforcing member 7 is a silicon carbide reinforcing column. By providing a plurality of reinforcing members 7 (silicon carbide reinforcing columns) penetrating the support frame and connected in parallel and spaced relation to the support top seat 2 and / or the support base 1, the stability and overall structural strength of the substrate carrying device composed of the support base 1, the support top seat 2, the support frame 3 and the plurality of connecting members 4 can be further improved.

[0088] Please also read Figure 1-7 As a preferred implementation scheme common to Example 1 and Example 2, the connecting member 4 passes through the supporting frame 3, and the two ends of the connecting member 4 are respectively connected to the supporting top seat 2 and the supporting base 1, so that the supporting top seat 2, the supporting base 1 and the supporting frame 3 are connected as a whole through multiple connecting members 4, thereby improving the stability of the substrate carrying device.

[0089] Please also read Figure 7-9 As a preferred implementation mode common to the first embodiment and the second embodiment, the substrate supporting device further includes:

[0090] At least one pair of hanging ears 8 is installed on both sides of the support frame 3 in the material feeding and discharging direction H, and is used to connect with the substrate conveying device (not shown in the figure) by clamping or supporting; the docking piece 9 is installed at one end of the support frame 3 in the material feeding and discharging direction H, and is used to dock with the substrate transferring device (not shown in the figure).

[0091] As a preferred implementation mode common to the first and second embodiments, the substrate is a silicon wafer or a solar cell wafer.

[0092] As a preferred implementation scheme common to Example 1 and Example 2, the substrate conveying device includes a wafer boat carrier (not shown in the figure) that can move along the horizontal conveying direction and a guide rail that guides the substrate carrying device to move along the conveying direction with the wafer boat carrier. The substrate carrying device serves as a wafer boat that carries multiple target substrates 6 (silicon wafers), and the substrate transferring device includes a wafer boat loading mechanism (not shown in the figure) and a wafer boat unloading mechanism (not shown in the figure).

[0093] When the substrate conveying device is working, the wafer boat loading mechanism is first docked with the docking piece 9 of the substrate carrying device, and multiple substrate carrying devices are transferred to the wafer boat carrier that has arrived at the loading position through the wafer boat loading mechanism in turn, and the substrate transferring device is positioned on the guide rail through the hanging ear 8. The wafer boat loading mechanism transfers multiple substrate conveying devices to the wafer boat carrier in turn to complete the loading operation of the substrate transferring device.

[0094] Then, the wafer boat carrier transports the substrate carrying device to the unloading position under the guidance of the guide rail, and then the wafer boat unloading mechanism docks with the docking piece 9 of the substrate carrying device. Finally, multiple substrate carrying devices are transferred to the designated operating position or downstream equipment in turn through the wafer boat unloading mechanism to complete the unloading operation of the substrate transfer device.

[0095] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the utility model.

Claims

1. A substrate carrying device, characterized in that: include: Support base (1); A support top seat (2) is spaced apart from the support base (1); At least one support frame (3) is arranged at intervals between the support top seat (2) and the support base (1); A plurality of connecting members (4) are arranged through the supporting frame (3) and are detachably connected to the supporting top seat (2) and / or the supporting base (1) in parallel and at intervals; The connecting member (4) is provided with a plurality of supporting parts (5) at intervals along its axial direction; When the substrate carrying device is loaded with a target substrate (6), the target substrate (6) enters between a plurality of connecting members (4) from one side of the substrate carrying device along a material feeding and discharging direction (H), and the periphery of the target substrate (6) is supported on supporting portions (5) of the same height of each connecting member (4).

2. The substrate carrying device according to claim 1, characterized in that: The connecting member (4) is made of a tough material and is detachably connected to the supporting top seat (2) and / or the supporting base (1); the supporting portion (5) is a supporting groove (51) integrally arranged in the connecting member (4).

3. The substrate carrying device according to claim 1, characterized in that: The support base (1), the support top seat (2) and the support frame (3) are arranged in parallel, the connecting member (4) is provided with a clamping groove (41) extending along its axial direction, the supporting portion (5) is a clamping block (52) detachably connected to the clamping groove (41), and the clamping block (52) is made of a tough material.

4. The substrate carrying device according to claim 3, characterized in that: The cross section of the clamping groove (41) is T-shaped, one end of the clamping block (52) is a connecting end (521) matching the shape of the clamping groove (41), and the clamping block (52) is mounted on the connecting piece (4) by clamping the connecting end (521) with the clamping groove (41).

5. The substrate carrying device according to claim 4, characterized in that: The other end of the clamping block (52) is a supporting end (522) with a triangular cross section, and the periphery of the target substrate (6) is supported on the corresponding supporting ends (522) of the supporting parts (5) of each connecting member (4) at the same height.

6. The substrate carrying device according to claim 3, characterized in that: The connecting member (4) comprises: At least two middle partitions (42) are arranged through the middle of the support frame (3) and are arranged at intervals along the feeding and discharging direction (H); a pair of the clamping grooves (41) are provided, and the pair of clamping grooves (41) are respectively arranged to correspond to two sides of the connecting member (4) in the feeding and discharging direction (H) and extend parallel to the axial direction of the connecting member (4); At least two pairs of side stoppers (43) are arranged to match the two middle partitions (42) and are spaced apart and penetrated on both sides of the support frame (3) in the material feeding and discharging direction (H); At least two end stoppers (44) are arranged through one end of the support frame (3) in the material feeding and discharging direction (H); The middle partition (42) and the side limiters (43) and the end limiters (44) on both sides thereof respectively correspond to form a pair of silo areas (I); When the substrate carrying device is loaded with target substrates (6), two groups of target substrates (6) respectively enter the corresponding silo area (I) from the opposite side of the end stopper (44) along the material feeding and discharging direction (H), and the periphery of the target substrates (6) is supported on the clamping blocks (52) at the same height as the middle partition (42), the side stopper (43) and the end stopper (44) in the corresponding silo area (I).

7. The substrate carrying device according to claim 2, characterized in that: The connecting piece (4) is a quartz connecting column.

8. The substrate carrying device according to claim 5, characterized in that: The connecting piece (4) is made of silicon carbide, and the clamping block (52) is made of quartz.

9. The substrate carrying device according to any one of claims 1 to 8, characterized in that: Also includes: At least one reinforcing member (7) is passed through the supporting frame (3) and is connected to the supporting top seat (2) and / or the supporting base (1) in parallel and at intervals.

10. The substrate carrying device according to any one of claims 1 to 8, characterized in that: The connecting member (4) passes through the supporting frame (3), and two ends of the connecting member (4) are respectively connected to the supporting top seat (2) and the supporting base (1).

11. The substrate carrying device according to any one of claims 1 to 8, characterized in that: Also includes: Hanging ears (8), installed on both sides of the support frame (3) in the material feeding and discharging direction (H), and used for connecting with a substrate conveying device; A docking member (9) is mounted on one end of the support frame (3) in the material feeding and discharging direction (H) and is used for docking with the substrate transfer device.

12. The substrate carrying device according to any one of claims 1 to 8, characterized in that: The substrate is a silicon wafer.

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