Multi-partition vacuum chuck device

Abstract

The utility model discloses a multi-partition vacuum suction cup device which comprises a suction cup and a valve, and a plurality of adsorption areas are arranged on the suction cup. The multiple valves are arranged in the adsorption areas, the valves are arranged between the adjacent adsorption areas, and the valves are used for communicating the adjacent adsorption areas. A plurality of adsorption areas are arranged on a suction cup, a valve is arranged between every two adjacent adsorption areas, the valves are arranged in the suction cup, the valves are correspondingly arranged in the suction cup to control the adjacent adsorption areas to be communicated or not, and the suction cup area for adsorption on the suction cup can be adjusted according to user requirements or the size of a substrate. Therefore, the multi-partition vacuum chuck device has more accurate use performance in the use process so as to correspondingly adsorb the substrate, so that the multi-partition vacuum chuck device can correspondingly output more appropriate performance for substrates with different sizes and different models so as to adsorb and fix the substrates; the applicability of the multi-partition vacuum chuck device is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of suction cup devices, in particular to a multi-zone vacuum suction cup device. Background Art

[0002] In the prior art, it is a common technical means to provide a multi-zone vacuum suction cup device in the substrate processing equipment to achieve the adsorption and fixation of the substrate. In the related art, the adsorption area on the suction cup is often set to a larger fixed value so that the suction cup can match the largest size of the substrate during use. However, for various types of substrates, especially small-sized substrates, the unblocked area on the suction cup surface needs to be blocked with stickers or other means to improve the adsorption capacity of the suction cup, which will reduce production efficiency and have the problem of insufficient adsorption force.

[0003] In the related technology, most of the existing regional suction cups use pipes or cavities to connect the various partitions on the outside of the suction cup, and add a control module on the external air path to control the vacuum on and off of different partitions. The problem with this method is that the external air path will increase the flow resistance of the entire flow path, resulting in uneven adsorption and insufficient adsorption force. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to propose a multi-zone vacuum suction cup device, in which a plurality of adsorption areas are formed in the suction cup body, and a zone control valve assembly is placed inside the suction cup, so that the multi-zone vacuum suction cup device can adjust the adsorption area according to demand when in use to output corresponding adsorption performance for different types of substrates, which can not only solve the problem of uneven and inappropriate adsorption, but also realize the rational application of resources.

[0005] According to the multi-zoned vacuum suction cup device of the embodiment of the utility model, it includes: a suction cup and a valve, wherein the suction cup is provided with a plurality of suction areas; the number of valves is multiple and the valves are arranged in the suction areas, the valves are arranged between adjacent suction areas, and the valves are used to connect adjacent suction areas.

[0006] According to the multi-partitioned vacuum suction cup device of the embodiment of the utility model, a plurality of adsorption areas are provided on the suction cup, and valves are provided between adjacent adsorption areas, and the valves are arranged inside the suction cup, so that the valves are correspondingly arranged in the suction cup to control the connectivity of adjacent adsorption areas, so that the suction cup area for adsorption on the suction cup can be adjusted according to user needs or substrate size, so that the multi-partitioned vacuum suction cup device has more precise performance during use to adsorb the substrate, so that the multi-partitioned vacuum suction cup device can output more appropriate performance for substrates of different sizes and models to adsorb and fix the substrate, not only so that the output performance of the multi-partitioned vacuum suction cup device during use can be more in line with the use requirements to improve the applicability of the multi-partitioned vacuum suction cup device, and the output adsorption capacity is more uniform and reliable to adsorb the substrate, and it can also reasonably utilize resources and reduce the cost of use.

[0007] In some embodiments, the suction cup includes a suction cup body, the adsorption area is arranged on the suction cup body, and the valve is arranged in the suction cup body, the adsorption area includes a first area, a second area, a third area and a fourth area, at least a part of the second area is arranged on the outside of the first area, at least a part of the third area is arranged on the outside of the second area, at least a part of the fourth area is arranged on the outside of the third area, and the valve is arranged between the first area and the second area, between the second area and the third area, and between the third area and the fourth area for communication.

[0008] In some embodiments, a partition plate is provided on the suction cup body, and the partition plate is used to separate the first area, the second area, the third area and the fourth area on the suction cup, and the valve is correspondingly provided on the partition plate.

[0009] In some embodiments, the partition plate includes a first partition and a second partition, one end of the first partition is connected to one end of the second partition, the other end of the first partition is connected to one end of the suction cup body, the other end of the second partition is connected to one side of the suction cup body, and the extension direction of the first partition is perpendicular to the extension direction of the second partition.

[0010] In some embodiments, it also includes: an air duct, the air duct is arranged through the plurality of the partition plates to allow the air duct to connect the first area, the second area, the third area and the fourth area, and the valve is correspondingly arranged at the connection between the air duct and the partition plate.

[0011] In some embodiments, the valve includes: a shell, a driving member and a valve core, the shell is correspondingly arranged on the airway, the driving member is arranged in the shell, the valve core is rotatably arranged in the shell, and the driving member is connected to the valve core.

[0012] In some embodiments, it further includes: a detection member, which is disposed in the housing and is arranged opposite to the valve core to detect the use status of the valve core.

[0013] In some embodiments, the detection element is a magnetic switch.

[0014] In some embodiments, it also includes: an air intake member, which is arranged in the suction cup and at one end of the airway.

[0015] In some embodiments, it further includes: a control unit, wherein the control unit is disposed on the outside of the suction cup, and one end of the control unit is connected to the air inlet member and the valve.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1 It is a schematic structural diagram of a multi-zone vacuum suction cup device according to an embodiment of the utility model;

[0019] Figure 2 It is a schematic structural diagram of the valve in the open state according to an embodiment of the utility model;

[0020] Figure 3 It is a schematic structural diagram of a valve in a closed state according to an embodiment of the utility model;

[0021] Reference numerals:

[0022] Multi-zone vacuum suction cup device 10,

[0023] Suction cup 100, suction cup body 101, adsorption area 110, first area 111, second area 112, third area 113, fourth area 114, partition plate 120, first partition plate 121, second partition plate 122,

[0024] Valve 200, housing 210, drive member 220, valve core 230,

[0025] Airway 300,

[0026] Air intake 500, DETAILED DESCRIPTION

[0027] The embodiments of the present utility model are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. The embodiments of the present utility model are described in detail below.

[0028] Reference below Figure 1-Figure 3 A multi-zoned vacuum suction cup device 10 according to an embodiment of the present utility model is described, including: a suction cup 100 and a valve 200 .

[0029] Specifically, a plurality of adsorption areas 110 are provided on the suction cup 100 ; there are a plurality of valves 200 , and the valves 200 are provided in the adsorption areas 110 , and the valves 200 are provided between adjacent adsorption areas 110 , and the valves 200 are used to connect adjacent adsorption areas 110 .

[0030] That is to say, during the use of the multi-partitioned vacuum suction cup device 10, it is suitable to control the connectivity of multiple adsorption areas 110 on the suction cup 100 through the valve 200, so that the multi-partitioned vacuum suction cup device 10 is suitable to control the use of at least one of the multiple adsorption areas 110 through the valve 200 provided in the adsorption area 110 during use, so that the multi-partitioned vacuum suction cup device 10 can be adjusted according to the size of the corresponding substrate to be adsorbed when in use, so as to control at least one of the adsorption areas 110 to perform adsorption, so as to adsorb the corresponding substrate.

[0031] Moreover, since multiple valves 200 are correspondingly arranged in the suction cup 100, the valves 200 can be arranged between adjacent adsorption areas 110 on the suction cup 100, so as to avoid the influence of the valves 200 arranged in the suction cup 100 on the structural center of gravity of the suction cup 100 itself, so that the suction cup 100 can output more stable and reliable adsorption performance to adsorb the substrate during use. At the same time, when it is necessary to adsorb substrates of different models, the adsorption performance of the corresponding size can be output, which not only allows the multi-zone vacuum suction cup device 10 to output accurate and reliable adsorption performance for substrates of different sizes to adsorb substrates, but also avoids waste of resources and reduces the cost of use.

[0032] According to the multi-partitioned vacuum suction cup device 10 of the embodiment of the utility model, a plurality of adsorption areas 110 are provided on the suction cup 100, and a valve 200 is provided between adjacent adsorption areas 110, and the valve 200 is arranged in the suction cup 100, so that the valve 200 is correspondingly arranged in the suction cup 100 to control whether the adjacent adsorption areas 110 are connected or not, so that the suction cup area for adsorption on the suction cup 100 can be adjusted according to user needs or substrate size, so that the multi-partitioned vacuum suction cup device 10 can output more precise adsorption performance to adsorb the substrate during use, so that the multi-partitioned vacuum suction cup device 10 can output more appropriate performance for substrates of different sizes and models to fix and adsorb the substrate, not only so that the output performance of the multi-partitioned vacuum suction cup device 10 during use can be more in line with the use requirements to improve the applicability of the multi-partitioned vacuum suction cup device 10, and the output adsorption capacity is more uniform and reliable to adsorb the substrate, and it can also reasonably utilize resources and reduce the use cost.

[0033] In some embodiments, the suction cup 100 includes a suction cup body 101, the adsorption area 110 is arranged on the suction cup body 101, and the valve 200 is arranged in the suction cup body 101, the adsorption area 110 includes a first area 111, a second area 112, a third area 113 and a fourth area 114, at least a portion of the second area 112 is arranged on the outside of the first area 111, at least a portion of the third area 113 is arranged on the outside of the second area 112, at least a portion of the fourth area 114 is arranged on the outside of the third area 113, and valves 200 are provided between the first area 111 and the second area 112, between the second area 112 and the third area 113, and between the third area 113 and the fourth area 114 for communication.

[0034] It should be noted that the adsorption area 110 includes a plurality of areas, and the distribution of the plurality of areas can be adjusted according to the user's usage requirements or the size of the substrate to be adsorbed. In the above embodiment, the adsorption area 110 is divided into a first area 111, a second area 112, a third area 113 and a fourth area 114 in an exemplary manner, and is constructed on the suction cup 100 in the form of layer-by-layer coating, that is, the second area 112 is coated on the outside of the first area 111, the third area 113 is coated on the outside of the second area 112, and the fourth area 114 is coated on the outside of the third area 113, so that during the use of the suction cup 100, the valve 200 provided between adjacent areas can be opened and closed, so that the suction area of ​​the suction cup 100 when working can be adjusted according to the use requirements during the use of the suction cup 100, so that the multi-partitioned vacuum suction cup device 10 can be adjusted according to the size of the substrate when in use, so that the output performance of the multi-partitioned vacuum suction cup device 10 can fit the use requirements of adsorbing the substrate, not only can the adsorption performance of the multi-partitioned vacuum suction cup device 10 be able to better adsorb the substrate, but also can avoid the multi-partitioned vacuum suction cup device 10 outputting too much performance to cause resource waste, so as to improve the operating efficiency of the multi-partitioned vacuum suction cup device 10 when in use.

[0035] In some embodiments, a partition plate 120 is provided on the suction cup 100, and the partition plate 120 is used to separate the first area 111, the second area 112, the third area 113 and the fourth area 114 on the suction cup 100, and the valve 200 is correspondingly provided on the partition plate 120. It can be understood that in the process of constructing the suction cup 100, it is suitable to separate the first area 111, the second area 112, the third area 113 and the fourth area 114 on the suction cup 100 through the partition plate 120, which can not only make the structural setting of the first area 111, the second area 112, the third area 113 and the fourth area 114 constructed on the suction cup 100 more reliable, but also allow the partition plate 120 to provide a position for the setting of the valve 200, so that the setting of the valve 200 in the suction cup 100 is more reliable, so as to control the connection of multiple areas on the suction cup 100, so as to achieve the adjustment of the adsorption performance of the suction cup 100.

[0036] In some embodiments, the partition plate 120 includes a first partition plate 121 and a second partition plate 122, one end of the first partition plate 121 is connected to one end of the second partition plate 122, the other end of the first partition plate 121 is connected to one end of the suction cup body 101, and the other end of the second partition plate 122 is connected to one side of the suction cup body 101, and the extension direction of the first partition plate 121 and the extension direction of the second partition plate 122 are perpendicular to each other.

[0037] It can be understood that by using the first partition 121 and the second partition 122 to divide the multiple adsorption areas 110, it is convenient to use the valve 200 and the air duct 300 to connect the adjacent adsorption areas 110, so that the multi-partitioned vacuum suction cup device 10 is suitable for controlling the opening and closing of the valve 200 during use to achieve the connectivity of the adjacent adsorption areas 110, so that the multi-partitioned vacuum suction cup device 10 can output different adsorption capacities for different substrates, and the output of the adsorption performance is more uniform and reliable, so as to improve the applicability of the multi-partitioned vacuum suction cup device 10.

[0038] In the present embodiment, it is suitable to construct the adsorption area on the suction cup by the first partition 121 and the second partition 122 in a manner perpendicular to each other, and at the same time, multiple adsorption areas are constructed by layering. In some other embodiments, the first partition and the second partition can also be constructed on the suction cup in other ways to correspond to the adsorption areas of different types of substrates. Those skilled in the art can draw the conclusion based on the above description and will not be elaborated here.

[0039] In some embodiments, the multi-zoned vacuum suction cup device 10 also includes: an air duct 300, which passes through multiple partition plates 120 to allow the air duct 300 to connect the first area 111, the second area 112, the third area 113 and the fourth area 114, and the valve 200 is correspondingly arranged at the connection between the air duct 300 and the partition plate 120.

[0040] That is to say, in the construction process of the multi-zone vacuum suction cup device 10, the air channel 300 is also included. The air channel 300 is suitable for being arranged on the partition plate 120, so that the air channel 300 is suitable for connecting the adjacent adsorption areas 110, and the valve 200 is arranged at the position where the air channel 300 is connected to the partition plate 120, so that the valve 200 can control the connectivity of the adjacent adsorption areas 110, so that the air channel 300 can achieve the conduction connection with the adjacent adsorption areas 110. The valve 200 is arranged at the position where the air channel 300 is connected to the partition plate 120, and the setting and use of the valve 200 can be made more reliable, so that the setting of the valve 200 can be more reliable to control and adjust the adsorption area 110 working on the suction cup 100.

[0041] In some embodiments, the valve 200 includes: a shell 210, a driving member 220 and a valve core 230, the shell 210 is correspondingly arranged on the airway 300, the driving member 220 is arranged in the shell 210, the valve core 230 is rotatably arranged in the shell 210, and the driving member 220 is connected to the valve core 230.

[0042] It is understandable that the housing 210 is suitable for protecting the driving member 220 and the valve core 230 disposed therein, and the housing 210 can be disposed on the airway 300 to realize the assembly arrangement of the valve 200, so that the assembly arrangement of the valve 200 in the airway 300 is more reliable. The driving member 220 and the valve core 230 are suitable for being constructed inside the housing 210, and the driving member 220 is suitable for providing a driving action to drive the valve core 230 to rotate, so that the valve core 230 rotates in the housing 210 to form an open state and a closed state to realize the connection and disconnection of adjacent adsorption areas 110, so as to realize the adjustment of the adsorption area 110 on the suction cup 100.

[0043] In some embodiments, the multi-partition vacuum suction cup device 10 further includes: a detection member, which is disposed in the housing 210, and the detection member is disposed opposite to the valve core 230, so as to detect the use status of the valve core 230. That is, a detection member is further disposed in the multi-partition vacuum suction cup device 10, and the detection member is disposed in the housing 210 to detect the use status of the valve core 230, that is, the detection member is used to detect and feedback the valve core 230, so as to realize feedback on the use status of the multi-partition vacuum suction cup device 10 during use, so that the adjustment of the adsorption area 110 of the multi-partition vacuum suction cup device 10 during use can be detected and feedbacked by the detection member, so that the user can know the performance adjustment of the suction cup 100 during use more directly through the feedback of the detection member, so that the working performance of the suction cup 100 is more in line with the user's needs, so as to improve the applicability of the multi-partition vacuum suction cup device 10.

[0044] In some specific embodiments, the detection member is a magnetic switch. In this way, during the use of the detection member, the magnetic switch and the valve core 230 can be arranged relative to each other, so that the valve core 230 can change its relative state with the detection member during the rotation process, so as to realize the detection and feedback of the valve core 230 after the adjustment of the use state.

[0045] In some embodiments, the multi-zone vacuum suction cup device 10 further includes an air inlet 500, which is disposed in the suction cup 100 and is disposed at one end of the air passage 300. It is understood that the air inlet 500 is suitable for being constructed in the suction cup 100, so that the multi-zone vacuum suction cup device 10 is suitable for extracting gas in the suction cup 100 through the air inlet 500 during use to achieve the adsorption effect of the multi-zone vacuum suction cup device 10. The air inlet 500 is disposed at one end of the air passage, so that the air inlet 500 is suitable for extracting gas through the air passage 3000. At the same time, since a valve 200 is provided on the air passage 300, the adsorption performance of the multi-zone vacuum suction cup device 10 can be adjusted by controlling the opening and closing of the valve 200 on the air passage 300, so that the adsorption performance of the multi-zone vacuum suction cup device 10 can be adjusted according to control and use to improve the applicability of the multi-zone vacuum suction cup device 10.

[0046] In some embodiments, the multi-partition vacuum suction cup device 10 further includes a control unit, which is disposed on the outside of the suction cup 100, and one end of which is connected to the air inlet 500 and the valve 200. It should be noted that in order to make the connection and adjustment of the adsorption area 110 on the multi-partition vacuum suction cup device 10 more accurate and reliable, the air inlet 500 and the valve 200 can also be connected to the control unit, and the control unit adjusts the use performance or use state of the air inlet 500 and the valve 200 according to feedback or user control, so that the use performance provided by the multi-partition vacuum suction cup device 10 can meet the use requirements of the user or the substrate, thereby making the applicability of the multi-partition vacuum suction cup device 10 higher.

[0047] Other structures and operations of the multi-zoned vacuum suction cup device 10 according to the embodiment of the utility model are known to ordinary technicians in the field and will not be described in detail here.

[0048] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example.

[0049] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A multi-zone vacuum suction cup device, characterized in that: include: A suction cup, wherein a plurality of adsorption areas are provided on the suction cup; The valve is multiple and is arranged in the adsorption area. The valve is arranged between adjacent adsorption areas and is used to connect adjacent adsorption areas.

2. The multi-zone vacuum suction cup device according to claim 1, characterized in that: The suction cup includes a suction cup body, the suction area is arranged on the suction cup body, and the valve is arranged in the suction cup body, the suction area includes a first area, a second area, a third area and a fourth area, at least a part of the second area is arranged outside the first area, at least a part of the third area is arranged outside the second area, at least a part of the fourth area is arranged outside the third area, and the valve is arranged between the first area and the second area, between the second area and the third area, and between the third area and the fourth area for communication.

3. The multi-zone vacuum suction cup device according to claim 2, characterized in that: The suction cup body is provided with a partition plate, and the partition plate is used to separate the first area, the second area, the third area and the fourth area on the suction cup, and the valve is correspondingly arranged on the partition plate.

4. The multi-zone vacuum suction cup device according to claim 3, characterized in that: The partition plate includes a first partition plate and a second partition plate, one end of the first partition plate is connected to one end of the second partition plate, the other end of the first partition plate is connected to one end of the suction cup body, the other end of the second partition plate is connected to one side of the suction cup body, and the extension direction of the first partition plate is perpendicular to the extension direction of the second partition plate.

5. The multi-zone vacuum suction cup device according to claim 3, characterized in that: Also includes: An air duct is provided through the plurality of partition plates so as to allow the air duct to communicate with the first area, the second area, the third area and the fourth area, and the valve is correspondingly provided at the connection between the air duct and the partition plate.

6. The multi-zone vacuum suction cup device according to claim 5, characterized in that: The valve comprises: a shell, a driving member and a valve core, the shell is correspondingly arranged on the airway, the driving member is arranged in the shell, the valve core is rotatably arranged in the shell, and the driving member is connected to the valve core.

7. The multi-zone vacuum suction cup device according to claim 6, characterized in that: Also includes: A detection member is arranged in the housing, and the detection member is arranged opposite to the valve core to detect the use status of the valve core.

8. The multi-zone vacuum suction cup device according to claim 7, characterized in that: The detection element is a magnetic switch.

9. The multi-zone vacuum suction cup device according to claim 5, characterized in that: Also includes: An air intake member is arranged in the suction cup and at one end of the air passage.

10. The multi-zone vacuum suction cup device according to claim 9, characterized in that: Also includes: The control part is arranged on the outside of the suction cup, and one end of the control part is connected to the air inlet and the valve.

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