Wafer position holding device

Abstract

The utility model provides a wafer position retaining device, which relates to the technical field of wafer retaining devices and comprises a device body, a U-shaped cavity is arranged in the device body, a protection mechanism is arranged in the cavity, a placement table is mounted at the top end of the device body, an adjusting mechanism is arranged in the placement table, and the U-shaped cavity and the protection mechanism are arranged in the placement table. And a limiting block is mounted at the top end of the adjusting mechanism. According to the device, the two-way threaded rod can be driven to rotate through the handle, then the limiting block can be finely adjusted, the position of a wafer can be limited, the phenomena of shaking or deviation and the like are avoided, the wafer can be kept still all the time in the detection process, meanwhile, wafers of different sizes can be limited, the operation steps are very simple and convenient, and the working efficiency is improved. And due to the design, the practicability is greatly improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer holding devices, and more specifically, particularly relates to a wafer position holding device. Background Art

[0002] Wafer is a basic material used in semiconductor manufacturing, usually made of single crystal silicon or other semiconductor materials, with a round and flat shape. Wafer plays a very important role in the semiconductor industry, and it is the basis for manufacturing integrated circuits (ICs).

[0003] Based on the above, the inventors have found the following problems: during use, the existing wafer holding device cannot maintain the position according to the size of the wafer in real time, and cannot better protect the wafer, which indirectly reduces the protection efficiency and is relatively inconvenient.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a wafer position holding device is provided to achieve a purpose with greater practical value. Utility Model Content

[0005] The purpose and effect of the wafer position holding device of the utility model are achieved by the following specific technical means:

[0006] A wafer position holding device comprises a device body, a U-shaped chamber is provided inside the device body, a protective mechanism is arranged inside the U-shaped chamber, the protective mechanism comprises a group of electric cylinders, a U-shaped protective plate is installed on the top of the electric cylinder, a placing table is installed on the top of the device body, an adjustment mechanism is arranged inside the placing table, a limit block is installed on the top of the adjustment mechanism, the adjustment mechanism comprises a bidirectional threaded rod, a group of sliders are installed on the bidirectional threaded rod through threads.

[0007] Furthermore, the bottom end of the limit block is connected to the slider.

[0008] Furthermore, a rubber pad is connected and installed on one end of the limit block.

[0009] Furthermore, a detection component is installed at one end of the placement table.

[0010] Furthermore, a handle is connected to one end of the placement table, and an output end of the handle passes through the placement table to the inside to form a transmission connection with the bidirectional threaded rod.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] Through the cooperation between the electric cylinder and the U-shaped protective plate, when the staff uses the device, they can start the electric cylinder to drive the U-shaped protective plate to rise, thereby protecting the wafer, indirectly improving the protection efficiency.

[0013] Through the cooperation between the limit block and the slider, when the staff places the wafer on the placement table, they can use the handle to drive the two-way threaded rod to rotate, and then they can fine-tune the limit block and limit the position of the wafer to avoid shaking or offset. The wafer can be kept still during the inspection process, and wafers of different sizes can be limited. The operation steps are very simple, and the design greatly increases the practicality.

[0014] Through the design of the rubber pad, the side wall of the wafer can be protected to avoid wear or damage thereto, which is very convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The utility model is a three-dimensional schematic diagram of a wafer position holding device.

[0016] Figure 2 The utility model is a three-dimensional schematic diagram of a wafer position holding device.

[0017] Figure 3 The utility model is a schematic cross-sectional plane diagram of the local structure of a wafer position holding device.

[0018] Figure 4 The utility model is a three-dimensional schematic diagram of the local structure of a wafer position holding device.

[0019] Figure 5 The utility model is a schematic plan cross-sectional view of a wafer position holding device.

[0020] In the figure, the corresponding relationship between the component names and the figure numbers is as follows:

[0021] 1. Device body; 2. U-shaped protective plate; 3. Placement table; 4. Handle; 5. Detection component; 6. Electric cylinder; 7. Bidirectional threaded rod; 8. Slider; 9. Limit block; 10. Rubber pad; 11. U-shaped chamber. DETAILED DESCRIPTION

[0022] The following is a further detailed description of the implementation of the present utility model in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0023] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0024] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] Example:

[0026] As attached Figure 1 To Attachment Figure 5 As shown:

[0027] The utility model provides a wafer position holding device, comprising a device body 1, wherein a U-shaped chamber 11 is provided inside the device body 1, wherein a protective mechanism is arranged inside the U-shaped chamber 11, wherein the protective mechanism comprises a group of electric cylinders 6, wherein a U-shaped protective plate 2 is installed at the top of the electric cylinder 6, wherein a placing table 3 is installed at the top of the device body 1, wherein an adjusting mechanism is arranged inside the placing table 3, wherein a limiting block 9 is installed at the top of the adjusting mechanism, wherein the adjusting mechanism comprises a bidirectional threaded rod 7, wherein a group of sliding blocks 8 are installed on the bidirectional threaded rod 7 through threads; through the cooperation between the electric cylinder 6 and the U-shaped protective plate 2, when using the device, the staff can start the electric cylinder 6 to drive the U-shaped protective plate 2 to rise, thereby protecting the wafer, thereby indirectly improving the protection efficiency.

[0028] Among them, the bottom end of the limit block 9 is connected to the slider 8; through the cooperation between the limit block 9 and the slider 8, when the staff places the wafer on the placement table 3, the handle 4 can be used to drive the bidirectional threaded rod 7 to rotate, and then the limit block 9 can be fine-tuned and the position of the wafer can be limited to avoid shaking or offset. The wafer can be kept stationary during the detection process, and wafers of different sizes can be limited at the same time. The operation steps are very simple, and the design greatly increases the practicality.

[0029] Among them, one end of the limit block 9 is connected and installed with a rubber pad 10; through the design of the rubber pad 10, the side wall of the wafer can be protected to avoid wear or damage to it, which is very simple.

[0030] Wherein, a detection component 5 is installed at one end of the placement table 3.

[0031] One end of the placing platform 3 is connected with a handle 4 , and the output end of the handle 4 passes through the placing platform 3 to form a transmission connection with the bidirectional threaded rod 7 inside.

[0032] The specific usage and function of this embodiment are as follows:

[0033] Before installing and using the utility model, the staff needs to check the internal components or structures of the device. After the inspection is correct, it can be used normally. First, the staff places the wafer on the placement table 3, and then the handle 4 can be used to drive the two-way threaded rod 7 to rotate, and then the limit block 9 can be fine-tuned and the position of the wafer can be limited to avoid shaking or offset. The wafer can be kept still during the detection process, and wafers of different sizes can be limited. The operation steps are very simple, and the design greatly increases the practicality. At the same time, the design of the rubber pad 10 can protect the side wall of the wafer to avoid wear or damage to it. It is very simple, and when the wafer is detected, the electric cylinder 6 can be started to drive the U-shaped protective plate 2 to rise, so as to protect the wafer, which indirectly improves the protection efficiency. If it needs to be used again, just repeat the above operation.

[0034] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific purposes.

Claims

1. A wafer position holding device, comprising a device body (1), characterized in that: A U-shaped chamber (11) is provided inside the device body (1), a protective mechanism is provided inside the U-shaped chamber (11), the protective mechanism comprises a group of electric cylinders (6), a U-shaped protective plate (2) is installed at the top of the electric cylinder (6), a placement table (3) is installed at the top of the device body (1), an adjustment mechanism is provided inside the placement table (3), a limit block (9) is installed at the top of the adjustment mechanism, the adjustment mechanism comprises a bidirectional threaded rod (7), a group of sliders (8) are installed on the bidirectional threaded rod (7) through a thread.

2. A wafer position holding device as claimed in claim 1, characterized in that: The bottom end of the limit block (9) is connected to the slide block (8).

3. A wafer position holding device as claimed in claim 1, characterized in that: One end of the limit block (9) is connected and installed with a rubber pad (10).

4. A wafer position holding device as claimed in claim 1, characterized in that: A detection component (5) is installed at one end of the placement platform (3).

5. A wafer position holding device as claimed in claim 1, characterized in that: A handle (4) is connected and installed at one end of the placement platform (3), and the output end of the handle (4) passes through the placement platform (3) to the inside to form a transmission connection with the bidirectional threaded rod (7).

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