Substrate clamp and turnover device using same

Abstract

The utility model provides a substrate clamp and a turnover device using the same. The substrate clamp comprises a fixed frame and a clamp assembly, a substrate placing area is arranged in the fixed frame and is used for accommodating a substrate; the clamp assembly is connected with the fixing frame and used for clamping a base plate. Wherein the clamp assembly comprises a first rod part, a second rod part and a driving part, and the driving part drives the first rod part and the second rod part to move relatively, so that the clamping opening is opened and closed. The substrate clamp drives the clamp assembly to be opened and closed through the driving piece, clamping of the substrate can be rapidly and accurately completed, the design of the clamping opening between the first rod component and the second rod component can ensure that the substrate is accurately clamped, and displacement or deformation of the substrate in the machining or conveying process is avoided; and the clamp assembly is composed of the two oppositely-arranged rod components, batch conveying of the base plates can be achieved, and the conveying efficiency of the base plate clamp is improved.

Description

Technical Field

[0001] The utility model relates to the field of substrate clamps, in particular to a substrate clamp and a turning device using the clamp. Background Art

[0002] Traditional substrate gripping and conveying structures usually rely on manual operation or use simple mechanical devices to grip and convey substrates. Manual substrate conveying or simple mechanically driven substrate conveying often has low operating efficiency and cannot meet the requirements of modern production lines for high efficiency and speed.

[0003] A simple mechanical device is a relatively set clamping arm or cylinder adsorption grabbing. During the process of clamping and conveying the substrate, especially during the operation of flipping the substrate, the position of the substrate is prone to shift or even fall off, requiring manual intervention or frequent adjustments, otherwise it will affect subsequent handling and processing.

[0004] Therefore, it is necessary to provide a substrate clamp and a flipping device using the clamp to solve the above technical problems. Utility Model Content

[0005] The utility model provides a substrate clamp and a flipping device using the clamp to solve the problem that the operation efficiency of manual substrate conveying or simple mechanical substrate conveying in the prior art is often low and the position of the substrate is offset during the conveying process of the clamping arm.

[0006] In order to solve the above technical problems, the technical solution of the utility model is: a substrate clamp, which includes:

[0007] A fixed frame, wherein a substrate placement area is provided in the fixed frame, and the substrate placement area is used to accommodate a substrate; and

[0008] A clamp assembly connected to the fixed frame, the clamp assembly being used to clamp the substrate;

[0009] Wherein, the clamp assembly comprises:

[0010] A first rod component is arranged at one side inside the fixed frame;

[0011] a second rod component, disposed opposite to the first rod component, wherein a clamping opening is formed between the second rod component and the first rod component, and the clamping opening is used to clamp a substrate; and

[0012] A driving member is arranged on the fixed frame, the driving member is connected to the first rod member and the second rod member, and the driving member drives the first rod member and the second rod member to move relative to each other, thereby opening and closing the clamp.

[0013] In the present utility model, the first rod component comprises:

[0014] a right connecting rod connected to the driving member; and

[0015] A right clamping block connected to the right connecting rod, wherein a first clamping groove is provided on a side of the right clamping block away from the right connecting rod, and the first clamping groove is used to clamp and fix one side of the substrate;

[0016] The second rod component comprises:

[0017] a left connecting rod, arranged opposite to the right connecting rod, the left connecting rod being connected to the driving member; and

[0018] The left clamping block is connected to the left connecting rod. A second clamping groove is provided on the side of the left clamping block away from the left connecting rod. The second clamping groove is used to clamp and fix the other side of the substrate.

[0019] In the utility model, the right clamping blocks are provided in plurality, and the plurality of right clamping blocks are arranged along the extending direction of the long side of the right connecting rod;

[0020] A plurality of the left clamping blocks are provided, and the plurality of the left clamping blocks are arranged along the extending direction of the long side of the left connecting rod.

[0021] 5. In the present invention, the arrangement direction of the first rod component and the second rod component is a first direction, and at least two groups of the clamp components are provided, and the arrangement direction of at least two groups of the clamp components is parallel to the first direction.

[0022] In the utility model, the substrate fixture further comprises:

[0023] A first linkage rod, connecting the right connecting rods in at least two groups of the clamp assemblies, wherein the straight line where the long side of the first linkage rod lies is parallel to the first direction; and

[0024] The second linkage rod connects the left connecting rods in at least two groups of the clamp assemblies, and the straight line where the long side of the second linkage rod lies is parallel to the first direction.

[0025] In the utility model, the substrate clamp further comprises a support plate, the support plate is connected to the fixed frame, the support plate is arranged between adjacent clamp assemblies, and the first linkage rod and the second linkage rod are both slidably connected to the support plate.

[0026] In the present utility model, the clamp assembly further comprises:

[0027] a first elastic member, one end of which is connected to the fixing frame, and the other end of which is connected to the first rod member, the first elastic member elastically compressing the first rod member; and

[0028] The second elastic member has one end connected to the fixing frame and the other end connected to the second rod component, and the second elastic member elastically presses the second rod component.

[0029] In the present utility model, the clamp assembly further comprises:

[0030] A first slide rail is disposed on the fixed frame, and the first rod component is slidably connected to the first slide rail; and

[0031] The second slide rail is arranged on the fixed frame, and the second rod component is slidably connected to the second slide rail.

[0032] In the utility model, the driving member is a bidirectional telescopic cylinder, one end of the driving member is connected to the first rod member, and the other end is connected to the second rod member.

[0033] The utility model provides a turning device, which comprises:

[0034] The substrate clamp as described above comprises a fixing frame and a clamp assembly arranged on the fixing frame;

[0035] A fixing seat, rotatably connected to the fixing frame; and

[0036] A rotation driving assembly is arranged on the fixing seat and connected to the fixing frame, and the rotation driving assembly drives the fixing frame to flip.

[0037] Compared with the prior art, the utility model has the following beneficial effects: in the substrate clamp of the utility model and the flipping device using the clamp, the substrate clamp can quickly and accurately complete the clamping of the substrate by driving the opening and closing of the clamp assembly through the driving member, and the clamping design between the first rod component and the second rod component can ensure that the substrate is accurately clamped, avoiding the displacement or deformation of the substrate during processing or transportation. Compared with the two relatively arranged clamp arms or cylinder adsorption grasping of the transmission, which can only transport the substrate back and forth in a single manner; the clamp assembly in the present application is two relatively arranged rod components, which can realize batch transportation of substrates and improve the transportation efficiency of the substrate clamp. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. The drawings described below are only drawings corresponding to some embodiments of the utility model.

[0039] Figure 1 It is a three-dimensional diagram of a flipping device according to a preferred embodiment of the utility model.

[0040] Figure 2This is a schematic diagram of the substrate clamp structure of a preferred embodiment of the utility model.

[0041] Figure 3 This is a schematic structural diagram of the right clamping block of a preferred embodiment of the utility model.

[0042] Figure 4 This is a top view of the turning device of the preferred embodiment of the utility model.

[0043] Figure 5 This is a bottom view of the flipping device of the preferred embodiment of the utility model.

[0044] Reference numerals: 1, substrate clamp; 11, fixing frame; 111, substrate placement area; 12, clamp assembly; 121, first rod member; 1211, right connecting rod; 1212, right clamping block; 1212a, first right clamping block; 12121, first bottom plate; 12122, first right side plate; 12123, first front side plate; 12124, first top plate; 12125, first clamping groove; 1212b, second right clamping block ; 122, second rod component; 1221, left connecting rod; 1222, left clamping block; 1222a, first left clamping block; 1222b, second left clamping block; 123, driving member; 124, first linkage rod; 125, second linkage rod; 126, first elastic member; 127, second elastic member; 128, first slide rail; 129, second slide rail; 13, support plate; 2, fixed seat; 3, rotation drive assembly; 4, base plate. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the utility model.

[0046] In the figures, structurally similar elements are denoted by the same reference numerals.

[0047] The words "first", "second" and the like in the terminology of the present invention are used for descriptive purposes only and should not be understood as indicating or implying relative importance, and should not be construed as limiting the order of precedence.

[0048] Please refer to Figure 1 and Figure 2 ,in Figure 1 Schematic diagram of the structure of a preferred embodiment of the substrate clamp and the flipping device using the clamp of the utility model. Figure 2 It is a rear view of a preferred embodiment of the substrate clamp and the flipping device using the clamp of the utility model.

[0049] The following is a preferred embodiment of a substrate clamp and a flipping device using the clamp provided by the utility model that can solve the above technical problems.

[0050] The preferred embodiment of the substrate clamp and the flipping device using the clamp provided by the utility model is: a substrate clamp 1, which includes a fixed frame 11 and a clamp assembly 12; a substrate placement area 111 is provided in the fixed frame 11, and the substrate placement area 111 is used to accommodate a substrate 4; the clamp assembly 12 is connected to the fixed frame 11, and the clamp assembly 12 is used to clamp the substrate 4; wherein the clamp assembly 12 includes a first rod component 121, a second rod component 122 and a driving member 123, the first rod component 121 is arranged on one side inside the fixed frame 11; the second rod component 122 is arranged opposite to the first rod component 121, and a clamp is formed between the second rod component 122 and the first rod component 121, and the clamp is used to clamp the substrate 4; the driving member 123 is arranged on the fixed frame 11, the driving member 123 is connected to the first rod component 121 and the second rod component 122, and the driving member 123 drives the first rod component 121 and the second rod component 122 to move relative to each other, thereby opening and closing the clamp.

[0051] The substrate clamp 1 of the present application drives the opening and closing of the clamp assembly 12 through the driving member 123, which can quickly and accurately complete the clamping of the substrate. The clamp design between the first rod member 121 and the second rod member 122 can ensure that the substrate 4 is accurately clamped, avoiding displacement or deformation of the substrate during processing or transportation. Compared with the two relatively set clamp arms or cylinder adsorption grasping of the transmission, the substrate can only be transported back and forth individually. The clamp assembly 12 in the present application can realize batch transportation of substrates, improving the transportation efficiency of the substrate clamp 1.

[0052] The structure of the clamp assembly 12 in this embodiment is described as follows:

[0053] Combine 1 and Figure 2 In this embodiment, the first rod component 121 includes a right connecting rod 1211 and a right clamping block 1212, the right connecting rod 1211 is connected to the driving member 123; the right clamping block 1212 is connected to the right connecting rod 1211, and the right clamping block 1212 is provided with a first clamping groove 12125 on the side away from the right connecting rod 1211, and the first clamping groove 12125 is used to clamp and fix one side of the substrate 4; the first rod component 121 clamps the right side of the substrate 4 through the right clamping block 1212.

[0054] The second rod component 122 includes a left connecting rod 1221 and a left clamping block 1222. The left connecting rod 1221 is arranged opposite to the right connecting rod 1211, and the left connecting rod 1221 is connected to the driving member 123. The left clamping block 1222 is connected to the left connecting rod 1221. The left clamping block 1222 is provided with a second clamping groove on the side away from the left connecting rod 1221. The second clamping groove is used to clamp and fix the other side of the substrate 4. The second rod component 122 clamps the left side of the substrate 4 through the left clamping block 1222.

[0055] The arrangement structure of the right clamping block 1212 and the left clamping block 1222 in this embodiment is described as follows:

[0056] Combination Figure 1 , 2 and Figure 3 In this embodiment, a plurality of right clamping blocks 1212 are provided, and the plurality of right clamping blocks 1212 are arranged along the direction in which the long side of the right connecting rod 1211 is extended, so that a plurality of substrates 4 can be clamped, thereby improving the practicality of the structure. A plurality of left clamping blocks 1222 are provided, and the plurality of left clamping blocks 1222 are arranged along the direction in which the long side of the left connecting rod 1221 is extended, and the plurality of left clamping blocks 1222 are arranged opposite to the plurality of right clamping blocks 1212, so that the substrate clamp 1 can clamp a plurality of substrates 4 simultaneously along the y direction shown in the figure, thereby improving the working efficiency of the clamp.

[0057] The right clamping block 1212 in the present invention can be provided with a first clamping groove 12125 to clamp the right side of the substrate 4, and the left clamping block 1222 can also be provided with a second clamping groove to clamp the left side of the substrate 4.

[0058] In this embodiment, at least two right clamping blocks 1212 are provided, and at least two right clamping blocks 1212 respectively support and clamp the two corners on the right side of the substrate 4. At least two left clamping blocks 1222 are provided, and at least two left clamping blocks 1222 respectively support and clamp the two corners on the left side of the substrate 4.

[0059] Furthermore, the right connecting rod 1211 in this embodiment is provided with a plurality of first connecting holes along the long side direction, and the plurality of first connecting holes are adjustably connected to the right clamping block 1212, so that the first rod component 121 can clamp substrates 4 of different sizes. The left connecting rod 1221 can be provided with a plurality of second connecting holes along the long side direction, and the plurality of second connecting holes are adjustably connected to the left clamping block 1222, so that the second rod component 122 can flexibly adjust the clamping position according to the size of the substrate 4, meet the clamping needs of substrates 4 of different sizes, and improve the versatility and practicality of the clamp.

[0060] In this embodiment, the substrate 4 includes a bottom surface and a top surface arranged opposite to each other, a first side surface and a third side surface arranged opposite to each other, and a second side surface and a fourth side surface arranged front and back. The four side surfaces, namely the first side surface, the second side surface, the third side surface and the fourth side surface, are arranged in a surrounding manner. In this embodiment, the direction from right to left is the direction shown by the x-axis, and the front-back direction is the direction shown by the y-axis in the figure.

[0061] Combination Figure 3 , at least two right clamping blocks 1212 are respectively a first right clamping block 1212a and a second right clamping block 1212b. The structure of the right clamping block 1212 is described by taking the first right clamping block 1212a as an example:

[0062] The first right clamping block 1212a includes a first bottom plate 12121, a first right side plate 12122, a first front side plate 12123 and a first top plate 12124, wherein the first top plate 12124 is relatively arranged above the first bottom plate 12121, the first right side plate 12122 connects the first top plate 12124 with the first bottom plate 12121, the second front side plate connects the first top plate 12124 with the first bottom plate 12121, and a first left clamping groove is formed among the first bottom plate 12121, the first right side plate 12122, the second front side plate and the first top plate 12124.

[0063] The first bottom plate 12121 is used to support the right front side of the bottom surface of the substrate 4, the first right side plate 12122 is used to limit the front end position of the first side surface, the first front side plate 12123 is used to limit the right position of the second side surface, and the first top plate 12124 is used to limit the right front side position of the top surface of the substrate 4.

[0064] In this embodiment, the second right clamping block 1212b structure is arranged opposite to the structure of the first right clamping block 1212a, and the second right clamping block 1212b limits the right rear side of the bottom surface of the substrate 4, the rear position of the first side surface, the right position of the fourth side surface, and the right rear side position of the top surface of the substrate 4.

[0065] In this embodiment, at least two left clamping blocks 1222 are respectively a first left clamping block 1222a and a second left clamping block 1222b. The first left clamping block 1222a has the same structure as the first right clamping block 1212a and is arranged oppositely. The first left clamping block 1222a limits the bottom surface, top surface, second side surface and third side surface of the left front portion of the substrate 4. The second left clamping block 1222b has the same structure as the second right clamping block 1212b and is arranged oppositely. The second left clamping block 1222b limits the bottom surface, top surface, fourth side surface and third side surface of the left rear portion of the substrate 4.

[0066] This embodiment can accurately clamp each surface of the substrate 4 through a detailed designed clamping block structure to ensure the stability of the substrate 4 during processing or flipping and transportation; different clamping block structures correspond to different parts of the substrate 4, achieving all-round stable clamping.

[0067] The arrangement of the clamp assembly 12 in this embodiment is described as follows:

[0068] Combination Figure 4 and Figure 5 The arrangement direction of the first rod member 121 and the second rod member 122 is the first direction (i.e., the x-axis direction shown in the figure), and at least two groups of clamp assemblies 12 are provided, and the arrangement direction of at least two groups of clamp assemblies 12 is parallel to the first direction. By providing multiple groups of clamp assemblies 12, multiple substrates 4 can be clamped at the same time, further improving work efficiency.

[0069] The substrate clamp 1 further includes a first linkage rod 124 and a second linkage rod 125; the first linkage rod 124 connects the right connecting rods 1211 in at least two groups of clamp assemblies 12, and the straight line where the long side of the first linkage rod 124 is located is parallel to the first direction; the second linkage rod 125 connects the left connecting rods 1221 in at least two groups of clamp assemblies 12, and the straight line where the long side of the second linkage rod 125 is located is parallel to the first direction. The arrangement of the first linkage rod 124 and the second linkage rod 125 enables multiple groups of clamp assemblies 12 to act synchronously, thereby improving the convenience and efficiency of operation.

[0070] Further, such as Figure 4 As shown, the clamp assembly 12 also includes a first elastic member (not shown in the figure) and a second elastic member 127. One end of the first elastic member is connected to the fixed frame 11, and the other end of the first elastic member is connected to the first rod member 121. The first elastic member elastically squeezes the first rod member 121; one end of the second elastic member 127 is connected to the fixed frame 11, and the other end of the second elastic member 127 is connected to the second rod member 122. The second elastic member 127 elastically squeezes the second rod member 122. The arrangement of the first elastic member and the second elastic member 127 makes the two rod members more stable in clamping the substrate 4.

[0071] In this embodiment, the substrate clamp 1 also includes a support plate 13, which is connected to the fixed frame 11 and is arranged between adjacent clamp assemblies 12. The first linkage rod 124 and the second linkage rod 125 are both slidably connected to the support plate 13. The support plate 13 improves the stability of the first linkage rod 124 and the second linkage rod 125 during sliding.

[0072] The driving structure of the clamp assembly 12 in this embodiment is described as follows:

[0073] Combination Figure 2 and Figure 4 In this embodiment, the clamp assembly 12 also includes a first slide rail 128 and a second slide rail 129. The first slide rail 128 is set on the fixed frame 11, and the first rod component 121 is slidably connected to the first slide rail 128, so that the first rod component 121 clamps the substrate 4 more stably; the second slide rail 129 is set on the fixed frame 11, and the second rod component 122 is slidably connected to the second slide rail 129, so that the process of the second rod component 122 clamping the substrate 4 is smoother.

[0074] In this embodiment, the driving member 123 is a bidirectional telescopic cylinder, one end of the driving member 123 is connected to the first rod member 121, and the other end of the driving member 123 is connected to the second rod member 122; the bidirectional telescopic cylinder serves as the driving member 123, which can simultaneously drive the first rod member 121 and the second rod member 122 to move relative to each other, thereby realizing the opening and closing of the clamp, simplifying the driving structure, and improving the clamping efficiency.

[0075] like Figure 1 As shown, the utility model also provides a flipping device, which includes a fixed seat 2, a substrate clamp 1 and a rotation drive assembly 3, wherein the substrate clamp 1 includes a fixed frame 11 and a clamp assembly 12 arranged on the fixed frame 11; the fixed seat 2 is rotatably connected to the fixed frame 11; the rotation drive assembly 3 is arranged on the fixed seat 2, and the rotation drive assembly 3 is connected to the fixed frame 11, and the rotation drive assembly 3 drives the fixed frame 11 to flip.

[0076] The working principle of the substrate clamp 1 of the utility model is as follows:

[0077] 1. Place substrate 4:

[0078] The substrate 4 is placed in the substrate placement area 111 in the fixed frame 11 , and the position of the substrate 4 is ensured to be aligned with the fixture assembly 12 .

[0079] 2. Prepare the fixture assembly 12.

[0080] The first rod component 121 and the second rod component 122 are opened in an initial state, that is, the clamping opening is in a maximum open state so as to place the substrate 4 therein.

[0081] The first elastic member and the second elastic member 127 elastically press the first rod member 121 and the second rod member 122 respectively.

[0082] 3. Clamping substrate 4:

[0083] The driving member 123 (bidirectional telescopic cylinder) is started, and the driving member 123 starts to work, pushing the first rod member 121 and the second rod member 122 to move relative to each other. As the rod members move relative to each other, the clamping opening gradually shrinks until the first clamping groove 12125 and the second clamping groove clamp the left and right sides of the substrate 4 respectively.

[0084] The right clamping block 1212 (such as the first right clamping block 1212a and the second right clamping block 1212b) on the first rod component 121 and the left clamping block 1222 (such as the first left clamping block 1222a and the second left clamping block 1222b) on the second rod component 122 respectively accurately clamp the corners and other sides of the substrate 4 to ensure that the substrate 4 is stably fixed.

[0085] By providing the first linkage rod 124 and the second linkage rod 125 , multiple groups of clamp assemblies 12 can achieve synchronous action, thereby improving the convenience and efficiency of operation.

[0086] 4. Substrate 4 transportation.

[0087] After the substrate 4 is stably clamped, the rotation drive assembly 3 drives the fixed frame 11 to flip, and other related operations such as back processing or testing can be performed.

[0088] This completes the working process of the substrate clamp 1 of the preferred embodiment and the turning device using the clamp.

[0089] The driving member in this embodiment is a cylinder, and the rotary driving component 3 adopts a rotary motor. The driving member and the rotary driving component 3 can also adopt common driving structures in automation equipment, such as electric motors, pneumatic devices or hydraulic cylinders.

[0090] In summary, although the present invention has been disclosed as above in terms of preferred embodiments, the above preferred embodiments are not intended to limit the present invention. A person skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be based on the scope defined in the claims.

Claims

1. A substrate clamp, characterized in that: include: A fixed frame, wherein a substrate placement area is provided in the fixed frame, and the substrate placement area is used to accommodate a substrate; as well as A clamp assembly connected to the fixed frame, the clamp assembly being used to clamp the substrate; Wherein, the clamp assembly comprises: A first rod component is arranged at one side inside the fixed frame; a second rod component, disposed opposite to the first rod component, wherein a clamping opening is formed between the second rod component and the first rod component, and the clamping opening is used to clamp a substrate; and A driving member is arranged on the fixed frame, the driving member is connected to the first rod member and the second rod member, and the driving member drives the first rod member and the second rod member to move relative to each other, thereby opening and closing the clamp.

2. The substrate fixture according to claim 1, characterized in that: The first rod component comprises: a right connecting rod connected to the driving member; and A right clamping block connected to the right connecting rod, wherein a first clamping groove is provided on a side of the right clamping block away from the right connecting rod, and the first clamping groove is used to clamp and fix one side of the substrate; The second rod component comprises: a left connecting rod, arranged opposite to the right connecting rod, the left connecting rod being connected to the driving member; and The left clamping block is connected to the left connecting rod. A second clamping groove is provided on the side of the left clamping block away from the left connecting rod. The second clamping groove is used to clamp and fix the other side of the substrate.

3. The substrate clamp according to claim 2, characterized in that: There are a plurality of right clamping blocks, which are arranged along the extending direction of the long side of the right connecting rod; A plurality of the left clamping blocks are provided, and the plurality of the left clamping blocks are arranged along the extending direction of the long side of the left connecting rod.

4. The substrate fixture according to claim 2, characterized in that: The arrangement direction of the first rod component and the second rod component is a first direction, and at least two groups of the clamp components are provided, and the arrangement direction of at least two groups of the clamp components is parallel to the first direction.

5. The substrate fixture according to claim 4, characterized in that: The substrate fixture further comprises: A first linkage rod, connecting the right connecting rods in at least two groups of the clamp assemblies, wherein the straight line where the long side of the first linkage rod lies is parallel to the first direction; and The second linkage rod connects the left connecting rods in at least two groups of the clamp assemblies, and the straight line where the long side of the second linkage rod lies is parallel to the first direction.

6. The substrate fixture according to claim 5, characterized in that: The substrate clamp further comprises a support plate, the support plate is connected to the fixed frame, the support plate is arranged between adjacent clamp assemblies, and the first linkage rod and the second linkage rod are both slidably connected to the support plate.

7. The substrate fixture according to claim 1, characterized in that: The clamp assembly also includes: a first elastic member, one end of which is connected to the fixing frame, and the other end of which is connected to the first rod member, the first elastic member elastically compressing the first rod member; and The second elastic member has one end connected to the fixing frame and the other end connected to the second rod component, and the second elastic member elastically squeezes the second rod component.

8. The substrate fixture according to claim 1, characterized in that: The clamp assembly also includes: A first slide rail is disposed on the fixed frame, and the first rod component is slidably connected to the first slide rail; and The second slide rail is arranged on the fixed frame, and the second rod component is slidably connected to the second slide rail.

9. The substrate fixture according to claim 1, characterized in that: The driving member is a bidirectional telescopic cylinder, one end of which is connected to the first rod member, and the other end of which is connected to the second rod member.

10. A turning device, characterized in that: include: The substrate clamp according to any one of claims 1 to 9, comprising a fixed frame and a clamp assembly arranged on the fixed frame; A fixed seat, rotatably connected to the fixed frame; as well as A rotation driving assembly is arranged on the fixing seat and connected to the fixing frame, and the rotation driving assembly drives the fixing frame to flip.

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