Vacuum chamber structure capable of improving vacuumizing efficiency

Abstract

The utility model relates to a vacuum chamber structure capable of improving vacuumizing efficiency, and relates to the field of isotope electromagnetic separation technologies. The vacuum chamber is used for providing a vacuum environment, the ion source is arranged in the vacuum chamber and is used for emitting ions, the receiver is arranged in the vacuum chamber and is used for receiving various isotopes of the ions, the fixed baffle plate is arranged in the vacuum chamber, and the vacuum chamber is divided into a plurality of vacuum compartments by the fixed baffle plate; each vacuum compartment is communicated with a vacuum pipe used for being communicated with vacuum equipment, the fixed baffle is provided with a communicating hole for ions to penetrate through, and a movable baffle used for sealing or communicating the adjacent vacuum compartments is arranged in the communicating hole. The vacuum chamber has the advantages that the vacuumizing efficiency of the vacuum chamber is improved, and the leakage point troubleshooting and overhauling efficiency of the vacuum chamber is improved.

Description

Technical Field

[0001] The present application relates to the field of isotope electromagnetic separation technology, and in particular to a vacuum chamber structure for improving vacuum pumping efficiency. Background Art

[0002] Isotope electromagnetic separation is a widely used isotope separation technology. The basic working principle of the isotope electromagnetic separator is that the ion source emits ions, which enter the magnetic field after being accelerated by the electric field and are deflected under the action of the magnetic field. Isotopes of different masses have different deflection radii, which allows isotope separation.

[0003] The ion source is usually set in a vacuum chamber. Due to the large size of the vacuum chamber, the vacuum pumping process takes a long time, which reduces the efficiency of isotope separation. In addition, when the vacuum chamber is evacuated too slowly, there may be a leak in the vacuum chamber, so it is necessary to check and repair the inside of the vacuum chamber. However, the large size of the vacuum chamber makes the efficiency of the troubleshooting process low, thereby reducing the efficiency of isotope separation.

[0004] With respect to the above-mentioned related technologies, the inventors believe that the current vacuum chambers have problems of low vacuuming efficiency and low troubleshooting and maintenance efficiency, which reduces the efficiency of separating isotopes. Utility Model Content

[0005] In order to solve the above technical problems, the present application provides a vacuum chamber structure that improves vacuuming efficiency.

[0006] The present application provides a vacuum chamber structure for improving vacuuming efficiency, which adopts the following technical solution:

[0007] A vacuum chamber structure for improving vacuum pumping efficiency comprises a vacuum chamber for providing a vacuum environment, a driving field, an ion source arranged in the vacuum chamber for emitting ions, a receiver of multiple isotopes arranged in the vacuum chamber for receiving the ions, and a fixed baffle arranged in the vacuum chamber, wherein the fixed baffle divides the vacuum chamber into a plurality of vacuum compartments, each of the vacuum compartments is connected to a vacuum tube for connecting to a vacuum device, a connecting hole for the ions to pass through is formed on the fixed baffle, and a movable baffle for sealing or connecting adjacent vacuum compartments is provided in the connecting hole.

[0008] By adopting the above technical solution, when the vacuum chamber needs to be evacuated, the movable baffle seals the connecting hole, and the vacuum equipment and vacuum tube evacuate multiple vacuum compartments at the same time. When the evacuation speed of one of the vacuum compartments is slow, it can be inferred that there is a leak in the vacuum compartment, so the vacuum compartment can be checked and repaired, thereby improving the efficiency of checking and repairing the leak in the vacuum chamber. The simultaneous evacuation of multiple vacuum compartments improves the efficiency of evacuating the vacuum chamber, thereby improving the work efficiency of separating isotopes. After the vacuum chamber is evacuated, the movable baffle is opened to connect the adjacent vacuum compartments, and the ion source emits ions, and the ions reach the receiver through the connecting hole under the action of the driving field.

[0009] Preferably, a transmission motor is provided on the fixed baffle, a transmission shaft of the transmission motor is fixedly connected to the movable baffle, the transmission motor drives the movable baffle to move so as to achieve communication or sealing between adjacent vacuum compartments, and the transmission motor signal is connected to a controller.

[0010] Preferably, one end of the movable baffle close to the transmission motor is rotatably connected to the fixed baffle, and the transmission motor drives the movable baffle to rotate, thereby achieving communication or sealing between adjacent vacuum compartments.

[0011] By adopting the above technical solution, the staff controls the start and stop of the transmission motor through the controller, so that the transmission motor drives the movable baffle to rotate, thereby realizing the connection and sealing of adjacent vacuum compartments. When adjacent vacuum compartments are sealed, it is convenient to improve the efficiency of vacuuming and the efficiency of troubleshooting and repairing the vacuum chamber. When adjacent vacuum compartments are connected, it is convenient for ions to pass through the connecting hole to reach the receiver.

[0012] Preferably, when the movable baffle seals the connecting hole, the movable baffle is perpendicular to the movement trajectory of the ions.

[0013] Preferably, the number of the fixed baffle is one, and the fixed baffle is located in the middle of the vacuum chamber. The fixed baffle divides the vacuum chamber into two vacuum compartments of the same size, and the ion source and the receiver are respectively arranged in the two vacuum compartments.

[0014] By adopting the above technical solution, after the vacuum chamber is evacuated, the ion source emits ions, and the ion beam hits the movable baffle. The staff can observe the clarity of the ion beam on the movable baffle. If the ion beam is clear, the movable baffle can be opened to allow the receiver to receive the ion beam. If the ion beam is not clear, it can be debugged until the ion beam is clear, and then the movable baffle can be opened to allow the receiver to receive the ion beam, thereby reducing the contamination of the receiver. When the movable baffle is in a sealed state, the movable baffle is perpendicular to the movement trajectory of the ions, which makes it easy for the staff to observe whether the ion beam is clear. The two vacuum compartments are of the same size, which makes it easy to compare their vacuuming speeds, so as to quickly determine whether the vacuum compartment needs to be at the leak point, thereby improving the efficiency of troubleshooting and repairing the leak point of the vacuum chamber, and at the same time, it is beneficial to improve the efficiency of vacuuming the vacuum chamber, and further improve the separation efficiency of isotopes.

[0015] Preferably, the fixed baffle and the movable baffle are both made of stainless steel.

[0016] By adopting the above technical solution, the fixed baffle and the movable baffle made of stainless steel have the advantages of high strength, high hardness, corrosion resistance, low cost and long service life.

[0017] Preferably, the driving field comprises an electric field and a magnetic field, wherein the electric field is used to accelerate the ions, and the magnetic field is used to deflect the ions.

[0018] Preferably, a transparent observation window is provided on the vacuum chamber, and the observation window is used to observe an image formed by the ions received at the receiver.

[0019] By adopting the above technical solution, the electric field accelerates the ions, the magnetic field drives the ions to deflect, and the deflection radius of isotopes of different masses is different, thereby achieving the separation of isotopes. The setting of the observation window is convenient for the staff to observe the situation inside the vacuum chamber.

[0020] In summary, this application has the following beneficial technical effects:

[0021] 1. The setting of fixed baffles and movable baffles improves the vacuum chamber's vacuuming efficiency and the efficiency of leak point detection and repair, thereby improving the working efficiency of isotope separation;

[0022] 2. The staff can observe whether the ion beam is clear through the movable baffle, which is convenient for debugging, so that the ion beam can be received by the receiver after being clear, thereby reducing the contamination of the receiver. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of a cross-sectional structure of a vacuum chamber structure for improving vacuuming efficiency;

[0024] Figure 2 yes Figure 1 Enlarged schematic diagram of part A.

[0025] Explanation of the reference numerals: 1. vacuum chamber; 11. vacuum compartment; 12. vacuum tube; 2. ion source; 21. ions; 3. receiver; 4. fixed baffle; 41. connecting hole; 42. transmission motor; 5. movable baffle. DETAILED DESCRIPTION

[0026] The following is combined with Figure 1-2 This application is described in further detail.

[0027] The embodiment of the present application discloses a vacuum chamber structure for improving vacuuming efficiency.

[0028] Reference Figure 1 and Figure 2 A vacuum chamber structure for improving vacuum pumping efficiency includes a vacuum chamber 1 for providing a vacuum environment, a driving field, an ion source 2 arranged in the vacuum chamber 1 for emitting ions 21, a receiver 3 for multiple isotopes arranged in the vacuum chamber 1 for receiving the ions 21, and a fixed baffle 4 fixedly arranged in the vacuum chamber 1, wherein the fixed baffle 4 divides the vacuum chamber 1 into a plurality of vacuum compartments 11, each vacuum compartment 11 is fixedly connected to a vacuum tube 12 for connecting to a vacuum device, a connecting hole 41 is opened on the fixed baffle 4 for the ions 21 to pass through, and a movable baffle 5 for sealing or connecting adjacent vacuum compartments 11 is arranged in the connecting hole 41.

[0029] A transmission motor 42 is fixedly arranged on the fixed baffle 4, and a transmission shaft of the transmission motor 42 is fixedly connected to the movable baffle 5. One end of the movable baffle 5 close to the transmission motor 42 is rotatably connected to the fixed baffle 4 through a hinge. The transmission motor 42 drives the movable baffle 5 to rotate, thereby realizing the connection or sealing of adjacent vacuum compartments 11. The transmission motor 42 is signal-connected to a controller.

[0030] There is one fixed baffle 4, which is located in the middle of the vacuum chamber 1. The fixed baffle 4 divides the vacuum chamber 1 into two vacuum compartments 11 of the same size, and the ion source 2 and the receiver 3 are respectively arranged in the two vacuum compartments 11. In the embodiment of the present application, the ion source 2 and the receiver 3 are symmetrically arranged on both sides of the fixed baffle 4. There are two vacuum tubes 12, which are respectively arranged on opposite sides of the vacuum chamber 1, one vacuum tube 12 is connected to one vacuum compartment 11, and the vacuum tube 12 is arranged in the middle of the side wall of the vacuum compartment 11.

[0031] When the movable baffle 5 seals the connecting hole 41, the movable baffle 5 is perpendicular to the movement trajectory of the ions 21. The fixed baffle 4 and the movable baffle 5 are both made of stainless steel. In the embodiment of the present application, the fixed baffle 4 is connected and fixed to the inner wall of the vacuum chamber 1 by welding.

[0032] The driving field includes an electric field and a magnetic field. The electric field is used to accelerate the ions 21 , and the magnetic field is used to deflect the ions 21 .

[0033] A transparent observation window is provided on the vacuum chamber 1 , and the observation window is used to observe the image formed by the ions 21 received at the receiver 3 .

[0034] The implementation principle of a vacuum chamber structure for improving the vacuum pumping efficiency in the embodiment of the present application is as follows: before the vacuum chamber 1 is vacuumed, the transmission motor 42 is started by the controller, so that the transmission motor 42 drives the movable baffle 5 to rotate, so that the movable baffle 5 seals the connecting hole 41, and then the two vacuum compartments 11 are vacuumed at the same time by the vacuum equipment and the vacuum tube 12. When the vacuum pumping speed of one of the vacuum compartments 11 is slow, it can be inferred that there is a leak in the vacuum compartment 11, so the vacuum compartment 11 can be checked and repaired. The inspection and repair of one of the vacuum compartments 11 is more efficient than the inspection and repair of the entire vacuum chamber 1, thereby improving the work efficiency of separating isotopes. At the same time, the volume of the vacuum compartment 11 is smaller than the volume of the vacuum chamber 1, and the efficiency of vacuuming the two vacuum compartments 11 at the same time is higher than the efficiency of vacuuming the entire vacuum chamber 1, thereby improving the work efficiency of separating isotopes.

[0035] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A vacuum chamber structure for improving vacuuming efficiency, characterized in that: The invention comprises a vacuum chamber (1) for providing a vacuum environment, a driving field, an ion source (2) arranged in the vacuum chamber (1) for emitting ions (21), a receiver (3) arranged in the vacuum chamber (1) for receiving multiple isotopes of the ions (21), and a fixed baffle (4) arranged in the vacuum chamber (1), wherein the fixed baffle (4) divides the vacuum chamber (1) into a plurality of vacuum compartments (11), each of the vacuum compartments (11) being connected to a vacuum tube (12) for connecting to a vacuum device, the fixed baffle (4) being provided with a connecting hole (41) for the ions (21) to pass through, and a movable baffle (5) for sealing or connecting adjacent vacuum compartments (11) being provided in the connecting hole (41).

2. A vacuum chamber structure for improving vacuuming efficiency according to claim 1, characterized in that: A transmission motor (42) is provided on the fixed baffle (4); a transmission shaft of the transmission motor (42) is fixedly connected to the movable baffle (5); the transmission motor (42) drives the movable baffle (5) to move so as to achieve communication or sealing between adjacent vacuum compartments (11); and a controller is connected to the transmission motor (42) signal.

3. A vacuum chamber structure for improving vacuuming efficiency according to claim 2, characterized in that: One end of the movable baffle (5) close to the transmission motor (42) is rotatably connected to the fixed baffle (4), and the transmission motor (42) drives the movable baffle (5) to rotate, thereby achieving communication or sealing of adjacent vacuum compartments (11).

4. A vacuum chamber structure for improving vacuuming efficiency according to claim 3, characterized in that: When the movable baffle (5) seals the communicating hole (41), the movable baffle (5) is perpendicular to the movement trajectory of the ions (21).

5. A vacuum chamber structure for improving vacuuming efficiency according to claim 4, characterized in that: The number of the fixed baffle (4) is one, and the fixed baffle (4) is located in the middle of the vacuum chamber (1). The fixed baffle (4) divides the vacuum chamber (1) into two vacuum compartments (11) of the same size, and the ion source (2) and the receiver (3) are respectively arranged in the two vacuum compartments (11).

6. A vacuum chamber structure for improving vacuuming efficiency according to claim 1, characterized in that: The fixed baffle (4) and the movable baffle (5) are both made of stainless steel.

7. A vacuum chamber structure for improving vacuuming efficiency according to claim 1, characterized in that: The driving field comprises an electric field and a magnetic field, wherein the electric field is used to accelerate the ions (21), and the magnetic field is used to deflect the ions (21).

8. The vacuum chamber structure for improving vacuuming efficiency according to claim 1, characterized in that: The vacuum chamber (1) is provided with a transparent observation window, and the observation window is used to observe an image formed by the ions (21) received at the receiver (3).

Images