Air uniformizing nozzle of etching machine

Abstract

The utility model discloses an air uniformizing nozzle of an etching machine, and mainly relates to the technical field of etching machines. Comprising an air tap body and an air uniformizing column arranged in the air tap body, an inner cavity matched with the air uniformizing column is formed in the air tap body, an annular cavity is formed between the inner wall of the inner cavity and the outer wall of the air uniformizing column, the rear end of the annular cavity is closed, and the front end of the annular cavity is communicated with the outside. A plurality of air inlet holes communicated with the annular cavity are evenly formed in the outer wall of the air tap body in the circumferential direction of the air tap body. Pressure can be reduced, directional cyclones can be formed and uniformly flow out through the axial direction of the air tap, and stability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of etching machines, in particular to an air equalizing nozzle for an etching machine. Background Art

[0002] In the semiconductor manufacturing industry, etching refers to engraving patterns on thin films. The patterns are formed using plasma spraying to form the final outline of each process step. Its main purpose is to perfectly present precise patterns according to the layout and maintain uniform and consistent results under all conditions. However, most existing gas nozzles have air intake from the rear end of the gas nozzle and exhaust from the front end. The gas pressure is relatively high, and when the gas supply system fluctuates, it will also affect the stability of the gas outlet. Utility Model Content

[0003] The utility model aims to solve the problems existing in the prior art and provide an air equalizing nozzle for an etching machine, which can reduce pressure and form a directional cyclone, so that air flows out evenly in the axial direction of the air nozzle and increases stability.

[0004] In order to achieve the above-mentioned purpose, the utility model is realized through the following technical solutions:

[0005] The air equalizing nozzle of an etching machine comprises an air nozzle body and an air equalizing column arranged in the air nozzle body, the air nozzle body is provided with an inner cavity adapted to the air equalizing column, and an annular cavity is provided between the inner wall of the inner cavity and the outer wall of the air equalizing column, the rear end of the annular cavity is closed, and the front end is connected to the outside, and a plurality of air inlet holes connected to the annular cavity are evenly provided on the outer wall of the air nozzle body along the circumference of the air nozzle body.

[0006] Preferably, the inner cavity is a stepped hole arranged in the air nozzle body, both ends of the stepped hole are connected to the outside world, the gas column is stepped, and the gas column includes a connecting part connected to the rear end of the inner cavity and a functional part for forming an annular cavity with the inner wall of the inner cavity, and the rear end of the inner cavity is closed by the connecting part.

[0007] Preferably, the connecting portion is detachably connected to the rear end of the inner cavity.

[0008] Preferably, the stepped holes are, from front to back, the first hole, the second hole, and the third hole, and the inner diameters of the first hole, the second hole, and the third hole increase successively; the uniform air column is, from front to back, the first column, the second column, and the third column, and the outer diameters of the first column, the second column, and the third column increase successively; the third column cooperates with the third hole, and the second column cooperates with the second hole; the first column passes through the second hole and the first hole in sequence from back to front; the air inlet is located outside the annular space between the first column and the second hole and is connected to the annular space between the first column and the second hole.

[0009] Preferably, the air nozzle body is a rotating body, an annular groove is provided on the outer wall of the air nozzle body, and the air inlet is located in the annular groove.

[0010] Preferably, the number of the air inlet holes is four.

[0011] Compared with the prior art, the beneficial effects of the present invention are:

[0012] The utility model has a plurality of air inlet holes evenly arranged on the outer wall of the air nozzle body along the circumference of the air nozzle body. After the gas enters through the air inlet holes on the outer circumferential wall of the air nozzle body, it is blown toward the uniform air column and air is taken in from multiple directions, so that the gases interact with each other, reduce the pressure and form directional cyclones, and evenly flow out in the axial direction of the air nozzle body, thereby increasing stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the utility model;

[0014] Figure 2 It is a schematic diagram of the structure of the air nozzle body;

[0015] Figure 3 It is a schematic diagram of the structure of the uniform gas column.

[0016] Numbers in the attached drawings:

[0017] 1. Air nozzle body; 11. First hole; 12. Second hole; 13. Third hole; 2. Air column; 21. Connecting part; 22. Functional part; 23. First column; 24. Second column; 25. Third column; 3. Annular cavity; 4. Air inlet; 5. Annular groove. DETAILED DESCRIPTION

[0018] The present invention is further described below in conjunction with specific embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not used to limit the scope of the present invention. In addition, it should be understood that after reading the content taught by the present invention, those skilled in the art can make various changes or modifications to the present invention, and these equivalent forms also fall within the scope defined by the present application.

[0019] Example: As shown in the attached Figure 1 As shown, the utility model describes an air equalizing nozzle for an etching machine, comprising an air nozzle body 1 and an air equalizing column 2 arranged in the air nozzle body 1, the air nozzle body 1 is provided with an inner cavity adapted to the air equalizing column 2, and an annular cavity 3 is provided between the inner wall of the inner cavity and the outer wall of the air equalizing column 2, the rear end of the annular cavity 3 is closed, and the front end is connected with the outside, and a plurality of air inlet holes 4 connected with the annular cavity 3 are evenly provided on the outer wall of the air nozzle body 1 along the circumference of the air nozzle body 1, the gas enters the annular cavity 3 through the air inlet holes 4, and is then discharged outwardly from the front end of the annular cavity 3.

[0020] An integrated structure can be adopted between the air nozzle body 1 and the air distribution column 2. An annular cavity 3 is provided at the front end of the air nozzle body 1. The rear end of the air nozzle body 1 is closed. The inner side of the annular cavity 3 is the air distribution column 2. The air nozzle body 1 can be a rotating body. Four air inlet holes 4 connected to the annular cavity 3 are evenly provided on the outer wall of the air nozzle body 1 along the circumference of the air nozzle body 1.

[0021] Preferably, in order to facilitate the manufacture of the utility model, the air nozzle body 1 and the air column 2 are preferably a split structure, the inner cavity is a stepped hole arranged in the air nozzle body 1, both ends of the stepped hole are connected to the outside, the air column 2 is stepped, and the air column 2 includes a connecting portion 21 connected to the rear end of the inner cavity and a functional portion 22 for forming an annular cavity 3 with the inner wall of the inner cavity, and the rear end of the inner cavity is closed by the connecting portion 21. Furthermore, the connecting portion 21 is threadedly connected to the rear end of the inner cavity.

[0022] Preferably, the stepped holes are the first hole 11, the second hole 12, and the third hole 13 from front to back, and the inner diameters of the first hole 11, the second hole 12, and the third hole 13 are increased in sequence. The gas column 2 is the first column 23, the second column 24, and the third column 25 from front to back, and the outer diameters of the first column 23, the second column 24, and the third column 25 are increased in sequence. The inner diameter of the first hole 11 is greater than the outer diameter of the first column 23. The third column 25 cooperates with the third hole 13, and the second column 24 cooperates with the second hole 12. The first column 23 passes through the second hole 12 and the first hole 11 from back to front in sequence, and the air inlet 4 is located between the first column 23 and the second hole The outer side of the annular space between the first column 23 and the second hole 12 is connected with the annular space between the first column 23 and the second hole 12, and the annular space therein has a large accommodating space. At the same time, a tapered guide hole can be further provided between the first hole 11 and the second hole 12 to guide the flow of air. The second column 24 and / or the third column 25 serve as the connecting portion 21, and external threads can be processed on the second column 24 and / or the third column 25, and corresponding internal threads can be processed on the second hole 12 and / or the third hole 13. The third column 25 can also be directly embedded in the third hole 13, or the second column 24 can be embedded in the second hole 12 while the third column 25 is directly embedded in the third hole 13.

[0023] An air inlet pipeline can be configured for each air inlet hole 4. Preferably, in order to facilitate air intake, the air nozzle body 1 is a rotating body, and an annular groove 5 is provided on the outer wall of the air nozzle body 1. The air inlet hole 4 is located in the annular groove 5. A connecting piece matching the annular groove 5 is used to supply air to all the air inlet holes 4 at the same time. The gas enters from the annular groove 5 and intakes from four directions at the same time, so that the gases interact with each other, reduce pressure and form directional cyclones, and flow out evenly in the axial direction of the air nozzle body 1 to increase stability.

Claims

1. Etching machine air nozzle, characterized by: The invention comprises an air nozzle body (1) and an air distribution column (2) arranged in the air nozzle body (1); the air nozzle body (1) is provided with an inner cavity adapted to the air distribution column (2), and an annular cavity (3) is provided between the inner wall of the inner cavity and the outer wall of the air distribution column (2); the rear end of the annular cavity (3) is closed, and the front end is connected to the outside; and a plurality of air inlet holes (4) connected to the annular cavity (3) are evenly provided on the outer wall of the air nozzle body (1) along the circumference of the air nozzle body (1).

2. The gas equalizing nozzle for etching machine according to claim 1, characterized in that: The inner cavity is a stepped hole arranged in the air nozzle body (1), both ends of the stepped hole are connected to the outside world, the gas column (2) is stepped, and the gas column (2) includes a connecting portion (21) connected to the rear end of the inner cavity and a functional portion (22) used to form an annular cavity (3) with the inner wall of the inner cavity, and the rear end of the inner cavity is closed by the connecting portion (21).

3. The gas equalizing nozzle for etching machine according to claim 2, characterized in that: The connecting portion (21) is detachably connected to the rear end of the inner cavity.

4. The gas equalizing nozzle for etching machine according to claim 2, characterized in that: The stepped holes are, from front to back, a first hole (11), a second hole (12), and a third hole (13), and the inner diameters of the first hole (11), the second hole (12), and the third hole (13) are increased in sequence. The gas equalizing column (2) is, from front to back, a first column (23), a second column (24), and a third column (25), and the outer diameters of the first column (23), the second column (24), and the third column (25) are increased in sequence. The third column (25) is matched with the third hole (13), and the second column (24) is matched with the second hole (12). The first column (23) passes through the second hole (12) and the first hole (11) in sequence from back to front. The air inlet hole (4) is located outside the annular space between the first column (23) and the second hole (12) and is connected to the annular space between the first column (23) and the second hole (12).

5. The gas equalizing nozzle for etching machine according to claim 1, characterized in that: The air nozzle body (1) is a rotating body, an annular groove (5) is provided on the outer wall of the air nozzle body (1), and the air inlet hole (4) is located in the annular groove (5).

6. The gas equalizing nozzle for etching machine according to claim 1, characterized in that: The number of the air inlet holes (4) is four.

Images