Temperature-conducting manipulator and electron microscope detection system

Abstract

The utility model is suitable for the technical field of transmission electron microscopes, and provides a temperature-conducting manipulator and an electron microscope detection system. The temperature conduction mechanical arm comprises a body and a temperature conduction mechanism, the clamping assembly is used for clamping a sample to be detected, and the driving assembly drives the clamping assembly to move so as to clamp or loosen the sample; the temperature conducting support is connected to one end of the body through a thermal insulation structure, the temperature conducting support is used for being externally connected with a cold source so as to at least conduct heat exchange with the clamped sample, and the clamping assembly is connected to the temperature conducting support; wherein the temperature conducting bracket is also provided with a temperature conducting piece which is propped against the clamped sample. The electron microscope detection system comprises a detection device and the temperature conduction manipulator. According to the utility model, the temperature-conducting manipulator is compact in overall structure and small in size, and can exchange heat with the sample to keep the sample in a low-temperature state, so that the accuracy of the detection result of the electron microscope detection system on the sample is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of transmission electron microscopes, and in particular relates to a temperature conducting manipulator and an electron microscope detection system. Background Art

[0002] Transmission electron microscope (TEM) uses electron beams that penetrate samples to achieve atomic-scale resolution, making it easy to analyze the internal structure and composition of materials. TEM can see fine structures smaller than 0.2um that cannot be seen under an optical microscope. It has important applications in materials science, biology, industrial quality inspection, etc., and can obtain information such as the morphology, structure, and orientation of materials.

[0003] The internal space of the transmission electron microscope is small, and when detecting frozen samples (minus 150 to minus 180 degrees Celsius), the manipulator that clamps the frozen samples also needs to have good thermal conductivity to avoid damaging the temperature state of the frozen samples (such as the temperature of the manipulator is higher than the temperature of the frozen samples). Therefore, there are high requirements for the temperature resistance and thermal conductivity of the manipulator that clamps the samples to avoid the temperature of the frozen samples being damaged by the high temperature of the manipulator. In the related art, the thermal conductivity of the manipulator is low, which easily causes the temperature of the frozen samples clamped to rise, affecting the detection results of the samples. Utility Model Content

[0004] In view of this, the utility model provides a temperature conducting manipulator and an electron microscope detection system to solve the problem that the manipulator causes the temperature of the frozen sample to rise, thereby affecting the accuracy of the detection result.

[0005] To solve the above problems, the technical solution of the utility model is achieved as follows:

[0006] A temperature-conducting manipulator comprises: a main body, inside which is provided a driving component; a clamping component, used for clamping a sample to be detected, the driving component drives the clamping component to move so as to clamp or release the sample; a temperature-conducting bracket, connected to one end of the main body via a thermal insulation structure, the temperature-conducting bracket is used for an external cold source to at least exchange heat with the clamped sample, the clamping component is connected to the temperature-conducting bracket; wherein the temperature-conducting bracket is also provided with a temperature-conducting part abutting against the clamped sample.

[0007] In some embodiments, the thermal conductive member is an elastic thermal conductive ring, one end of the thermal conductive ring is connected to the thermal conductive bracket, and the other end is suspended and extended to abut against the sample.

[0008] In some embodiments, the clamping assembly includes: a tongue, which is movably connected to the thermal conductive bracket via a connecting shaft, the tongue including a clamping end for abutting the sample and a driving end for connecting to the driving assembly; a reset member, which is used to drive the tongue to maintain a clamping state, the reset member being arranged between the thermal conductive bracket and the driving end; a guide pin, one end of which is fixed to the thermal conductive bracket, and the other end of which is extended in the air; wherein the driving end is inserted into the body and connected to the driving assembly, and the sample is clamped between the clamping end and the guide pin.

[0009] In some embodiments, a central hole is formed on the thermal conductive component, and one end of the guide pin movably passes through the central hole and is connected to the thermal conductive bracket.

[0010] In some embodiments, the thermal insulation structure includes: a thermal insulation connector, which is inserted between the thermal conductive bracket and the main body, and is used to connect the thermal conductive bracket to the main body and space it; a thermal insulation ball, which is used to support the thermal insulation bracket, and the thermal insulation ball is arranged between the thermal conductive bracket and the main body.

[0011] In some embodiments, the thermal insulation connector and the thermal insulation ball are provided in plurality, and the thermal insulation connectors and the thermal insulation balls are arranged at intervals and evenly distributed.

[0012] In some embodiments, the main body includes: an outer shell with a accommodating cavity formed inside; and a thermal insulation bracket arranged in the accommodating cavity; wherein the driving component is installed in the accommodating cavity, and the driving component includes a driving shaft, and the driving shaft is rotatably connected to the thermal insulation bracket and connected to the driving end.

[0013] In some embodiments, the driving assembly further includes a driving member and a coupling, and the rotating shaft of the driving member is connected to the driving shaft through the coupling; wherein a thermal insulation bearing is provided on the thermal insulation bracket, and the driving shaft is passed through the thermal insulation bearing.

[0014] In some embodiments, the drive shaft is eccentrically provided with a roller for abutting against the drive end and a limit pin for limiting the rotation range of the drive shaft, and a limit slot is provided on the outer shell, one end of the limit pin is connected to the drive shaft, and the other end of the limit pin is located in the limit slot.

[0015] The embodiment of the utility model further provides an electron microscope detection system, comprising a detection device and the above-mentioned temperature conducting manipulator.

[0016] The embodiment of the utility model provides a temperature-conducting manipulator and an electron microscope detection system, wherein the temperature-conducting manipulator includes a main body, a clamping assembly and a temperature-conducting bracket, wherein the temperature-conducting bracket is connected to the main body, and the clamping assembly is connected to the temperature-conducting bracket and is connected to a driving assembly disposed in the main body. The embodiment of the utility model provides a temperature-conducting bracket, and the temperature-conducting bracket is connected to the main body through a thermal insulation structure, and a temperature-conducting member is also provided on the temperature-conducting bracket. In this way, since the temperature-conducting bracket has good heat conduction performance, and is in contact with the clamped sample through the temperature-conducting member, the temperature-conducting bracket connected to the external cold source can effectively exchange heat with the sample, so that the temperature of the clamped sample is maintained at a low temperature, and the increase in the sample temperature is preferably avoided, thereby improving the accuracy of the results of the electron microscope detection system detecting the sample. Moreover, the overall structure of the temperature-conducting manipulator is compact and small in size, which better meets the needs of smart operation in a narrow space, and has good ingenuity in design. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the temperature conducting manipulator provided by an embodiment of the utility model;

[0018] Figure 2 It is an exploded schematic diagram of the clamping assembly and the body of the temperature conducting manipulator provided by the embodiment of the utility model, in which the outer shell is omitted;

[0019] Figure 3 It is a cross-sectional schematic diagram of the temperature conducting manipulator provided by the embodiment of the utility model in a clamping state;

[0020] Figure 4 It is a cross-sectional schematic diagram of the temperature conducting robot provided by an embodiment of the utility model in an open state.

[0021] Description of reference numerals:

[0022] 1. Temperature-conducting manipulator; 11. Main body; 111. Shell; 1110. Accommodating chamber; 112. Temperature-insulating bracket; 113. Limiting groove; 12. Driving assembly; 121. Driving shaft; 122. Driving member; 123. Coupling; 124. Temperature-insulating bearing; 125. Roller; 126. Limiting pin; 13. Clamping assembly; 130. Connecting shaft; 131. Tab; 1311. Clamping end; 1312. Driving end; 132. Resetting member; 133. Guide pin; 14. Temperature-conducting bracket; 15. Temperature-insulating structure; 151. Temperature-insulating connector; 152. Temperature-insulating ball; 16. Temperature-conducting member; 161. Center hole. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0024] The various specific technical features described in the specific embodiments can be combined in any suitable manner without contradiction, for example, different embodiments and technical solutions can be formed by combining different specific technical features. In order to avoid unnecessary repetition, the various possible combinations of the specific technical features in the utility model will not be described separately.

[0025] In the following description, the terms "first\second\..." are only used to distinguish different objects, and do not mean that the objects have the same or related points. It should be understood that the directions "above", "below", "outside" and "inside" are all directions in normal use, and the directions "left" and "right" refer to the left and right directions shown in the corresponding schematic diagrams, which may or may not be the left and right directions in normal use.

[0026] It should be noted that the terms "comprises", "includes" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element. "Multiple" means greater than or equal to two.

[0027] The embodiment of the utility model provides a temperature conducting manipulator 1, which is used for clamping samples to be detected in an electron microscope detection system, that is, the temperature conducting manipulator 1 is used to transport samples during the detection process, thereby realizing the function of transporting frozen samples in a low-temperature environment.

[0028] like Figure 1As shown, the temperature-conducting manipulator 1 includes a main body 11, a clamping assembly 13 and a temperature-conducting bracket 14. A driving assembly 12 is provided inside the main body 11. The clamping assembly 13 is used to clamp the sample to be detected. The driving assembly 12 is connected to the clamping assembly 13, so that the clamping assembly 13 can be driven to move, so as to clamp or release the sample. That is, the clamping assembly 13 can move by providing a force through the driving assembly 12, so as to clamp or release the sample. The temperature-conducting bracket 14 is connected to one end of the main body 11 through a thermal insulation structure 15. The temperature-conducting bracket 14 is used to connect an external cold source to at least exchange heat with the clamped sample. The clamping assembly 13 is connected to the temperature-conducting bracket 14; wherein, the temperature-conducting bracket 14 is also provided with a temperature-conducting member 16 that abuts against the clamped sample. Specifically, since the sample to be detected needs to be kept in a frozen low-temperature state (about minus 150 to minus 180 degrees Celsius), a temperature-conducting bracket 14 is provided and connected to an external cold source, so that the temperature-conducting bracket 14 is continuously cooled by the external cold source (such as liquid nitrogen), so that the temperature-conducting bracket 14 can be kept in a low-temperature state. In addition, the temperature-conducting bracket 14 has good thermal conductivity, and the temperature-conducting member 16 is provided on the temperature-conducting bracket 14, so that the temperature-conducting member 16 also has good thermal conductivity. In this way, when the clamping assembly 13 clamps the sample, the sample and the temperature-conducting member 16 are kept in contact. Therefore, under the continuous cooling of the external cold source, the temperature-conducting bracket 14 and the temperature-conducting member 16 can be kept in a low-temperature state, and then the temperature-conducting member 16 can absorb the temperature on the sample, so that the temperature of the sample is kept in a low-temperature state, which better avoids the occurrence of inaccurate detection results due to the increase in the temperature of the sample.

[0029] like Figure 1 As shown, in some embodiments, the thermal conductive bracket 14 is connected to one end of the body 11 through the thermal insulation structure 15. Through the thermal insulation structure 15, not only the connection between the thermal conductive bracket 14 and the body 11 is realized, but also, under the interval connection of the thermal insulation structure 15, the contact area between the thermal conductive bracket 14 and the body 11 is reduced, so that the heat transfer between the thermal conductive bracket 14 and the body 11 can be reduced, thereby better avoiding the temperature rise on the thermal conductive bracket 14 and reducing the interference with the low temperature maintenance of the sample. At the same time, in the embodiment of the utility model, the thermal conductive bracket 14 is connected to one end of the body 11, and the thermal conductive bracket 14 and the body 11 are basically coaxially arranged, and the size of the outer contour shape is basically the same as that of the body 11. In this design mode, the thermal conductive bracket 14 is connected in the length direction of the body 11, which better avoids the increase of the circumferential size, so that the overall size of the thermal conductive manipulator 1 is small, meeting the precision operation requirements in a small space.

[0030] A temperature-conducting manipulator 1 provided in an embodiment of the utility model comprises a body 11, a clamping assembly 13 and a temperature-conducting bracket 14, wherein the temperature-conducting bracket 14 is connected to one end of the body 11, and the clamping assembly 13 is connected to the temperature-conducting bracket 14 and is connected to a driving assembly 12 arranged in the body 11 so as to be able to move the driving member. In the embodiment of the utility model, a temperature-conducting bracket 14 having good heat conduction performance is provided, and the temperature-conducting bracket 14 is connected to the body 11 through a heat insulation structure 15, so as to better avoid the temperature influence of the temperature on the body 11 on the temperature-conducting bracket 14, and a temperature-conducting member 16 is provided on the temperature-conducting bracket 14, and the temperature-conducting member 16 abuts against the sample to realize heat exchange between the sample and the temperature-conducting bracket 14. In this way, through the temperature-conducting bracket 14, and in combination with the temperature-conducting member 16 abutting against the clamped sample, the temperature-conducting bracket 14 connected to the external cold source can effectively exchange heat with the sample, so that the temperature of the clamped sample is kept at a low temperature state, and the increase and change of the sample temperature is better avoided. Moreover, the temperature conducting robot 1 has a compact overall structure and small size, which can better meet the requirements of smart operation in a narrow space and has an ingenious design.

[0031] like Figure 1 As shown, the thermal conductive member 16 is an elastic thermal conductive ring, one end of which is connected to the thermal conductive bracket 14, and the other end is suspended and extended to abut against the sample. Specifically, the interior of the thermal conductive ring is hollow and can undergo elastic deformation, so that when clamping the sample, the thermal conductive ring can undergo elastic deformation under force to maintain reliable contact with the sample. In addition, the setting of the thermal conductive ring can have a larger contact area with the sample. In this way, through the thermal conductive ring, heat conduction between the sample and the thermal conductive bracket 14 can be better achieved.

[0032] like Figures 1 to 3As shown, in some embodiments, the clamping assembly 13 includes a tongue 131, a reset member 132 and a guide pin 133. The tongue 131 is movably connected to the thermal conductive support 14 through the connecting shaft 130, and the tongue 131 includes a clamping end 1311 for abutting the sample and a driving end 1312 for connecting with the driving assembly 12; the reset member 132 is used to drive the tongue 131 to maintain the clamping state, and the reset member 132 is arranged between the thermal conductive support 14 and the driving end 1312; one end of the guide pin 133 is fixed to the thermal conductive support 14, and the other end of the guide pin 133 extends in the air; wherein the driving end 1312 is inserted into the body 11 and connected to the driving assembly 12, and the sample is clamped between the clamping end 1311 and the guide pin 133. Specifically, the tongue 131 is movably connected to the thermal conductive support 14 through the connecting shaft 130, so that it can move with the connecting shaft 130 as the rotation support point, so as to realize the opening or clamping movement of the tongue 131. In the embodiment of the utility model, a reset member 132 is provided between the thermal conductive support 14 and the driving end 1312, and the reset member 132 is optionally provided as a spring capable of elastic deformation, and the clamping end 1311 of the latch 131 is driven to remain closed under the action of the driving force generated by the reset member 132, so as to clamp the sample. Under the action force generated by the driving assembly 12, the reset member 132 is compressed, so that the clamping end 1311 of the latch 131 is opened, and the sample is loosened. One end of the guide pin 133 is fixed to the thermal conductive support 14 by a threaded connection, and the suspended end of the guide pin 133 is used to locate the clamped sample, and cooperate with the clamping end 1311 of the latch 131 to clamp the sample. Further, the suspended end of the guide pin 133 can be provided with a guide structure (such as a spherical surface or a straight inclined surface) to improve the accuracy of clamping with the sample.

[0033] like Figure 2 As shown, in some embodiments, a central hole 161 is provided on the thermal conductive member 16, and one end of the guide pin 133 movably passes through the central hole 161 and is connected to the thermal conductive bracket 14. In this way, the guide pin 133 is arranged at the central position of the thermal conductive member 16, so that the thermal conductive member 16 surrounds the positioning pin, and when the sample is placed on the guide pin 133, the thermal conductive member 16 always keeps in contact with the sample, and there is no need to adjust the position of the clamped sample, thereby reliably realizing the heat conduction exchange between the sample and the thermal conductive member 16.

[0034] like Figure 2 and Figure 3As shown, in some embodiments, the thermal insulation structure 15 includes a thermal insulation connector 151 and a thermal insulation ball 152. The thermal insulation connector 151 is inserted between the thermal conductive bracket 14 and the body 11, and the thermal insulation connector 151 is used to connect the thermal conductive bracket 14 to the body 11, and keep the two separated but not in direct contact. In this way, the thermal conductive bracket 14 is installed on the body 11 through the thermal insulation connector 151, and the heat conduction between the two can be reduced, which can better avoid the temperature change of the body 11 affecting the temperature of the thermal conductive bracket 14. Optionally, the thermal insulation connector 151 is a bolt made of polyetheretherketone material with good temperature resistance and low thermal conductivity, so that the reliable connection between the thermal conductive bracket 14 and the body 11 can be achieved and the heat conduction can be reduced. At the same time, a thermal insulation ball 152 is also set between the thermal conductive bracket 14 and the body 11. The thermal insulation ball 152 is used to support the thermal conductive bracket 14 to improve the stability of the thermal conductive bracket 14. Furthermore, the insulation ball 152 is made of a ceramic material with low thermal conductivity, which can reduce the heat conduction between the thermal conductive bracket 14 and the body 11 caused by the insulation ball 152 .

[0035] like Figure 1 and Figure 2 As shown, in some embodiments, in order to improve the reliability of the connection between the thermal conductive bracket 14 and the body 11, a plurality of thermal insulation connectors 151 and thermal insulation balls 152 may be provided, and each thermal insulation connector 151 and each thermal insulation ball 152 may be provided at intervals and evenly distributed. In this way, the thermal conductive bracket 14 can be stably connected to the body 11 through the connection and support provided by the plurality of thermal insulation connectors 151 and the plurality of thermal insulation balls 152, thereby improving the reliability of the use performance.

[0036] like Figure 2 and Figure 3 As shown, in some embodiments, the body 11 includes a shell 111 and a thermal insulation bracket 112. A accommodating cavity 1110 is formed inside the shell 111, and the thermal insulation bracket 112 is arranged in the accommodating cavity 1110. Among them, the driving component 12 is installed in the accommodating cavity 1110, and the driving component 12 includes a driving shaft 121, and the driving shaft 121 is rotatably connected to the thermal insulation bracket 112 and connected to the driving end 1312. Specifically, the thermal insulation bracket 112 is made of a material with low temperature conductivity, so that the influence of the low temperature environment on the rotation of the driving shaft 121 that is movably arranged on the thermal insulation bracket 112 can be reduced. At the same time, the thermal insulation bracket 112 provides active support for the driving shaft 121, so as to improve the stability of the rotation of the driving shaft 121, thereby realizing the reliable driving of the opening or closing clamping movement of the latch 131.

[0037] like Figure 2 and Figure 3As shown, in some embodiments, the drive assembly 12 also includes a drive member 122 and a coupling 123, the rotating shaft of the drive member 122 is connected to the drive shaft 121 through the coupling 123, and a thermal insulation bearing 124 is provided on the thermal insulation bracket 112, and the drive shaft 121 is penetrated by the thermal insulation bearing 124. The drive member 122 can be a motor capable of providing rotational motion. In this way, the coaxiality correction between the drive member 122 and the drive shaft 121 is realized through the connection of the coupling 123. In addition, the drive member 122 also includes a code disk and a sensor, and the zero point positioning of the temperature-conducting manipulator 1 and the real-time monitoring and correction of the motion are realized through the cooperation of the code disk and the sensor. The drive shaft 121 is supported by the thermal insulation bearing 124, which can further improve the stability and accuracy of the rotation of the drive shaft 121. At the same time, the thermal insulation bearing 124 is made of a ceramic material with low thermal conductivity, which can play a role in heat insulation and reduce the influence of low temperature in the working environment on the overall rotation.

[0038] like Figures 2 to 4 As shown, in some embodiments, a roller 125 for contacting with the driving end 1312 is eccentrically arranged on the driving shaft 121. In this way, the eccentrically arranged roller 125 moves eccentrically under the drive of the driving shaft 121, so that it can contact or separate with the driving end 1312 on the tongue 131, thereby realizing that when the roller 125 contacts the driving end 1312, the clamping end 1311 of the tongue 131 can be opened (refer to Figure 4 ), when the roller 125 is separated from the driving end 1312 and does not abut, the clamping end 1311 of the latch tongue 131 can be closed (refer to Figure 3 ). At the same time, the setting of the roller 125 makes the contact transmission between the roller 125 and the clamping end 1311 a rolling friction contact, which reduces the friction between the two and improves the stability and service life of the drive. In addition, in order to accurately control the rotation of the drive shaft 121, a limit pin 126 for limiting the rotation range of the drive shaft 121 is also used. A limit slot 113 is provided on the thermal insulation bracket 112, one end of the limit pin 126 is connected to the drive shaft 121, and the other end of the limit pin 126 is located in the limit slot 113. The length of the limit slot 113 is set according to the ability to limit the drive shaft 121 within a set rotation angle range. In this way, the limit pin 126 moves in the limit slot 113 and touches the two ends of the limit slot in the length direction to achieve the limit, and then the rotation direction is adjusted to control the opening or closing movement of the control tongue 131. In the embodiment of the utility model, the limiting groove 113 is disposed to control the limiting pin 126 to reciprocate within a range of 90°.

[0039] The present invention also provides an electron microscope detection system in an embodiment, including a detection device and a temperature conducting manipulator 1 as any one of the above items. The temperature conducting manipulator 1 is arranged adjacent to or connected to the detection device. The detection device can be an electron beam as a light source. The electron beam emitted by the electron gun passes through a condenser along the optical axis of the mirror body in a vacuum channel, and is converged into a sharp, bright and uniform light spot by the condenser, which is irradiated on the sample in the sample chamber; the electron beam after passing through the sample carries the structural information inside the sample, and the amount of electrons passing through the dense part of the sample is small, and the amount of electrons passing through the sparse part is large; after the convergence and focusing of the objective lens and the primary magnification, the electron beam enters the lower intermediate lens and the first and second projection lenses for comprehensive magnification and imaging, and the magnified electronic image is finally projected on the fluorescent screen in the observation room, and the fluorescent screen converts the electronic image into a visible light image for observation by the user. The sample to be detected is transported to the detection device for detection by the temperature conducting manipulator 1, and after the detection is completed, the sample is transported away from the detection device by the temperature conducting manipulator 1. Since the above-mentioned temperature conducting manipulator 1 can effectively maintain the clamped sample at a low temperature, the electron microscope detection system can effectively reduce the impact of sample temperature changes on the detection results by adopting the above-mentioned temperature conducting manipulator 1, thereby improving the accuracy of the sample detection results. In addition, the temperature conducting manipulator 1 has a small overall size and high movement accuracy, which can meet the needs of narrow spaces and high position accuracy requirements.

[0040] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A temperature conducting robot, characterized in that: include: A main body, in which a driving assembly is arranged; A clamping assembly, used for clamping a sample to be detected, wherein the driving assembly drives the clamping assembly to move so as to clamp or release the sample; A thermal conductive bracket, connected to one end of the body via a thermal insulation structure, the thermal conductive bracket is used to connect to an external cold source to at least perform heat exchange with the clamped sample, and the clamping assembly is connected to the thermal conductive bracket; Wherein, the thermal conductive support is also provided with a thermal conductive component which abuts against the clamped sample.

2. The temperature conducting robot according to claim 1, characterized in that: The temperature conducting member is an elastic temperature conducting ring, one end of which is connected to the temperature conducting bracket, and the other end of which is suspended and extends to abut against the sample.

3. The temperature conducting robot according to claim 1, characterized in that: The clamping assembly comprises: A latch tongue, movably connected to the temperature conducting bracket via a connecting shaft, the latch tongue comprising a clamping end for abutting against the sample and a driving end for connecting with the driving assembly; A reset member, used for driving the latch to maintain a clamping state, the reset member being arranged between the thermal conductive bracket and the driving end; A guide pin, one end of which is fixed on the thermal conductive bracket, and the other end of which is suspended and extended; Wherein, the driving end is inserted into the body and connected to the driving component, and the sample is clamped between the clamping end and the guide pin.

4. The temperature conducting robot according to claim 3, characterized in that: The heat conducting component is provided with a central hole, and one end of the guide pin movably passes through the central hole and is connected with the heat conducting bracket.

5. The temperature conducting robot according to any one of claims 1 to 4, characterized in that: The thermal insulation structure comprises: A thermal insulation connector is provided between the thermal conductive bracket and the main body, and is used to connect the thermal conductive bracket to the main body and space them apart; The thermal insulation ball is used to support the thermal conductive bracket, and the thermal insulation ball is arranged between the thermal conductive bracket and the body.

6. The temperature conducting robot according to claim 5, characterized in that: The thermal insulation connectors and the thermal insulation balls are provided in plurality, respectively, and the thermal insulation connectors and the thermal insulation balls are arranged at intervals and evenly distributed.

7. The temperature conducting robot according to claim 3, characterized in that: The body comprises: A housing having a receiving cavity formed therein; A thermal insulation bracket, arranged in the accommodating cavity; Wherein, the driving assembly is installed in the accommodating cavity, and the driving assembly includes a driving shaft, and the driving shaft is rotatably connected to the thermal insulation bracket and connected to the driving end.

8. The temperature conducting robot according to claim 7, characterized in that: The driving assembly further comprises a driving member and a coupling, wherein the rotating shaft of the driving member is connected to the driving shaft via the coupling; Wherein, a temperature-insulating bearing is arranged on the temperature-insulating bracket, and the driving shaft is passed through the temperature-insulating bearing.

9. The temperature conducting robot according to claim 7, characterized in that: The driving shaft is eccentrically provided with a roller for abutting against the driving end and a limit pin for limiting the rotation range of the driving shaft. The thermal insulation bracket is provided with a limit slot, one end of the limit pin is connected to the driving shaft, and the other end of the limit pin is located in the limit slot.

10. An electron microscope detection system, characterized in that: It comprises a detection device and a temperature conducting robot as described in any one of claims 1 to 9.

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