Sheet body neatening device

Abstract

The utility model discloses a sheet body normalizing device which comprises a first conveying line, a second conveying line, a first normalizing mechanism and a second normalizing mechanism, the first normalizing mechanism is arranged on a normalizing station of the first conveying line, and the second normalizing mechanism is arranged on a normalizing station of the second conveying line. The first neatening mechanism comprises a first neatening part, a second neatening part and a first driving assembly, the second neatening mechanism comprises a third neatening part, a fourth neatening part and a second driving assembly, each of the second neatening part and the third neatening part comprises a plurality of neatening wheels arranged at intervals in the first direction, and the third neatening part is arranged above the second neatening part; the normalizing wheels of the third normalizing part and the normalizing wheels of the second normalizing part are arranged in a staggered manner in the first direction. According to the wafer body neatening device, the neatening wheels of the second neatening part and the third neatening part are arranged in the first direction in a staggered mode, the installation distance between the first conveying line and the second conveying line can be reduced, the overall structure of the silicon wafer conveying line is more compact, and the occupied space is small.

Description

Technical Field

[0001] The present application belongs to the technical field of sheet production equipment, and in particular, relates to a sheet regularization device. Background Art

[0002] In the process of processing wafers (such as silicon wafers, battery cells, etc.), in order to improve production efficiency, two conveyor lines arranged side by side are usually set up to convey the wafers simultaneously. Each conveyor line is equipped with a regularizing mechanism, which regularizes the wafers conveyed on the conveyor line.

[0003] The existing straightening mechanism usually adopts straightening rollers or straightening belts on both sides of each conveyor line, which has a high processing cost; and a large space needs to be reserved between the two conveyor lines to install the straightening rollers or straightening belts, which occupies a large space. Utility Model Content

[0004] The purpose of the present application is to provide a wafer aligning device to solve the problems of high processing cost and large occupied space in the aligning mechanism of the silicon wafer conveyor line in the prior art.

[0005] To achieve this goal, this application adopts the following technical solutions:

[0006] A sheet tidying device comprises a first conveying line, a second conveying line, a first tidying mechanism and a second tidying mechanism, wherein:

[0007] The first conveyor line and the second conveyor line are both configured to convey the sheet body along the first direction, the first conveyor line and the second conveyor line are arranged side by side along the second direction, the first direction is perpendicular to the second direction, a first tidying station is arranged on the conveying path of the first conveyor line, and a second tidying station is arranged on the conveying path of the second conveyor line;

[0008] The first tidying mechanism is arranged at the first tidying station, the first tidying mechanism comprises a first tidying part, a second tidying part and a first driving assembly, the first tidying part and the second tidying part are correspondingly arranged at opposite sides of the first tidying station in the second direction, the driving end of the first driving assembly is connected to the first tidying part and / or the second tidying part, and the first driving assembly is configured to drive the first tidying part and the second tidying part to move closer to or away from each other;

[0009] The second tidying mechanism is arranged at the second tidying station, the second tidying mechanism comprises a third tidying part, a fourth tidying part and a second driving assembly, the third tidying part and the fourth tidying part are arranged on opposite sides of the second tidying station in the second direction, the driving end of the second driving assembly is connected to the third tidying part and / or the fourth tidying part, and the second driving assembly is configured to drive the third tidying part and the fourth tidying part to move closer to or away from each other;

[0010] The second regularization part and the third regularization part each include a plurality of regularization wheels arranged at intervals along the first direction, the third regularization part is arranged above the second regularization part, and the regularization wheels of the third regularization part and the regularization wheels of the second regularization part are arranged alternately in the first direction;

[0011] The first and second regularization parts regularize the sheet at the first regularization station with regularization wheels; the third regularization part regularizes the sheet at the second regularization station with regularization wheels and the fourth regularization part.

[0012] The wafer aligning device proposed in the present application aligns the wafer at the first aligning station by a first aligning mechanism, and aligns the wafer at the second aligning station by a second aligning mechanism; at the same time, the third aligning part is arranged above the second aligning part, and the aligning wheels of the second aligning part and the third aligning part are staggered in the first direction, so that only one row of aligning wheel installation space is required between the first conveyor line and the second conveyor line, which can reduce the installation spacing between the first conveyor line and the second conveyor line, making the overall structure of the silicon wafer conveyor line more compact and occupying less space.

[0013] In some embodiments, the first conveyor line includes a first conveyor frame and a first conveyor belt, the first tidying mechanism includes a first mounting frame, the first conveyor belt is rotatably mounted on the first conveyor frame, the first mounting frame is arranged below the first conveyor frame, the first tidying section includes a first movable plate and a first tidying piece, the first movable plate is movably mounted on the first mounting frame along the second direction, the first tidying piece is mounted on the first movable plate, the second tidying section includes a second movable plate, the second movable plate is movably mounted on the first mounting frame along the second direction, a plurality of tidying wheels are mounted on the second movable plate, and the driving end of the first driving assembly is connected to the first movable plate and the second movable plate.

[0014] By arranging the first mounting frame below the first conveyor frame, the space at the first conveyor line can be reasonably utilized, providing a first tidying mechanism with a compact structure, small space occupation and reasonable layout; the first driving component drives the first movable plate and the second movable plate to approach or move away from each other, thereby driving several tidying wheels on the second movable plate and the first tidying piece to approach or move away from each other, so as to regularize the sheet body at the first tidying station, providing a first tidying part and a second tidying part with a simple structure and low cost.

[0015] In some embodiments, the first driving assembly includes a first driving member, a first cam follower, a second cam follower and a first rotating disk, the fixed end of the first driving member is mounted on the first mounting frame, the driving end of the first driving member is connected to the first rotating disk, the first driving member is configured to drive the first rotating disk to rotate, the first rotating disk is centrally symmetrically provided with a first track groove and a second track groove, the first end of the first cam follower is mounted on the first movable plate, the second end of the first cam follower is located in the first track groove, the first end of the second cam follower is mounted on the second movable plate, and the second end of the second cam follower is located in the second track groove;

[0016] The first driving member drives the first turntable to rotate, and then drives the first movable plate and the second movable plate to synchronously approach or move away from the first conveyor belt through the first cam follower and the second cam follower.

[0017] Through the cooperation of the first driving member, the first cam follower, the second cam follower and the first turntable, the rotational motion of the first turntable is converted into a linear motion of the first movable plate and the second movable plate synchronously approaching or moving away from the first conveyor belt, providing a first driving component with high transmission accuracy, stability and reliability, and long service life; at the same time, it is achieved that the first movable plate and the second movable plate are driven synchronously to approach or move away from the first conveyor belt by one driving member, which has a simple structure and low cost.

[0018] In some embodiments, the first regularization part also includes a first connecting plate, which is mounted on the first movable plate with an adjustable height, and the first regularization piece is mounted on the first connecting plate. The second regularization part also includes a second connecting plate, which is mounted on the second movable plate with an adjustable height, and a plurality of regularization wheels are installed on the second connecting plate at intervals along the first direction.

[0019] By setting a first connecting plate and a second connecting plate, and installing the first connecting plate on the first movable plate with adjustable height, and installing the second connecting plate on the second movable plate with adjustable height, height adjustment of several aligning wheels of the first aligning part and the second aligning part is achieved.

[0020] In some embodiments, the first aligning member includes a plurality of aligning wheels installed on the first movable plate at intervals along the first direction;

[0021] Alternatively, the first regulated member comprises a regulated plate mounted on the first movable plate extending along the first direction;

[0022] Alternatively, the first tidying member comprises a tidying belt mounted on the first movable plate, and the tidying belt is configured to tidy and assist in conveying the sheet.

[0023] By installing a number of aligning wheels at intervals on the first movable plate, a first aligning piece with low friction and long service life is provided; by installing a aligning plate on the first movable plate, a first aligning piece with simple structure, easy implementation and low cost is provided; by installing a aligning belt on the first movable plate, a first aligning piece with both aligning and auxiliary conveying functions is provided.

[0024] In some embodiments, the second conveyor line includes a second conveyor frame and a second conveyor belt, the second tidying mechanism includes a second mounting frame, the second conveyor belt is rotatably mounted on the second conveyor frame, the second mounting frame is arranged above the second conveyor frame, the third tidying part includes a third movable plate, the third movable plate is movably mounted on the second mounting frame along the second direction, a plurality of tidying wheels are mounted on the third movable plate, the fourth tidying part includes a fourth movable plate and a second tidying piece, the fourth movable plate is movably mounted on the second mounting frame along the second direction, the second tidying piece is mounted on the fourth movable plate, and the driving end of the second driving assembly is connected to the third movable plate and the fourth movable plate.

[0025] By arranging the second mounting frame above the second conveyor frame, the space above the second conveyor line can be reasonably utilized, providing a second regularizing mechanism with a compact structure and a reasonable layout; the third movable plate and the fourth movable plate are driven to approach or move away from each other by the second driving component, thereby driving several regularizing wheels and the second regularizing piece on the third movable plate to approach or move away from each other, so as to regularize the sheet at the second regularizing station, providing a third regularizing part and a fourth regularizing part with a simple structure and low cost.

[0026] In some embodiments, the second driving assembly includes a second driving member, a third cam follower, a fourth cam follower and a second rotating disk, the fixed end of the second driving member is mounted on the second mounting frame, the driving end of the second driving member is connected to the second rotating disk, the second driving member is configured to drive the second rotating disk to rotate, the second rotating disk is symmetrically provided with a third track groove and a fourth track groove, the first end of the third cam follower is mounted on the third movable plate, the second end of the third cam follower is located in the third track groove, the first end of the fourth cam follower is mounted on the fourth movable plate, and the second end of the fourth cam follower is located in the fourth track groove;

[0027] The second driving member drives the second turntable to rotate, and then drives the third movable plate and the fourth movable plate to synchronously approach or move away from the second conveyor belt through the third cam follower and the fourth cam follower.

[0028] Through the cooperation of the second driving member, the third cam follower, the fourth cam follower and the second turntable, the rotational motion of the second turntable is converted into a linear motion of the third movable plate and the fourth movable plate synchronously approaching or moving away from the second conveyor belt, providing a second driving component with high transmission accuracy, stability and reliability and long service life; at the same time, it is achieved that the third movable plate and the fourth movable plate are driven synchronously to approach or move away from the second conveyor belt by one driving member, which has a simple structure and low cost.

[0029] In some embodiments, the third regularization part also includes a third connecting plate, which can be fixed on the third movable plate with an adjustable height, and a plurality of regularization wheels are installed on the third connecting plate at intervals along the first direction. The fourth regularization part also includes a fourth connecting plate, which can be fixed on the fourth movable plate with an adjustable height, and the second regularization piece is installed on the fourth connecting plate.

[0030] By setting a third connecting plate and a fourth connecting plate, and installing the third connecting plate on the third movable plate with adjustable height, and installing the fourth connecting plate on the fourth movable plate with adjustable height, height adjustment of several aligning wheels of the second aligning piece and the third aligning part is achieved.

[0031] In some embodiments, the second aligning member includes a plurality of aligning wheels installed on the fourth movable plate at intervals along the first direction;

[0032] Alternatively, the second structuring member comprises a structuring plate mounted on the fourth movable plate extending along the first direction;

[0033] Alternatively, the second tidying member comprises a tidying belt mounted on the fourth movable plate, and the tidying belt is configured to tidy and assist in conveying the sheet.

[0034] By installing a number of aligning wheels at intervals on the fourth movable plate, a second aligning piece with low friction and long service life is provided; by installing a aligning plate on the fourth movable plate, a second aligning piece with simple structure, easy implementation and low cost is provided; by installing a aligning belt on the fourth movable plate, a second aligning piece with both aligning and auxiliary conveying functions is provided.

[0035] In some embodiments, each regularizing wheel is rotatably mounted on an axle, and the axle is fixed to the corresponding movable plate;

[0036] Alternatively, each aligning wheel is fixedly mounted on a rotating shaft, and the rotating shaft is rotatably mounted on a corresponding movable plate. The first aligning part, the second aligning part, the third aligning part and the fourth aligning part also include a third driving assembly, and the third driving assembly is configured to drive all the rotating shafts on the same aligning part to rotate synchronously, so as to drive all the aligning wheels on the same aligning part to rotate synchronously.

[0037] By fixing the wheel axle on the corresponding movable plate, each tidying wheel can be rotatably installed on the wheel axle, providing a non-powered tidying wheel installation method with a simple structure and low cost; by rotatably installing the wheel axle on the corresponding movable plate, each tidying wheel is fixed on the rotating shaft, and the third drive component drives all the rotating shafts of the same tidying part to rotate synchronously, providing a powered tidying wheel installation method; the tidying wheel is realized to have an auxiliary conveying function while tidying.

[0038] In some embodiments, the third driving assembly includes a third driving member, a first magnetic wheel assembly, a driving shaft, and a plurality of sets of second magnetic wheel assemblies, the driving shaft is rotatably mounted on a corresponding movable plate, and the third driving member is configured to drive the driving shaft to rotate along its own axis through the first magnetic wheel assembly;

[0039] Each set of second magnetic wheel assemblies corresponds to a rotating shaft, and each set of second magnetic wheel assemblies includes a first magnetic wheel and a second magnetic wheel. The first magnetic wheel is installed on the driving shaft, and the second magnetic wheel is installed on the rotating shaft. The third driving member drives the driving shaft to rotate along its own axis, so as to drive the corresponding rotating shaft to rotate through the cooperation of the first magnetic wheel and the second magnetic wheel.

[0040] Through the cooperation of the third driving member, the first magnetic wheel assembly, the driving shaft and several sets of second magnetic wheel assemblies, it is possible to drive all the rotating shafts of the same regular part to rotate synchronously, providing a third driving assembly with contactless power transmission, low noise, low vibration and high efficiency.

[0041] In some embodiments, the first magnetic wheel assembly includes a third magnetic wheel and a fourth magnetic wheel, the third driving member is a motor, the third magnetic wheel is installed at the output end of the motor, the fourth magnetic wheel is installed at one end of the drive shaft, and the third magnetic wheel and the fourth magnetic wheel cooperate to transmit power.

[0042] Through the cooperation of the third magnetic wheel and the fourth magnetic wheel, the power of the motor is transmitted to the drive shaft, so that the drive shaft rotates along its own axis. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 It is a schematic diagram of the three-dimensional structure of the sheet regularization device provided in an embodiment of the present application;

[0044] Figure 2 It is a schematic installation diagram of the first perspective of the first regularizing mechanism and the second regularizing mechanism of the sheet regularizing device provided in an embodiment of the present application.

[0045] Figure 3 It is a schematic installation diagram of a first regularizing mechanism and a second regularizing mechanism of a sheet regularizing device provided in an embodiment of the present application from a second viewing angle;

[0046] Figure 4It is a schematic diagram of the structure of the first regularization part, the second regularization part, the third regularization part and the fourth regularization part of the sheet regularization device provided in an embodiment of the present application;

[0047] Figure 5 This is a front view of the first turntable of the sheet tidying device provided in an embodiment of the present application;

[0048] Figure 6 is a schematic diagram of the three-dimensional structure of the third driving assembly of the sheet tidying device provided in an embodiment of the present application from a first viewing angle;

[0049] Figure 7 It is a schematic diagram of the three-dimensional structure from a second perspective of the third driving component of the sheet aligning device provided in an embodiment of the present application.

[0050] Figures 1 to 7 The following reference numerals are included:

[0051] A first conveyor line 10, a first tidying station 11, a first conveyor frame 12, a first conveyor belt 13, and a first mounting frame 14;

[0052] A second conveyor line 20, a second tidying station 21, a second conveyor frame 22, a second conveyor belt 23, and a second mounting frame 24;

[0053] A first aligning mechanism 30, a first aligning portion 31, a first movable plate 310, a first aligning member 311, a first connecting plate 312, a second aligning portion 32, a second movable plate 320, a second connecting plate 321, a first driving assembly 33, a first driving member 330, a first cam follower 331, a second cam follower 332, a first rotating disk 333, a first track groove 3330, and a second track groove 3331;

[0054] The second regularizing mechanism 40, the third regularizing portion 41, the third movable plate 410, the third connecting plate 411, the fourth regularizing portion 42, the fourth movable plate 420, the second regularizing member 421, the fourth connecting plate 422, the second driving assembly 43, the second driving member 430, the third cam follower 431, the fourth cam follower 432, the second rotating disk 433, the third track groove 4330, and the fourth track groove 4331;

[0055] Sheet 50;

[0056] Regular wheel 60;

[0057] The third driving member 70 , the driving shaft 71 , the first magnetic wheel 72 , the second magnetic wheel 73 , the third magnetic wheel 74 , and the fourth magnetic wheel 75 . DETAILED DESCRIPTION

[0058] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0059] In the process of silicon wafer processing, in order to improve production efficiency, two conveyor lines arranged side by side are usually set up to convey silicon wafers simultaneously. Each conveyor line is equipped with a regularizing mechanism, which regularizes the silicon wafers conveyed on the conveyor line.

[0060] The existing straightening mechanism usually adopts straightening rollers or straightening belts on both sides of each conveyor line, which has a high processing cost; and a large space needs to be reserved between the two conveyor lines to install the straightening rollers or straightening belts, which occupies a large space.

[0061] Therefore, the present application provides a sheet regularization device, see Figure 1 and Figure 2 As shown, the sheet tidying device provided in the embodiment of the present application includes a first conveyor line 10, a second conveyor line 20, a first tidying mechanism 30 and a second tidying mechanism 40, wherein: the first conveyor line 10 and the second conveyor line 20 are both configured to be arranged along a first direction ( Figure 1 The sheet 50 is transported along the X direction in the first conveying line 10 and the second conveying line 20 along the second direction ( Figure 1The first and second directions are perpendicular to each other, a first tidying station 11 is arranged on the conveying path of the first conveyor line 10, and a second tidying station 21 is arranged on the conveying path of the second conveyor line 20; a first tidying mechanism 30 is arranged at the first tidying station 11, the first tidying mechanism 30 includes a first tidying part 31, a second tidying part 32 and a first driving assembly 33, the first tidying part 31 and the second tidying part 32 are correspondingly arranged on opposite sides of the first tidying station 11 in the second direction, a driving end of the first driving assembly 33 is connected to the first tidying part 31 and / or the second tidying part 32, and the first driving assembly 33 is configured to drive the first tidying part 31 and the second tidying part 32 to move closer to or away from each other; a second tidying mechanism 40 is arranged at the second tidying station 21, the second tidying mechanism 40 includes a third tidying part 41, a fourth tidying part 42 and a second driving assembly 43. 3. The third regularizing part 41 and the fourth regularizing part 42 are correspondingly arranged on the opposite sides of the second regularizing station 21 in the second direction. The driving end of the second driving component 43 is connected to the third regularizing part 41 and / or the fourth regularizing part 42. The second driving component 43 is configured to drive the third regularizing part 41 and the fourth regularizing part 42 to move closer to or away from each other. The second regularizing part 32 and the third regularizing part 41 both include a plurality of regularizing wheels 60 arranged at intervals along the first direction. The third regularizing part 41 is arranged above the second regularizing part 32. The regularizing wheels 60 of the third regularizing part 41 and the regularizing wheels 60 of the second regularizing part 32 are staggered in the first direction. The regularizing wheels 60 on the first regularizing part 31 and the second regularizing part 32 regularize the sheet body 50 at the first regularizing station 11. The regularizing wheels 60 on the third regularizing part 41 and the fourth regularizing part 42 regularize the sheet body 50 at the second regularizing station 21.

[0062] It can be seen that the sheet tidying device proposed in the present application tidyes the sheet 50 at the first tidying station 11 by the first tidying mechanism 30, and tidyes the sheet 50 at the second tidying station 21 by the second tidying mechanism 40; at the same time, the third tidying part 41 is arranged above the second tidying part 32, and the tidying wheels 60 of the second tidying part 32 and the third tidying part 41 are staggered in the first direction, so that only one row of tidying wheel installation space is required between the first conveyor line 10 and the second conveyor line 20, which can reduce the installation spacing between the first conveyor line 10 and the second conveyor line 20, so that the overall structure of the silicon wafer conveyor line is more compact and occupies less space.

[0063] As an embodiment, the first conveyor line 10 includes a first conveyor frame 12 and a first conveyor belt 13, the first tidying mechanism 30 includes a first mounting frame 14, the first conveyor belt 13 is rotatably mounted on the first conveyor frame 12, the first mounting frame 14 is arranged below the first conveyor frame 12, the first tidying section 31 includes a first movable plate 310 and a first tidying piece 311, the first movable plate 310 can be movably mounted on the first mounting frame 14 along the second direction, the first tidying piece 311 is mounted on the first movable plate 310, the second tidying section 32 includes a second movable plate 320, the second movable plate 320 can be movably mounted on the first mounting frame 14 along the second direction, a plurality of tidying wheels 60 are installed on the second movable plate 320, and the driving end of the first driving assembly 33 is connected to the first movable plate 310 and the second movable plate 320.

[0064] Specifically, the first movable plate 310 and the second movable plate 320 are both movably mounted on the first mounting frame 14 along the second direction via a support guide pair consisting of a guide rail and a slider to ensure the stability and reliability of the movement of the first movable plate 310 and the second movable plate 320 .

[0065] It can be seen that by arranging the first mounting frame 14 below the first conveying frame 12, the space at the first conveyor line 10 can be reasonably utilized, providing a first tidying mechanism 30 with a compact structure, small space occupation and reasonable layout; the first driving component 33 drives the first movable plate 310 and the second movable plate 320 to approach or move away from each other, thereby driving the several tidying wheels 60 and the first tidying piece 311 on the second movable plate 320 to approach or move away from each other, so as to regularize the sheet body 50 at the first tidying station 11, providing a first tidying part 31 and a second tidying part 32 with a simple structure and low cost.

[0066] See also Figure 1 , Figures 3 to 5As shown in the figure, as an embodiment, the first driving assembly 33 includes a first driving member 330, a first cam follower 331, a second cam follower 332 and a first rotating disk 333. The fixed end of the first driving member 330 is mounted on the first mounting frame 14, and the driving end of the first driving member 330 is connected to the first rotating disk 333. The first driving member 330 is configured to drive the first rotating disk 333 to rotate. The first rotating disk 333 is centrally symmetrically provided with a first track groove 3330 and a second track groove 3331. The first cam follower 33 The first end of the first cam follower 331 is installed on the first movable plate 310, the second end of the first cam follower 331 is located in the first track groove 3330, the first end of the second cam follower 332 is installed on the second movable plate 320, and the second end of the second cam follower 332 is located in the second track groove 3331; the first driving member 330 drives the first rotating disk 333 to rotate, and then drives the first movable plate 310 and the second movable plate 320 to synchronously approach or move away from the first conveyor belt 13 through the first cam follower 331 and the second cam follower 332.

[0067] Specifically, the first driving member 330 is a motor, the first track groove 3330 and the second track groove 3331 are both arc grooves, and the corresponding cam follower maintains contact with the inner and outer walls of the arc groove when moving in the arc groove, and the distance between the center of the cam follower and the center of the first turntable 333 gradually increases clockwise or counterclockwise at each point on the moving path.

[0068] It can be seen that, through the cooperation of the first driving member 330, the first cam follower 331, the second cam follower 332 and the first turntable 333, the rotational motion of the first turntable 333 is converted into a linear motion of the first movable plate 310 and the second movable plate 320 synchronously approaching or moving away from the first conveyor belt 23, thereby providing a first driving component 33 with high transmission accuracy, stability and reliability, and long service life; at the same time, it is achieved that the first movable plate 310 and the second movable plate 320 are driven synchronously to approach or move away from the first conveyor belt 13 by a first driving member 330, which has a simple structure and low cost.

[0069] As an embodiment, the first regularizing portion 31 also includes a first connecting plate 312, which is mounted on the first movable plate 310 with an adjustable height, and the first regularizing piece 311 is mounted on the first connecting plate 312. The second regularizing portion 32 also includes a second connecting plate 321, which is mounted on the second movable plate 320 with an adjustable height, and a plurality of regularizing wheels 60 are installed on the second connecting plate 321 at intervals along the first direction.

[0070] Specifically, the first connecting plate 312 and the second connecting plate 321 are both provided with a first waist-shaped hole extending in the vertical direction, the first movable plate 310 and the second movable plate 320 are both horizontal plate-shaped, and the first mounting blocks are respectively fixed on the upper plate surfaces of the first movable plate 310 and the second movable plate 320, and the first mounting blocks are provided with a first threaded hole, and the first locking screw passes through the first waist-shaped hole on the first connecting plate 312 or the second connecting plate 321 and is locked in the first threaded hole of the corresponding first mounting block, so that the first connecting plate 312 is vertically installed on the first movable plate 312 and the second connecting plate 321 is vertically installed on the second movable plate 320, and the installation height of the first connecting plate 312 and the second connecting plate 321 can be adjusted by loosening the first locking screw.

[0071] It can be seen that by providing the first connecting plate 312 and the second connecting plate 321, and installing the first connecting plate 312 on the first movable plate 310 with an adjustable height, and installing the second connecting plate 321 on the second movable plate 320 with an adjustable height, the height adjustment of the plurality of regularizing wheels 60 of the first regularizing member 311 and the second regularizing portion 32 is achieved. After the sheet regularizing device is used for a long time, the surface of the regularizing wheel 60 in the first regularizing member 311 and the second regularizing portion 32 that is in direct contact with the sheet is prone to wear. After wear, the surface of the regularizing wheel 60 that is in direct contact with the sheet can be switched by adjusting the height of the first connecting plate 312 and the second connecting plate 321 to ensure the regularizing effect.

[0072] As an embodiment, the first regularizing member 311 includes a plurality of regularizing wheels installed on the first movable plate 310 at intervals along a first direction; by installing a plurality of regularizing wheels at intervals on the first movable plate 310, a first regularizing member 311 with low friction and long service life is provided.

[0073] As an embodiment, the first regularizing member 311 includes a regularizing plate installed on the first movable plate 310 extending along the first direction; by installing the regularizing plate on the first movable plate 310, a first regularizing member 311 with a simple structure, easy implementation and low cost is provided.

[0074] As an embodiment, the first aligning member 311 includes an aligning belt installed on the first movable plate 310, and the aligning belt is configured to align and assist in conveying the sheet. By installing the aligning belt on the first movable plate 310, a first aligning member 311 having both aligning and assisting conveying functions is provided.

[0075] See also Figure 1 and Figure 2As shown, as an embodiment, the second conveyor line 20 includes a second conveyor frame 22 and a second conveyor belt 23, the second tidying mechanism 40 includes a second mounting frame 24, the second conveyor belt 23 is rotatably mounted on the second conveyor frame 22, the second mounting frame 24 is arranged above the second conveyor frame 22, the third tidying section 41 includes a third movable plate 410, the third movable plate 410 can be movably mounted on the second mounting frame 24 along the second direction, and a plurality of tidying wheels 60 are installed on the third movable plate 410, the fourth tidying section 42 includes a fourth movable plate 420 and a second tidying piece 421, the fourth movable plate 420 can be movably mounted on the second mounting frame 24 along the second direction, the second tidying piece 421 is installed on the fourth movable plate 420, and the driving end of the second driving assembly 43 is connected to the third movable plate 410 and the fourth movable plate 420.

[0076] Specifically, the third movable plate 410 and the fourth movable plate 420 are both movably mounted on the second mounting frame 24 along the second direction via a support guide pair consisting of a guide rail and a slider to ensure the stability and reliability of the movement of the third movable plate 410 and the fourth movable plate 420 .

[0077] It can be seen that by arranging the second mounting frame 24 above the second conveyor frame 22, the space above the second conveyor line 20 can be reasonably utilized, providing a second tidying mechanism 40 with a compact structure and a reasonable layout; the third movable plate 410 and the fourth movable plate 420 are driven to approach or move away from each other by the second driving assembly 43, thereby driving the several tidying wheels and the second tidying piece 421 on the third movable plate 410 to approach or move away from each other, so as to regularize the sheet at the second tidying station 21, providing a third tidying part 41 and a fourth tidying part 42 with a simple structure and low cost.

[0078] See also Figure 1 , Figure 3 and Figure 4As shown, as an embodiment, the second driving assembly 43 includes a second driving member 430, a third cam follower 431, a fourth cam follower 432 and a second rotating disk 433. The fixed end of the second driving member 430 is mounted on the second mounting frame 24, and the driving end of the second driving member 430 is connected to the second rotating disk 433. The second driving member 430 is configured to drive the second rotating disk 433 to rotate. The second rotating disk 433 is symmetrically provided with a third track groove 4330 and a fourth track groove 4331. The third cam follower 431 is The first end is mounted on the third movable plate 410, the second end of the third cam follower 431 is located in the third track groove 4330, the first end of the fourth cam follower 432 is mounted on the fourth movable plate 420, and the second end of the fourth cam follower 432 is located in the fourth track groove 4331; the second driving member 430 drives the second turntable 433 to rotate, and then drives the third movable plate 410 and the fourth movable plate 420 to synchronously approach or move away from the second conveyor belt 23 through the third cam follower 431 and the fourth cam follower 432.

[0079] Specifically, the second driving member 430 is a motor, the third track groove 4330 and the fourth track groove 4331 are both arc grooves, and the corresponding cam follower maintains contact with the inner and outer walls of the arc groove when moving in the arc groove, and the distance between the center of the cam follower and the center of the second turntable 433 gradually increases clockwise or counterclockwise at each point on the moving path.

[0080] It can be seen that, through the cooperation of the second driving member 430, the third cam follower 431, the fourth cam follower 432 and the second turntable 433, the rotational motion of the second turntable 433 is converted into a linear motion of the third movable plate 410 and the fourth movable plate 420 synchronously approaching or moving away from the second conveyor belt 23, thereby providing a second driving component 43 with high transmission accuracy, stability and reliability, and long service life; at the same time, it is achieved that the third movable plate 410 and the fourth movable plate 420 are driven synchronously to approach or move away from the second conveyor belt 23 by a second driving member 430, which has a simple structure and low cost.

[0081] As an embodiment, the third regularizing portion 41 also includes a third connecting plate 411, which is fixed on the third movable plate 410 with an adjustable height, and a plurality of regularizing wheels 60 are installed on the third connecting plate 411 at intervals along the first direction. The fourth regularizing portion 42 also includes a fourth connecting plate 422, which is fixed on the fourth movable plate 420 with an adjustable height, and the second regularizing piece 421 is installed on the fourth connecting plate 422.

[0082] Specifically, the third connecting plate 411 and the fourth connecting plate 422 are both provided with a second waist-shaped hole extending in the vertical direction, the third movable plate 410 and the fourth movable plate 420 are also horizontal plate-shaped, and the lower plate surfaces of the third movable plate 410 and the fourth movable plate 420 are respectively fixed with second mounting blocks, and the second mounting blocks are provided with a second threaded hole, and the second locking screw passes through the second waist-shaped hole on the third connecting plate 411 or the fourth connecting plate 422 and is locked in the second threaded hole of the corresponding second mounting block, so that the third connecting plate 411 is vertically installed on the third movable plate 410 and the fourth connecting plate 422 is vertically installed on the fourth movable plate 420, and the installation height of the third connecting plate 411 and the fourth connecting plate 422 can be adjusted by loosening the second locking screw.

[0083] It can be seen that by providing the third connecting plate 411 and the fourth connecting plate 422, and installing the third connecting plate 411 on the third movable plate 410 with adjustable height, and installing the fourth connecting plate 422 on the fourth movable plate 420 with adjustable height, the height adjustment of the plurality of regularizing wheels of the second regularizing member 421 and the third regularizing portion 41 is achieved. Similarly, after the sheet regularizing device is used for a long time, the regularizing wheel surfaces in the second regularizing member 421 and the third regularizing portion 41 that are in direct contact with the sheet are prone to wear. After wear, the regularizing wheel surfaces that are in direct contact with the sheet can be switched by adjusting the height of the third connecting plate 411 and the fourth connecting plate 422 to ensure the regularizing effect.

[0084] As an embodiment, the second regularizing member 421 includes a plurality of regularizing wheels installed on the fourth movable plate 422 at intervals along the first direction; by installing a plurality of regularizing wheels at intervals on the fourth movable plate 422, a second regularizing member 421 with low friction and long service life is provided.

[0085] As an embodiment, the second regularizing member 421 includes a regularizing plate installed on the fourth movable plate 422 extending along the first direction; by installing the regularizing plate on the fourth movable plate 422, a second regularizing member 421 with a simple structure, easy implementation and low cost is provided.

[0086] As an embodiment, the second aligning member 421 includes an aligning belt mounted on the fourth movable plate 422, and the aligning belt is configured to align and assist in conveying the sheet. By installing the aligning belt on the fourth movable plate 422, a second aligning member 421 having both aligning and assisting conveying functions is provided.

[0087] See also Figures 1 to 3 As shown, as an embodiment, each tidying wheel 60 is rotatably mounted on an axle, and the axle is fixed on the corresponding movable plate.

[0088] It can be seen that by fixing the axle on the corresponding movable plate, each aligning wheel 60 can be rotatably installed on the axle, providing a non-powered aligning wheel installation method with a simple structure and low cost.

[0089] As an embodiment, each aligning wheel 60 is fixedly mounted on a rotating shaft, and the rotating shaft is rotatably mounted on a corresponding movable plate. The first aligning part 31, the second aligning part 32, the third aligning part 41 and the fourth aligning part 42 also include a third driving assembly, and the third driving assembly is configured to drive all the rotating shafts on the same aligning part to rotate synchronously, so as to drive all the aligning wheels on the same aligning part to rotate synchronously.

[0090] It can be seen that by rotatably mounting the wheel axle on the corresponding movable plate, each aligning wheel 60 is fixed on the rotating shaft, and the third drive assembly drives all the rotating shafts of the same aligning part to rotate synchronously, providing a powered aligning wheel installation method; the aligning wheel is realized to have an auxiliary conveying function while aligning.

[0091] See also Figure 6 and Figure 7 As shown, as an embodiment, the third driving assembly includes a third driving member 70, a first magnetic wheel assembly, a driving shaft 71 and a plurality of sets of second magnetic wheel assemblies, the driving shaft 71 is rotatably mounted on the corresponding movable plate, and the third driving member 70 is configured to drive the driving shaft to rotate along its own axis through the first magnetic wheel assembly;

[0092] Each set of second magnetic wheel assemblies corresponds to a rotating shaft, and each set of second magnetic wheel assemblies includes a first magnetic wheel 72 and a second magnetic wheel 73. The first magnetic wheel 72 is installed on the driving shaft 71, and the second magnetic wheel 73 is installed on the rotating shaft. The third driving member 70 drives the driving shaft 71 to rotate along its own axis, so as to drive the corresponding rotating shaft to rotate through the cooperation of the first magnetic wheel 72 and the second magnetic wheel 73.

[0093] It can be seen that through the cooperation of the third driving member 70, the first magnetic wheel assembly, the driving shaft 71 and several sets of second magnetic wheel assemblies, it is possible to drive all the rotating shafts of the same regular part to rotate synchronously, providing a third driving assembly with contactless power transmission, low noise, low vibration and high efficiency.

[0094] As an embodiment, the first magnetic wheel assembly includes a third magnetic wheel 74 and a fourth magnetic wheel 75. The third driving member 70 is a motor. The third magnetic wheel 74 is installed at the output end of the motor. The fourth magnetic wheel 75 is installed at one end of the driving shaft 71. The third magnetic wheel 74 and the fourth magnetic wheel 75 cooperate to transmit power.

[0095] It can be seen that, through the cooperation of the third magnetic wheel 74 and the fourth magnetic wheel 75 , the power of the motor is transmitted to the drive shaft 71 , so that the drive shaft 71 rotates along its own axis.

[0096] The present application provides a sheet tidying device having the following advantages:

[0097] 1) The installation distance between two adjacent conveyor lines is reduced, making the overall structure of the silicon wafer conveyor line more compact and occupying less space;

[0098] 2) The first and second regularization mechanisms make reasonable use of the space at the conveyor line, occupying a small space and having a reasonable layout;

[0099] 3) The first drive assembly and the second drive assembly adopt a transmission method of a turntable and two cam followers, which has high transmission accuracy, stability and reliability, and long service life.

[0100] 4) The aligning wheel has the dual functions of aligning and auxiliary conveying. At the same time, the aligning wheel transmits power contactlessly through the cooperation of the first magnetic wheel assembly and multiple sets of second magnetic wheel assemblies, with high transmission efficiency, low transmission noise and low transmission vibration.

[0101] The above embodiments are only to illustrate the basic principles and characteristics of the present application. The present application is not limited by the above examples. Without departing from the spirit and scope of the present application, the present application may be subject to various changes and modifications, which are within the scope of the present application to be protected. The scope of protection claimed in the present application is defined by the attached claims and their equivalents.

Claims

1. A sheet tidying device, characterized in that: The sheet tidying device comprises a first conveying line, a second conveying line, a first tidying mechanism and a second tidying mechanism, wherein: The first conveyor line and the second conveyor line are both configured to convey sheets along a first direction, the first conveyor line and the second conveyor line are arranged side by side along a second direction, the first direction is perpendicular to the second direction, a first tidying station is arranged on the conveying path of the first conveyor line, and a second tidying station is arranged on the conveying path of the second conveyor line; The first tidying mechanism is arranged at the first tidying station, the first tidying mechanism comprises a first tidying part, a second tidying part and a first driving assembly, the first tidying part and the second tidying part are arranged at opposite sides of the first tidying station in the second direction, the driving end of the first driving assembly is connected to the first tidying part and / or the second tidying part, and the first driving assembly is configured to drive the first tidying part and the second tidying part to move closer to or away from each other; The second tidying mechanism is arranged at the second tidying station, the second tidying mechanism comprises a third tidying part, a fourth tidying part and a second driving assembly, the third tidying part and the fourth tidying part are correspondingly arranged at opposite sides of the second tidying station in the second direction, the driving end of the second driving assembly is connected to the third tidying part and / or the fourth tidying part, and the second driving assembly is configured to drive the third tidying part and the fourth tidying part to move closer to or away from each other; The second regularization part and the third regularization part each include a plurality of regularization wheels arranged at intervals along the first direction, the third regularization part is arranged above the second regularization part, and the regularization wheels of the third regularization part and the regularization wheels of the second regularization part are staggered in the first direction; The tidying wheels on the first tidying section and the second tidying section tidy the sheet at the first tidying station; the tidying wheels on the third tidying section and the fourth tidying section tidy the sheet at the second tidying station.

2. The sheet aligning device according to claim 1, characterized in that: The first conveyor line includes a first conveyor frame and a first conveyor belt, the first tidying mechanism includes a first mounting frame, the first conveyor belt is rotatably mounted on the first conveyor frame, the first mounting frame is arranged below the first conveyor frame, the first tidying section includes a first movable plate and a first tidying piece, the first movable plate is movably mounted on the first mounting frame along the second direction, the first tidying piece is mounted on the first movable plate, the second tidying section includes a second movable plate, the second movable plate is movably mounted on the first mounting frame along the second direction, a plurality of tidying wheels are mounted on the second movable plate, and the driving end of the first driving assembly is connected to the first movable plate and the second movable plate.

3. The sheet aligning device according to claim 2, characterized in that: The first driving assembly comprises a first driving member, a first cam follower, a second cam follower and a first rotating disk, wherein a fixed end of the first driving member is mounted on the first mounting frame, a driving end of the first driving member is connected to the first rotating disk, the first driving member is configured to drive the first rotating disk to rotate, a first track groove and a second track groove are centrally symmetrically provided on the first rotating disk, a first end of the first cam follower is mounted on the first movable plate, a second end of the first cam follower is located in the first track groove, a first end of the second cam follower is mounted on the second movable plate, and a second end of the second cam follower is located in the second track groove; The first driving member drives the first turntable to rotate, and then drives the first movable plate and the second movable plate to synchronously approach or move away from the first conveyor belt through the first cam follower and the second cam follower.

4. The sheet aligning device according to claim 2, characterized in that: The first regularizing part also includes a first connecting plate, which is mounted on the first movable plate with an adjustable height, and the first regularizing piece is mounted on the first connecting plate. The second regularizing part also includes a second connecting plate, which is mounted on the second movable plate with an adjustable height, and the plurality of regularizing wheels are mounted on the second connecting plate at intervals along the first direction.

5. The sheet aligning device according to claim 2, characterized in that: The first aligning member comprises a plurality of aligning wheels installed on the first movable plate at intervals along the first direction; Alternatively, the first regulated member comprises a regulated plate installed on the first movable plate extending along the first direction; Alternatively, the first tidying member comprises a tidying belt mounted on the first movable plate, and the tidying belt is configured to tidy and assist in conveying the sheet.

6. The sheet aligning device according to claim 1, characterized in that: The second conveyor line includes a second conveyor frame and a second conveyor belt, the second tidying mechanism includes a second mounting frame, the second conveyor belt is rotatably mounted on the second conveyor frame, the second mounting frame is arranged above the second conveyor frame, the third tidying section includes a third movable plate, the third movable plate is movably mounted on the second mounting frame along the second direction, a plurality of tidying wheels are mounted on the third movable plate, the fourth tidying section includes a fourth movable plate and a second tidying piece, the fourth movable plate is movably mounted on the second mounting frame along the second direction, the second tidying piece is mounted on the fourth movable plate, and the driving end of the second driving assembly is connected to the third movable plate and the fourth movable plate.

7. The sheet aligning device according to claim 6, characterized in that: The second driving assembly comprises a second driving member, a third cam follower, a fourth cam follower and a second rotating disk, the fixed end of the second driving member is mounted on the second mounting frame, the driving end of the second driving member is connected to the second rotating disk, the second driving member is configured to drive the second rotating disk to rotate, a third track groove and a fourth track groove are symmetrically provided on the second rotating disk, the first end of the third cam follower is mounted on the third movable plate, the second end of the third cam follower is located in the third track groove, the first end of the fourth cam follower is mounted on the fourth movable plate, and the second end of the fourth cam follower is located in the fourth track groove; The second driving member drives the second turntable to rotate, and then drives the third movable plate and the fourth movable plate to synchronously approach or move away from the second conveyor belt through the third cam follower and the fourth cam follower.

8. The sheet aligning device according to claim 6, characterized in that: The third regularizing part also includes a third connecting plate, which is fixed on the third movable plate with an adjustable height, and the plurality of regularizing wheels are installed on the third connecting plate at intervals along the first direction. The fourth regularizing part also includes a fourth connecting plate, which is fixed on the fourth movable plate with an adjustable height, and the second regularizing piece is installed on the fourth connecting plate.

9. The sheet aligning device according to claim 6, characterized in that: The second aligning member comprises a plurality of aligning wheels installed on the fourth movable plate at intervals along the first direction; Alternatively, the second structuring member comprises a structuring plate installed on the fourth movable plate extending along the first direction; Alternatively, the second tidying member comprises a tidying belt mounted on the fourth movable plate, and the tidying belt is configured to tidy and assist in conveying the sheet.

10. The sheet aligning device according to claim 5 or 9, characterized in that: Each of the regularizing wheels is rotatably mounted on a wheel axle, and the wheel axle is fixed on a corresponding movable plate; Alternatively, each of the aligning wheels is fixedly mounted on a rotating shaft, and the rotating shaft is rotatably mounted on a corresponding movable plate. The first aligning part, the second aligning part, the third aligning part and the fourth aligning part also include a third driving assembly, and the third driving assembly is configured to drive all of the rotating shafts on the same aligning part to rotate synchronously, so as to drive all of the aligning wheels on the same aligning part to rotate synchronously.

11. The sheet aligning device according to claim 10, characterized in that: The third driving assembly includes a third driving member, a first magnetic wheel assembly, a driving shaft and a plurality of sets of second magnetic wheel assemblies, wherein the driving shaft is rotatably mounted on a corresponding movable plate, and the third driving member is configured to drive the driving shaft to rotate along its own axis through the first magnetic wheel assembly; Each set of the second magnetic wheel assembly corresponds to one of the rotating shafts, and each set of the second magnetic wheel assembly includes a first magnetic wheel and a second magnetic wheel. The first magnetic wheel is installed on the driving shaft, and the second magnetic wheel is installed on the rotating shaft. The third driving member drives the driving shaft to rotate along its own axis, so as to drive the corresponding rotating shaft to rotate through the cooperation of the first magnetic wheel and the second magnetic wheel.

12. The sheet aligning device according to claim 11, characterized in that: The first magnetic wheel assembly includes a third magnetic wheel and a fourth magnetic wheel. The third driving member is a motor. The third magnetic wheel is installed at the output end of the motor. The fourth magnetic wheel is installed at one end of the driving shaft. The third magnetic wheel and the fourth magnetic wheel cooperate to transmit power.

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