Safety interlocking device of ion implanter

Abstract

The embodiment of the utility model provides a safety interlocking device of an ion implanter, which is applied to the technical field of ion implanters and comprises an emergency safety relay, and the emergency safety relay comprises a power supply unit, a plurality of safety input units and a plurality of related output units. The power supply unit is used for supplying power to the emergency safety relay, the safety input unit is respectively connected with an emergency stop circuit which is formed by connecting emergency stop devices inside and outside the ion implanter equipment in series, and each related output unit is connected with each control circuit of the ion implanter equipment. When a certain group of coils in the safety relay are adhered or abnormal, or the state of a certain emergency stop device in the emergency stop circuit changes to change the safety input unit from a normal state to an abnormal state, each control circuit of the ion implanter equipment can be disconnected, so that the problem that in the prior art, a key control device is abnormal, so that the safety input unit is in an abnormal state can be effectively solved. And the disconnection of the control circuit cannot be realized.

Description

Technical Field

[0001] The utility model relates to the technical field of ion implanters, in particular to a safety interlocking device for ion implanters. Background Art

[0002] Ion implanters are key equipment in the pre-manufacturing process of integrated circuits. They are often used to accurately implant ions into silicon-based materials to change the conductivity of the material. However, the ion implantation process involves radiation and high-energy particles, which requires operators to pay great attention to safety issues. During the operation of the ion implanter, accidents may occur due to external reasons (such as illegal operation) or internal reasons (such as internal device failure).

[0003] Thus, when an ion implanter fails, how to respond urgently becomes a technical problem that must be solved to ensure the safety of operators. In the related art, an emergency stop circuit is designed for the ion implanter circuit, and the emergency stop circuit can be used to cut off the power supply in an emergency when an abnormality occurs in the ion implanter to protect the safety of operators. However, the existing emergency stop circuit has the risk of failure when some key components are abnormal. Utility Model Content

[0004] In view of this, an embodiment of the present application provides a safety interlock device for an ion implanter to solve the problem of emergency stop circuit failure caused by abnormalities of key components in the existing emergency stop circuit.

[0005] In some embodiments, the present application provides an ion implanter safety interlock device, wherein the device comprises:

[0006] An emergency safety relay, wherein the emergency safety relay comprises: a power supply unit, a plurality of safety input units and a plurality of related output units;

[0007] Wherein, the power supply unit is connected to the power supply system of the ion implanter equipment and is used to supply power to the emergency safety relay;

[0008] Each of the safety input units is respectively connected to each of the emergency stop circuits inside and outside the ion implanter, and each of the emergency stop circuits is a circuit formed by connecting each of the emergency stop devices inside and outside the ion implanter in series;

[0009] Each of the related output units is connected to each control circuit of the ion implanter equipment, and is used to disconnect each of the control circuits when the emergency safety relay is powered and each of the safety input units changes from a normal state to an abnormal state.

[0010] Optionally, the emergency safety relay has several groups of internal control coils;

[0011] Each of the related output units is also used to disconnect each of the control circuits if a group of internal control coils among the internal control coils are stuck.

[0012] Optionally, each of the related output units includes two control switches, and the two control switches are connected in series to obtain a series switch circuit, and the series switch circuit is connected to one control circuit;

[0013] Each of the related output units is specifically used for:

[0014] If one of the emergency stop circuits connected to each of the safety input units changes from a normal state to an abnormal state, the two control switches of each of the safety input units are controlled to be disconnected.

[0015] Optionally, the emergency safety relay further includes: a reset unit, and the reset unit is used to: if the emergency stop circuits connected to the safety input units are all in normal status, control the relevant output units to connect to the control circuits.

[0016] Optionally, the reset unit is in an automatic reset state.

[0017] Optionally, each of the emergency stop devices includes: each emergency stop switch of the ion implanter equipment and a smoke detection device of the ion implanter equipment.

[0018] Optionally, the emergency stop switches of the ion implanter equipment specifically include: an emergency stop switch on the outer door of the ion implanter equipment and an emergency stop switch on the main power distribution cabinet of the ion implanter equipment.

[0019] Optionally, each of the control circuits includes: a remote emergency stop circuit of the ion implanter equipment, a main power supply circuit of the ion implanter equipment, and a UPS power supply circuit of the ion implanter equipment.

[0020] Optionally, the main power supply circuit includes: a main power supply circuit control relay and a main power supply circuit contactor, a group of contacts of the main power supply circuit control relay is connected to the coil of the main power supply circuit contactor, and the main power supply circuit control relay is used to control the power supply or power off of the main power supply circuit.

[0021] Optionally, the UPS power supply circuit includes: a UPS power supply circuit control relay, and the UPS power supply circuit control relay is used to control the power supply or power off of the UPS power supply circuit.

[0022] Optionally, the remote emergency stop circuit includes: a remote emergency stop circuit control relay, the remote emergency stop circuit control relay is used to control the power supply or power failure of the remote emergency stop circuit, and the remote emergency stop circuit and the UPS power supply circuit are connected to the same group of related output units.

[0023] Beneficial effects of this application:

[0024] The embodiment of the present application provides a safety interlock device for an ion implanter, the safety interlock device includes: an emergency safety relay, the emergency safety relay includes: a power supply unit, a plurality of safety input units and a plurality of related output units. The power supply unit is used to supply power to the emergency safety relay, the safety input unit is respectively connected to an emergency stop circuit formed by connecting emergency stop devices in series inside and outside the ion implanter, and each related output unit is connected to each control circuit of the ion implanter. When the emergency safety relay is powered, and one of the emergency stop circuits changes from a normal state to an abnormal state, or when a group of internal control coils in the safety relay is stuck or abnormal, the connection of each control circuit can be disconnected.

[0025] In this way, by selecting an embodiment of the present application, if a group of internal control coils inside the safety relay becomes stuck or abnormal, or an emergency stop device in the emergency stop circuit changes from a normal state to an abnormal state, causing the safety input unit to change from a normal state to an abnormal state, the problem of being unable to disconnect the control circuit due to abnormalities in key control devices in the prior art can be effectively avoided. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Further details, features and advantages of the present application are disclosed in the following description of exemplary embodiments in conjunction with the accompanying drawings, in which:

[0027] Figure 1 A logical connection diagram of a safety interlock device of an ion implanter provided in an embodiment of the present application is shown;

[0028] Figure 2 Another logical connection schematic diagram of the safety interlock device of the ion implanter provided in the embodiment of the present application is shown;

[0029] Figure 3 A circuit diagram of an application scenario of a safety relay provided by an embodiment of the present application is shown;

[0030] Figure 4 A circuit connection diagram of a safety relay provided in an embodiment of the present application is shown;

[0031] Figure 5 A circuit connection schematic diagram of a main power supply circuit of an ion implanter provided in an embodiment of the present application is shown;

[0032] Figure 6 A circuit connection diagram of a power supply system of an ion implanter provided in an embodiment of the present application is shown;

[0033] Figure 7A circuit connection diagram of a UPS power supply circuit, which is one of the control circuits provided in an embodiment of the present application, is shown. DETAILED DESCRIPTION

[0034] The embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be construed as being limited to the embodiments described herein. Instead, these embodiments are provided to provide a more thorough and complete understanding of the present application. It should be understood that the drawings and embodiments of the present application are only for exemplary purposes and are not intended to limit the scope of protection of the present application.

[0035] It should be understood that the various steps described in the method implementation of the present application can be performed in different orders and / or performed in parallel. In addition, the method implementation may include additional steps and / or omit the steps shown. The scope of the present application is not limited in this respect.

[0036] The term "including" and its variations used in this document are open inclusions, that is, "including but not limited to". The term "based on" means "based at least in part on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one other embodiment"; the term "some embodiments" means "at least some embodiments". Relevant definitions of other terms will be given in the description below. It should be noted that the concepts of "first", "second", etc. mentioned in this application are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0037] As described in the background art, accidents are prone to occur during the operation of the ion implanter due to various factors. In order to reduce the occurrence of these accidents, operators are usually required to follow the operating rules and safety requirements and maintain the ion implanter well. In addition, when designing the ion implanter, it is necessary to add some safety designs, such as emergency stop design, safety door design, etc. Even so, the reality is that there is no "unbreakable" device, that is, there will still be some faulty devices that cause the entire ion implanter to fail.

[0038] For example, take the emergency stop design as an example. The purpose of the emergency stop design is to shut down the entire ion implanter circuit once the operator presses the emergency stop button. However, there are some situations where the emergency stop button or key components (such as the control switch in the ion implanter control circuit) are abnormal, resulting in the ion implanter circuit being unable to shut down immediately, further causing the emergency stop safety design to fail. In other words, the existing ion implanter safety design has the risk of a key component being abnormal and causing the entire safety design to fail.

[0039] In view of this, the utility model application provides a safety interlock device for an ion implanter, which can perform real-time fault detection on key components in the safety design circuit to ensure the actual application effect of the safety design.

[0040] Among them, Figure 1 As shown, the safety interlock circuit of the ion implanter provided by the present application mainly includes the following parts:

[0041] Emergency stop circuit 11, safety interlock device 12, ion implanter equipment control circuit 13. Figure 2 As shown, the safety interlock device 12 includes: an emergency safety relay 120, and the emergency safety relay 120 includes the following parts:

[0042] A power supply unit 121 , a plurality of safety input units 122 , and a plurality of related output units 123 .

[0043] The power supply unit 121 is connected to the power supply system of the ion implanter, and the power supply system is further divided into a main power supply circuit and a UPS (Uninterruptible Power Supply).

[0044] Each safety input unit 122 is respectively connected to each emergency stop circuit 11 inside and outside the ion implanter, wherein each emergency stop circuit is a circuit formed by connecting each emergency stop device inside and outside the ion implanter in series. As an embodiment, each emergency stop device includes: each emergency stop switch of the ion implanter, each smoke detection device, wherein each emergency stop switch includes: the emergency stop switch on the outer door of the ion implanter, and the emergency stop switch on the main distribution cabinet.

[0045] In the embodiment of the present application, the emergency stop switch may be an EMO (Emergency Machine Off) button switch, such as the common red emergency stop switch button on the equipment. The emergency stop circuit is used to obtain the internal and external status of the ion implanter, such as the emergency stop switch is used to obtain the abnormal signal triggered by the operator based on the actual situation, and the smoke detection device is used to obtain the smoke status inside and outside the ion implanter. If the smoke concentration detected by the smoke detection device is greater than the preset concentration threshold, an abnormal signal is triggered, and the abnormal signal helps to determine whether there is an abnormality inside and outside the ion implanter.

[0046] In the embodiment of the present application, the emergency stop circuit may also include various state detection devices such as temperature detectors and humidity detectors. The various state detection devices are used to detect the internal and external states of the ion implanter equipment. The types, models, and sizes of the specific state detection devices are not strictly limited in this application. Similarly, in the embodiment of the present application, the number of each emergency stop switch and the number of each smoke detection device can be flexibly selected according to actual needs, but it is necessary to ensure that each emergency stop switch or state detection device is connected in series end to end. In the embodiment of the present application, the emergency stop circuit is a general term, not limited to a single emergency stop circuit, and can be a multi-way emergency stop circuit. The number of specific emergency stop circuits can also be flexibly selected according to actual needs, and this application does not strictly limit it.

[0047] In the embodiment of the present application, the emergency safety relay has several groups of internal control coils. For the convenience of description, the emergency safety relay 120 is referred to as a safety relay below. Figure 2 As shown on the right, it is connected to the various control circuits of the ion implanter equipment and is used to disconnect the connection of each control circuit when the following two conditions are met:

[0048] Condition 1: Emergency safety relay is powered;

[0049] Condition 2: The safety input unit changes from a normal state to an abnormal state, including:

[0050] Condition 2-1: The state of the emergency stop device in the emergency stop circuit changes, for example, the emergency stop switch in the emergency stop circuit changes from closed to open.

[0051] Condition 2-2: A set of internal control coils of the safety relay is stuck or abnormal.

[0052] Among them, the safety input unit changes from a normal state to an abnormal state means that one of the safety input units changes from a normal state to an abnormal state. Among them, the normal state means that each device in each emergency stop circuit works normally, and the emergency stop circuit is in a circuit conduction state, which is reflected in: the safety input unit has an input electrical signal, and the voltage value of the input electrical signal meets the preset voltage value condition. For example, the input electrical signal should not be less than the preset voltage lower limit threshold, and illustratively, the input voltage is not less than 2V.

[0053] In the embodiment of the present application, the abnormal state refers to the input voltage being less than the preset voltage lower limit threshold, or no electrical signal input at all, which means that the emergency stop circuit connected to the safety input unit is no longer in a circuit conduction state. Or the internal control coil of the safety relay is abnormal, that is, the internal control coil and the contact controlled by the internal control coil cannot be closed normally, or cannot be opened normally.

[0054] Based on this, each relevant output unit 123 is used to disconnect each control circuit if a group of internal control coils are stuck together. Figure 3 As shown, each relevant output unit includes a plurality of control switches, and each control switch is connected in series to obtain a series switch circuit. Each series switch circuit is connected to one control circuit. For example, as a preferred embodiment, each relevant output unit includes two control switches. The two control switches (such as Figure 3 The control switch Sw1 and the control switch Sw2 are connected in series to obtain a series switch circuit, each of which is connected to a control circuit of an ion implanter device, wherein the control switch Sw1 is controlled by a group of internal control coils, and the control switch Sw2 is controlled by another group of internal control coils.

[0055] At this time, each relevant output unit 123 is specifically used to control its own two control switches to be disconnected if there is an emergency stop circuit in each safety input unit that changes from a normal state to an abnormal state.

[0056] Since the two control switches are connected in series, they are controlled by two different internal control coils. If one of the internal control coils sticks, one control switch is always in a closed state. Due to the forced guidance of the safety relay, the other control switches are not stuck to the internal control coils. In this case, one control switch sticks and closes, while the other control switches are disconnected. Since the two control switches are connected in series, the entire series switch circuit will be in an open circuit state, and further, the control circuit connected to the series switch circuit will be in an open circuit state.

[0057] In some embodiments, Figure 3 As shown, the emergency safety relay 120 also includes: a reset unit 124, wherein the reset unit 124 is used to: if the emergency stop circuits connected to the safety input units are all in normal state, control the relevant output units to connect the control circuits. As an embodiment, the reset unit 124 is in an automatic reset state, specifically, when each safety input unit 122 changes from a normal state to an abnormal state, even if a group of coils of the safety relay is in a sticking state, that is, when the key control components in the circuit of the entire ion implanter are in an abnormal state, the relevant output unit 123 will disconnect the various control circuits of the ion implanter, that is, when the emergency stop circuit or the device in the safety input unit is abnormal and causes the safety input unit to be disconnected, the relevant output unit 123 will disconnect the various control circuits of the ion implanter.

[0058] After that, the operator or maintenance personnel will inspect the abnormal circuit. When the inspection is completed and the abnormal circuit returns to normal, it means that when each safety input unit 122 changes from an abnormal state to a normal state, the reset unit 124 will automatically restore the state of the control circuit connected to the relevant output unit 123. In the embodiment of the present application, the reset unit 124 is in an automatic reset state by short-circuiting the two pins of the reset unit, which can be achieved as shown in FIG. Figure 3 As shown, the automatic reset state can be achieved by short-circuiting the Y1 and Y2 pins of the reset unit 124.

[0059] In the embodiment of the present application, Figure 3 As shown, the two pins of the power supply unit 121 are connected to the power supply system of the ion implanter, and specifically can be connected to the UPS power supply circuit, wherein the UPS power supply circuit provides a 24V driving voltage. At this time, pin A1 is connected to the input 24Vin (corresponding to Figure 4 The other pin A2 is connected to the output 24Vout (corresponding to Figure 4 The UPS power supply circuit is converted into 24V AC power through an isolation transformer, which can be Figure 4 As shown, UPS Power is converted into 24V AC power via T1 coil, and the AC power is connected to A1 and A2 pins in the safety relay.

[0060] In the embodiment of the present application, before the power supply unit 121 is powered on, it should be ensured that: all emergency stop devices in the emergency stop circuit are in a normal state. If the normal state is a closed state, it is necessary to ensure that all emergency stop devices are in a closed state. For example, taking the emergency stop device as an emergency stop switch, before the power supply unit is powered on, it can be checked whether all emergency stop switches are in a closed state. If they are all in a closed state, the power supply unit can be used to power on the emergency safety relay assembly.

[0061] The safety input unit 122 is connected to the emergency stop circuit, wherein the safety input unit may be a plurality of groups of external pins, each group of pins being connected to an emergency stop circuit. Figure 3 As shown, the safety input unit includes two groups of pins, one group is S11, S12, and the other group is S21, S22. Among them, S11-S12 is connected to a group of contacts of the emergency stop circuit 11, and S21-S22 is connected to another group of contacts of the emergency stop circuit 11. Among them, each emergency stop device includes: EMO on the peripheral door of the ion implanter equipment, the smoke detection device of the ion implanter equipment, and the EMO on the main distribution cabinet of the ion implanter equipment.

[0062] As an implementation method, the emergency stop circuit 11 can be as follows Figure 4As shown, the emergency stop circuit 11 includes: a main distribution cabinet EMO (corresponding to SB4 in the figure), an EMO circuit 1, an EMO circuit 2 and a smoke detector circuit, wherein the main distribution cabinet EMO is connected to contacts A4C and A4E of a smoke detector contactor A4 in the smoke detector circuit, and a coil A4A of the smoke detector contactor A4 is connected to the smoke detector, wherein the smoke detector contactor A4 is similar to a relay, and the connection or disconnection of the coil A4A and the contacts A4C and A4E realizes the connection or disconnection between the entire smoke detector circuit and other devices in the emergency stop circuit 11.

[0063] The emergency stop circuit 11 is connected in series to the safety input unit. Figure 4 As shown, the pins S11-S12 and the pins S21-S22 of the A5 safety relay are connected in series. In the embodiment of the present application, the number of safety input units 122 is not limited, and the number of corresponding emergency stop circuits 11 connected is also not limited.

[0064] In the embodiment of the present application, the relevant output unit 123 can be as follows Figure 3 As shown, the relevant output unit 123 includes two groups of pins, one group is 13, 14, and the other group is 23, 24. Among them, 13-14 is connected to one control circuit of the ion implanter equipment, and 23-24 is connected to another control circuit of the ion implanter equipment. Among them, there is a series switch circuit between 13-14, which is composed of two control switches (Sw1, Sw2) connected in series, and there is another series switch circuit between 23-24, which is also composed of two control switches (Sw3, Sw4) connected in series. The state of each control switch is controlled by the internal control coil of the emergency safety relay.

[0065] The relevant output unit 123 is connected to the control circuit of the ion implanter, and the control circuit specifically includes: a remote emergency stop circuit (corresponding to Figure 4 The three control circuits can be divided into two groups:

[0066] The first group: the main power supply circuit controlled by the main power supply circuit control relay, specifically including: the main power supply circuit of the ion implanter equipment (i.e. the circuit connected to the contacts 23-24). Figure 4 As shown, the main power supply circuit control relay is an A1 relay. In order to distinguish the internal connection mode of the relay, in the embodiment of the present application, A1A is determined as the coil of the main power supply circuit control relay, and A1B and A1C are determined as the contacts of the main power supply circuit control relay. Among them, the main power supply circuit control relay A1 is used to control the power on or off of the main power supply circuit.

[0067] Specifically, Figure 4As shown, the coil of the main power supply circuit control relay A1 cooperates with the machine power supply switches SB1 and SB2 to control the power on or off of the main power supply circuit. When the control switches between the A5 safety relay contacts 23 and 24 are closed, the machine power supply switches SB1 and SB2 are closed (or the coil of the main circuit control relay A1 and the contact A1C are both in the on state), the entire main power supply circuit is turned on. It can be determined that the control switches between the A5 safety relay contacts 23 and 24 are closed, the machine power supply switches SB1 and SB2 are closed (or the coil A1A of the main circuit control relay A1 and the contact A1C are both in the on state) are in a normal state. When the following conditions occur, the entire main power supply circuit will be disconnected:

[0068] Case 1: The control switch between contacts 23 and 24 of the A5 safety relay is disconnected, and switch SB1 is disconnected.

[0069] Case 2: If SB2 is originally disconnected, the coil A1A and the contact A1C are connected, and then SB2 is disconnected, and the coil A1A and the contact A1C are disconnected.

[0070] Case 3: Regardless of whether the coil A1A and the contact A1C are disconnected or connected, if SB2 is originally connected, SB2 changes to being disconnected.

[0071] When the main power supply circuit is disconnected, all subsequent circuits connected to TB2 will be powered off.

[0072] As an implementation method, the signal source circuit of the main power supply circuit can be as follows Figure 5 As shown, the main power supply circuit is formed by connecting the 3-phase 5-wire 208V power supply through the main circuit breaker and the contactor 101 of the main power supply circuit (the contactor is similar to a relay, and the contactor is turned on or off by cooperating with the control coil A101A and the contact A101B).

[0073] The second group: the remote EMO circuit controlled by the remote emergency stop circuit control relay, and the UPS power supply circuit of the ion implanter equipment controlled by the UPS power supply circuit control relay, wherein the remote emergency stop circuit and the UPS power supply circuit are connected to the same group of related output units, that is, both are connected to contacts 13 and 14. Figure 4 As shown in the figure, the remote emergency stop circuit control relay is A2 relay, where A2A is the coil of the remote emergency stop circuit control relay, and A2B (located at Figure 7 ) is a contact of a remote emergency stop circuit control relay. The remote emergency stop circuit control relay A2 is used to control the power on or off of the remote emergency stop circuit.

[0074] The UPS power supply circuit control relay is A3, where A3A is the coil of the UPS power supply circuit control relay and A3B (located at Figure 7 ) are the contacts of the UPS power supply circuit control relay. Among them, the UPS power supply circuit control relay A3 is used to control the power on and off of the UPS power supply circuit. Among them, the contact A2B of the remote emergency stop circuit control relay A2 is connected to the coil A3A of the UPS power supply circuit control relay A3. When the coil A2A of the remote emergency stop circuit control relay A2 is connected to the contact A2B, the coil A3A of the UPS power supply circuit control relay A3 is energized, which can control the state change of the contact of relay A3, and further make the UPS power supply circuit conductive.

[0075] Among them, the signal source of the UPS power supply circuit can be as follows Figure 6 As shown in the figure, the 120V voltage difference between the UPS output and the UPS neutral point is converted into a 24V electrical signal (i.e. 24V+ corresponding to TB1 and 24V- corresponding to TB2) through the transformer shown in T1, and then connected to Figure 4 As an implementation method, the corresponding TB1 and TB2 can be Figure 5 As shown, the contact A1H of the main power supply circuit control relay A1 is connected to the coil of the main power supply circuit contactor A101, and the corresponding contact of the contactor A101 is located on the main power supply circuit. When the coil of the main power supply circuit control relay A1A is connected to the contact of A1H, the coil of the contactor A101 is energized. At this time, the coil A101A of the contactor A101 is connected to the contact A101B. At this time, a voltage difference is generated between the UPS output and the UPS neutral point in the UPS power supply circuit, and the entire UPS power supply circuit is turned on. In this way, when the connection between the contacts 23 and 24 of the safety relay A5 is disconnected, the connection between the coil A1A of the main power supply circuit control relay A1 and the contact A1H is disconnected, which will cause the connection between the UPS output and the UPS neutral point to be disconnected, and further cause the UPS power supply circuit to have no signal input, thereby also being able to achieve power off of the entire UPS power supply circuit.

[0076] In an embodiment of the present application, the safety interlock device of the ion implanter can be arranged inside the ion implanter equipment or outside the ion implanter equipment, and can be specifically arranged in the peripheral circuit of the ion implanter, so as to monitor the fault state of the ion implanter equipment and quickly handle the fault in real time. As an implementation mode, compared with ordinary relays which usually have only one coil, once the voltage is too high or the ordinary relay is blocked, it is easy to cause the inability to quickly switch the state. The emergency safety relay in the embodiment of the present application is a circuit module of modular design, which has a special color to distinguish it from other ordinary relays. When a fault occurs, the safety relay can perform an execution action that meets the trigger condition according to the preset trigger condition, such as forcibly changing the state of the control unit of the safety relay, which effectively ensures the safety of the operator.

[0077] Among them, the main power supply circuit of the ion implanter is connected to the pins 23 and 24 of the emergency safety relay, and the UPS power supply circuit is also connected to the pins 13 and 14 of the emergency safety relay. By selecting the embodiment of the present application, when the smoke detection system and the emergency stop switch circuit fail, the emergency safety relay in the safety redundant start-stop circuit of the ion implanter can quickly disconnect the control switches between pins 13-14 and pins 23-24. Since the emergency safety relay component includes multiple groups of related output units, that is, corresponding to multiple groups of internal control coils, each group of internal control coils controls a control switch, and a group of related output units includes two control switches connected in series, at this time, even if a group of internal control coils is stuck, pins 13-14 will be in an open circuit state, and pins 23-24 will also be in an open circuit state. In this way, the main power supply circuit and the UPS power supply circuit of the ion implanter equipment can be powered off, which is beneficial to ensuring the personal safety of the ion implanter operator.

[0078] It should be noted that the modifications of "one" and "plurality" mentioned in the present application are illustrative rather than restrictive, and those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0079] The names of the messages or information exchanged between multiple devices in the embodiments of the present application are only used for illustrative purposes and are not used to limit the scope of these messages or information.

Claims

1. A safety interlock device for an ion implanter, characterized in that: The device comprises: An emergency safety relay, wherein the emergency safety relay comprises: a power supply unit, a plurality of safety input units and a plurality of related output units; Wherein, the power supply unit is connected to the power supply system of the ion implanter equipment and is used to supply power to the emergency safety relay; Each of the safety input units is respectively connected to each of the emergency stop circuits inside and outside the ion implanter, and each of the emergency stop circuits is a circuit formed by connecting each of the emergency stop devices inside and outside the ion implanter in series; Each of the related output units is connected to each control circuit of the ion implanter equipment, and is used to disconnect each of the control circuits when the emergency safety relay is powered and each of the safety input units changes from a normal state to an abnormal state.

2. The device according to claim 1, characterized in that The emergency safety relay has several groups of internal control coils; Each of the related output units is also used to disconnect each of the control circuits if a group of internal control coils among the internal control coils are stuck.

3. The device according to claim 1, characterized in that Each of the related output units includes two control switches, and the two control switches are connected in series to obtain a series switch circuit, and the series switch circuit is connected to one control circuit; Each of the related output units is specifically used for: If one of the emergency stop circuits connected to each of the safety input units changes from a normal state to an abnormal state, the two control switches of each of the safety input units are controlled to be disconnected.

4. The device according to claim 1, characterized in that The emergency safety relay further includes: a reset unit, which is used to: if the emergency stop circuits connected to the safety input units are all in normal state, control the relevant output units to connect to the control circuits; the reset unit is in an automatic reset state.

5. The device according to claim 1, characterized in that Each of the emergency stop devices includes: each emergency stop switch of the ion implanter equipment and a smoke detection device of the ion implanter equipment.

6. The device according to claim 5, characterized in that The emergency stop switches of the ion implanter equipment specifically include: an emergency stop switch on the outer door of the ion implanter equipment and an emergency stop switch on the main power distribution cabinet of the ion implanter equipment.

7. The device according to claim 1, characterized in that Each of the control circuits comprises: a remote emergency stop circuit of the ion implanter equipment, a main power supply circuit of the ion implanter equipment, and a UPS power supply circuit of the ion implanter equipment.

8. The device according to claim 7, characterized in that The main power supply circuit includes: a main power supply circuit control relay and a main power supply circuit contactor. A group of contacts of the main power supply circuit control relay is connected to the coil of the main power supply circuit contactor. The main power supply circuit control relay is used to control the power supply or power off of the main power supply circuit.

9. The device according to claim 7, characterized in that The UPS power supply circuit includes: a UPS power supply circuit control relay, and the UPS power supply circuit control relay is used to control the UPS power supply circuit to supply power or cut off power.

10. The device according to claim 9, characterized in that The remote emergency stop circuit includes: a remote emergency stop circuit control relay, the remote emergency stop circuit control relay is used to control the power supply or power off of the remote emergency stop circuit, and the remote emergency stop circuit and the UPS power supply circuit are connected to the same group of related output units.

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