Quartz boat for semiconductor

Abstract

The utility model relates to the field of quartz boats, in particular to a quartz boat for a semiconductor, which comprises a trapezoid support, arc-shaped notches are symmetrically arranged on two sides of an inverted trapezoid opening of the support, a first sliding rod and a second sliding rod are respectively connected onto the arc-shaped notches in a sliding mode, and the support comprises a front support and a rear support. The first fulcrum and the third fulcrum are connected through a first supporting rod, the second fulcrum and the fourth fulcrum are connected through a second supporting rod, the two sides of the lower end of the front support are connected with one end of a first inserting rod and one end of a second inserting rod respectively, and the other end of the first inserting rod and the other end of the second inserting rod are connected to the positions, corresponding to the front support, of the rear support. A plurality of clamping grooves are formed in the first sliding rod, the second sliding rod, the first inserting rod and the second inserting rod in an array mode. The quartz boat designed by the utility model is convenient to position, can be used for storing silicon wafers with different specifications and sizes, and is wide in application range.

Description

Technical Field

[0001] The utility model relates to the field of quartz boats, in particular to a quartz boat for semiconductors. Background Art

[0002] With the development of semiconductor industry, the demand for material processing equipment is increasing. As a common semiconductor material processing tool, the performance of quartz boat directly affects the production efficiency and product quality of semiconductors.

[0003] Quartz boat, also known as quartz glass boat, is a quartz glass product used in high temperature environments, especially in the semiconductor and solar energy industries. Due to its good stability and chemical inertness at high temperatures, quartz boats are often used to carry wafers (silicon wafers) for various high temperature treatments, such as oxidation, diffusion, annealing, etc. In fact, quartz boats are designed and manufactured to accommodate wafers of different sizes and specifications. The size and shape of the quartz boat are usually adjusted according to the size of the wafer carried to ensure that the wafer can be stably placed in the boat and receive uniform heat treatment. However, this does not mean that a quartz boat can hold wafers of any size at will. Different quartz boats are usually designed for wafers of specific sizes to ensure the correct position and stability of the wafer in the boat. If the wafer size does not match the quartz boat, it may cause the wafer to move, tilt or be unstable in the boat, thereby affecting the uniformity and effect of the heat treatment. Therefore, when choosing a quartz boat, you should choose a suitable quartz boat according to the size and specifications of the wafer being processed to ensure that the wafer can be stably placed in the boat and receive good heat treatment. Utility Model Content

[0004] Based on the problems existing in the above background technology, the utility model proposes a quartz boat for semiconductors, including a support, the support is in a ladder shape, an inverted trapezoidal opening is arranged in the middle of the support, arc-shaped slots are symmetrically opened on both sides of the inverted trapezoidal opening on the support, and a first sliding rod and a second sliding rod are slidably connected to the arc-shaped slots respectively. The support includes a front support and a rear support, a first fulcrum extending downwardly on the left side of the front support, a second fulcrum extending downwardly on the right side of the front support, a third fulcrum extending downwardly on the left side of the rear support, and a fourth fulcrum extending downwardly on the right side of the rear support, the first fulcrum and the third fulcrum are connected by a first support rod, and the second fulcrum and the fourth fulcrum are connected by a second support rod, one end of the first plug rod and the second plug rod are respectively connected to the two sides of the lower end of the front support, the other ends of the first plug rod and the second plug rod are connected to the corresponding positions on the rear support, and a plurality of slots are arranged in an array on the first sliding rod, the second sliding rod, the first plug rod and the second plug rod.

[0005] Preferably, a first retaining ring is formed at the contact point between the first slide rod and the inner side of the support, the end of the first slide rod extends out of the arc-shaped groove of the support, the end of the first slide rod is threaded, and the end of the first slide rod is threadedly connected to a first buckle, and the first buckle can be rotated to one side to tighten the first slide rod.

[0006] Preferably, a second retaining ring is formed at the contact point between the second slide rod and the inner side of the support, the end of the second slide rod extends out of the arc-shaped groove of the support, the end of the second slide rod is threaded, and the end of the second slide rod is threadedly connected to a second buckle, and the second buckle can be rotated to one side to tighten the second slide rod.

[0007] Preferably, the first buckle and the second buckle are provided with handles.

[0008] Preferably, a card plate is installed between the front support and the rear support, and the card plate has corresponding arc-shaped grooves adapted for sliding of the first slide bar and the second slide bar, and the card plate has through holes adapted for sliding connection of the first plug rod and the second plug rod.

[0009] Preferably, the arc-shaped notches on both sides of the support are in a parabola shape opening upward.

[0010] Preferably, the first fulcrum, the second fulcrum, the third fulcrum and the fourth fulcrum are in the shape of a triangle.

[0011] Preferably, the lowermost ends of the first support rod and the second support rod are on the same plane as the bottom.

[0012] Compared with the prior art, the utility model has the following beneficial effects: the utility model has the beneficial effect of effectively reducing the contact surface between the silicon wafer and the silicon wafer limiting groove under the condition of ensuring the stable positioning of the silicon wafer, thereby improving the diffusion quality of the silicon wafer. The quartz boat is convenient for positioning and can store silicon wafers of different specifications and sizes, and has a wide range of applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the structure of a quartz boat for semiconductors.

[0014] Figure 2 The figure is a schematic diagram of a second insertion rod in a quartz boat for semiconductors.

[0015] In the accompanying drawings, the names of the components represented by each reference numeral are as follows: 1. support; 2. arc-shaped notch; 3. first slide bar; 4. second slide bar; 5. first fulcrum; 6. second fulcrum; 7. third fulcrum; 8. fourth fulcrum; 9. first support rod; 10. second support rod; 11. first plug rod; 12. second plug rod; 13. first retaining ring; 14. first buckle; 15. second buckle; 16. second retaining ring; 17. clamping plate. DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0017] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly. In the present invention, unless otherwise clearly specified and limited, the terms "connection", "fixed", etc. should be understood in a broad sense. For example, "fixed" can be a fixed connection, a detachable connection, or an integral whole; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0018] The utility model relates to a quartz boat for semiconductors, including a support 1, the support 1 is in a ladder shape, an inverted trapezoidal opening is arranged in the middle of the support 1, arc-shaped notches 2 are symmetrically opened on both sides of the inverted trapezoidal opening on the support 1, a first slide bar 3 and a second slide bar 4 are respectively slidably connected on the arc-shaped notches 2, the support 1 includes a front support 1 and a rear support 1, a first fulcrum 5 extends downwardly from the left side of the front support 1, a second fulcrum 6 extends downwardly from the right side of the front support 1, a third fulcrum 7 extends downwardly from the left side of the rear support 1, and a rear fulcrum 8 extends downwardly from the left side of the rear support 1. A fourth fulcrum 8 extends downward from the right side of the support 1, the first fulcrum 5 and the third fulcrum 7 are connected by a first support rod 9, the second fulcrum 6 and the fourth fulcrum 8 are connected by a second support rod 10, and one end of the first plug rod 11 and the second plug rod 12 are respectively connected to both sides of the lower end of the front support 1, and the other ends of the first plug rod 11 and the second plug rod 12 are connected to the corresponding position of the front support 1 on the rear support 1, and a plurality of card slots are arranged in an array on the first sliding rod 3, the second sliding rod 4, the first plug rod 11 and the second plug rod 12.

[0019] Furthermore, a first retaining ring 13 is formed at the contact point between the first slide rod 3 and the inner side of the support 1, the end of the first slide rod 3 extends out of the arc-shaped groove 2 of the support 1, the end of the first slide rod 3 is threaded, and the end of the first slide rod 3 is threadedly connected with a first clip 14, and the first clip 14 can be rotated to one side to tighten the first slide rod 3.

[0020] Furthermore, a second retaining ring 16 is formed at the contact point between the second slide rod 4 and the inner side of the support 1, the end of the second slide rod 4 extends out of the arc-shaped groove 2 of the support 1, the end of the second slide rod 4 is threaded, and the end of the second slide rod 4 is threadedly connected with a second clip 15, and the second clip 15 can be rotated to one side to tighten the second slide rod 4.

[0021] Furthermore, handles are provided on the first buckle 14 and the second buckle 15 .

[0022] Furthermore, a card plate is installed between the front support 1 and the rear support 1, and an arc-shaped groove 2 is opened on the card plate to adapt to the sliding of the first slide bar 3 and the second slide bar 4, and a through hole is opened on the card plate to adapt to the sliding connection of the first plug rod 11 and the second plug rod 12.

[0023] Furthermore, the arc-shaped notches 2 on both sides of the support 1 are in a parabolic shape with the openings facing upward.

[0024] Furthermore, the first fulcrum 5, the second fulcrum 6, the third fulcrum 7 and the fourth fulcrum 8 are in the shape of a triangle.

[0025] Furthermore, the lowermost ends of the first support rod 9 and the second support rod 10 are on the same plane as the bottom.

[0026] The above are only preferred embodiments of the present invention. It should be noted that the above preferred embodiments should not be regarded as limiting the present invention. The protection scope of the present invention should be based on the scope defined by the claims. For ordinary technicians in this technical field, several improvements and modifications can be made without departing from the spirit and scope of the present invention, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A quartz boat for semiconductors, characterized in that: The cam is provided with a first notch and a second notch on the second end of the support frame, and the second notch is provided with a second notch on the second end of the support frame.

2. A semiconductor quartz boat according to claim 1, characterized in that: A first retaining ring is formed at the contact point between the first slide rod and the inner side of the support, the end of the first slide rod extends out of the arc-shaped groove of the support, the end of the first slide rod is threaded, and the end of the first slide rod is threadedly connected to a first buckle, the first buckle can be rotated to one side to tighten the first slide rod, and the first buckle is provided with a handle.

3. A semiconductor quartz boat according to claim 1, characterized in that: A second retaining ring is formed at the contact point between the second slide rod and the inner side of the support, the end of the second slide rod extends out of the arc-shaped groove of the support, the end of the second slide rod is threaded, and the end of the second slide rod is threadedly connected to a second buckle, the second buckle can be rotated to one side to tighten the second slide rod, and a handle is provided on the second buckle.

4. A semiconductor quartz boat according to claim 1, characterized in that: A card plate is installed between the front support and the rear support, and the card plate has corresponding arc-shaped grooves adapted for sliding of the first slide bar and the second slide bar, and the card plate has a through hole adapted for sliding connection of the first plug rod and the second plug rod.

5. The semiconductor quartz boat according to claim 1, characterized in that: The arc-shaped notches on both sides of the support are in a parabola shape with the openings upward.

6. The semiconductor quartz boat according to claim 1, characterized in that: The first fulcrum, the second fulcrum, the third fulcrum and the fourth fulcrum form a triangle.

7. The semiconductor quartz boat according to claim 1, characterized in that: The lowermost ends of the first support rod and the second support rod are on the same plane as the bottom.

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