Control cabinet of sputter coating machine

Abstract

The utility model discloses a sputter coating machine control cabinet which comprises a cabinet body, a partition plate is arranged in the cabinet body in an extending mode from top to bottom, the partition plate divides an inner cavity of the cabinet body into a front cavity and a rear cavity, and a cabinet door assembly capable of opening the front cavity and the rear cavity is arranged on the side face of the cabinet body. The rear cavity is provided with a water path mounting assembly for mounting a water path device and a gas path mounting assembly for mounting a gas path device; the cabinet body is divided into the front cavity and the rear cavity which are respectively used for configuring the circuit system and the water-gas path system, namely, the water-gas path system and the circuit system are combined to the same cabinet body, the integration level is high, the operation is convenient, and the cost is low. The device is simple in structure and high in safety, the occupied space of the device body is reduced, the water-gas path system and the circuit system are arranged in the same space, installation and wiring are convenient, the side door opening mode is adopted, and the assembly and maintenance difficulty is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of control cabinets, in particular to a sputtering coating machine control cabinet. Background Art

[0002] Vacuum sputtering coating machine, vacuum magnetron sputtering technology refers to a method of using the magnetic field of the cathode surface to form an electron trap, so that the electrons drift close to the cathode surface under the combined action of the magnetic field and the electric field. A magnetic field orthogonal to the target surface electric field is set, and the fast electrons generated during sputtering move approximately in a cycloidal motion in the orthogonal electromagnetic field, which increases the electron travel and improves the gas ionization rate. At the same time, high-energy particles lose energy after colliding with the gas, and the substrate temperature is low, so coating can be completed on heat-resistant materials. The equipment consists of a coating chamber, a vacuum unit, and a water system, a gas system, a circuit system and other control systems.

[0003] In the traditional vacuum sputtering coating machine, due to the particularity of the sputtering coating machine, multiple process output power supplies are required in the circuit system, such as medium frequency power supply, DC power supply, radio frequency power supply and other large power supplies, so the following series of problems will appear in the design of the control system:

[0004] 1. Based on the problem that such equipment uses a large amount of process control power, the most common way to design the electric control cabinet in the past was to add a process power cabinet. Use a separate control cabinet to install the process power supply, and in order to meet the operability and installation and maintenance considerations of the process power cabinet, it is difficult to reach a consistent size specification with the traditional electric control cabinet. This not only generates the cost of making more control cabinets, but also takes up a lot of space.

[0005] 2. Traditional control cabinets are often separated into electrical control cabinets and process power cabinets. This method will also increase line costs. More wires are required due to distance, and it is inconvenient for workers to connect wires, which will lead to higher costs.

[0006] 3. The installation method of the water and gas systems of the vacuum sputtering coating machine is often installed on the equipment cavity or independently in another space, which greatly affects the appearance of the equipment and takes up a lot of equipment space. In addition, the water, electricity and gas lines will be more chaotic, which increases the installation and maintenance costs of the staff.

[0007] 4. Equipment relocation problem. Since traditional vacuum sputtering coating machines have more control systems, including circuit systems, water systems and gas systems, and previous unreasonable design schemes, the overall size of the equipment is relatively large, and the installation of each system is unreasonable, resulting in a cumbersome equipment relocation process and easy errors when restoring the equipment. Utility Model Content

[0008] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a sputtering coating machine control cabinet, which has the advantages of high integration, convenient maintenance and small space occupation.

[0009] According to the first aspect of the present invention, a control cabinet for a sputtering coating machine includes: a cabinet body, a partition plate extending from top to bottom inside the cabinet body, the partition plate divides the inner cavity of the cabinet body into a front chamber and a rear chamber, a cabinet door assembly capable of opening the front chamber and the rear chamber is arranged on the left and / or right side of the cabinet body, the rear chamber is provided with a water path installation assembly for installing water path components and an air path installation assembly for installing air path components; the front chamber is provided with a power supply installation assembly for installing a process output power supply and a control component installation assembly for installing a circuit control component.

[0010] The sputtering coating machine control cabinet according to the embodiment of the utility model has at least the following beneficial effects: by dividing the cabinet body into a front chamber and a rear chamber, which are respectively used to configure the circuit system and the water and gas system, that is, the water and gas system and the circuit system are combined into the same cabinet body, with high integration and high safety, reducing the space occupied by the equipment body, and the water and gas system and the circuit system are in the same space, which is convenient for installation and wiring, and adopts a side-opening door method, which reduces the difficulty of assembly and maintenance.

[0011] According to some embodiments of the utility model, a first door body capable of opening the front chamber is provided on the left side of the cabinet body, the first door body is provided with an air inlet and an air outlet, one of the air inlet and the air outlet is provided with a filter, and the other is provided with a fan.

[0012] According to some embodiments of the utility model, a second door body capable of opening the rear chamber is provided on the left side of the cabinet body, and the second door body is provided with a water inlet and a water outlet, and the water inlet and the water outlet are used for the entry and exit of the main water pipe or for setting a main water pipe joint.

[0013] According to some embodiments of the present invention, a third door body capable of opening the front chamber and a fourth door body capable of opening the rear chamber are provided on the right side of the cabinet body.

[0014] According to some embodiments of the present invention, the water circuit installation assembly includes a water circuit device installation plate arranged on the rear side wall of the rear chamber, and the air circuit installation assembly includes an air circuit device installation plate arranged on the front side wall of the rear chamber.

[0015] According to some embodiments of the present invention, the power supply installation assembly includes a power supply installation seat arranged on the rear side wall of the front chamber, and the control device installation assembly includes a control device installation plate arranged on the front side of the front chamber.

[0016] According to some embodiments of the present invention, a fifth door capable of opening the front chamber is provided on the front side of the cabinet body.

[0017] According to some embodiments of the utility model, the power supply mounting base includes multiple layers of height-adjustable shelves, and the process output power supply is installed on the shelves.

[0018] According to some embodiments of the utility model, the cabinet body is provided with a base frame, and the base frame is provided with a plurality of threading holes for threading electric wires, water pipes or air pipes.

[0019] According to some embodiments of the present invention, the threading hole is extended along the left-right direction.

[0020] According to some embodiments of the present utility model, a placement groove is provided on the right side wall of the front chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0022] Figure 1 This is a schematic diagram of the internal structure of a control cabinet of a sputtering coating machine according to an embodiment of the utility model when viewed from above;

[0023] Figure 2 This is a front structural schematic diagram of a sputtering coating machine control cabinet according to an embodiment of the utility model;

[0024] Figure 3 It is a schematic diagram of the left side structure of the control cabinet of the sputtering coating machine according to an embodiment of the utility model;

[0025] Figure 4 This is a schematic diagram of the right side structure of the sputtering coating machine control cabinet according to an embodiment of the utility model.

[0026] Reference numerals:

[0027] Cabinet body 100, front chamber 101, rear chamber 102, partition plate 110, bottom frame 120, threading hole 121;

[0028] The first door body 210, the air inlet 211, the air outlet 212, the second door body 220, the waterway inlet 221, the waterway outlet 222, the third door body 230, the fourth door body 240, and the fifth door body 250;

[0029] A water circuit device mounting plate 310 and a gas circuit device mounting plate 320;

[0030] Power supply mounting seat 410 and control device mounting plate 420 . DETAILED DESCRIPTION

[0031] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0032] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0033] In the description of the utility model, if there is a description of first and second, it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0034] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0035] Reference below Figures 1 to 4 A control cabinet for a sputtering coating machine according to an embodiment of the utility model is described.

[0036] like Figure 1 , Figure 3 , Figure 4 As shown, a sputtering coating machine control cabinet according to an embodiment of the utility model includes a cabinet body 100, and a partition plate 110 is extended from top to bottom inside the cabinet body 100, and the partition plate 110 divides the inner cavity of the cabinet body 100 into a front chamber 101 and a rear chamber 102. The left side and / or right side of the cabinet body 100 is provided with a cabinet door assembly capable of opening the front chamber 101 and the rear chamber 102; the rear chamber 102 is provided with a water path installation assembly for installing water path components and an air path installation assembly for installing air path components; the front chamber 101 is provided with a power supply installation assembly for installing a process output power supply and a control device installation assembly for installing a circuit control device.

[0037] The cabinet body 100 is divided into a front chamber 101 and a rear chamber 102, which are used to configure the circuit system and the water and gas system respectively. That is, the water and gas system and the circuit system are combined into the same cabinet body, which has high integration and high safety, reduces the space occupied by the equipment body, and the water and gas system and the circuit system are in the same space, which is convenient for installation and wiring, and adopts a side-opening door method, which reduces the difficulty of assembly and maintenance.

[0038] Specifically, the water circuit installation components can be used to install water drains, valves, water flow switches, water pressure gauges and other devices; the gas circuit installation components can be used to install gas control valve groups, air pressure gauges and other devices; the power supply installation components can be used to install medium frequency power supplies, DC power supplies, radio frequency power supplies and other large power supplies; the control device installation components can be used to install circuit breakers, CPC controllers, relays, transformers and other electrical devices.

[0039] like Figure 3 As shown, in some embodiments of the present invention, a first door 210 capable of opening the front chamber 101 is provided on the left side of the cabinet body 100 to facilitate the installation, wiring and maintenance of process output power and circuit control devices.

[0040] like Figure 3 As shown, in some embodiments of the utility model, the first door body 210 is provided with an air inlet 211 and an air outlet 212, one of the air inlet 211 and the air outlet 212 is provided with a filter, and the other is provided with a fan, so that air circulation is formed inside and outside the front chamber 101, which is beneficial to the heat dissipation of the process output power in the front chamber 101.

[0041] like Figure 3 As shown, in some embodiments of the present invention, a second door 220 capable of opening the rear chamber 102 is provided on the left side of the cabinet body 100 to facilitate the installation, wiring and maintenance of the water and gas system.

[0042] like Figure 3 As shown, in some embodiments of the utility model, the second door body 220 is provided with a water inlet 221 and a water outlet 222, and the water inlet 221 and the water outlet 222 are used for the entry and exit of the main water pipe or for setting the main water pipe joint to facilitate the summary output or input of the water pipes and the layout of the water pipes.

[0043] It can be understood that in some embodiments of the present invention, the water inlet 221 and the water outlet 222 can also be arranged at the bottom of the rear chamber 102, and the main water pipe is output from the bottom.

[0044] like Figure 4As shown, in some embodiments of the utility model, a third door body 230 capable of opening the front chamber 101 and a fourth door body 240 capable of opening the rear chamber 102 are provided on the right side of the cabinet body 100 to facilitate opening the front chamber 101 and the rear chamber 102 from the right side, thereby facilitating the installation and maintenance of the water and gas system and the circuit system.

[0045] like Figure 3 , Figure 4 As shown, in some embodiments of the present invention, a first door body 210 is provided on the left side of the cabinet body 100 and a third door body 230 is provided on the right side, which are used to open the front chamber 101 from the left and right sides to facilitate the installation, wiring and maintenance of process output power and circuit control devices.

[0046] like Figure 3 , Figure 4 As shown, in some embodiments of the present invention, a second door body 220 is provided on the left side of the cabinet body 100 and a fourth door body 240 is provided on the right side for opening the rear chamber 102 from both sides to facilitate the installation and maintenance of the water and gas system and the circuit system.

[0047] It can be understood that in some embodiments of the present invention, the positions of the door bodies can be swapped as needed, such as the positions of the first door body 210 and the third door body 230 can be swapped left and right, and the positions of the second door body 220 and the fourth door body 240 can be swapped left and right.

[0048] like Figure 1 As shown, in some embodiments of the present invention, the water channel installation assembly includes a water channel device installation plate 310 arranged on the rear side wall of the rear chamber 102 for installing devices such as water drains, valves, water flow switches, and water pressure gauges.

[0049] Specifically, the water channel device mounting plate 310 is a plate member and is provided with a plurality of mounting holes or mounting platforms to facilitate the installation of devices such as water drains, valves, water flow switches, and water pressure gauges.

[0050] In some embodiments of the present invention, the water channel device installation plate 310 can be slidably disposed on the rear side wall of the rear chamber 102, so that the water channel device installation plate 310 can slide out of the rear chamber 102 from the left or right side to facilitate maintenance.

[0051] Specifically, a slide rail mechanism is provided between the rear side wall of the rear chamber 102 and the water channel component mounting plate 310 to achieve sliding installation of the water channel component mounting plate 310 .

[0052] like Figure 1 As shown, in some embodiments of the present invention, the gas circuit installation assembly includes a gas circuit device installation plate 320 arranged on the front side wall of the rear chamber 102 for installing devices such as a gas control valve group and a pressure gauge.

[0053] Specifically, the gas circuit device mounting plate 320 is a plate member and is provided with a plurality of mounting holes or mounting platforms to facilitate the installation of devices such as gas control valve groups and pressure gauges.

[0054] In some embodiments of the present invention, the gas circuit device mounting plate 320 can be slidably disposed on the front side wall of the rear chamber 102, so that the gas circuit device mounting plate 320 can slide out of the rear chamber 102 from the left or right side to facilitate maintenance.

[0055] Specifically, a slide rail mechanism is provided between the rear side wall of the rear chamber 102 and the gas path component mounting plate 320 to achieve sliding installation of the gas path component mounting plate 320 .

[0056] like Figure 1 As shown, in some embodiments of the utility model, in some embodiments of the utility model, the water circuit installation assembly includes a water circuit device installation plate 310 arranged on the rear side wall of the rear chamber 102, and the air circuit installation assembly includes an air circuit device installation plate 320 arranged on the front side wall of the rear chamber 102, that is, the water circuit device installation plate 310 is installed at a position away from the partition plate 110, that is, away from the front chamber 101, so that the water circuit system is away from the front chamber 101 for installing the circuit system, thereby improving safety.

[0057] like Figure 1 As shown, in some embodiments of the present invention, the power supply installation assembly includes a power supply mounting seat 410 arranged on the rear side wall of the front chamber 101, which is used to install larger power supplies such as intermediate frequency power supply, direct current power supply, and radio frequency power supply.

[0058] Specifically, the power supply mounting seat 410 is disposed at the partition plate 110 and is used for centrally installing a power supply with a large volume and weight, which has higher stability and makes the overall weight distribution of the sputtering coating machine control cabinet more reasonable and the operation more stable.

[0059] like Figure 1 As shown, in some embodiments of the present invention, the control device installation assembly includes a control device installation plate 420 arranged on the front side of the front chamber 101, which is used for the installation of electrical devices such as circuit breakers, CPC controllers, relays, transformers, etc., and can facilitate the maintenance of electrical devices on the front side of the control cabinet.

[0060] Specifically, the front side of the control cabinet generally faces outward and is provided with a door. Circuit breakers, CPC controllers, relays, transformers and other electrical devices are commonly used electrical devices and are low-voltage devices. They are arranged on the front side of the control cabinet for easy maintenance.

[0061] like Figure 1As shown, in some embodiments of the present invention, a control device installation cavity is formed in front of the control device installation plate 420, the control device is installed on the front side of the control device installation plate 420 and distributed in the control device installation cavity, and the front side of the cabinet body 100 is provided with a fifth door 250 capable of opening the control device installation cavity, so as to facilitate the installation and maintenance of the control device.

[0062] In some embodiments of the present invention, a power supply mounting seat 410 is provided at the rear side of the control device mounting plate 420 to facilitate the installation of the power supply for the process output.

[0063] like Figure 2 As shown, in some embodiments of the present invention, a fifth door 250 capable of opening the front chamber 101 is provided on the front side of the cabinet body 100 to facilitate opening the front chamber 101 from the front side and to facilitate maintenance of the circuit system.

[0064] Specifically, a control device installation cavity is formed in front of the control device installation plate 420. The control device is installed on the front side of the control device installation plate 420 and distributed in the control device installation cavity. Through the fifth door body 250 opened on the front side, electrical devices such as circuit breakers, CPC controllers, relays, and transformers can be easily inspected and maintained.

[0065] In some embodiments of the present invention, the fifth door body 250 is provided with an alarm light, a touch screen, control buttons, etc.

[0066] In some embodiments of the present invention, a plurality of columns are arranged in the middle of the front chamber 101, and the control device mounting plate 420 is connected to the columns by a scissors mechanism, so that the control device mounting plate 420 can extend from the front side to facilitate the inspection and maintenance of the devices on the control device mounting plate 420.

[0067] In some embodiments of the present invention, the power supply mounting base 410 includes multiple layers of height-adjustable shelves, and the process output power supply is installed on the shelves. When in use, the height position of the shelves can be adjusted according to the height of the process output power supply, thereby improving versatility.

[0068] Specifically, the power supply mounting base 410 includes a vertical frame and a plurality of shelves that can be raised and lowered and slidably arranged on the vertical frame. The shelves and the vertical frame can be slidably matched with each other through a slide rail mechanism, a guide column mechanism, etc., so as to achieve lifting and sliding. Locking positions such as a latch mechanism and a bolt mechanism can be set between the shelves and the vertical frame to meet the height adjustment requirements of the shelves.

[0069] It can be understood that in some embodiments of the present invention, the shelves of the power supply mounting base 410 can also be shelves of fixed height, which can meet the power supply installation requirements of the set equipment and have higher stability.

[0070] like Figure 3As shown, in some embodiments of the present invention, the cabinet body 100 is provided with a base frame 120, and the base frame 120 is provided with a plurality of threading holes 121 for threading electric wires, water pipes or air pipes, so as to facilitate the connection of the electric wires, water pipes and air pipes to the sputtering coating machine.

[0071] Specifically, a connecting bridge is provided in the threading hole 121 , and the electric wires, water pipes and air pipes are connected to the sputtering coating machine through the connecting bridge in the threading hole 121 .

[0072] like Figure 3 As shown, in some embodiments of the present invention, the threading hole 121 is extended in the left-right direction to facilitate lateral wire outlet and the installation layout of the connecting bridge.

[0073] In some embodiments of the present invention, the threading hole 121 may be configured to penetrate the bottom frame 120 from left to right to facilitate the wires to be routed out from the left and right sides.

[0074] In some embodiments of the present invention, the threading hole 121 is provided with a unidirectional conductive structure to meet the requirement of unidirectional wire outlet.

[0075] In some embodiments of the present invention, the threading hole 121 is provided with a detachable end cover to block the threading hole 121 when not in use.

[0076] like Figure 3 As shown, in some embodiments of the present invention, a placement groove 430 is provided on the right side wall of the front chamber 101, and the placement groove 430 is used to place the panel handle of the process output power supply, so as to facilitate the organization of the internal space of the front chamber 101 and the control of the process output power supply.

[0077] The sputtering coating machine control cabinet of the utility model has the following advantages:

[0078] 1. Considering that magnetron sputtering coating equipment needs to use multiple process power supplies, this integrated control cabinet combines the process power cabinet and the low-voltage electrical control cabinet. The functions of the two control cabinets can now be completed by one control cabinet, solving the problem of high cost and large floor space of the control cabinet.

[0079] Second, the design of this structure is more convenient for electricians to install and wire. It does not require complicated line layout, reduces the lines from the low-voltage control baseboard to the process power supply, and saves wiring costs.

[0080] 3. The design of this structure combines the water and gas system with the circuit system, making them in the same area. This not only improves the overall appearance of the equipment, but also reduces the problem of the water drain and gas control valve group occupying the main space of the equipment. In addition, because they are in the same space as the circuit system, installation and wiring are also very convenient. At the same time, water pipes, gas pipes and wires can all be connected to various parts of the equipment from one location, which looks clear at a glance and reduces the difficulty of maintenance.

[0081] Fourth, this design structure designs the water, electricity, and gas systems as a whole, and installs them in a control cabinet. Through clever design, the control cabinet not only meets the requirements of complete functions, but also does not occupy too much area, and also controls the manufacturing cost of the control cabinet. In the process of equipment relocation, this structure also has great advantages. The separation can be completed by removing the pipes and lines connecting the water, electricity, and gas at the control cabinet end and the equipment. The connections between the water, electricity, and gas systems in the control cabinet do not need to be separated at all, which also greatly reduces the cost of equipment relocation.

[0082] Of course, the invention of the present invention is not limited to the above-mentioned implementation modes. Those skilled in the art may make equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A sputtering coating machine control cabinet, characterized in that: include: A cabinet body (100), wherein a partition plate (110) is provided inside the cabinet body (100) extending from top to bottom, wherein the partition plate (110) divides the inner cavity of the cabinet body (100) into a front chamber (101) and a rear chamber (102), and a cabinet door assembly capable of opening the front chamber (101) and the rear chamber (102) is provided on the left side and / or the right side of the cabinet body (100); Wherein, the rear chamber (102) is provided with a water channel installation assembly for installing water channel components and an air channel installation assembly for installing air channel components; The front chamber (101) is provided with a power supply installation component for installing a process output power supply and a control device installation component for installing a circuit control device.

2. The sputtering coating machine control cabinet according to claim 1, characterized in that: A first door body (210) capable of opening the front chamber (101) is arranged on the left side of the cabinet body (100); the first door body (210) is provided with an air inlet (211) and an air outlet (212); one of the air inlet (211) and the air outlet (212) is provided with a filter, and the other is provided with a fan.

3. The sputtering coating machine control cabinet according to claim 1, characterized in that: A second door body (220) capable of opening the rear chamber (102) is arranged on the left side of the cabinet body (100); the second door body (220) is provided with a waterway inlet (221) and a waterway outlet (222); the waterway inlet (221) and the waterway outlet (222) are used for the inlet and outlet of a main water pipe or for setting a main water pipe joint.

4. The sputtering coating machine control cabinet according to claim 1, characterized in that: The right side of the cabinet body (100) is provided with a third door body (230) capable of opening the front chamber (101) and a fourth door body (240) capable of opening the rear chamber (102).

5. The sputtering coating machine control cabinet according to claim 1, characterized in that: The water circuit installation assembly comprises a water circuit device installation plate (310) arranged on the rear side wall of the rear chamber (102), and the gas circuit installation assembly comprises a gas circuit device installation plate (320) arranged on the front side wall of the rear chamber (102).

6. The sputtering coating machine control cabinet according to claim 1 or 5, characterized in that: The power supply installation assembly includes a power supply installation seat (410) arranged on the rear side wall of the front chamber (101), and the control device installation assembly includes a control device installation plate (420) arranged on the front side of the front chamber (101).

7. The sputtering coating machine control cabinet according to claim 6, characterized in that: The front side of the cabinet body (100) is provided with a fifth door (250) capable of opening the front chamber (101).

8. The sputtering coating machine control cabinet according to claim 6, characterized in that: The power supply mounting seat (410) comprises multiple layers of height-adjustable shelves, and the process output power supply is mounted on the shelves.

9. The sputtering coating machine control cabinet according to claim 1, characterized in that: The cabinet body (100) is provided with a bottom frame (120), and the bottom frame (120) is provided with a plurality of threading holes (121) for threading electric wires, water pipes or air pipes.

10. The sputtering coating machine control cabinet according to claim 1, characterized in that: A placement groove (430) is provided on the right side wall of the front chamber (101).

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