Micro-LED device capable of realizing dynamic deflection of light

Abstract

The utility model discloses a Micro-LED device capable of realizing light dynamic deflection, which comprises a Micro-LED light-emitting unit, a DBR reflection unit and a light beam deflection layer unit which are sequentially arranged from bottom to top, and the light beam deflection layer unit comprises a first ITO layer, a first liquid crystal layer, a second ITO layer, a SiO2 crystal layer, a third ITO layer, a second liquid crystal layer and a fourth ITO layer which are sequentially arranged from bottom to top. A plurality of first deflection units which are periodically arranged in the x-axis direction are arranged in the first liquid crystal layer, each first deflection unit is composed of a plurality of first nanometer columns, the cross section areas of the first nanometer columns are sequentially increased in the x-axis direction, and a plurality of second deflection units which are periodically arranged in the y-axis direction are arranged in the second liquid crystal layer. The second deflection unit is composed of a plurality of second nano-columns, wherein the cross section areas of the second nano-columns are sequentially increased in the y-axis direction. According to the utility model, the dynamic deflection of light can be realized, the flexibility is enhanced, the space is saved, and the cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of electronic optics, and in particular to a Micro-LED device capable of realizing dynamic deflection of light. Background Art

[0002] Micro-LED display technology has the characteristics of high luminous efficiency, high brightness, high response speed and reliability, and is gradually developing into the next generation of display technology. Micro-LED has broad application prospects in flat panel display, projection display, AR / VR display, 3D display and other scenarios.

[0003] Traditional Micro-LED directional lighting technology usually uses microelectronic processing technology to manufacture Micro-LED arrays, and then uses optical components (such as metasurfaces, reflectors, etc.) to control the direction of Micro-LED light emission. The following are some common Micro-LED directional lighting technologies:

[0004] 1. Metasurface: Setting a metasurface on the top of Micro-LED can make the light be emitted in a specific direction, such as the Chinese patent with publication number CN 117276450 A. This method can achieve the control of the directional deflection angle of the light direction without using other complex optical elements.

[0005] 2. Reflector: Reflectors are installed around or at the bottom of the Micro-LED array to reflect light in a specific direction, thereby achieving directivity control of the light. However, the shape and surface structure of the reflector will affect the refraction and reflection of the light, thereby affecting the directivity performance.

[0006] These traditional Micro-LED directional emission technologies are usually used to control the fixed deflection direction of light in LED display, lighting and other applications to meet different design requirements and application scenarios. However, the traditional Micro-LED with fixed deflection direction has some shortcomings, such as:

[0007] 1. Limited flexibility: Micro-LEDs with fixed deflection directions limit their flexibility in design. If the deflection direction of light needs to be changed in different application scenarios, traditional designs may require the use of additional optical components or adjustment of the entire layout, increasing complexity and cost.

[0008] 2. Wasted device space: In order to achieve dynamic light deflection, more space is needed to accommodate additional optical components, which is unacceptable, especially in compact designs.

[0009] 3. Higher cost requirements: Additional optical components to achieve dynamic deflection of light will increase manufacturing costs and may lead to greater energy consumption, especially if additional energy is required to drive these components.

[0010] Therefore, how to enable Micro-led devices to have the function of dynamically controlling directional light emission without adding additional optical components is a problem that we urgently need to solve. Utility Model Content

[0011] The purpose of the utility model is to provide a Micro-LED device that can realize dynamic deflection of light in view of the shortcomings of the prior art.

[0012] The Micro-LED device capable of realizing dynamic deflection of light provided by the utility model comprises a Micro-LED light-emitting unit, a DBR reflection unit and a beam deflection layer unit which are sequentially arranged from bottom to top, wherein the beam deflection layer unit comprises a first ITO layer, a first liquid crystal layer, a second ITO layer, a SiO2 crystal layer, a third ITO layer, a second liquid crystal layer and a fourth ITO layer which are sequentially arranged from bottom to top, a plurality of first deflection units which are periodically arranged along the x-axis direction are arranged in the first liquid crystal layer, the first deflection units are composed of a plurality of first nanocolumns whose cross-sectional areas sequentially increase along the x-axis direction, a plurality of second deflection units which are periodically arranged along the y-axis direction are arranged in the second liquid crystal layer, the second deflection units are composed of a plurality of second nanocolumns whose cross-sectional areas sequentially increase along the y-axis direction.

[0013] The first nanorod and the second nanorod are both cylindrical.

[0014] The heights of the first nanocolumn and the second nanocolumn are both 850 nm.

[0015] The arrangement period of the first deflection units along the x-axis in the first liquid crystal layer is 1500 nm.

[0016] The cross-sectional diameter of the first nanocolumns increases successively along the x-axis direction in the first deflection unit, and the diameter ranges from 60 nm to 134 nm. The center distance between adjacent first nanocolumns in the first deflection unit is 250 nm.

[0017] The cross-sectional diameters of the first nanorods located in the first deflection unit along the x-axis direction are 60 nm, 96 nm, 110 nm, 120 nm, 128 nm, and 134 nm, respectively.

[0018] The arrangement period of the second deflection unit along the y-axis in the second liquid crystal layer is 1500 nm.

[0019] The cross-sectional diameter of the second nanocolumns increases successively along the y-axis direction in the second deflection unit, and the diameter ranges from 60 nm to 134 nm. The center distance between adjacent second nanocolumns in the second deflection unit is 250 nm.

[0020] The cross-sectional diameters of the second nanorods located in the second deflection unit along the y-axis direction are 60 nm, 96 nm, 110 nm, 120 nm, 128 nm, and 134 nm, respectively.

[0021] The Micro-LED light-emitting unit includes a sub substrate layer, an aluminum reflector layer, a p-GaN layer, an MQW multi-quantum well layer, and an n-GaN layer arranged in sequence from bottom to top. The DBR reflective unit is arranged on the n-GaN layer. The electrons and holes in the p-GaN layer and the n-GaN layer are recombined in the MQW multi-quantum well layer to form a light-emitting area.

[0022] Compared with the prior art, the utility model has the following advantages:

[0023] 1. A DBR reflection unit is set at the light output side of the Micro-LED light-emitting unit to reflect light of a certain wavelength band, thereby realizing the control of the wavelength of the reflected light; by setting a beam deflection layer unit on the DBR reflection unit, the light of a specific wavelength emitted by the DBR reflection unit undergoes a phase mutation when passing through the first deflection unit, thereby changing the position of the equiphase plane and producing the effect of light deflection; then the voltage applied to the first ITO layer and the second ITO layer is controlled to change the electric field distribution and the arrangement of liquid crystal molecules in the first liquid crystal layer, so that the refractive index of the first liquid crystal layer changes, thereby controlling the deflection angle of the light; when the deflected light passes through the second deflection unit, since the arrangement of the nanocolumns in the second deflection unit is perpendicular to that of the first deflection unit, the light will be deflected in the vertical direction of the first light deflection direction, and then the voltage applied to the third ITO layer and the fourth ITO layer is controlled to change the electric field distribution and the arrangement of liquid crystal molecules in the second liquid crystal layer, so that the refractive index of the second liquid crystal layer changes, thereby realizing the dynamic deflection of light in a certain area.

[0024] 2. By achieving dynamic control of light directly on the Micro-LED light-emitting unit, the use of additional optical components will be reduced, thereby reducing the volume and size of the entire system and reducing space occupancy.

[0025] 3. By optimizing the dynamic pointing luminescence technology, energy consumption can be reduced and energy can be used more efficiently.

[0026] 4. Dynamic directional luminous technology will reduce optical distortion and scattering, thereby improving the display quality and viewing experience, making the displayed content clearer and more realistic.

[0027] The utility model realizes dynamic deflection of light in a specific wavelength band by integrating double-layer liquid crystal into the metasurface, which will bring some major improvements to Micro-LED technology in terms of manufacturing, performance and application, and further promote its application in display, lighting and other fields, especially in 3D display technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a structural schematic diagram of the utility model.

[0029] Figure 2 for Figure 1 Schematic diagram of the cross-sectional structure at AA in the middle.

[0030] Figure 3 for Figure 1 Schematic diagram of the cross-sectional structure at BB in the middle.

[0031] Figure 4 This is a simulation effect diagram of light deflection when an 8V voltage is applied between the first ITO layer and the second ITO layer, and no voltage is applied between the third ITO layer and the fourth ITO layer in the utility model.

[0032] Figure 5 This is a simulation effect diagram of light deflection when no voltage is applied between the first ITO layer and the second ITO layer and 8V voltage is applied between the third ITO layer and the fourth ITO layer in the utility model.

[0033] The marks and corresponding component names shown in the figure are:

[0034] 1. Micro-LED light-emitting unit; 11. sub substrate layer; 12. aluminum reflector layer; 13. p-GaN layer; 14. MQW multi-quantum well layer; 15. n-GaN layer;

[0035] 2. DBR reflector unit;

[0036] 3. beam deflection layer unit; 31. first ITO layer; 32. first liquid crystal layer; 33. second ITO layer; 34. SiO2 crystal layer; 35. third ITO layer; 36. second liquid crystal layer; 37. fourth ITO layer; 38. first deflection unit; 381. first nanocolumn; 39. second deflection unit; 391. second nanocolumn. DETAILED DESCRIPTION

[0037] from Figures 1 to 3It can be seen that the Micro-LED device capable of realizing dynamic deflection of light of the present invention comprises a Micro-LED light-emitting unit 1, a DBR reflective unit 2 and a beam deflection layer unit 3, wherein the Micro-LED light-emitting unit 1 comprises a sub substrate layer 11, an aluminum reflector layer 12, a p-GaN layer 13, an MQW multi-quantum well layer 14, and an n-GaN layer 15 arranged in sequence from bottom to top, and the electrons and holes in the p-GaN layer 13 and the n-GaN layer 15 are recombined in the MQW multi-quantum well layer 14 to form a light-emitting region;

[0038] The DBR reflection unit 2 is disposed on the n-GaN layer 15;

[0039] The beam deflection layer unit 3 is arranged on the DBR reflection unit 2, and includes a first ITO layer 31, a first liquid crystal layer 32, a second ITO layer 33, a SiO2 crystal layer 34, a third ITO layer 35, a second liquid crystal layer 36 and a fourth ITO layer 37 which are arranged in sequence from bottom to top. A plurality of first deflection units 38 which are periodically arranged along the horizontal x-axis direction are arranged in the first liquid crystal layer 32. The first deflection unit 38 is composed of a plurality of first nanorods 381 whose cross-sectional areas increase in sequence along the horizontal x-axis direction. A plurality of second deflection units 39 which are periodically arranged along the horizontal y-axis direction are arranged in the second liquid crystal layer 36. The second deflection unit is composed of a plurality of second nanorods 391 whose cross-sectional areas increase in sequence along the horizontal y-axis direction.

[0040] In the present invention, the first nanorod 381 and the second nanorod 391 are both made of TiO 2 oxide.

[0041] from Figures 1 to 3 It can be seen that the first nanorod 381 and the second nanorod 391 are both cylinders.

[0042] In the present invention, the heights of the first nanorod 381 and the second nanorod 391 are both 850 nm.

[0043] from Figure 2 It can be seen that, in the present invention, the arrangement period L1 of the first deflection unit 38 along the horizontal x-axis in the first liquid crystal layer 32 is 1500 nm.

[0044] from Figure 2 It can be seen that in the present invention, the cross-sectional diameter of the first nanocolumns 381 increases successively along the horizontal x-axis direction in the first deflection unit 38, and its diameter ranges from 60nm to 134nm; in each first deflection unit 38, the center distance d1 between the first nanocolumns 381 adjacently arranged along the horizontal x-axis is 250nm, and the center distance d2 between the first nanocolumns 381 adjacently arranged along the horizontal y-axis is 250nm.

[0045] In the present invention, the cross-sectional diameters of the first nanorods 381 in the first deflection unit 38 are 60 nm, 96 nm, 110 nm, 120 nm, 128 nm, and 134 nm respectively along the horizontal x-axis direction.

[0046] from Figure 3 It can be seen that, in the present invention, the arrangement period L2 of the second deflection unit 39 along the horizontal y-axis in the second liquid crystal layer 36 is 1500 nm.

[0047] from Figure 3 It can be seen that in the present invention, the cross-sectional diameter of the second nanocolumns 391 increases successively along the horizontal y-axis direction in the second deflection unit 39, and its diameter range is 60nm to 134nm; in each second deflection unit 39, the center distance d3 between the second nanocolumns 391 adjacently arranged along the horizontal y-axis is 250nm, and the center distance d4 between the second nanocolumns 391 adjacently arranged along the horizontal x-axis is 250nm.

[0048] In the present invention, the cross-sectional diameters of the second nanorods 391 located in the second deflection unit 39 are 60 nm, 96 nm, 110 nm, 120 nm, 128 nm, and 134 nm respectively along the horizontal y-axis direction.

[0049] The manufacturing process of the Micro-LED light-emitting unit 1 in the utility model is as follows:

[0050] An aluminum reflector layer 12 is set on the sub substrate layer 11, and then a p-GaN layer 13, an MQW multi-quantum well layer 14, and an n-GaN layer 15 are grown on the aluminum reflector layer 12 as the basic structure of the device. The electrons and holes in the p-GaN layer 13 and the n-GaN layer 15 are recombined in the MQW multi-quantum well layer 14 to serve as the light-emitting area.

[0051] The principle of the utility model to realize dynamic deflection of light is as follows:

[0052] 1. By modifying the structure control of the DBR reflection unit 2, the light emitted by the Micro-LED light-emitting unit 1 will reflect the light of a specific wavelength band when passing through the DBR reflection unit 2;

[0053] 2. When the light of a specific wavelength output by the DBR reflection unit 2 passes through the first deflection unit 38, according to the generalized Snell's law, the light undergoes a phase mutation in the propagation of the first nanorod 381, thereby changing the position of the equiphase plane, and producing a light deflection effect in a certain fixed direction; then the voltage applied between the first ITO layer 31 and the second ITO layer 33 is controlled, thereby changing the electric field distribution and the arrangement of liquid crystal molecules in the first liquid crystal layer 32, causing the refractive index of the first liquid crystal layer 32 to change, thereby controlling the deflection angle of the light;

[0054] 3. When the deflected light passes through the second liquid crystal layer 36, since the direction of the periodic arrangement of the second nanocolumns 391 is horizontally perpendicular to the direction of the periodic arrangement of the first nanocolumns 381, the light will be deflected in the vertical direction of the first light deflection direction. Then, the voltage applied between the third ITO layer 35 and the fourth ITO layer 37 is controlled to change the electric field distribution and the arrangement of liquid crystal molecules in the second liquid crystal layer 36, so that the refractive index of the second liquid crystal layer 36 changes, and the dynamic deflection of light of a specific wavelength band in a certain area can be achieved.

[0055] The utility model overcomes the problems of insufficient flexibility, wasted device space, and high cost requirements of traditional Micro-LEDs, and has many advantages, such as:

[0056] 1. Enhanced flexibility: Micro LED devices that integrate double-layer liquid crystals into metasurfaces to achieve dynamic light deflection allow the deflection direction of light to be adjusted as needed, thereby enhancing flexibility and customizability in different application scenarios.

[0057] 2. Save space: No additional optical components are needed to adjust the direction of light, which saves space and can be better integrated into various devices and systems, which is very beneficial especially in occasions with limited space.

[0058] 3. Reduced costs: Reducing the use of additional optical components can reduce costs and also reduce energy consumption because the new design can use energy more efficiently.

[0059] Therefore, Micro-LED, which integrates double-layer liquid crystal into the metasurface to achieve dynamic deflection of light, has the potential to improve the shortcomings of existing technologies, and is expected to improve the performance and application scope of LED display and lighting and other fields, and be applied in 3D display technology. By controlling the light-emitting direction of Micro-LED, it can emit light at different positions and angles, thereby achieving more accurate depth perception and enhanced stereoscopic effects, which can bring more realistic visual effects to 3D displays and give viewers a more immersive experience.

Claims

1. A Micro-LED device capable of achieving dynamic light deflection, characterized in that: The invention comprises a Micro-LED light-emitting unit (1), a DBR reflection unit (2) and a beam deflection layer unit (3) which are sequentially arranged from bottom to top, wherein the beam deflection layer unit comprises a first ITO layer (31), a first liquid crystal layer (32), a second ITO layer (33), a SiO2 crystal layer (34), a third ITO layer (35), a second liquid crystal layer (36) and a fourth ITO layer (37) which are sequentially arranged from bottom to top, a plurality of first deflection units (38) which are periodically arranged along the x-axis direction are arranged in the first liquid crystal layer, the first deflection units are composed of a plurality of first nanocolumns (381) whose cross-sectional areas sequentially increase along the x-axis direction, a plurality of second deflection units (39) which are periodically arranged along the y-axis direction are arranged in the second liquid crystal layer, the second deflection units are composed of a plurality of second nanocolumns (391) whose cross-sectional areas sequentially increase along the y-axis direction.

2. The Micro-LED device capable of achieving dynamic light deflection according to claim 1, characterized in that: The first nanorod and the second nanorod are both cylindrical.

3. The Micro-LED device capable of achieving dynamic light deflection according to claim 1, characterized in that: The heights of the first nanocolumn and the second nanocolumn are both 850 nm.

4. The Micro-LED device capable of achieving dynamic light deflection according to claim 2, characterized in that: The arrangement period of the first deflection units along the x-axis in the first liquid crystal layer is 1500 nm.

5. The Micro-LED device capable of achieving dynamic light deflection according to claim 4, characterized in that: The cross-sectional diameter of the first nanocolumns increases successively along the x-axis direction in the first deflection unit, and the diameter ranges from 60 nm to 134 nm. The center distance between adjacent first nanocolumns in the first deflection unit is 250 nm.

6. The Micro-LED device capable of achieving dynamic light deflection according to claim 5, characterized in that: The cross-sectional diameters of the first nanorods located in the first deflection unit along the x-axis direction are 60 nm, 96 nm, 110 nm, 120 nm, 128 nm, and 134 nm, respectively.

7. The Micro-LED device capable of achieving dynamic light deflection according to claim 2, characterized in that: The arrangement period of the second deflection unit along the y-axis in the second liquid crystal layer is 1500 nm.

8. The Micro-LED device capable of achieving dynamic light deflection according to claim 7, characterized in that: The cross-sectional diameter of the second nanocolumns increases successively along the y-axis direction in the second deflection unit, and the diameter ranges from 60 nm to 134 nm. The center distance between adjacent second nanocolumns in the second deflection unit is 250 nm.

9. The Micro-LED device capable of achieving dynamic light deflection according to claim 8, characterized in that: The cross-sectional diameters of the second nanorods located in the second deflection unit along the y-axis direction are 60 nm, 96 nm, 110 nm, 120 nm, 128 nm, and 134 nm, respectively.

10. The Micro-LED device capable of achieving dynamic light deflection according to claim 1, characterized in that: The Micro-LED light-emitting unit comprises a sub-substrate layer (11), an aluminum reflector layer (12), a p-GaN layer (13), an MQW multi-quantum well layer (14), and an n-GaN layer (15) which are arranged in sequence from bottom to top; the DBR reflective unit (2) is arranged on the n-GaN layer; and electrons and holes in the p-GaN layer and the n-GaN layer are recombined in the MQW multi-quantum well layer to form a light-emitting region.

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