Ultrafine bubble generating device and super-hydrophobic water film device system

Through the ultrafine bubble generation device and the superhydrophobic water membrane device system, the problem of water dropping due to mechanical vibration in the etching process is solved, and a superhydrophobic water membrane with high stability and reliability is achieved, which improves the protection effect of the water membrane on the surface of the battery cell.

CN222816620UActive Publication Date: 2025-05-02SUZHOU KZONE EQUIP TECH
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Patent Information

Application Number
CN202421651254.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-12
Publication Date
2025-05-02
Estimated Expiration
2034-07-12

AI Technical Summary

Technical Problem

In the existing BSG and PSG plating and etching processes, the water film is prone to drop water due to mechanical vibration during the transmission process, resulting in the process surface being exposed to an acidic atmosphere, reducing production stability.

Method used

Using ultrafine bubble generation device and superhydrophobic water membrane device system, stable ultrafine nanobubble is generated through the Venturi tube, and a highly hydrophobic water membrane is formed, which increases the contact angle and tension of the water membrane and improves the stability of the water membrane.

Benefits of technology

It significantly improves the stability and reliability of the water film, extends the holding time in the saturation state, reduces the water drop rate, and improves the protection effect of the water film on the surface of the battery cell.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides an ultra-fine bubble generating device and super-hydrophobic water film device system, the ultra-fine bubble generating device comprises a shell and a venturi tube, the venturi tube comprises a gradually shrinking cavity, a straight cylinder cavity and a gradually expanding cavity which are communicated in sequence, the gradually shrinking cavity is provided with a water inlet, the straight cylinder cavity is provided with an air inlet, and the gradually expanding cavity is provided with a water outlet. An atomizing nozzle is arranged at the outlet end of the divergent cavity, the atomizing nozzle is partially located in the shell, and a water outlet is formed in the shell. The device is simple in structure, high in stability of state, size and concentration of generated bubbles, and suitable for forming hydrophobic membranes.
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Description

Technical Field

[0001] The utility model belongs to the technical field of ultrafine bubble generation, and in particular relates to an ultrafine bubble generation device and an ultra-hydrophobic water film device system. Background Art

[0002] At present, the manufacturing process of photovoltaic TOPCon cells usually involves two diffusion processes: boron diffusion (BSG) and phosphorus diffusion (PSG). Since the diffusion process is carried out in a gas phase atmosphere, a small amount of deposition (i.e., winding plating) is also inevitable on the edge of the non-process surface during the film formation process on the process surface. These winding plating layers will short-circuit the front and back sides of the silicon wafer, causing serious leakage of the battery, which greatly affects the comprehensive electrical performance of the cell. Therefore, the winding plating layer must be stably and thoroughly removed. For the removal of the winding plating layer, the water film protection or exhaust protection of the process surface on the cell is generally adopted. The winding plating surface is transmitted on a roller with specific patterns, and the lower half of the roller is immersed in a specific concentration of hydrofluoric acid. As the conveying process proceeds, the roller immersed in the potion will continuously bring hydrofluoric acid to the winding plating surface of the cell as the body rotates, thereby realizing the etching and removal of BSG or PSG on the winding plating surface, and through the protection of the front water film or the removal of acid gas, the diffusion layer can be prevented from being damaged by acid gas.

[0003] CN102386086A adopts the scheme of back roller with liquid and back acid gas discharge, but in the actual production process, this method is extremely unstable. First, since the roller with liquid itself is easy to turn up the liquid at the tail, and since the process surface is not protected by a medium, the turned-up liquid will directly cause the diffusion layer at the edge of the upper surface process surface to be destroyed. Secondly, the protection scheme for acid gas discharge is not reliable, and the silicon wafer process surface is still exposed to the overall acidic atmosphere, and the diffusion layer will be damaged during the entire etching process. CN112309913A solves the problem of the tail turning up of the battery cell, that is, by spraying part of the pure water on the process surface of the battery cell, a dense water film is formed on the surface to prevent the influence of acid gas on the diffusion layer during the etching process, so that the stability is improved to a certain extent, but it cannot solve the stability problem from the root. During the etching process, the water film on the upper surface process surface will vibrate during the transmission process due to mechanical transmission. The water film will drop water due to vibration, which reduces the concentration of the medicine on the one hand and exposes the process surface to the acidic atmosphere on the other hand. When the roller rotates, there is also a probability that the tail will flip over. After the liquid flips over to the process surface, the hydrofluoric acid will micro-etch the diffusion layer of the process surface, reducing the stability of the production process. Especially when the equipment capacity requirements are getting higher and higher and the conveying speed is getting faster and faster, the probability of water film falling off is higher, and the probability of defects is also higher.

[0004] It is known that the existing BSG and PSG plating etching, which uses a roller to carry liquid to bring hydrofluoric acid to the back of the cell, that is, to etch the plating surface, still has many defects. In view of the above problems, if the medium of the water film is directly replaced, for example, the water film is replaced with an ink coating, and then removed after the etching is completed, but because a new medium needs to be introduced into the process system, it will have unpredictable consequences on the process results, and additional costs will be incurred. Therefore, it is also necessary to improve the original water film to fundamentally solve the above problems. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of the utility model is to provide an ultrafine bubble generating device and a super hydrophobic water film device system, which can generate ultrafine nano bubbles in a saturated state in an environment under standard atmospheric pressure and form a protective water film, thereby improving the hydrophobicity of the water film and facilitating the extension of the saturated state maintenance time, and having higher stability and reliability.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] In the first aspect, the utility model provides an ultrafine bubble generating device, which includes a shell and a venturi tube, wherein the venturi tube is located outside the shell, and the venturi tube includes a tapered cavity, a straight cavity and a gradually expanding cavity which are connected in sequence, the tapered cavity is provided with a water inlet, the straight cavity is provided with an air inlet, the outlet end of the gradually expanding cavity is provided with an atomizing nozzle, the atomizing nozzle portion is located in the shell, and the shell is provided with a water outlet.

[0008] The ultrafine bubble generating device of the utility model is based on the Bernoulli principle, adopts a Venturi tube for air intake, and utilizes the incoming water to actively draw air in, so that the incoming water carries the incoming air, which is atomized and released in the shell by the atomizing nozzle, and the sprayed bubble water is deposited at the bottom of the shell, and the incoming air converges at the top and continues to dissolve with the atomized water. When the pressure in the shell is balanced, the liquid level is synchronously balanced, and the size, state and concentration of the generated bubbles are highly stable.

[0009] Compared with the traditional bubble generating device used for dissolved air sterilization or bacteriostasis, which adopts a spiral cutting method to cut the water into small particles, uses a high-speed liquid flow to suck the gas into its spiral flow channel, and mixes the gas and liquid in the flow channel to form the required bubble water, the water in the ultra-fine bubble generating device of the utility model presents a steady flow state, the bubble size is small, the microbubble concentration is high, and the contact angle of the water surface can be significantly improved, which is particularly suitable for the formation of super-hydrophobic water film.

[0010] As a preferred technical solution of the utility model, a pressure detection component is also provided on the housing.

[0011] As a preferred technical solution of the utility model, a first back-pressure valve is further provided at the water outlet of the shell, and the first back-pressure valve is electrically connected to the pressure detection component.

[0012] The utility model utilizes a pressure detection component to detect the pressure condition in the shell in real time, and is electrically connected to a first back pressure valve. When the pressure in the shell reaches a set value, the first back pressure valve will be pushed open by water, thereby delivering water to the process demand unit.

[0013] As a preferred technical solution of the utility model, a safety valve is also provided on the housing.

[0014] It should be noted that those skilled in the art may set the safety valve on the top of the shell according to actual conditions to eliminate potential safety hazards when the pressure in the shell is too high.

[0015] In the second aspect, the utility model provides a super-hydrophobic water film device system, which includes a liquid storage device, a spray device, an external air source, and the ultra-fine bubble generating device described in the first aspect, the water inlet of the venturi tube is connected to the liquid storage device, the air inlet of the venturi tube is connected to the external air source, and the water outlet of the shell is connected to the spray device.

[0016] The utility model sprays the bubbles generated by the ultrafine bubble generating device onto the surface of the material to form a water film, the contact angle of the saturated bubble water surface is obviously increased, the tension is significantly improved, the stability of the water film is improved, and it is not easy to fall off.

[0017] As a preferred technical solution of the utility model, the liquid storage device is connected to the Venturi tube through a water inlet pipe, and a circulation drive pump, a first throttle valve and a first flow detection component are sequentially arranged on the water inlet pipe along the water inlet flow direction.

[0018] As a preferred technical solution of the utility model, the external air source is connected to the Venturi tube through an air intake pipe, and a second throttle valve and a second flow detection component are sequentially arranged on the air intake pipe along the air intake flow direction.

[0019] The utility model utilizes a circulating drive pump to pump pure water in a liquid storage device into a venturi tube, and utilizes a first throttle valve and a first flow detection component to accurately control the water intake, while utilizing a second throttle valve and a second flow detection component to accurately control the air intake to ensure that the steam-water ratio meets the requirements.

[0020] As a preferred technical solution of the utility model, the spray device is connected to the shell through a water outlet pipe, and an automatic regulating valve is provided on the water outlet pipe.

[0021] As a preferred technical solution of the utility model, the spray device includes a spray head assembly.

[0022] As a preferred technical solution of the utility model, the liquid storage device is also connected to the water outlet pipeline through a water outlet branch pipe, and a second back pressure valve is provided on the water outlet branch pipe.

[0023] Compared with the prior art, the beneficial effects of the utility model are:

[0024] The utility model provides an ultrafine bubble generating device and an ultra-hydrophobic water film device system, which utilize the passage and state of air to form ultrafine bubbles, so that the bubble size, state and concentration have high stability, which is beneficial to prolonging the retention time of the saturated state, increasing the contact angle of the water film, and realizing lossless improvement of the surface tension of the water body, making it difficult for the water to fall off the surface of the battery cell, thereby effectively improving the stability of the water film. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A schematic diagram of the structure of the ultrafine bubble generating device provided in Example 1 of the utility model;

[0026] Figure 2 This is a schematic structural diagram of the super-hydrophobic water film device system provided in Example 2 of the utility model.

[0027] Among them, 1-shell; 101-water outlet; 102-first back pressure valve; 2-Venturi tube; 201-gradually converging chamber; 202-straight cylinder chamber; 203-gradually expanding chamber; 204-air inlet; 205-atomizing nozzle; 206-water inlet; 3-pressure detection component; 4-safety valve; 5-liquid storage device; 501-water inlet pipe; 502-circulation drive pump; 503-first throttle valve; 504-first flow detection component; 505-water outlet branch pipe; 506-second back pressure valve; 6-spraying device; 601-water outlet pipe; 602-automatic regulating valve; 7-external air source; 701-air inlet pipe; 702-second throttle valve; 703-second flow detection component. DETAILED DESCRIPTION

[0028] It should be understood that, in the description of the present utility model, the terms "center", "upper", "lower", "front", "back", "left", "right", "horizontal", "top", "bottom", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0029] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0030] Those skilled in the art should understand that the present invention necessarily includes necessary pipelines, conventional valves and general pump equipment for realizing a complete process, but the above content does not constitute the main improvement of the present invention. Those skilled in the art can add layouts on their own based on the process flow and equipment structure selection, and the present invention does not make special requirements or specific limitations on this.

[0031] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0032] In a specific embodiment, the utility model provides an ultrafine bubble generating device, including a shell and a venturi tube, wherein the venturi tube is located outside the shell, and the venturi tube includes a gradually converging chamber, a straight cylinder chamber and a gradually expanding chamber connected in sequence, wherein the gradually converging chamber is provided with a water inlet, wherein the straight cylinder chamber is provided with an air inlet, and wherein the outlet end of the gradually expanding chamber is provided with an atomizing nozzle, wherein the atomizing nozzle is partially located in the shell, and wherein the shell is provided with a water outlet. The inner diameter of the gradually expanding chamber in the venturi tube gradually decreases from its end to the direction connected to the straight cylinder chamber, wherein the straight cylinder chamber has an equal diameter structure, and the inner diameter of the gradually expanding chamber gradually increases from one end connected to the straight cylinder chamber to one end provided with the atomizing nozzle. During the application process, pure water is used as the medium and injected into the Venturi tube from the water inlet. Based on the Bernoulli principle, air is injected from the air inlet, and the water inlet is used to actively inhale air, so that the outlet water carries air, which is atomized and released in the shell by the atomizing nozzle. The sprayed bubble water is deposited at the bottom of the shell, and the intake air converges at the top and continues to dissolve with the atomized water. The utility model does not make special requirements for the shape, size and material of the shell, and those skilled in the art can adjust it according to specific circumstances. The design working pressure of the water inlet is ≥1.5kg·f / cm 2 .

[0033] In some embodiments, the housing is also provided with a pressure detection assembly. The utility model does not make any special requirements for the type of the pressure detection assembly, and a commonly used pressure measuring instrument in the art may be used, for example, a liquid column pressure measuring instrument, an elastic pressure measuring instrument, a load pressure measuring instrument, or an electrical pressure measuring instrument.

[0034] Furthermore, a first back pressure valve is also provided at the water outlet of the shell, and the first back pressure valve is electrically connected to the pressure detection assembly. During the application process, the pressure detection assembly is used to detect the pressure in the shell in real time, and is electrically connected to the first back pressure valve. The pressure in the shell is balanced by the pressure detection assembly and the first back pressure valve. When the pressure in the shell reaches the set value, the first back pressure valve will be pushed open by the bubble water, so as to be transported to the process demand unit.

[0035] In some embodiments, a safety valve is also provided on the shell. In the utility model, the atomizing nozzle extends into the shell from the top of the shell, and the bubble water released by the atomizing nozzle extends inside the shell. Those skilled in the art can set the safety valve on the top of the shell according to actual conditions, so as to eliminate potential safety hazards when the pressure in the shell is too high. The utility model does not specifically limit the type of safety valve, and can adopt safety valve components commonly used in the field, including but not limited to heavy hammer lever safety valves, spring micro-opening safety valves and pulse safety valves. In order to further improve operational safety, an audible and visual alarm can be provided on the shell, so that it is electrically connected to the pressure detection assembly, so as to remind the staff to promptly check the problem when the pressure in the shell exceeds the safety value, and eliminate the safety threat by using the safety valve or other favorable measures.

[0036] In another specific embodiment, the utility model provides a super-hydrophobic water film device system, including a liquid storage device, a spray device, an external air source, and an ultra-fine bubble generating device described in a specific embodiment, wherein the water inlet of the venturi tube is connected to the liquid storage device, the air inlet of the venturi tube is connected to the external air source, and the water outlet of the shell is connected to the spray device. The saturated micro-nano bubble water generated by the ultra-fine bubble generating device will present a "smoking" state in an environment under standard atmospheric pressure, and this state will last for a long time and have high stability; the bubble water is sprayed on the surface of the material by the spray device to form a water film, and the saturated bubble water significantly increases the contact water of the surface of the material, and the tension increases accordingly, which protects the material, and the water film has high stability, which greatly improves the transportation stability.

[0037] In some embodiments, the liquid storage device is connected to the venturi tube via a water inlet pipe, and a circulation drive pump, a first throttle valve and a first flow detection assembly are sequentially arranged on the water inlet pipe along the water inlet flow direction. The liquid storage device is also provided with necessary connecting pipelines and switch control valves, which are not specifically limited in the present utility model. The technicians in this field need to reasonably adjust, add or delete according to the actual production needs. It should be clear that the new technical solutions generated by deleting some unnecessary connecting pipelines and switch control valves, or replacing the single-function switch control valve with a multi-function integrated control valve, or an automatic control system electrically connected to the switch control valve to control the opening of the corresponding valve, etc., which are commonly used and well-known conventional technical means by those skilled in the art, also fall within the scope of disclosure and protection of the present utility model.

[0038] Furthermore, the external air source is connected to the venturi tube through an air intake pipe, and a second throttle valve and a second flow detection component are sequentially arranged on the air intake pipe along the air intake flow direction. The utility model uses a circulating drive pump to pump pure water in the liquid storage device into the venturi tube, and uses the first throttle valve and the first flow detection component to accurately control the water intake, and uses the second throttle valve and the second flow detection component to accurately control the air intake, so as to ensure that the steam-water ratio meets the requirements.

[0039] In some embodiments, the spray device is connected to the shell through a water outlet pipe, and an automatic regulating valve is provided on the water outlet pipe. At the same time, the liquid storage device is also connected to the water outlet pipe through a water outlet branch pipe, and a second back pressure valve is provided on the water outlet branch pipe. When the material needs to spray a water film, the automatic regulating valve can be opened, and the back pressure valve of the pipeline is automatically closed due to the reduction of pipeline pressure; the spray device sprays the bubble water in a waterfall state, and the bubble water enters a standard atmospheric pressure state from the working pressure state in the pipe, and the air dissolved in the bubble water quickly enters a supersaturated state; the supersaturated air quickly cavitates in the water film and forms high-density microbubbles in the water film. Due to the supersaturated state of the air, the bubbles continue to rupture quickly and present a "smoking" state. When the surface of the material is sprayed with bubble water to form a water film, the automatic regulating valve is closed, and the pressure in the pipeline increases. When the pressure exceeds the set value pressure of the second back pressure valve, the second back pressure valve is automatically opened, so that the pure water flows back to the liquid storage device. Since the circulation drive pump and the ultra-fine bubble generating device are always in working condition, the water in the circulation pipeline is always in a continuous and stable flow state, and cavitation only occurs when the spray device sprays bubble water. This is essentially different from the traditional bubble generating device. The utility model is extremely stable and reliable.

[0040] Specifically, the spray device includes a spray head assembly. The spray device is also provided with necessary connecting pipes and switch control valves, which are not specifically limited in the present invention. Those skilled in the art need to reasonably adjust, add or delete according to actual production needs. It should be clear that new technical solutions generated by deleting some unnecessary connecting pipes and switch control valves, or replacing a single-function switch control valve with a multi-function integrated control valve, or an automatic control system electrically connected to an external device and a switch control valve to control the opening of a corresponding valve, etc., which are commonly used and well-known conventional technical means by those skilled in the art, also fall within the disclosure scope and protection scope of the present invention.

[0041] The super-hydrophobic water film device system provided by the utility model has a wide range of applications and can be applied to any scenario where a water film is to be formed. It is particularly suitable for forming a protective water film on the surface of photovoltaic cells, which can greatly reduce the water drop rate, thereby reducing the acid consumption during the PSG and BSG etching process and improving the stability of the cell etching.

[0042] Example 1

[0043] This embodiment provides an ultra-fine bubble generating device, such as Figure 1 As shown, it includes a shell 1 and a venturi tube 2. The venturi tube 2 includes a gradually converging chamber 201, a straight cylinder chamber 202 and a gradually expanding chamber 203 which are connected in sequence. The gradually converging chamber 201 is provided with a water inlet 206, the straight cylinder chamber 202 is provided with an air inlet 204, and the outlet end of the gradually expanding chamber 203 is provided with an atomizing nozzle 205. The atomizing nozzle 205 extends into the shell 1 from the top of the shell 1, and a water outlet 101 is provided at the bottom of the shell 1. A first back pressure valve 102 is also provided at the water outlet 101 of the shell 1. A pressure detection component 3 is also provided on the shell 1, and is electrically connected to the first back pressure valve 102. A safety valve 4 is also provided on the shell 1.

[0044] Example 2

[0045] This embodiment provides a super hydrophobic water membrane device system, such as Figure 2 As shown, it includes a liquid storage device 5, a spray device 6, an external air source 7 and an ultrafine bubble generating device. And the structure of the ultrafine bubble generating device is exactly the same as that of Example 1, which will not be described here. The liquid storage device 5 is connected to the water inlet 206 of the venturi tube 2 through an inlet pipe 501, and a circulation drive pump 502, a first throttle valve 503 and a first flow detection component 504 are sequentially arranged on the inlet pipe 501 along the direction of water inlet flow. The external air source 7 is connected to the air inlet 204 of the venturi tube 2 through an inlet pipe 701, and a second throttle valve 702 and a second flow detection component 703 are sequentially arranged on the inlet pipe 701 along the direction of air inlet flow. The spray device 6 includes a nozzle assembly, which is connected to the water outlet 101 of the shell 1 through an outlet pipe 601, and an automatic regulating valve 602 is arranged on the outlet pipe 601. The liquid storage device 5 is also connected to the water outlet pipe 601 through the water outlet branch pipe 505, and the water outlet branch pipe 505 is provided with a second back pressure valve 506. The circulation drive pump 502 extracts the pure water in the liquid storage device 5 and transports it into the ultra-fine bubble generating device, and accurately controls the water intake through the first throttle valve 503 and the first flow detection component 504, and accurately controls the air intake by the second throttle valve 702 and the second flow detection component 703, thereby ensuring the air-water ratio. During the application process, when the material is transferred to the bottom of the nozzle assembly, the automatic regulating valve 602 is automatically opened, and the second back pressure valve 506 is closed, and the bubble water is sprayed on the surface of the material by the nozzle assembly to form a high-density micro-bubble water film; after the surface of the material is sprayed with bubble water, the automatic regulating valve 602 is closed, and the second back pressure valve 506 is opened to return the water in the shell 1 to the liquid storage device 5.

[0046] The applicant declares that the above is only a specific implementation method of the present utility model, but the protection scope of the present utility model is not limited thereto. The technicians in the relevant technical field should understand that any changes or substitutions that can be easily thought of by the technicians in the relevant technical field within the technical scope disclosed in the present utility model fall within the protection scope and disclosure scope of the present utility model.

Claims

1. An ultrafine bubble generating device, characterized in that: The ultrafine bubble generating device comprises a shell and a venturi tube, wherein the venturi tube is located outside the shell, and the venturi tube comprises a tapered cavity, a straight cavity and a gradually expanding cavity which are connected in sequence, the tapered cavity is provided with a water inlet, the straight cavity is provided with an air inlet, an atomizing nozzle is provided at the outlet end of the gradually expanding cavity, the atomizing nozzle part is located inside the shell, and the shell is provided with a water outlet.

2. The ultrafine bubble generating device according to claim 1, characterized in that: The housing is also provided with a pressure detection component.

3. The ultrafine bubble generating device according to claim 2, characterized in that: A first back-pressure valve is also provided at the water outlet of the shell, and the first back-pressure valve is electrically connected to the pressure detection component.

4. The ultrafine bubble generating device according to claim 1, characterized in that: The housing is also provided with a safety valve.

5. A super-hydrophobic water membrane device system, characterized in that: The super-hydrophobic water film device system includes a liquid storage device, a spray device, an external air source, and the ultra-fine bubble generating device described in any one of claims 1 to 4, the water inlet of the venturi tube is connected to the liquid storage device, the air inlet of the venturi tube is connected to the external air source, and the water outlet of the shell is connected to the spray device.

6. The super-hydrophobic water film device system according to claim 5, characterized in that: The liquid storage device is connected to the Venturi tube via a water inlet pipe, and a circulation drive pump, a first throttle valve and a first flow detection component are sequentially arranged on the water inlet pipe along the water inlet flow direction.

7. The super-hydrophobic water film device system according to claim 5, characterized in that: The external air source is connected to the Venturi tube through an air intake pipe, and a second throttle valve and a second flow detection component are sequentially arranged on the air intake pipe along the air intake flow direction.

8. The super-hydrophobic water film device system according to claim 5, characterized in that: The spray device is connected to the shell through a water outlet pipe, and an automatic regulating valve is arranged on the water outlet pipe.

9. The super-hydrophobic water membrane device system according to claim 8, characterized in that: The spray device comprises a spray head assembly.

10. The super-hydrophobic water membrane device system according to claim 8, characterized in that: The liquid storage device is also connected to the water outlet pipeline via a water outlet branch pipe, and a second back pressure valve is arranged on the water outlet branch pipe.

Citation Information

Patent Citations

  • Roller and etching cleaning machine

    CN102386086A

  • Roller with liquid for wet etching and wet etching method

    CN112309913A