Magnetic filtering device

Abstract

The present application provides a magnetic filtration apparatus including: a transfer tray including at least one first magnet, supporting at least one substrate spaced apart from the at least one first magnet in a first direction, and configured to be movable in the first direction and in a direction opposite to the first direction; and a magnetic assembly disposed on the transfer tray, configured to be rotatable about a rotation axis extending in a second direction crossing the first direction, and including a second magnet. Further, the magnetic filtration apparatus includes a rotation control member including a rotation control magnet overlapping with at least one of the second magnets in the third direction, and configured to move the rotation control magnet in the third direction and a direction opposite to the third direction.

Description

Technical Field

[0001] The utility model relates to a magnetic filtering device, and more particularly to a magnetic filtering device comprising a magnet. Background Art

[0002] A ratchet gear can be used for objects that are rotated to achieve position control and rotation control. The ratchet gear can be operated by saw teeth fixed to the shaft so that the object can be stopped at a desired position.

[0003] However, when the ratchet gear is used for a long time, gear corrosion may occur due to foreign matter (particles) and the surrounding environment. In particular, in a clean room, such foreign matter may cause equipment failure during the process.

[0004] The above-described contents are only used to help understand the background technology of the technical concept of the present invention, and therefore should not be understood as being equivalent to the contents of the prior art known to technicians in the technical field to which the present invention belongs. Utility Model Content

[0005] Technical issues to be solved

[0006] Embodiments of the utility model provide a magnetic filtering device for removing foreign matter on a substrate with improved reliability. For example, the magnetic filtering device may include a magnetic assembly that rotates efficiently and effectively on a conveyor tray without generating undesired foreign matter. Therefore, the magnetic assembly can remove foreign matter on a substrate with high reliability.

[0007] Workaround

[0008] According to one embodiment of the utility model, the magnetic filtering device includes: a conveying tray, including at least one first magnet, supporting at least one substrate spaced apart from the at least one first magnet in a first direction, and configured to be able to move in the first direction and a direction opposite to the first direction; a magnetic assembly, arranged above the conveying tray, configured to be able to rotate around a rotation axis extending in a second direction intersecting the first direction, and including a second magnet; and a rotation control member, including a rotation control magnet overlapping with at least one of the second magnets in a third direction intersecting the first direction and the second direction, and configured to enable the rotation control magnet to move in the third direction and a direction opposite to the third direction.

[0009] The magnetic assembly may include: a magnetic filter member overlapping the conveying tray in the third direction and including one or more third magnets among the second magnets; and a magnetic gear connected to the magnetic filter member in a manner adjacent to the magnetic filter member in the second direction and configured to rotate together with the magnetic filter member and overlapping the rotation control member in the third direction.

[0010] The magnetic gear may include one or more fourth magnets among the second magnets.

[0011] The magnetic gear may have a shape of a faceted cylinder aligned with the rotation axis as a reference, and the one or more fourth magnets may be arranged on a surface of the faceted cylinder facing the rotation control member according to the rotation of the magnetic filtering member about the rotation axis.

[0012] The rotation control magnet may have a polarity of an N pole, and the one or more fourth magnets may have a polarity of an S pole.

[0013] The rotation control magnet may have a polarity of an S pole, and the one or more fourth magnets may have a polarity of an N pole.

[0014] The rotation control member may be configured to increase a magnetic force between the rotation control magnet and the fourth magnet by moving to reduce a distance between the rotation control magnet and the magnetic gear, thereby suppressing the rotation of the magnetic gear.

[0015] The magnetic filter member may have a shape of a faceted cylinder aligned with the rotation axis as a reference, and the one or more third magnets are arranged on a surface of the faceted cylinder facing the conveying tray according to the rotation of the magnetic filter member about the rotation axis.

[0016] The magnetic filter member may have a shape of a hexagonal cylinder aligned with the rotation axis as a reference.

[0017] The magnetic filtration device may further include: a first supporting member extending in the third direction, wherein the conveying tray may be configured to be movable in the first direction and a direction opposite to the first direction relative to the first supporting member.

[0018] The magnetic filtering device may further include: a second support member spaced apart from the first support member in the second direction and extending in the third direction, wherein the magnetic assembly may be coupled to the first support member and the second support member in a manner rotatable about the rotation axis.

[0019] The rotation control member may be coupled to the first support member.

[0020] The rotation control member may further include: a bracket supporting the rotation control magnet; and a vertical moving member fixed to the first supporting member and supporting the bracket and configured to move the bracket in the third direction and a direction opposite to the third direction.

[0021] The magnetic filtering device may also include: an additional rotation control member, including an additional rotation control magnet overlapping with at least one other magnet of the second magnets in the third direction, and configured to move the additional rotation control magnet in the third direction and in a direction opposite to the third direction, wherein the additional rotation control member can be connected to the second supporting member.

[0022] Beneficial Effects

[0023] According to an embodiment of the present invention, a magnetic filtering device capable of removing foreign matter on a substrate with improved reliability is provided.

[0024] The effects according to the embodiment are not limited to the above-exemplified contents, and more various effects are included in this specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is a perspective view showing a magnetic filtering device according to an embodiment of the present utility model.

[0026] Figure 2 and Figure 3 It is shown in Figure 1 A perspective view of a state in which the position of a rotation control magnet is adjusted in a magnetic filtering device.

[0027] Figures 4 to 6 It is shown Figure 1 A stereoscopic view of an embodiment of a magnetic filter component.

[0028] Figure 7 It is shown Figure 1 A perspective view of an embodiment of a transfer tray. DETAILED DESCRIPTION

[0029] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be noted that in the following description, only the parts required for understanding the operation of the present invention will be described, and the remaining parts will be omitted to avoid blurring the gist of the present invention. In addition, the present invention is not limited to the embodiments described herein, and may be embodied in other forms. However, the embodiments described herein are provided in order to provide a detailed description of the technical ideas of the present invention to a person of ordinary skill in the technical field to which the present invention belongs so that the technical ideas of the present invention can be easily implemented.

[0030] Throughout the specification, when a part is referred to as being "connected" to another part, it includes not only the case of "direct connection", but also the case of "indirect connection" when other elements are interposed. The terms used herein are only used to illustrate specific embodiments and are not used to limit the utility model. Throughout the specification, when a part is referred to as "including" a certain constituent element, unless there is a special record to the contrary, it means that other constituent elements are not excluded, but other constituent elements may also be included. "At least any one of X, Y and Z" and "at least any one of the group consisting of X, Y and Z" can be interpreted as a certain combination of one X, one Y, one Z or two or more of X, Y and Z (for example, XYZ, XYY, YZ, ZZ). Here, "and / or" includes all combinations of one or more of the corresponding compositions.

[0031] Here, although terms such as "first", "second", etc. may be used to describe various components, these components are not limited to these terms. These terms are used to distinguish one component from another component. Therefore, without departing from the scope of the content disclosed herein, a first component may refer to a second component.

[0032] Spatially relative terms such as "below", "above", etc. may be used for illustrative purposes, and thereby illustrate the relationship between an element or feature shown in the drawings and another (some) element or feature. In addition to the directions described in the drawings, spatially relative terms are intended to also include different directions in use, operation and / or manufacture. For example, when the device shown in the drawings is turned over, an element described as being "below" another element or feature may be "above" another element or feature. Therefore, in one embodiment, the term "below" may include both "above" and "below" directions. Not only that, the device may be oriented in other directions (e.g., rotated 90 degrees or in other directions), and therefore, the spatially relative terms used herein will be interpreted accordingly.

[0033] Various embodiments are described with reference to the accompanying drawings that illustrate ideal embodiments. Therefore, it is expected that the shapes thereof may vary depending on, for example, tolerances and / or manufacturing techniques. Therefore, the embodiments disclosed herein should not be construed as limited to the specific shapes shown, but should be construed to include variations in shape, for example, due to manufacturing. As such, the shapes shown in the accompanying drawings may not illustrate the actual shape of an area of ​​the device, and the present embodiments are not limited thereto.

[0034] Figure 1 is a perspective view showing a magnetic filtering device according to an embodiment of the present utility model.

[0035] Reference Figure 1 The magnetic filtering device 100 may include a transfer tray 110 , a magnetic assembly 120 , a first support member 130 , a second support member 140 , a first rotation control member 150 , and a second rotation control member 160 .

[0036] The transfer tray 110 may include a transfer base 111 , an upper surface 112 , a first bias generating member 113 , and a second bias generating member 114 .

[0037] The conveying base 111 is disposed at the lower side of the conveying tray 110 and is configured to support the conveying tray 110. The conveying base 111 is not limited to Figure 1 As shown, it can be made into various shapes.

[0038] The upper surface 112 of the conveying tray 110 may be provided in a quadrilateral frame shape on the conveying base 111. In an embodiment, four bars having a predetermined length are provided at predetermined intervals in the upper, lower, left, and right directions and the edges of the bars are in contact with each other, so that the upper surface 112 may be made in a quadrilateral frame shape. At least one substrate 10 may be fixed on the upper surface 112 of the conveying tray 110.

[0039] The first bias generating member 113 and the second bias generating member 114 may be spaced apart in the first direction DR1 with the magnetic assembly 120 interposed therebetween. At this time, the substrate 10 mounted on the upper surface 112 may be spaced apart from the first bias generating member 113 in the first direction DR1, and spaced apart from the second bias generating member 114 in a direction opposite to the first direction DR1.

[0040] The first bias generating member 113 may include at least one first magnet MN1 , and the second bias generating member 114 may include at least one second magnet MN2 .

[0041] Figure 12 shows that each of the first magnet MN1 and the second magnet MN2 has a quadrilateral shape, but the embodiment is not limited thereto. Each of the first magnet MN1 and the second magnet MN2 may have various shapes. For example, each of the first magnet MN1 and the second magnet MN2 may have a circular shape, a star shape, a triangular shape, etc.

[0042] The first bias generating member 113 and the second bias generating member 114 have magnetism due to the first magnet MN1 and the second magnet MN2, respectively. In an embodiment, each of the first bias generating member 113 and the second bias generating member 114 may have various polarities. For example, the first bias generating member 113 and the second bias generating member 114 may both have a polarity of an N pole. As another example, the first bias generating member 113 and the second bias generating member 114 may both have a polarity of an S pole. As yet another example, the first bias generating member 113 may have a polarity of an N pole, and the second bias generating member 114 may have a polarity of an S pole. As another example, the first bias generating member 113 may have an S pole, and the second bias generating member 114 may have an N pole.

[0043] The substrate 10 mounted on the upper surface 112 of the conveying tray 110 may be conveyed in the first direction DR1 and a direction opposite to the first direction DR1 according to the linear movement of the conveying tray 110 .

[0044] The magnetic assembly 120 may include a magnetic filter member 121 , a first magnetic gear 122 , and a second magnetic gear 123 .

[0045] The magnetic assembly 120 may be configured to be rotatable around a rotation axis extending in a second direction DR2 intersecting the first direction DR1. The magnetic assembly 120 may be spaced apart from the conveying tray 110 in a third direction DR3 intersecting the first direction DR1 and the second direction DR2, and may include a magnet. The magnetic assembly 120 is coupled between the first supporting member 130 and the second supporting member 140. Therefore, the conveying tray 110 may move relative to the magnetic assembly 120 along the first direction DR1.

[0046] The magnetic filter member 121 constituting the magnetic assembly 120 may be spaced apart from the conveying tray 110 in the third direction DR3, and may include at least one fourth magnet MN4. When the conveying tray 110 moves relative to the magnetic assembly 120, foreign matter of the substrate 10 arranged on the conveying tray 110 may be attached to the fourth magnet MN4 due to the magnetic force of the fourth magnet MN4. Therefore, the foreign matter on the substrate 10 may be removed. Here, the foreign matter may be a substance that reacts to magnetic force, such as iron powder, etc.

[0047] The magnetic filter member 121 can be configured to be rotatable around a rotation axis extending in the second direction DR2. The magnetic filter member 121 can have the shape of a polygonal column (faceted cylinder) aligned with the rotation axis as a reference. For example, the magnetic filter member 121 can have a shape of a hexagonal column, an octagonal column, etc. The fourth magnet MN4 can be arranged on the surface of the polygonal column facing the conveying tray 110 according to the rotation of the magnetic filter member 121 around the rotation axis. The length D2 of the magnetic filter member 121 in the second direction DR2 can be made equal to or greater than the length D3 of the upper surface 112 in the second direction DR2.

[0048] The first magnetic gear 122 of the magnetic assembly 120 is connected to the magnetic filter member 121 in a manner adjacent to the magnetic filter member 121 in a direction opposite to the second direction DR2. The first magnetic gear 122 shares a rotation axis with the magnetic filter member 121 and can be configured to rotate together with the magnetic filter member 121. The first magnetic gear 122 may include at least one third magnet MN3. The first magnetic gear 122 may have the shape of a polygonal column aligned with the rotation axis as a reference. The third magnet MN3 may be arranged on the surface of the polygonal column facing the first rotation control member 150 according to the rotation of the magnetic filter member 121 around the rotation axis. The length D4 of the first magnetic gear 122 in the second direction DR2 may be made smaller than the length D2 of the magnetic filter member 121 in the second direction DR2, but the embodiment is not limited thereto.

[0049] The first magnetic gear 122 and the second magnetic gear 123 are spaced apart in the second direction DR2 with the magnetic filter member 121 interposed therebetween. The second magnetic gear 123 is connected to the magnetic filter member 121 in a manner adjacent to the magnetic filter member 121 in the second direction DR2. The first magnetic gear 122 and the second magnetic gear 123 are respectively connected to the ends of the magnetic filter member 121. The second magnetic gear 123 shares a rotation axis with the magnetic filter member 121, so that it can be configured to rotate with the magnetic filter member 121. The second magnetic gear 123 can have the shape of a polygonal column aligned with the rotation axis as a reference. Similar to the first magnetic gear 122, the second magnetic gear 123 can include at least one third magnet MN3. The third magnet MN3 can be arranged on the surface of the polygonal column facing the second rotation control member 160 according to the rotation of the magnetic filter member 121 around the rotation axis.

[0050] The first support member 130 may include a first horizontal support member 131 and a first vertical support member 132 .

[0051] The first horizontal supporting member 131 may extend in the first direction DR1 and be separated from the transfer tray 110. The first horizontal supporting member 131 may have various shapes.

[0052] The first vertical supporting member 132 may be coupled to the first horizontal supporting member 131 and may extend in the third direction DR3 The first vertical supporting member 132 may support the bracket 151 and / or the vertical moving member 153 .

[0053] The second supporting member 140 may include a second horizontal supporting member 141 and a second vertical supporting member 142 .

[0054] The second horizontal supporting member 141 may extend in the first direction DR1 and be separated from the transfer tray 110. The second horizontal supporting member 141 may have various shapes.

[0055] The second vertical supporting member 142 may be coupled to the second horizontal supporting member 141 and may extend in the third direction DR3 The second horizontal supporting member 141 may support a bracket and / or a vertical moving member of the second rotation control member 160 .

[0056] The first support member 130 and the second support member 140 may be spaced apart in the second direction DR2 with the magnetic filter member 121 interposed therebetween. The first support member 130 and the second support member 140 are configured to also support the magnetic assembly 120. The magnetic assembly 120 may be coupled to the first support member 130 and the second support member 140 in a manner rotatable around a rotation axis, for example, to the first vertical support member 132 and the second vertical support member 142.

[0057] The first rotation control member 150 may be spaced apart from the first magnetic gear 122 in the third direction DR3 . The first rotation control member 150 may be fixed to one surface of the first vertical supporting member 132 .

[0058] The first rotation control member 150 may include a bracket 151 , a rotation control magnet 152 , and a vertical moving member 153 .

[0059] The bracket 151 is configured to support the rotation control magnet 152. In an embodiment, the rotation control magnet 152 may be coupled to a lower portion of the bracket 151, and may be configured to overlap at least one of the third magnets MN3 in the third direction DR3.

[0060] The vertical moving member 153 may be configured to move the rotation control magnet 152 in the third direction DR3 and in a direction opposite to the third direction DR3. In an embodiment, the vertical moving member 153 may be coupled to an upper portion of the first vertical supporting member 132 and may support the bracket 151. In this case, the vertical moving member 153 may include a structure such as a hydraulic cylinder for moving the bracket 151, so that the rotation control magnet 152 may be moved in the third direction DR3 together with the bracket 151.

[0061] The second rotation control member 160 may be spaced apart from the second magnetic gear 123 in the third direction DR3 The second rotation control member 160 may be coupled to one surface of the second vertical supporting member 142 .

[0062] The second rotation control member 160 may include a bracket, a rotation control magnet, and a vertical moving member like the first rotation control member 150. The magnetic force MF1 may act between the fourth magnet MN4 of the magnetic filtering member 121 and the first magnet MN1 of the first bias generating member 113. For example, if the fourth magnet MN4 and the first magnet MN1 have the same magnetic properties as each other, a repulsive force may act between the fourth magnet MN4 and the first magnet MN1, and if the fourth magnet MN4 and the first magnet MN1 have different magnetic properties from each other, an attractive force may act between the fourth magnet MN4 and the first magnet MN1.

[0063] Likewise, the magnetic force MF2 may act between the fourth magnet MN4 of the magnetic filtering member 121 and the second magnet MN2 of the second bias generating member 114. For example, if the fourth magnet MN4 and the second magnet MN2 have the same magnetic properties as each other, a repulsive force may act, and if the fourth magnet MN4 and the second magnet MN2 have different magnetic properties from each other, an attractive force may act.

[0064] When the conveying tray 110 moves linearly in the first direction DR1 and the direction opposite to the first direction DR1, the magnetic filter member 121 can rotate due to the magnetic force MF1 between the first magnet MN1 and the fourth magnet MN4 and the magnetic force MF2 between the second magnet MN2 and the fourth magnet MN4. At this time, the first magnetic gear 122 and the second magnetic gear 123 sharing the same rotation axis with the magnetic filter member 121 can also rotate. In this way, the magnetic assembly 120 can rotate due to the magnetic force between the first magnet MN1, the second magnet MN2 and the fourth magnet MN4.

[0065] The rotation control magnet 152 and the third magnet MN3 of the first magnetic gear 122 may have different magnetic properties from each other, and therefore, an attractive force may act between the rotation control magnet 152 and the third magnet MN3 of the first magnetic gear 122. For example, if the rotation control magnet 152 is an N pole, the third magnet MN3 may be an S pole, and if the rotation control magnet 152 is an S pole, the third magnet MN3 may be an N pole. The rotation of the magnetic assembly 120 may be suppressed due to such an attractive force.

[0066] Similarly, the rotation control magnet of the second rotation control member 160 and the third magnet MN3 of the second magnetic gear 123 may have different magnetic properties from each other, and therefore, an attractive force may act between the corresponding rotation control magnet and the third magnet MN3 of the second magnetic gear 123. For example, if the rotation control magnet is an N pole, the third magnet MN3 may be an S pole, and if the rotation control magnet is an S pole, the third magnet MN3 may be an N pole. The rotation of the magnetic assembly 120 may be suppressed due to this attractive force. The vertical moving member 153 may enable the bracket 151 to move vertically in the third direction DR3 and in a direction opposite to the third direction DR3. Therefore, the distance D1 between the rotation control magnet 152 and the third magnet MN3 may vary. For example, if the first rotation control member 150 moves vertically in the third direction DR3, the distance D1 between the rotation control magnet 152 and the third magnet MN3 increases. Conversely, if the first rotation control member 150 moves vertically in the direction opposite to the third direction DR3, the distance D1 between the rotation control magnet 152 and the third magnet MN3 decreases.

[0067] As the distance D1 between the rotation control magnet 152 and the third magnet MN3 decreases, the attractive force MF3 (refer to Figure 2 As the attractive force MF3 increases, the degree to which the rotation of the first magnetic gear 122 is suppressed increases.

[0068] Figure 2 and Figure 3 It is shown in Figure 1 A perspective view of a state in which the position of a rotation control magnet is adjusted in a magnetic filtering device.

[0069] First refer to Figure 1 and Figure 2 When the conveying tray 110 moves linearly in the first direction DR1, the magnetic assembly 120 may rotate due to the magnetic force MF1 between the first magnet MN1 and the fourth magnet MN4 and the magnetic force MF2 between the second magnet MN2 and the fourth magnet MN4. For example, as the magnetic force MF2 between the second magnet MN2 and the fourth magnet MN4 increases, the magnetic assembly 120 may rotate.

[0070] If the rotation control magnet 152 is spaced apart from the first magnetic gear 122 by a distance D1, for example, by a first distance D1, a first strength of attraction may be generated between the rotation control magnet 152 and the first magnetic gear 122. At this time, the rotation control magnet of the second rotation control member 160 may also be spaced apart from the second magnetic gear 123 by a first distance D1.

[0071] The rotation of the magnetic assembly 120 due to the magnetic force between the first magnet MN1, the second magnet MN2, and the fourth magnet MN4 may be suppressed due to the first strength of the attractive force between the rotation control magnet 152 and the first magnetic gear 122 and the first strength of the attractive force between the rotation control magnet of the second rotation control member 160 and the second magnetic gear 123. For example, the rotation of the magnetic assembly 120 may be suppressed so that the magnetic assembly 120 may rotate by the first angle AG1.

[0072] Next, refer to Figures 1 to 3 When the conveying tray 110 moves linearly in the first direction DR1, the magnetic assembly 120 may rotate due to the magnetic force MF1 between the first magnet MN1 and the fourth magnet MN4 and the magnetic force MF2 between the second magnet MN2 and the fourth magnet MN4. For example, as the magnetic force MF2 between the second magnet MN2 and the fourth magnet MN4 increases, the magnetic assembly 120 may rotate.

[0073] When the vertical moving member 153 vertically moves in a direction opposite to the third direction DR3, the rotation control magnet 152 may approach the first magnetic gear 122 so that the rotation control magnet 152 may be spaced apart from the first magnetic gear 122 by a second distance D5. The second distance D5 may be less than Figure 2 The first distance D1.

[0074] According to the second distance D5 between the rotation control magnet 152 and the third magnet MN3, a second strength of attraction may be generated between the rotation control magnet 152 and the first magnetic gear 122. The second strength of attraction is greater than the reference Figure 2 Description of the first strength of gravity.

[0075] The rotation of the magnetic assembly 120 caused by the magnetic force between the first magnet MN1, the second magnet MN2, and the fourth magnet MN4 can be further suppressed due to the second strength of the attractive force between the rotation control magnet 152 and the first magnetic gear 122 and the second strength of the attractive force between the rotation control magnet of the second rotation control member 160 and the second magnetic gear 123. For example, the rotation of the magnetic assembly 120 can be suppressed so that the magnetic assembly 120 can rotate by the second angle AG2. The second angle AG2 can be less than Figure 2 The first angle AG1.

[0076] Figures 4 to 6 It is shown Figure 1 A stereoscopic view of an embodiment of a magnetic filter component.

[0077] Reference Figure 4 The magnetic filter member 400 may include a support body 401 and a fourth magnet 402 .

[0078] The support body 401 can be coupled to the first vertical support member 132 and the second vertical support member 142 in a manner that can rotate around the rotation axis. The support body 401 can have a polygonal column shape aligned with the rotation axis as a reference. For example, the support body 401 can have a hexagonal column, an octagonal column, etc.

[0079] The outermost surface of the support body 401 may be surrounded by the fourth magnets 402. Each of the fourth magnets 402 has magnetic properties. For example, each of the fourth magnets 402 may have a polarity of an N pole. As another example, each of the fourth magnets 402 may have a polarity of an S pole.

[0080] Reference Figure 5 The magnetic filter component 500 may include a support body 501 and fourth magnets 502 , 503 , 504 , and 505 .

[0081] The support body 501 may be configured to be rotatable around a rotation axis. The support body 501 may be coupled to the first vertical support member 132 and the second vertical support member 142. The support body 501 may have a polygonal column shape aligned with the rotation axis as a reference. For example, the support body 501 may have a hexagonal column, an octagonal column, or the like.

[0082] The outermost surface of the support 501 may be surrounded by fourth magnets 502, 503, 504, 505. The fourth magnets 502, 503, 504, 505 have magnetic properties. For example, each of the fourth magnets 502, 503, 504, 505 may have an N-pole polarity. As another example, each of the fourth magnets 502, 503, 504, 505 may have an S-pole polarity.

[0083] Reference Figure 6 , the magnetic filter member 600 may include a support body 601 and fourth magnets 602 to 609 .

[0084] The support body 601 may be configured to be rotatable around the rotation axis. The support body 601 may be coupled to the first vertical support member 132 and the second vertical support member 142. The support body 601 may have a polygonal column shape aligned with the rotation axis as a reference. For example, it may have a hexagonal column, an octagonal column, or the like.

[0085] The outermost surface of the support body 601 is surrounded by the fourth magnets 602 to 609. The fourth magnets 602 to 609 may have a rectangular parallelepiped shape, and one surface of the fourth magnets 602 to 609 may be in contact with the support body 601.

[0086] The fourth magnets 602 to 609 have magnetic properties. For example, each of the fourth magnets 602 to 609 may have a polarity of an N pole. As another example, each of the fourth magnets 602 to 609 may have a polarity of an S pole.

[0087] Figure 7 It is shown Figure 1 A perspective view of an embodiment of a transfer tray.

[0088] Reference Figure 1 and Figure 7 The first magnet MN1 and the second magnet MN2 are shown as quadrilaterals, but are not limited to the corresponding shapes. The first magnet MN1 and the second magnet MN2 may have various shapes, such as a circle, a star, a triangle, and the like.

[0089] The first bias generating member 113 and the second bias generating member 114 may have magnetism due to the first magnet MN1 and the second magnet MN2, respectively, and may have various combinations of polarities. For example, the first bias generating member 113 and the second bias generating member 114 may both have the polarity of the N pole, or the first bias generating member 113 and the second bias generating member 114 may both have the polarity of the S pole. If the first bias generating member 113 has the polarity of the N pole, the second bias generating member 114 may have the polarity of the S pole. Alternatively, the first bias generating member 113 may have the polarity of the S pole, while the second bias generating member 114 may have the polarity of the N pole.

[0090] The distance between the first magnet MN1 in the first bias generating member 113 that is closest to the second bias generating member 114 in the direction opposite to the first direction DR1 and the second magnet MN2 in the second bias generating member 114 that is closest to the first bias generating member 113 in the first direction DR1 may be defined as a reference distance MD. For example, the reference distance MD may be defined as the distance between the first bias generating member 113 and the second bias generating member 114.

[0091] By adjusting the reference distance MD, the magnetic force MF1 between the first magnet MN1 and the fourth magnet MN4 and the magnetic force MF2 between the second magnet MN2 and the fourth magnet MN4 can be adjusted. For example, as the reference distance MD increases, the magnetic force MF1 between the first magnet MN1 and the fourth magnet MN4 and the magnetic force MF2 between the second magnet MN2 and the fourth magnet MN4 can be reduced. By adjusting the magnetic force MF1 between the first magnet MN1 and the fourth magnet MN4 and the magnetic force MF2 between the second magnet MN2 and the fourth magnet MN4, the rotation of the magnetic filter member 121 can be adjusted.

[0092] Although specific embodiments and application embodiments have been described herein, other embodiments and variations can be derived from the above description. Therefore, the idea of ​​the present invention is not limited to these embodiments, and is directed to the appended claims, various obvious variations and equivalents.

Claims

1. A magnetic filtration device, characterized in that: include: a transport tray including at least one first magnet, supporting at least one substrate spaced apart from the at least one first magnet in a first direction, and configured to be movable in the first direction and a direction opposite to the first direction; a magnet assembly disposed above the conveying tray, configured to be rotatable about a rotation axis extending in a second direction intersecting the first direction, and including a second magnet; and A rotation control member includes a rotation control magnet overlapping at least one of the second magnets in a third direction intersecting the first direction and the second direction, and is configured to move the rotation control magnet in the third direction and a direction opposite to the third direction.

2. The magnetic filtration device according to claim 1, characterized in that: The magnetic assembly comprises: a magnetic filter member overlapping the conveying tray in the third direction and including one or more third magnets among the second magnets; and A magnetic gear is coupled to the magnetic filter member so as to be adjacent to the magnetic filter member in the second direction and is configured to rotate together with the magnetic filter member, and overlaps with the rotation control member in the third direction.

3. The magnetic filtration device according to claim 2, characterized in that: The magnetic gear has a shape of a polygonal column aligned with the rotation axis as a reference, and The magnetic gear includes one or more fourth magnets among the second magnets.

4. The magnetic filtration device according to claim 3, characterized in that: The rotation control member is configured to increase a magnetic force between the rotation control magnet and the fourth magnet by moving to reduce a distance between the rotation control magnet and the magnetic gear, thereby suppressing the rotation of the magnetic gear.

5. The magnetic filtration device according to claim 2, characterized in that: The magnetic filter member has a polygonal column shape aligned with the rotation axis as a reference, and The one or more third magnets are arranged on a surface of the polygonal column facing the conveying tray according to the rotation of the magnetic filter member about the rotation axis.

6. The magnetic filtration device according to claim 1, characterized in that: Also includes: a first supporting member extending in the third direction, Wherein, the conveying tray is configured to be movable relative to the first supporting member in the first direction and in a direction opposite to the first direction.

7. The magnetic filtration device according to claim 6, characterized in that: Also includes: a second supporting member spaced apart from the first supporting member in the second direction and extending in the third direction, The magnetic assembly is coupled to the first support member and the second support member in a manner rotatable around the rotation axis.

8. The magnetic filtration device according to claim 7, characterized in that: The rotation control member is coupled to the first support member.

9. The magnetic filtration device according to claim 8, characterized in that: The rotation control member further comprises: a bracket supporting the rotation control magnet; and A vertical moving member is fixed to the first supporting member and supports the bracket, and is configured to move the bracket in the third direction and a direction opposite to the third direction.

10. The magnetic filtration device according to claim 8, characterized in that: Also includes: An additional rotation control member includes an additional rotation control magnet overlapping with at least one other of the second magnets in the third direction and is configured to move the additional rotation control magnet in the third direction and in a direction opposite to the third direction, wherein the additional rotation control member is connected to the second supporting member.

Images