Boron expansion outer flange plane polishing device

Abstract

The utility model provides a boron expansion outer flange plane polishing device which comprises a main body assembly, and the main body assembly comprises a bottom plate, a supporting column, a supporting plate, a driving motor, a workbench and a limiting frame. Supporting columns are symmetrically and fixedly connected to the top of the bottom plate, a supporting plate is fixedly connected to the tops of the supporting columns, a driving motor is installed on the lower surface of the supporting plate, and an output shaft of the driving motor is fixedly connected with the bottom of the workbench. The boron expansion outer flange is limited through the limiting frame, the working table is driven by the driving motor to rotate, the position of the flange is changed, feeding and taking work and flange overturning work are completed through the two mechanical arm assemblies respectively, double-face grinding of the flange is completed through the two grinding assemblies, and grinding work of the boron expansion outer flange can be automatically completed; manual operation of workers is not needed, operation is easy and convenient, the time needed for grinding is shortened, and the automation degree of the grinding device and the production efficiency of the boron expansion outer flange are improved.

Description

Technical Field

[0001] The utility model relates to a grinding device, in particular to a boron-expanded flange plane grinding device, belonging to the technical field of boron diffusion equipment production. Background Art

[0002] Boron diffusion is an important technology in the preparation of semiconductor materials. By spraying boron compounds on the surface of silicon wafers and diffusing boron elements to the surface of silicon wafers under high temperature and high pressure conditions, p-type semiconductor materials can be formed. Boron diffusion technology has many advantages, such as enhancing the hardness, wear resistance and corrosion resistance of materials, optimizing thermal properties, and fine-tuning electrical properties. In the semiconductor industry, boron diffusion is one of the key technologies for achieving semiconductor material doping, which is crucial for manufacturing high-performance semiconductor devices and integrated circuits.

[0003] The pipelines of the boron diffusion equipment are connected by flanges. For the boron expanded flange, both sides of the flange need to be polished during production to ensure that the flange can be tightly connected when installed. During the use of the existing flange polishing device, the staff needs to manually complete the loading, polishing, flipping and secondary polishing. The polishing work takes a long time, the operation is cumbersome, and the degree of automation is low, which is not conducive to improving the production efficiency of the boron expanded flange. Therefore, a boron expanded flange plane polishing device is proposed. Utility Model Content

[0004] In view of this, the utility model provides a boron-expanded flange surface grinding device to solve or alleviate the technical problems existing in the prior art and at least provide a beneficial choice.

[0005] The technical solution of the embodiment of the utility model is implemented as follows: a boron expansion flange surface grinding device, including a main body component, the main body component includes a base plate, a support column, a support plate, a drive motor, a workbench and a limit frame;

[0006] The top of the bottom plate is symmetrically fixedly connected with a support column, the top of the support column is fixedly connected with a support plate, a driving motor is installed on the lower surface of the support plate, the output shaft of the driving motor is fixedly connected to the bottom of the workbench, the workbench is rotatably connected to the upper surface of the support plate, four limit frames are symmetrically fixedly connected to the upper surface of the workbench, and positioning columns are arranged inside the limit frames;

[0007] Two mechanical arm assemblies and a grinding assembly are symmetrically arranged on the top of the main assembly.

[0008] Further preferably: the mechanical arm assembly comprises a first fixed plate, a rotating support and a mechanical arm;

[0009] A rotating support is installed on the top of the first fixing plate, and a mechanical arm is installed on the top of the rotating support.

[0010] Further preferably, a manipulator is installed on one side of the manipulator arm, and the manipulator is arranged above the limit frame.

[0011] Further preferably, the two first fixing plates are symmetrically fixedly connected to the outer side wall of the support plate.

[0012] Further preferably: the grinding assembly comprises a second fixed plate, a column and a crossbeam;

[0013] The top of the second fixing plate is fixedly connected with a column, and the top end of the column is fixedly connected with a crossbeam.

[0014] Further preferably, a hydraulic cylinder is installed on the top of the crossbeam.

[0015] Further preferably, the bottom of the piston rod of the hydraulic cylinder is fixedly connected to a drive box, a motor and a reducer are installed inside the drive box, and the bottom of the drive box is rotatably connected to a grinding head, and the grinding head is arranged above the limit frame.

[0016] Further preferably, two of the second fixing plates are symmetrically fixedly connected to the outer side wall of the support plate.

[0017] The embodiment of the utility model has the following advantages due to the adoption of the above technical solution:

[0018] The utility model limits the boron expanded outer flange by a limit frame, drives the workbench to rotate by a driving motor to change the position of the flange, respectively completes the loading and taking work and the flange turning work by two groups of mechanical arm components, and completes the double-sided grinding of the flange by two groups of grinding components. The boron expanded outer flange grinding work can be automatically completed without manual operation by staff, the operation is simple and convenient, the time required for grinding is shortened, and the automation degree of the grinding device and the production efficiency of the boron expanded outer flange are improved.

[0019] The above summary is for the purpose of description only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the utility model will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0021] Figure 1 It is a structural diagram of the utility model;

[0022] Figure 2 This is a structural diagram of the main components of the utility model;

[0023] Figure 3 This is a structural diagram of the mechanical arm assembly of the utility model;

[0024] Figure 4 This is a structural diagram of the grinding assembly of the present utility model.

[0025] Figure numerals: 10, main body assembly; 11, base plate; 12, support column; 13, support plate; 14, drive motor; 15, workbench; 16, limit frame; 20, robot arm assembly; 21, first fixed plate; 22, rotating support; 23, robot arm; 24, robot; 30, grinding assembly; 31, second fixed plate; 32, column; 33, beam; 34, hydraulic cylinder; 35, drive box; 36, grinding head. DETAILED DESCRIPTION

[0026] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0027] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0028] like Figure 1 As shown in FIG. 4 , the embodiment of the utility model provides a boron expansion flange surface grinding device, including a main assembly 10, the main assembly 10 includes a base plate 11, a support column 12, a support plate 13, a drive motor 14, a workbench 15 and a limit frame 16;

[0029] The top of the bottom plate 11 is symmetrically fixedly connected with a support column 12, the top of the support column 12 is fixedly connected with a support plate 13, the lower surface of the support plate 13 is installed with a drive motor 14, the output shaft of the drive motor 14 is fixedly connected to the bottom of the workbench 15, the workbench 15 is rotatably connected to the upper surface of the support plate 13, and the upper surface of the workbench 15 is symmetrically fixedly connected with four limit frames 16, the limit frames 16 are provided with positioning columns inside, the positioning columns are used to prevent the flange from rotating, the drive motor 14 drives the workbench 15 to rotate, and the position of the flange is changed. The four flanges placed in the four limit frames 16 are respectively taken in and discharged and polished on the front and back sides in the same time period, which shortens the time required for polishing and improves the production efficiency of the boron expanded flange;

[0030] Two robot arm assemblies 20 and a grinding assembly 30 are symmetrically arranged on the top of the main assembly 10 .

[0031] In this embodiment, specifically: the mechanical arm assembly 20 includes a first fixed plate 21, a rotating support 22 and a mechanical arm 23;

[0032] A rotating support 22 is installed on the top of the first fixed plate 21, and a robotic arm 23 is installed on the top of the rotating support 22. The first group of robotic arm components 20 performs material picking and discharging operations, and drives the robotic arm 24 to move through the rotating support 22 and the robotic arm 23 to take the boron-expanded flange from the conveyor belt or the feeding platform and place it inside the limit frame 16. At the same time, the first group of robotic arm components 20 is also responsible for returning the polished flange.

[0033] In this embodiment, specifically: a robot arm 24 is installed on one side of the robot arm 23, and the robot arm 24 is arranged above the limit frame 16. The second group of robot arm components 20 is responsible for flipping the flange.

[0034] In this embodiment, specifically: two first fixing plates 21 are symmetrically fixedly connected to the outer side wall of the support plate 13 .

[0035] In this embodiment, specifically: the grinding assembly 30 includes a second fixing plate 31, a column 32 and a beam 33;

[0036] A column 32 is fixedly connected to the top of the second fixing plate 31 , and a crossbeam 33 is fixedly connected to the top of the column 32 .

[0037] In this embodiment, specifically: a hydraulic cylinder 34 is installed on the top of the crossbeam 33 .

[0038] In this embodiment, specifically: the bottom of the piston rod of the hydraulic cylinder 34 is fixedly connected to a drive box 35, a motor and a reducer are installed inside the drive box 35, the bottom of the drive box 35 is rotatably connected to a grinding head 36, and the grinding head 36 is arranged above the limit frame 16. The hydraulic cylinder 34 drives the grinding head 36 to approach the flange, and the motor and the reducer in the drive box 35 drive the grinding head 36 to rotate, so as to grind the flange surface.

[0039] In this embodiment, specifically: two second fixing plates 31 are symmetrically fixedly connected to the outer side wall of the support plate 13, and two groups of grinding assemblies 30 grind the front and back sides of the flange respectively.

[0040] When the utility model is working: the first group of mechanical arm components 20 performs material picking and discharging operations, and drives the mechanical hand 24 to move by rotating the support 22 and the mechanical arm 23, takes the boron expanded outer flange from the conveyor belt or the feeding platform and places it inside the limit frame 16, and limits the boron expanded outer flange by the limit frame 16. After the material picking is completed, the working table 15 is driven to rotate by the driving motor 14 to change the position of the flange, and the flange is moved to the bottom of the first group of grinding components 30, and the grinding head 36 is driven to approach the flange by the hydraulic cylinder 34, and the grinding head 36 is driven to rotate by the motor and the reducer in the driving box 35 to grind the flange surface. After the grinding is completed, the working table 15 rotates again, and the flange moves The flange is moved to the bottom of the second group of robot arm components 20, and the flange is flipped by the robot arm components 20. After the flipping is completed, the workbench 15 rotates again, and the flange moves to the bottom of the second group of grinding components 30 for grinding on the reverse side. After the grinding is completed, the workbench 15 rotates, and the flange moves back to the bottom of the first group of robot arm components 20, and is sent back to the conveyor belt by the first group of robot arm components 20, and the boron-expanded flange grinding work is automatically completed. No manual operation is required by the staff, and the operation is simple and convenient. The two groups of robot arm components 20 and the grinding components 30 work at the same time, and the material picking and placing and the front and back grinding work are performed synchronously, which shortens the time required for grinding, improves the degree of automation of the grinding device and the production efficiency of the boron-expanded flange.

[0041] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of various changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A boron-expanded flange surface grinding device, comprising a main assembly (10), characterized in that: The main body component (10) comprises a base plate (11), a support column (12), a support plate (13), a drive motor (14), a workbench (15) and a limit frame (16); The top of the base plate (11) is symmetrically fixedly connected with a support column (12), the top of the support column (12) is fixedly connected with a support plate (13), the lower surface of the support plate (13) is installed with a drive motor (14), the output shaft of the drive motor (14) is fixedly connected to the bottom of a workbench (15), the workbench (15) is rotatably connected to the upper surface of the support plate (13), the upper surface of the workbench (15) is symmetrically fixedly connected with four limit frames (16), and the limit frames (16) are provided with positioning columns inside; Two mechanical arm assemblies (20) and a grinding assembly (30) are symmetrically arranged on the top of the main assembly (10).

2. The boron-expanded flange surface grinding device according to claim 1, characterized in that: The mechanical arm assembly (20) comprises a first fixed plate (21), a rotating support (22) and a mechanical arm (23); A rotating support (22) is installed on the top of the first fixed plate (21), and a mechanical arm (23) is installed on the top of the rotating support (22).

3. A boron-expanded flange surface grinding device according to claim 2, characterized in that: A mechanical hand (24) is installed on one side of the mechanical arm (23), and the mechanical hand (24) is arranged above the limiting frame (16).

4. The boron-expanded flange surface grinding device according to claim 2, characterized in that: The two first fixing plates (21) are symmetrically fixedly connected to the outer side wall of the supporting plate (13).

5. The boron-expanded flange surface grinding device according to claim 1, characterized in that: The grinding assembly (30) comprises a second fixing plate (31), a column (32) and a crossbeam (33); The top of the second fixing plate (31) is fixedly connected to a column (32), and the top of the column (32) is fixedly connected to a crossbeam (33).

6. The boron-expanded flange surface grinding device according to claim 5, characterized in that: A hydraulic cylinder (34) is installed on the top of the crossbeam (33).

7. The boron-expanded flange surface grinding device according to claim 6, characterized in that: The bottom of the piston rod of the hydraulic cylinder (34) is fixedly connected to a driving box (35), a motor and a reducer are installed inside the driving box (35), and the bottom of the driving box (35) is rotatably connected to a grinding head (36), and the grinding head (36) is arranged above the limiting frame (16).

8. The boron-expanded flange surface grinding device according to claim 5, characterized in that: The two second fixing plates (31) are symmetrically fixedly connected to the outer side wall of the support plate (13).

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