Assembling jig for furnace core assembly

Abstract

The utility model discloses an assembling jig for a furnace core assembly. The assembling jig comprises a mounting base, a plurality of first positioning pieces and a plurality of second positioning pieces. The plurality of first positioning pieces and the plurality of second positioning pieces are arranged on the mounting seat at intervals around a central axis, the plurality of first positioning pieces define a first positioning ring with the central axis as the center, and the plurality of first positioning pieces can mutually surround and diffuse so as to adjust the diameter of the first positioning ring; the multiple second positioning pieces enclose to form a second positioning ring with the central axis as the center, and the multiple second positioning pieces can mutually enclose and diffuse so as to adjust the diameter of the second positioning ring. The small supporting pipe and the small heat preservation sleeve abut against the two sides of the first positioning ring in the radial direction of the first positioning ring respectively, the large supporting pipe and the large heat preservation sleeve abut against the two sides of the second positioning ring in the radial direction of the second positioning ring respectively, and therefore the four components are positioned, the uniformity of gaps between every two adjacent components is guaranteed, and the heat conduction uniformity is guaranteed; the crystal quality is improved.

Description

Technical Field

[0001] The present application relates to auxiliary tools for assembling a single crystal furnace, and specifically to an assembly jig for a furnace core assembly. Background Art

[0002] At present, the mainstream growth method of gallium arsenide single crystal is the vertical gradient solidification method. This method is to put gallium arsenide polycrystalline material synthesized from elemental arsenic and gallium into a crucible in a quartz tube, and then place the sealed quartz tube in a single crystal furnace. The computer program is used to accurately control the thermal field to slowly cool down the temperature, so that the crystal growth interface gradually moves upward from the lower end of the melt, thereby growing into a gallium arsenide single crystal.

[0003] For precise cooling of the thermal field, that is, to achieve uniform heat extraction of the melt, a heat-conducting furnace core assembly needs to be set at the lower end of the quartz tube in the single crystal furnace. The furnace core assembly usually consists of a furnace core, a quartz support tube and an insulation sleeve. The uniformity of the gap between the quartz support tube and the insulation sleeve will affect the uniformity of heat extraction. Uneven heat extraction is prone to produce supercooling, which is very likely to form crystal defects. The existing furnace core assembly process is manually observed and the position is manually adjusted, which cannot guarantee the uniformity of the gap. Utility Model Content

[0004] The technical problem to be solved by the present application is that during the existing furnace core assembly process, manual observation and manual adjustment of the position cannot ensure the uniformity of the gap. In order to solve the above technical problem, an assembly jig for a furnace core assembly is provided, which can ensure the uniformity of the gap between the quartz support tube and the insulation sleeve during the furnace core assembly process.

[0005] The technical solution proposed in this application is:

[0006] An assembly jig for a furnace core assembly, comprising:

[0007] Mounting seat;

[0008] A plurality of first positioning members are arranged at intervals on the mounting seat around a central axis and enclosed to form a first positioning circle centered on the central axis, and the plurality of first positioning members can surround and spread each other to adjust the diameter of the first positioning circle;

[0009] A plurality of second positioning members are arranged at intervals on the mounting seat around the central axis and enclose a second positioning circle centered on the central axis. The plurality of second positioning members can surround and spread each other to adjust the diameter of the second positioning circle.

[0010] Further, the diameter of the first positioning ring is smaller than the diameter of the second positioning ring.

[0011] Further, the mounting seat includes a plurality of mounting portions, and the plurality of mounting portions are arranged at intervals along the circumference of a circle with the central axis as the center. Each of the first positioning members and each of the second positioning members are arranged at a corresponding mounting portion, and each of the first positioning members and each of the second positioning members can adjust the position along a radial direction corresponding to the circumference.

[0012] Furthermore, each of the mounting parts is provided with the first positioning member and the second positioning member, the first positioning member and the second positioning member on each of the mounting parts are arranged in sequence along the radial direction, and the first positioning member is located on the side of the second positioning member facing the central axis.

[0013] Further, the mounting portion is provided with a mounting groove, the mounting groove extends along the radial direction, the first positioning member and the second positioning member are clamped in the mounting groove, and the first positioning member and the second positioning member can adjust positions along the radial direction.

[0014] Furthermore, each of the mounting portions is provided with a plurality of mounting holes, and the plurality of mounting holes of each of the mounting portions are arranged at intervals along the radial direction, and the first positioning member and the second positioning member are both detachably connected to the mounting holes.

[0015] Furthermore, the mounting seat also includes a fixing portion, the fixing portion is penetrated by a through hole, and the plurality of mounting portions are fixedly connected to the fixing portion and are arranged at intervals along the circumference of the through hole.

[0016] Further, each of the first positioning members and each of the second positioning members includes a connecting portion and a positioning portion, the connecting portion is connected to the mounting seat, the positioning portion is connected to the connecting portion, and the positioning portions can be enclosed to form a positioning circle.

[0017] Furthermore, the assembly jig also includes a plurality of third positioning members, which are arranged at intervals around the central axis and enclosed to form a third positioning circle centered on the central axis. The plurality of third positioning members can surround and diffuse each other to adjust the diameter of the third positioning circle, and the third positioning circle is located between the first positioning circle and the second positioning circle.

[0018] An assembly jig for a furnace core assembly, comprising:

[0019] Mounting seat;

[0020] A plurality of first positioning members are arranged at intervals on the mounting seat around a central axis and enclose a first positioning circle centered on the central axis. The plurality of first positioning members can surround and spread each other to adjust the diameter of the first positioning circle. The first positioning circle can abut against the supporting small tube and the thermal insulation small sleeve at two sides along its own radial direction respectively.

[0021] A plurality of second positioning members are arranged on the mounting seat at intervals around the central axis and enclose a second positioning circle centered on the central axis. The plurality of second positioning members can surround and spread each other to adjust the diameter of the second positioning circle. The second positioning circle can respectively abut against the supporting large pipe and the insulation large sleeve on both sides along its own radial direction.

[0022] A plurality of third positioning members are arranged on the mounting seat at intervals around the central axis and enclose a third positioning circle centered on the central axis. The plurality of third positioning members can surround and spread each other to adjust the diameter of the third positioning circle. The third positioning circle is located between the first positioning circle and the second positioning circle, and the third positioning circle can respectively abut against the thermal insulation sleeve and the supporting large tube on both sides along its own radial direction.

[0023] By using the above-mentioned assembly jig, the diameters of the first positioning ring and the second positioning ring are first adjusted according to the diameters of the small supporting tube, the small insulation sleeve, the large supporting tube and the large insulation sleeve, and then the small supporting tube and the small insulation sleeve are respectively abutted against the two sides of the first positioning ring along their own radial direction, and the large supporting tube and the large insulation sleeve are respectively abutted against the two sides of the second positioning ring along their own radial direction, thereby realizing the positioning of the four components. Since the first positioning ring and the second positioning ring are coaxial, it can ensure that the small supporting tube, the small insulation sleeve, the large supporting tube and the large insulation sleeve are coaxial, thereby ensuring the uniformity of the gap between the two adjacent ones, ensuring the uniformity of heat extraction, and improving the quality of the crystal.

[0024] In addition, since the plurality of first positioning members and the plurality of second positioning members can surround and spread each other, the diameters of the first positioning ring and the second positioning ring are adjustable, thereby making the assembly jig applicable to the assembly of furnace core assemblies of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings are used to provide further understanding of the present application and constitute a part of the specification. They are used to explain the present application together with the embodiments of the present application and do not constitute a limitation of the present application.

[0026] Figure 1 A schematic diagram of the structure of an assembly fixture provided in one embodiment of the present application.

[0027] Description of labels:

[0028] 100, assembly jig; 110, mounting seat; 120, first positioning member; 130, second positioning member; 111, mounting portion; 112, fixing portion; 1121, through hole; 1111, mounting groove; 140, third positioning member; 150, connecting portion; 160, positioning portion. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0030] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0031] In order to facilitate understanding of the technical solution of the present application, the specific structure of the existing furnace core assembly is explained here: the furnace core assembly consists of a furnace core, a small supporting tube, a small insulating sleeve, a large supporting tube and a large insulating sleeve from the inside to the outside. During the assembly process, it is necessary to ensure the uniformity of the gaps between the small supporting tube, the small insulating sleeve, the large supporting tube and the large insulating sleeve, that is, to ensure that the small supporting tube, the small insulating sleeve, the large supporting tube and the large insulating sleeve are coaxial.

[0032] like Figure 1 As shown, an embodiment of the present application provides an assembly jig 100 for a furnace core assembly, which is used to position a small support tube, a small insulation sleeve, a large support tube and a large insulation sleeve to ensure that the four components are coaxial, thereby ensuring the uniformity of the gap between adjacent ones.

[0033] Furthermore, the assembly jig 100 includes a mounting seat 110 and a plurality of first positioning members 120 and a plurality of second positioning members 130. The plurality of first positioning members 120 and the plurality of second positioning members 130 are arranged on the mounting seat 110 at intervals around a central axis, and the plurality of first positioning members 120 enclose a first positioning circle centered on the central axis, and the plurality of second positioning members 130 enclose a second positioning circle centered on the central axis. The plurality of first positioning members 120 and the plurality of second positioning members 130 can surround and spread each other to adjust the diameters of the first positioning circle and the second positioning circle.

[0034] By using the above-mentioned assembly jig 100, the diameters of the first positioning ring and the second positioning ring are first adjusted according to the diameters of the small supporting tube, the small insulation sleeve, the large supporting tube and the large insulation sleeve, and then the small supporting tube and the small insulation sleeve are respectively abutted against the two sides of the first positioning ring along their own radial direction, and the large supporting tube and the large insulation sleeve are respectively abutted against the two sides of the second positioning ring along their own radial direction, thereby realizing the positioning of the four components. Since the first positioning ring and the second positioning ring are coaxial, it can ensure that the small supporting tube, the small insulation sleeve, the large supporting tube and the large insulation sleeve are coaxial, thereby ensuring the uniformity of the gap between the adjacent two, ensuring the uniformity of heat extraction, and improving the quality of the crystal.

[0035] In addition, since the plurality of first positioning members 120 and the plurality of second positioning members 130 can surround and spread each other, the diameters of the first positioning ring and the second positioning ring are adjustable, so that the assembly jig 100 can be suitable for assembling furnace core assemblies of different sizes.

[0036] In one embodiment, the mounting seat 110 includes a plurality of mounting portions 111, which are arranged at intervals around the central axis, that is, arranged at intervals along the circumferential direction of a circle centered on the central axis, each first positioning member 120 and each second positioning member 130 are arranged on a corresponding mounting portion 111, and each first positioning member 120 and each second positioning member 130 can be adjusted along a radial direction corresponding to the circumferential direction, so that the plurality of first positioning members 120 and the plurality of second positioning members 130 surround and diffuse each other. It can be understood that the radial direction corresponding to the circumferential direction is the radial direction of the circle centered on the central axis.

[0037] Furthermore, the mounting seat 110 also includes a fixing portion 112, and the fixing portion 112 is penetrated by a through hole 1121, and the plurality of mounting portions 111 are fixedly connected to the fixing portion 112, and are arranged at intervals along the circumference of the through hole 1121. It should be noted that the through hole 1121 is located in the middle of the plurality of mounting portions 111, and the corresponding central axis is the central axis of the through hole 1121. During the assembly process of the furnace core assembly, the furnace core is first fixed on the furnace frame, and then the mounting seat 110 is installed on the furnace frame, and the fixing portion 112 is sleeved on the outside of the furnace core through the through hole 1121. It can be seen that the fixing portion 112 is in a circular ring shape. Specifically, Figure 1 In the illustrated embodiment, there are four mounting portions 111 , and the four mounting portions 111 are evenly spaced apart along the circumference of the fixing portion 112 .

[0038] Preferably, each mounting portion 111 is provided with a first positioning member 120 and a second positioning member 130, and the first positioning member 120 and the second positioning member 130 on each mounting portion 111 are arranged in sequence along the radial direction, and the first positioning member 120 is located on the side of the second positioning member 130 facing the central axis, that is, the first positioning member 120 and the second positioning member 130 are arranged in sequence along the radial direction of the fixing portion 112, and the first positioning member 120 is located on the inner side. At this time, the diameter of the first positioning ring is smaller than the diameter of the second positioning ring.

[0039] Similarly, the radial direction of the fixing portion 112 is the same as the radial direction of the first positioning ring and the second positioning ring. The radial direction hereinafter refers to the radial direction of the fixing portion 112, the first positioning ring or the second positioning ring. Figure 1 In the illustrated embodiment, the number of the first positioning members 120 and the number of the second positioning members 130 are both four, and the four first positioning members 120 and the four second positioning members 130 are respectively arranged on four mounting portions 111. At this time, the first positioning member 120 is always located on the inner side of the second positioning member 130, so the diameter of the first positioning ring is always smaller than the diameter of the second positioning ring.

[0040] In other embodiments, the first positioning member 120 and the second positioning member 130 may be located on different mounting portions 111, and in this case, the diameters of the first positioning ring and the second positioning ring may be the same or different during the adjustment process. If it is to be ensured that the diameter of the first positioning ring is smaller than the diameter of the second positioning ring, it can be achieved by limiting the adjustment range of the first positioning member 120 and the second positioning member 130, that is, by limiting the position adjustment range of the first positioning member 120 and the second positioning member 130, it is ensured that the diameter of the first positioning ring is always smaller than the diameter of the second positioning ring. Of course, it is preferred to simultaneously set the first positioning member 120 and the second positioning member 130 on the mounting portion 111.

[0041] In one embodiment, the mounting portion 111 is provided with a mounting groove 1111, the mounting groove 1111 extends radially, the first positioning member 120 and the second positioning member 130 are clamped in the mounting groove 1111, and the first positioning member 120 and the second positioning member 130 can adjust the position radially. At the same time, it can be understood that in order to ensure that the first positioning member 120 and the second positioning member 130 will not move easily after the position adjustment is completed, the clamping force between the first positioning member 120 and the second positioning member 130 and the mounting groove 1111 has a certain strength, that is, the first positioning member 120 and the second positioning member 130 need to apply a certain external force to adjust the position before they can move.

[0042] In another embodiment, the mounting portion 111 is provided with a plurality of mounting holes, and the plurality of mounting holes of each mounting portion 111 are arranged radially at intervals, and the first positioning member 120 and the second positioning member 130 are both detachably connected to the mounting holes, so that they can be connected to the corresponding mounting holes according to the size of the furnace core assembly. It can be understood that when the mounting groove 1111 is used, the position adjustment of the first positioning member 120 and the second positioning member 130 can be steplessly adjusted.

[0043] In one embodiment, the assembly jig 100 further includes a plurality of third positioning members 140, which are arranged at intervals on the mounting seat 110 around the central axis and enclose a third positioning circle centered on the central axis. The plurality of third positioning members 140 can surround and spread each other to adjust the diameter of the third positioning circle, and the third positioning circle is located between the first positioning circle and the second positioning circle. In this way, the third positioning circle can respectively abut against the small insulation sleeve and the supporting large tube on both sides along its own radial direction to further facilitate the adjustment of the gap between the small insulation sleeve and the supporting large tube. Specifically, Figure 1 In the illustrated embodiment, the third positioning member 140 is disposed on the mounting portion 111 , and each mounting portion 111 is sequentially provided with the first positioning member 120 , the third positioning member 140 and the second positioning member 130 .

[0044] It is understandable that, in the case of setting the third positioning member 140, the thickness of the first positioning member 120, the second positioning member 130 and the third positioning member 140 can be determined according to the diameters of the small supporting tube, the small insulation sleeve, the large supporting tube and the large insulation sleeve. During the assembly process, it is only necessary to determine the position of any one of the first positioning member 120, the second positioning member 130 and the third positioning member 140, and then arrange them in the order of the small supporting tube, the first positioning member 120, the small insulation sleeve, the third positioning member 140, the large supporting tube, the second positioning member 130 and the large insulation sleeve.

[0045] In one embodiment, the first positioning member 120, the second positioning member 130 and the third positioning member 140 all include a connecting portion 150 and a positioning portion 160, the connecting portion 150 is connected to the mounting seat 110, the positioning portion 160 is connected to the connecting portion 150, and the positioning portion 160 can be enclosed to form a positioning circle. For example, the positioning portion 160 of the first positioning member 120 is enclosed to form a first positioning circle, and the positioning portion 160 of the first positioning member 120 is respectively abutted against the supporting small tube and the thermal insulation small sleeve.

[0046] In one embodiment, the mounting base 110 and the positioning member are both made of quartz.

[0047] In order to facilitate understanding of the technical solution of this application, Figure 1 The application process of the assembly jig 100 in the above embodiment is described as follows:

[0048] Initially, the furnace core is fixed on the furnace frame, and the positions of the first positioning member 120, the second positioning member 130 and the third positioning member 140 are adjusted according to the diameters of the components of the furnace core assembly, and then the mounting seat 110 is fixed on the furnace frame, and then the supporting small tube, the small insulation sleeve, the supporting large tube and the large insulation sleeve are placed on the assembly fixture 100 in sequence, and the supporting small tube, the first positioning member 120, the small insulation sleeve, the third positioning member 140, the supporting large tube, the second positioning member 130 and the large insulation sleeve are arranged in sequence, and the two sides of the first positioning member 120 are respectively abutted against the supporting small tube and the small insulation sleeve, the two sides of the third positioning member 140 are respectively abutted against the small insulation sleeve and the supporting large tube, and the two sides of the second positioning member 130 are respectively abutted against the supporting large tube and the large insulation sleeve, so as to realize the positioning of the supporting small tube, the small insulation sleeve, the supporting large tube and the large insulation sleeve, and ensure that the four components are coaxially arranged so that the gaps between adjacent two are evenly distributed.

[0049] In addition, in order to reflect the advantages of the furnace core assembly assembled by the assembly fixture 100 in the present application, the following embodiments and comparative examples are provided for illustration:

[0050] Embodiment: For a 4-inch silicon-doped gallium arsenide crystal, the furnace core assembly is assembled using the assembly fixture 100 of the present application, that is, the small support tube, the small insulation sleeve, the large support tube and the large insulation sleeve are positioned by the first positioning member 120, the third positioning member 140 and the second positioning member 130. During the subsequent crystal growth process, 16 furnaces are grown, the average dislocation density is 230 / cm2, and crystal defects such as twins and dendrites account for 15.46%.

[0051] Comparative example: For a 4-inch GaAs-doped silicon crystal, the furnace core assembly was assembled in a traditional way, that is, the positions of the supporting small tube, the small insulation sleeve, the supporting large tube and the insulation sleeve were manually adjusted by manual observation. During the subsequent crystal growth process, 16 furnaces were grown, and the average dislocation density was 281 / cm 2 , crystal defects account for 25.72%.

[0052] It can be seen from the analysis of the embodiments and comparative examples that the use of the assembly fixture 100 in the above embodiment can ensure that the gaps between the components in the furnace core assembly are evenly distributed, thereby effectively reducing crystal defects and dislocation density and improving crystal quality.

[0053] Although the embodiments of the present application have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. An assembly jig for a furnace core assembly, characterized in that: include: Mounting seat; A plurality of first positioning members are arranged at intervals on the mounting seat around a central axis and enclosed to form a first positioning circle centered on the central axis, and the plurality of first positioning members can surround and spread each other to adjust the diameter of the first positioning circle; A plurality of second positioning members are arranged at intervals on the mounting seat around the central axis and enclose a second positioning circle centered on the central axis. The plurality of second positioning members can surround and spread each other to adjust the diameter of the second positioning circle.

2. The assembly jig for the furnace core assembly according to claim 1, characterized in that: The diameter of the first positioning ring is smaller than the diameter of the second positioning ring.

3. The assembly jig for furnace core assembly according to claim 1, characterized in that: The mounting seat includes a plurality of mounting portions, and the plurality of mounting portions are arranged at intervals along the circumference of a circle with the central axis as the center. Each of the first positioning members and each of the second positioning members are arranged at a corresponding mounting portion, and each of the first positioning members and each of the second positioning members can adjust their positions radially along the circle with the central axis as the center.

4. The assembly jig for the furnace core assembly according to claim 3, characterized in that: Each of the mounting parts is provided with the first positioning member and the second positioning member. The first positioning member and the second positioning member on each of the mounting parts are arranged in sequence along the radial direction, and the first positioning member is located on a side of the second positioning member facing the central axis.

5. The assembly jig for the furnace core assembly according to claim 3, characterized in that: The mounting portion is provided with a mounting groove, the mounting groove extends along the radial direction, the first positioning member and the second positioning member are clamped in the mounting groove, and the first positioning member and the second positioning member can adjust positions along the radial direction.

6. The assembly jig for the furnace core assembly according to claim 3, characterized in that: Each of the mounting parts is provided with a plurality of mounting holes, and the plurality of mounting holes of each of the mounting parts are arranged at intervals along the radial direction, and the first positioning member and the second positioning member are both detachably connected to the mounting holes.

7. The assembly jig for furnace core assembly according to claim 3, characterized in that: The mounting seat also includes a fixing portion, the fixing portion is penetrated by a through hole, and the plurality of mounting portions are fixedly connected to the fixing portion and are arranged at intervals along the circumference of the through hole.

8. The assembly jig for furnace core assembly according to claim 1, characterized in that: Each of the first positioning members and each of the second positioning members includes a connecting portion and a positioning portion, the connecting portion is connected to the mounting seat, the positioning portion is connected to the connecting portion, and the positioning portions can be enclosed to form a positioning circle.

9. The assembly jig for furnace core assembly according to claim 1, characterized in that: The assembly jig also includes a plurality of third positioning members, which are arranged at intervals around the central axis and enclose a third positioning circle centered on the central axis. The plurality of third positioning members can surround and diffuse each other to adjust the diameter of the third positioning circle, and the third positioning circle is located between the first positioning circle and the second positioning circle.

10. An assembly jig for a furnace core assembly, characterized in that: include: Mounting seat; A plurality of first positioning members are arranged at intervals on the mounting seat around a central axis and enclose a first positioning circle centered on the central axis. The plurality of first positioning members can surround and spread each other to adjust the diameter of the first positioning circle. The first positioning circle can abut against the supporting small tube and the thermal insulation small sleeve at two sides along its own radial direction respectively. A plurality of second positioning members are arranged on the mounting seat at intervals around the central axis and enclose a second positioning circle centered on the central axis. The plurality of second positioning members can surround and spread each other to adjust the diameter of the second positioning circle. The second positioning circle can respectively abut against the supporting large pipe and the insulation large sleeve on both sides along its own radial direction. A plurality of third positioning members are arranged on the mounting seat at intervals around the central axis and enclose a third positioning circle centered on the central axis. The plurality of third positioning members can surround and spread each other to adjust the diameter of the third positioning circle. The third positioning circle is located between the first positioning circle and the second positioning circle, and the third positioning circle can respectively abut against the thermal insulation sleeve and the supporting large tube on both sides along its own radial direction.

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