Improved aluminum vacuum chuck clamp device

Abstract

The utility model discloses an improved aluminum vacuum chuck clamp device which comprises a chuck body, exhaust grooves which are communicated in a criss-cross mode are formed in the upper surface of the chuck body, air suction holes are formed in the upper surface of the chuck body, and air outlet holes are formed in one side face of the chuck body. A sealing groove is formed in the upper side of the suction cup body along the outer edge of the suction cup body, and the suction hole is communicated with the exhaust groove and the air outlet hole. According to the device, the criss-cross exhaust grooves are adopted for exhausting, drilling is not needed to penetrate through the suction cup, and the thin-wall flat plate can be better sucked.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment processing, in particular to an improved aluminum vacuum suction cup clamp device. Background Art

[0002] Thin-walled flat parts are needed in semiconductor equipment. The processing of thin-walled flat parts often faces problems such as difficult clamping and easy deformation. Although vacuum suction cup fixtures have been used, they generally have defects such as poor sealing and inconvenient operation, which limits their application in high-precision processing.

[0003] For example, Chinese invention patent CN106584497A discloses a thin-sheet material taking manipulator seamless combined vacuum suction cup, wherein the suction cup bottom plate is provided with a plurality of second through holes from top to bottom, and the suction cup top plate is provided with at least one first through hole from top to bottom, and a sealing silicone ring is provided between the lower surface of the suction cup top plate and the upper surface of the suction cup bottom plate to form a closed space to suck the thin sheet. The above design can effectively distribute the air flow during vacuuming evenly on each small hole, so that the air flow of each small hole is almost similar. In actual operation, it is necessary to process a plurality of small holes, and the holes are drilled through the suction cup, and the drilling difficulty is relatively large. Although the thin sheet can be sucked for material taking during suction, when applied to processing, the suction force formed by the plurality of small holes is relatively small due to the certain impact force of the processing, and the thin-walled flat plate is easy to fall off. Moreover, the sealing silicone ring adopts a conventional structure, and the sealing performance is average. Therefore, a new technical solution is urgently needed to solve at least one of the above technical problems. Summary of the invention

[0004] The utility model aims to provide an improved aluminum vacuum suction cup fixture device, which adopts crisscross exhaust grooves for exhaust, does not need to drill holes through the suction cup, and can better absorb thin-walled flat plates.

[0005] In order to achieve the above-mentioned technical objectives and meet the above-mentioned technical requirements, the technical solution adopted by the utility model is: an improved aluminum vacuum suction cup clamp device, characterized in that it includes a suction cup body, the upper surface of the suction cup body is provided with exhaust grooves that are criss-crossed and connected, the upper surface of the suction cup body is provided with suction holes, one side of the suction cup body is provided with an air outlet hole, the upper side of the suction cup body is provided with a sealing groove along the outer edge of the suction cup body, and the suction holes are respectively connected to the exhaust grooves and the air outlet holes.

[0006] As a preferred technical solution, the exhaust grooves include a plurality of uniformly linearly arranged transverse grooves and a plurality of uniformly linearly arranged longitudinal grooves, and the transverse grooves and the longitudinal grooves are arranged to intersect.

[0007] As a preferred technical solution, the sealing groove includes a first straight segment and a second straight segment symmetrically arranged. Third straight segments and fourth straight segments are respectively and perpendicularly arranged at both ends of the first straight segment. Fifth straight segments and sixth straight segments are respectively and perpendicularly arranged at both ends of the second straight segment. A first curved segment is connected between the third straight segment and the fifth straight segment. A second curved segment is connected between the fourth straight segment and the sixth straight segment. The first straight segment, the third straight segment, the first curved segment, the fifth straight segment, the second straight segment, the sixth straight segment, the second curved segment, and the fourth straight segment are connected in sequence.

[0008] As a preferred technical solution, the cross-section of the sealing groove is dovetail-shaped.

[0009] As a preferred technical solution, the shape of the first curved segment is U-shaped.

[0010] As a preferred technical solution, the shape of the second curved segment is arched.

[0011] As a preferred technical solution, a plurality of pressure grooves are respectively arranged on both sides in the length direction of the suction cup body.

[0012] As a preferred technical solution, at least one positioning groove is arranged on the lower side of the suction cup body.

[0013] As a preferred technical solution, one handle is detachably arranged on both sides in the width direction of the suction cup body.

[0014] The beneficial effects of the present utility model are as follows:

[0015] 1) The criss-cross exhaust grooves are used for exhaust, without the need to drill through the suction cup, and can better hold the thin-walled flat plate.

[0016] 2) The multiple transverse grooves and multiple longitudinal grooves cooperate with the thin-walled flat plate to better adsorb the thin-walled flat plate. The thin-walled flat plate is not easy to fall off, ensuring the rapid and uniform discharge of air, accelerating the vacuum establishment process, and improving the adsorption efficiency.

[0017] 3) The sealing groove has better sealing performance compared with the traditional rectangular structure.

[0018] 4) The dovetail-shaped sealing groove cooperates with the sealing ring to form a tight sealing interface, and can maintain good vacuum even in a complex processing environment, effectively preventing air leakage.

[0019] 5) The pressure grooves cooperate with the special pressing plate to be quickly fixed on various workbenches, ensuring the stability of the suction cup body during the processing process and preventing displacement.

[0020] 6) The positioning groove is convenient for quick positioning and plays a role in limiting.

[0021] 7) An ergonomic handle design is added to the edge of the suction cup body to facilitate operators to easily remove and install the suction cup, reduce labor intensity and improve work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is an exploded diagram of a device provided by one embodiment of the utility model;

[0023] Figure 2 It is a structural diagram of a suction cup body provided by an embodiment of the utility model;

[0024] Figure 3 yes Figure 2 Another view of;

[0025] Figure 4 It is a cross-sectional view of a suction cup body provided by an embodiment of the utility model.

[0026] exist Figure 1-Figure 4 In the figure, 1. suction cup body; 101. air suction hole; 102. air outlet hole; 103. pressing groove; 104. positioning groove; 2. exhaust groove; 201. transverse groove; 202. longitudinal groove; 3. sealing groove; 301. first straight line segment; 302. second straight line segment; 303. third straight line segment; 304. fourth straight line segment; 305. fifth straight line segment; 306. sixth straight line segment; 307. first curved line segment; 308. second curved line segment; 4. handle; 5. thin-walled plate. DETAILED DESCRIPTION

[0027] The utility model is further described below in conjunction with the accompanying drawings.

[0028] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "head", "tail", "top", "bottom", "left", "right", "front", "back", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as a limitation on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0029] See also Figure 1-Figure 4, an embodiment of the present utility model provides an improved aluminum vacuum suction cup fixture device, including a suction cup body 1. An exhaust groove 2 communicating in a crisscross manner is arranged on the upper surface of the suction cup body 1. An air suction hole 101 is arranged on the upper surface of the suction cup body 1. An air outlet hole 102 is arranged on one side of the suction cup body 1. A sealing groove 3 is arranged along the outer edge of the suction cup body 1 on the upper side of the suction cup body 1. The air suction hole 101 is respectively communicated with the exhaust groove 2 and the air outlet hole 102.

[0030] Vacuum is sucked from the air outlet hole 102, and the gas discharged from the exhaust groove 2 enters the air outlet hole 102 through the air suction hole 101. The crisscross exhaust groove 2 is used for exhausting gas, without the need to drill through the suction cup, which can better hold the thin-walled flat plate 5, so that the processing stability of the thin-walled flat plate 5 is better.

[0031] As Figure 1-Figure 4 shown, the exhaust groove 2 includes a plurality of laterally arranged grooves 201 arranged linearly and evenly, and a plurality of longitudinally arranged grooves 202 arranged linearly and evenly. The laterally arranged grooves 201 and the longitudinally arranged grooves 202 intersect, which can better adsorb the thin-walled flat plate 5, and the thin-walled flat plate 5 is not easy to fall off, ensuring rapid and uniform discharge of air, accelerating the vacuum establishment process, and improving the adsorption efficiency.

[0032] As Figure 1-Figure 4 shown, the sealing groove 3 includes a symmetrically arranged first straight section 301 and a second straight section 302. Third straight sections 303 and fourth straight sections 304 are respectively vertically arranged at both ends of the first straight section 301. Fifth straight sections 305 and sixth straight sections 306 are respectively vertically arranged at both ends of the second straight section 302. A first curved section 307 is communicated between the third straight section 303 and the fifth straight section 305. A second curved section 308 is communicated between the fourth straight section 304 and the sixth straight section 306. The first straight section 301, the third straight section 303, the first curved section 307, the fifth straight section 305, the second straight section 302, the sixth straight section 306, the second curved section 308, and the fourth straight section 304 are communicated in sequence. The sealing groove 3 has better sealing performance compared with the traditional rectangular structure.

[0033] As Figure 1-Figure 4 shown, the cross-section of the sealing groove 3 is a dovetail shape. The dovetail-shaped sealing groove 3 cooperates with a sealing ring to form a tight sealing interface, and can maintain good vacuum even in a complex processing environment, effectively preventing air leakage.

[0034] As Figure 1-Figure 4 shown, the shape of the first curved section 307 is a C shape. Adopting a special-shaped structure, the sealing performance is better after the sealing groove 3 is embedded with a sealing ring.

[0035] As Figure 1-Figure 4As shown, the second curved section 308 is in an arched shape and adopts a special-shaped structure. After the sealing groove 3 is embedded with a sealing ring, the sealing performance is better.

[0036] like Figure 1-Figure 4 As shown, a plurality of pressing grooves 103 are respectively arranged on both sides of the length direction of the suction cup body 1. The suction cup body 1 is rectangular. The pressing grooves 103 cooperate with special pressing plates to be quickly fixed on various workbenches to ensure the stability of the suction cup body 1 during processing and prevent displacement.

[0037] like Figure 1-Figure 4 As shown, at least one positioning groove 104 is provided on the lower side of the suction cup body 1. A positioning block is designed to cooperate with the positioning groove 104. The positioning groove 104 facilitates quick positioning, plays a role in positioning, and improves installation efficiency.

[0038] like Figure 1-Figure 4 As shown, a handle 4 is detachably provided on both sides of the suction cup body 1 in the width direction, and an ergonomic handle 4 is added to the edge of the suction cup body 1 to facilitate the operator to carry, easily disassemble and install the suction cup, reduce labor intensity, and improve work efficiency.

[0039] The above embodiments are merely descriptions for clearly illustrating the present invention, and are not limitations on the implementation methods. For technicians in the relevant field, other different forms of changes or modifications can be made based on the above descriptions. It is not necessary and impossible to list all the implementation methods here, and the obvious changes or modifications derived therefrom are still within the scope of protection of the present invention.

Claims

1. An improved aluminum vacuum suction cup fixture device, characterized in that: It includes a suction cup body. An exhaust groove that communicates in a crisscross pattern is provided on the upper surface of the suction cup body. An air suction hole is provided on the upper surface of the suction cup body. An air outlet hole is provided on one side surface of the suction cup body. A sealing groove is provided along the outer edge of the suction cup body on the upper side thereof. The air suction holes communicate with the exhaust groove and the air outlet hole respectively.

2. The improved aluminum vacuum suction cup fixture device according to claim 1, characterized in that: The exhaust groove includes a plurality of laterally arranged grooves that are uniformly linearly arranged and a plurality of longitudinally arranged grooves that are uniformly linearly arranged. The laterally arranged grooves and the longitudinally arranged grooves intersect.

3. The improved aluminum vacuum suction cup fixture device according to claim 1, characterized in that: The sealing groove includes a first straight line segment and a second straight line segment that are symmetrically arranged. Third straight line segments and fourth straight line segments are respectively and perpendicularly provided at both ends of the first straight line segment. Fifth straight line segments and sixth straight line segments are respectively and perpendicularly provided at both ends of the second straight line segment. A first curved line segment is communicated between the third straight line segment and the fifth straight line segment. A second curved line segment is communicated between the fourth straight line segment and the sixth straight line segment. The first straight line segment, the third straight line segment, the first curved line segment, the fifth straight line segment, the second straight line segment, the sixth straight line segment, the second curved line segment, and the fourth straight line segment are sequentially communicated.

4. An improved aluminum vacuum suction cup fixture device according to claim 1 or 3, characterized in that: The cross-section of the sealing groove is in the shape of a dovetail.

5. The improved aluminum vacuum suction cup fixture device according to claim 3, characterized in that: The shape of the first curved line segment is in the shape of a "匚".

6. The improved aluminum vacuum suction cup fixture device according to claim 3, characterized in that: The shape of the second curved line segment is in the shape of an arch.

7. The improved aluminum vacuum chuck fixture device according to claim 1, characterized in that: A plurality of pressure grooves are respectively provided on both sides in the length direction of the suction cup body.

8. The improved aluminum vacuum chuck fixture device according to claim 1, characterized in that: At least one positioning groove is provided on the lower side of the suction cup body.

9. The improved aluminum vacuum chuck fixture device according to claim 1, characterized in that: One handle is detachably provided on both sides in the width direction of the suction cup body.

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