Vacuumizing system of single crystal furnace

Abstract

The utility model discloses a single crystal furnace vacuumizing system which comprises a furnace body and a supporting frame, the furnace body is arranged at the upper end of the supporting frame, a main exhaust pipeline is arranged at the lower end of the furnace body, the upper end of the main exhaust pipeline is connected with the bottom of the furnace body, and filtering tanks are arranged at the left end and the right end of the main exhaust pipeline. A plurality of vacuum pumps are arranged at the left ends and the right ends of the two filtering tanks correspondingly and suck oxygen through main exhaust pipelines between the filtering tanks and the furnace body, and auxiliary exhaust pipelines are arranged between the outer walls of the left ends and the right ends of the furnace body and the filtering tanks correspondingly. The auxiliary exhaust pipeline is used for increasing the efficiency of the vacuum pumps for sucking oxygen in the furnace body, the vacuum pumps are connected in series or in parallel through the vacuum channels, the vacuumizing performance of the vacuum pump device can be improved under the condition that the vacuum pump performance is not changed, the low-furnace-pressure effect is achieved, the oxygen content is reduced, and the service life of a battery is effectively prolonged.

Description

Technical Field

[0001] The utility model belongs to the technical field related to crystalline silicon manufacturing equipment, and specifically relates to a single crystal furnace vacuum pumping system. Background Art

[0002] At present, monocrystalline silicon is widely used in the solar photovoltaic industry. Monocrystalline silicon is generally prepared by the Czochralski method, and the Czochralski method requires the use of an argon atmosphere to pull crystals. In the process of using the Czochralski method to pull doped single crystals, the oxygen content of the crystal rod will gradually increase as the furnace pressure increases, resulting in a high overall oxygen content in the crystal rod grown at high furnace pressure, which limits the electrical performance. Although the oxygen content in the crystal rod can be reduced by reducing the furnace pressure, the existing furnace exhaust system, such as the exhaust pipe and vacuum pump design, does not support further reduction of the furnace pressure and cannot effectively reduce the oxygen content. Utility Model Content

[0003] The purpose of the utility model is to provide a single crystal furnace vacuum system to solve the problem that the existing furnace exhaust system, such as exhaust pipe, vacuum pump design, etc., mentioned in the above background technology, does not support further reduction of furnace pressure and cannot effectively reduce oxygen content.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a single crystal furnace vacuum system, comprising a furnace body and a support frame;

[0005] A furnace body is arranged at the upper end of the support frame;

[0006] A main exhaust pipe is provided at the lower end of the furnace body;

[0007] The upper end of the main exhaust pipe is connected to the bottom of the furnace body. Filter tanks are arranged at the left and right ends of the main exhaust pipe. Multiple vacuum pumps are respectively arranged at the left and right ends of the two filter tanks. The multiple vacuum pumps absorb oxygen through the main exhaust pipe between the filter tank and the furnace body.

[0008] Preferably, auxiliary exhaust pipes are provided between the outer walls at the left and right ends of the furnace body and the filter tank, and the auxiliary exhaust pipes are used to increase the efficiency of the vacuum pump in absorbing oxygen in the furnace body.

[0009] Preferably, a water tank is arranged outside the main exhaust pipe, the main exhaust pipe is fixedly arranged inside the water tank, and a plurality of heat-conducting blocks are welded equidistantly on the outer wall of the main exhaust pipe, and the heat-conducting blocks are used to increase the heat conduction efficiency of the main exhaust pipe.

[0010] Preferably, a water valve is provided on the right side of the front end of the water tank, and the water valve is fixed by screwing two nuts on the inner and outer walls of the water tank. A rubber ring is sleeved between the two nuts and the water tank, and the rubber ring is used to prevent water leakage at the connection of the water valve.

[0011] Preferably, a water filling cap is provided on the right front side of the upper end of the water tank, and the water filling cap is unscrewed to add water into the water tank. A plug is provided on the lower left side of the front end of the water tank, and the plug is used to block the sewage outlet.

[0012] Preferably, the water tank is made of welded stainless steel, and a heat insulation layer is pasted on the outer wall of the water tank, and the heat insulation layer is used to isolate the heat from the surface of the water tank.

[0013] Compared with the prior art, the utility model provides a single crystal furnace vacuum system, which has the following

[0014] Beneficial effects:

[0015] 1. The single crystal furnace vacuum system in the utility model includes a main exhaust duct and an auxiliary exhaust duct. The upper end of the main exhaust duct is connected to the furnace bottom of the furnace body, the left and right ends of the main exhaust duct are connected to the air inlet of the filter tank, the auxiliary exhaust duct is connected to the main furnace chamber of the furnace body and the filter tank, the vacuum pump is connected to the air outlet of the filter device through a vacuum duct, and multiple vacuum pumps are connected in series or in parallel through vacuum channels. The vacuum pump device's vacuuming performance can be improved without changing the vacuum pump's performance, achieving a low furnace pressure effect, thereby reducing the oxygen content and effectively improving the battery life.

[0016] 2. When multiple vacuum pumps start to run to extract oxygen from the furnace body, due to the high temperature inside the furnace body, the heat of the oxygen extracted by the vacuum pump is also high, causing the vacuum pump to heat up too quickly when absorbing high-calorie oxygen for a long time. Long-term use will reduce the service life of the vacuum pump. By setting the main exhaust pipe inside the water tank, the water inside the water tank will cool the main exhaust pipe when the hot air passes through the main exhaust pipe, thereby reducing the heat of the air entering the main exhaust pipe, reducing the problem of the vacuum pump heating up too quickly, and effectively avoiding overheating of the vacuum pump and damage caused by load operation. The water in the water tank used for cooling will heat itself when absorbing the main exhaust pipe, and the hot water in the water tank can be released from the water valve for use. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The utility model is a schematic diagram of the structure of a single crystal furnace vacuum system.

[0018] Figure 2 It is a schematic diagram of the planed surface structure of the front end of the water tank of the utility model.

[0019] Figure 3 It is a schematic diagram of the planed surface structure of the right end of the water tank of the utility model.

[0020] In the figure: 1. vacuum pump; 2. filter tank; 3. auxiliary exhaust pipe; 4. furnace body; 5. support frame; 6. water valve; 7. water filling cover; 8. main exhaust pipe; 9. water tank; 10. heat transfer block; 11. nut; 12. rubber ring; 13. insulation layer; 14. plug. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] The utility model provides Figure 1-3 A single crystal furnace vacuum system shown includes a furnace body 4 and a support frame 5;

[0023] A furnace body 4 is disposed on the upper end of the support frame 5;

[0024] A main exhaust pipe 8 is provided at the lower end of the furnace body 4;

[0025] The upper end of the main exhaust pipe 8 is connected to the bottom of the furnace body 4. Filter tanks 2 are arranged at both ends of the main exhaust pipe 8. Multiple vacuum pumps 1 are respectively arranged at both ends of the two filter tanks 2. The multiple vacuum pumps 1 absorb oxygen through the main exhaust pipe 8 between the filter tank 2 and the furnace body 4.

[0026] When the pressure in the furnace body 4 needs to be reduced, multiple vacuum pumps 1 connected in series are turned on, and the oxygen in the furnace body 4 will be transported to the filter tanks 2 on both sides through the main exhaust pipe 8. After the gas is filtered by the filter tank 2, the extracted oxygen is discharged to the outside by the vacuum pump 1.

[0027] like Figure 1 As shown, auxiliary exhaust pipes 3 are provided between the outer walls at the left and right ends of the furnace body 4 and the filter tank 2 , and the auxiliary exhaust pipes 3 are used to increase the efficiency of the vacuum pump 1 in absorbing oxygen in the furnace body 4 .

[0028] When the vacuum pump 1 reduces the pressure of the furnace body 4, the auxiliary exhaust pipe 3 can increase the speed of oxygen discharge from the furnace body 4 to the outside, thereby achieving a rapid pressure reduction effect.

[0029] like Figure 1 and Figure 2As shown, a water tank 9 is arranged outside the main exhaust pipe 8, and the main exhaust pipe 8 is fixedly arranged inside the water tank 9. A plurality of heat-conducting blocks 10 are welded and arranged at equal intervals on the outer wall of the main exhaust pipe 8. The heat-conducting blocks 10 are used to increase the heat conduction efficiency of the main exhaust pipe 8. The water tank 9 is made of stainless steel by welding, and a heat-insulating layer 13 is pasted on the outer wall of the water tank 9. The heat-insulating layer 13 is used to isolate the heat on the surface of the water tank 9.

[0030] When the vacuum pump 1 absorbs oxygen, the hot oxygen is transported to the filter tank 2 through the main exhaust pipe 8. The heat in the main exhaust pipe 8 is transferred to the surface of the heat conductive block 10, and the cold water in the water tank 9 will cool down the main exhaust pipe 8 and the heat conductive block 10, while the water that absorbs the heat will heat up. The heat insulating layer 13 can prevent the temperature in the water tank 9 from dissipating outward.

[0031] like Figure 1 and Figure 3 As shown, a water valve 6 is arranged on the right side of the front end of the water tank 9, and the water valve 6 is fixed by screwing two nuts 11 on the inner and outer walls of the water tank 9, and a rubber ring 12 is arranged between the two nuts 11 and the water tank 9, and the rubber ring 12 is used to prevent water leakage at the connection of the water valve 6, and a water filling cover 7 is arranged on the front right side of the upper end of the water tank 9, and the water filling cover 7 is unscrewed to add water into the water tank 9, and a plug 14 is arranged on the lower left side of the front end of the water tank 9, and the plug 14 is used to plug the sewage outlet.

[0032] When the water in the water tank 9 is to be used, the water in the water tank 9 can be discharged outward through the water valve 6, the water filling cap 7 can be unscrewed to add cold water into the water tank 9, and the plug 14 can be unscrewed to discharge all the water in the water tank 9, thereby achieving the effect of cleaning the water tank 9.

[0033] The working principle of the utility model is as follows: when the pressure in the furnace body 4 needs to be reduced, multiple vacuum pumps 1 connected in series are turned on, and the oxygen in the furnace body 4 will be transported to the filter tanks 2 on both sides through the main exhaust pipe 8 and the auxiliary exhaust pipe 3. After the gas is filtered by the filter tank 2, the extracted oxygen is discharged to the outside by the vacuum pump 1. When the vacuum pump 1 absorbs oxygen, the hot oxygen is transported to the filter tank 2 through the main exhaust pipe 8. During the process, the heat in the main exhaust pipe 8 is transferred to the surface of the heat conductive block 10, and the cold water in the water tank 9 will cool the main exhaust pipe 8 and the heat conductive block 10.

[0034] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A single crystal furnace vacuum system, comprising a furnace body (4) and a support frame (5); A furnace body (4) is arranged at the upper end of the support frame (5); A main exhaust pipe (8) is provided at the lower end of the furnace body (4); Features: The upper end of the main exhaust pipe (8) is connected to the bottom of the furnace body (4), and filter tanks (2) are arranged at the left and right ends of the main exhaust pipe (8). A plurality of vacuum pumps (1) are arranged at the left and right ends of the two filter tanks (2), respectively, and the plurality of vacuum pumps (1) absorb oxygen through the main exhaust pipe (8) between the filter tank (2) and the furnace body (4).

2. A single crystal furnace vacuum pumping system according to claim 1, characterized in that: Auxiliary exhaust pipes (3) are provided between the outer walls at the left and right ends of the furnace body (4) and the filter tank (2), and the auxiliary exhaust pipes (3) are used to increase the efficiency of the vacuum pump (1) in absorbing oxygen in the furnace body (4).

3. The single crystal furnace vacuum pumping system according to claim 1, characterized in that: A water tank (9) is arranged outside the main exhaust pipe (8), the main exhaust pipe (8) is fixedly arranged inside the water tank (9), and a plurality of heat conduction blocks (10) are welded and arranged at equal intervals on the outer wall of the main exhaust pipe (8), the heat conduction blocks (10) being used to increase the heat conduction efficiency of the main exhaust pipe (8).

4. The single crystal furnace vacuum pumping system according to claim 3, characterized in that: A water valve (6) is arranged on the right side of the front end of the water tank (9), and the water valve (6) is fixed by screwing two nuts (11) on the inner and outer walls of the water tank (9), and a rubber ring (12) is arranged between the two nuts (11) and the water tank (9), and the rubber ring (12) is used to prevent water leakage at the connection of the water valve (6).

5. A single crystal furnace vacuum pumping system according to claim 4, characterized in that: A water filling cap (7) is arranged on the right front side of the upper end of the water tank (9), and the water filling cap (7) is unscrewed to add water into the water tank (9). A plug (14) is arranged on the lower left side of the front end of the water tank (9), and the plug (14) is used to block the sewage outlet.

6. The single crystal furnace vacuum pumping system according to claim 5, characterized in that: The water tank (9) is made of stainless steel by welding, and a heat insulation layer (13) is bonded to the outer wall of the water tank (9), and the heat insulation layer (13) is used to isolate the heat on the surface of the water tank (9).

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