Thermal insulation structure for single crystal furnace
By designing a single crystal furnace insulation structure including the main insulation barrel, the second insulation barrel and the first insulation barrel, the problem of uneven temperature gradient distribution in the existing single crystal furnace insulation structure is solved, and a more uniform temperature gradient and more stable crystal growth are achieved.
Patent Information
- Application Number
- CN202420725288.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-10
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2034-04-10
AI Technical Summary
The insulation structure of the existing single crystal furnace has poor insulation effect during the crystal drawing process, and the temperature gradient distribution is uneven, resulting in instability and disconnection of the crystal growth interface.
A thermal insulation structure for a single crystal furnace is designed, including a main thermal insulation bucket, a second thermal insulation bucket and a first thermal insulation bucket. Through the design of these thermal insulation buckets and the structure of the mounting base, a layer-by-layer insulation effect is formed, and the distribution of the temperature gradient is optimized.
It effectively improves the temperature gradient in the thermal field of the single crystal furnace, enhances the insulation effect, obtains a relatively uniform temperature gradient, improves the thermal insulation effect of the single crystal furnace body, stabilizes the crystal growth rate, and optimizes the thermal field distribution in the furnace, reducing the probability of crystal cracking.
Smart Images
Figure CN222821716U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of thermal insulation structures, in particular to a thermal insulation structure for a single crystal furnace. Background Art
[0002] The Czochralski method is currently the most widely used technology for the production of monocrystalline silicon. With the intensification of market competition, the production of monocrystalline silicon needs to reduce the production cost per kilogram of monocrystalline silicon to improve the price advantage of the product. The combustion cost accounts for a large proportion in the production of monocrystalline silicon. Reducing the power consumption of the single crystal furnace is one of the main ways to reduce the production cost per kilogram. Thermal field insulation is the most effective and controllable way to reduce energy consumption. Therefore, the selection and design of the side insulation structure is very important, especially the requirements for the mechanical strength and thermal insulation capacity of the material under high temperature conditions are very high; it is necessary to ensure a certain insulation effect, and also to meet the ideal radial and axial temperature gradient requirements required for crystal growth.
[0003] The existing large-scale thermal field size and the temperature gradient inside the thermal field are uneven and difficult to adjust, which can easily cause melt temperature fluctuations, thereby interfering with the stability of the crystal growth interface and causing wire breakage.
[0004] Therefore, it is necessary to propose a single crystal furnace insulation structure to solve the above problems. Utility Model Content
[0005] The main purpose of the utility model is to provide a heat preservation structure for a single crystal furnace, which can effectively solve the problems in the background technology.
[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:
[0007] A thermal insulation structure for a single crystal furnace comprises a mounting seat, a main thermal insulation barrel is fixedly connected to the center of the top of the mounting seat, a single crystal furnace body is installed in the inner cavity of the main thermal insulation barrel, a second thermal insulation barrel is arranged on the outer wall of the single crystal furnace body, a first thermal insulation barrel is arranged on the outer wall of the second thermal insulation barrel, and a fastening bolt is threadedly connected to the bottom of the mounting seat.
[0008] Preferably, the main insulation barrel is a hollow structure, a top cover is threadedly connected in the middle of the top of the main insulation barrel, and a sealing cover is installed in the middle of the top of the top cover.
[0009] Preferably, the bottom of the single crystal furnace body is fixedly connected to the center of the top of the mounting seat, the second insulation barrel is sleeved on the outer wall of the single crystal furnace body, the height of the first insulation barrel is greater than the height of the second insulation barrel, and support columns are symmetrically fixedly connected around the bottom of the mounting seat.
[0010] Preferably, first guide grooves are symmetrically provided around the outer wall of the first heat-insulating barrel, a first through groove is provided in the center of the first heat-insulating barrel, first guide columns are symmetrically provided around the inner cavity of the first through groove, first threaded grooves are symmetrically provided around the bottom of the first heat-insulating barrel, and a reserved hole is provided at the bottom of the mounting seat.
[0011] Preferably, second thread grooves are symmetrically opened around the bottom of the second heat-insulating barrel, the second thread grooves are of the same size as the first thread grooves, the positions of the reserved holes are relative to the first thread grooves and the second thread grooves, and the fastening bolts pass through the reserved holes and are threadedly connected to the first heat-insulating barrel and the second heat-insulating barrel through the second thread grooves and the first thread grooves.
[0012] Preferably, second guide grooves are symmetrically opened around the outer wall of the second heat-insulating barrel, a second through groove is opened in the center of the inner cavity of the second heat-insulating barrel, second guide columns are symmetrically fixedly connected around the inner cavity of the second through groove, the sizes of the first guide column and the second guide groove are matched, the sizes of the first guide column and the second guide groove are connected, the sizes of the first guide groove and the second guide groove are connected, the first guide column is inserted into the inner cavity of the second guide groove, and the first heat-insulating barrel is sleeved on the outer wall of the second heat-insulating barrel.
[0013] Beneficial Effects
[0014] Compared with the prior art, the utility model has the following beneficial effects:
[0015] 1. The single crystal furnace uses an insulation structure, which can solve the problems of poor insulation effect and uneven temperature gradient distribution of the insulation structure of the existing single crystal furnace during the crystal pulling process. The designed second insulation barrel and the first insulation barrel can effectively improve the temperature gradient in the thermal field of the single crystal furnace, enhance the insulation effect, and obtain a more uniform temperature gradient. It can effectively improve the thermal insulation effect of the single crystal furnace body, reduce the heat dissipation rate of the melt surface when the single crystal furnace body is working, and effectively increase the radial temperature gradient, which is beneficial to stabilizing the crystal growth rate. At the same time, it is also beneficial to form a uniform axial temperature gradient, which can not only ensure the protrusion rate of the crystal growth front, make bubbles easy to discharge, but also avoid excessive crystal growth in the later stage.
[0016] 2. The thermal insulation structure of the single crystal furnace enables the single crystal furnace body to control the temperature gradient in the furnace through the second thermal insulation barrel and the first guide groove placed at different positions and at different heights, which is beneficial to the formation of a convex interface during the crystal growth process, adjusts the position and range of the crystal growth remelting zone, makes the temperature distribution on the crystal surface smoother, reduces the probability of crystal cracking due to excessive thermal stress, and can optimize the thermal field distribution in the single crystal growth furnace, control and improve the axial temperature gradient in the furnace, thereby promoting the formation of a convex liquid-solid interface during the crystal growth process, reducing the thermal stress inside the crystal during in-situ annealing, and effectively improving the crystal quality.
[0017] 3. The single crystal furnace insulation structure, the second insulation barrel and the first insulation barrel are insulation barrel structures whose diameters gradually increase from the inside to the outside and whose heights of each layer of insulation barrels gradually increase from the inside to the outside. The first guide groove, the first guide column, the second guide groove and the second guide column arranged on the outer wall and the inner wall of the first insulation barrel and the second insulation barrel can be conveniently installed on the outer wall of the single crystal furnace body. At the same time, insulation barrels can be added or reduced according to usage requirements, so as to facilitate the control of the thermal field temperature gradient inside the single crystal furnace body. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a structural schematic diagram of the front side of the utility model;
[0019] Figure 2 It is a structural schematic diagram of the single crystal furnace body of the utility model;
[0020] Figure 3 It is a schematic diagram of the structure of the bottom of the first heat preservation barrel of the utility model;
[0021] Figure 4 It is a structural schematic diagram of the bottom of the mounting base of the utility model.
[0022] In the figure: 1. mounting base; 2. supporting column; 3. main insulation barrel; 4. top cover; 5. sealing cover; 6. first insulation barrel; 7. second insulation barrel; 8. first guide groove; 9. first guide column; 10. first threaded groove; 11. first through groove; 12. second guide groove; 13. second guide column; 14. second through groove; 15. second threaded groove; 16. reserved hole; 17. fastening bolt; 18. single crystal furnace body. DETAILED DESCRIPTION
[0023] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.
[0024] like Figure 1-4As shown, a heat preservation structure for a single crystal furnace comprises a mounting seat 1, a main heat preservation barrel 3 is fixedly connected to the center of the top of the mounting seat 1, a single crystal furnace body 18 is installed in the inner cavity of the main heat preservation barrel 3, a second heat preservation barrel 7 is arranged on the outer wall of the single crystal furnace body 18, a first heat preservation barrel 6 is arranged on the outer wall of the second heat preservation barrel 7, a fastening bolt 17 is threadedly connected to the bottom of the mounting seat 1, the main heat preservation barrel 3 is a cavity structure, a top cover 4 is threadedly connected to the center of the top of the main heat preservation barrel 3, and a sealing bolt 17 is installed in the center of the top of the top cover 4 The cover 5, the bottom of the single crystal furnace body 18 is fixedly connected to the center of the top of the mounting seat 1, the second insulation barrel 7 is sleeved on the outer wall of the single crystal furnace body 18, the height of the first insulation barrel 6 is greater than the height of the second insulation barrel 7, the bottom of the mounting seat 1 is symmetrically fixed with support columns 2, the outer wall of the first insulation barrel 6 is symmetrically provided with first guide grooves 8, the center of the first insulation barrel 6 is provided with a first through groove 11, the inner cavity of the first through groove 11 is symmetrically provided with first guide columns 9, the bottom of the first insulation barrel 6 A first thread groove 10 is symmetrically provided around the mounting base 1, a reserved hole 16 is provided at the bottom of the mounting base 1, a second thread groove 15 is symmetrically provided around the bottom of the second insulation barrel 7, the second thread groove 15 is of the same size as the first thread groove 10, the positions of the reserved hole 16 and the first thread groove 10 and the second thread groove 15 are relative, a fastening bolt 17 passes through the reserved hole 16 and is threadedly connected with the first insulation barrel 6 and the second insulation barrel 7 through the second thread groove 15 and the first thread groove 10, a second guide groove 12 is symmetrically provided around the outer wall of the second insulation barrel 7, a second through groove 14 is provided in the middle of the inner cavity of the second insulation barrel 7, and a second guide column 13 is symmetrically fixedly connected around the inner cavity of the second through groove 14, the sizes of the first guide column 9 and the second guide groove 12 are adapted, the sizes of the first guide column 9 and the second guide column 13 are connected, the sizes of the first guide groove 8 and the second guide groove 12 are connected, the first guide column 9 is inserted in the inner cavity of the second guide groove 12, and the first insulation barrel 6 is sleeved on the outer wall of the second insulation barrel 7.
[0025] This structure can solve the problems of poor insulation effect and uneven temperature gradient distribution of the insulation structure of the existing single crystal furnace during the crystal pulling process. The designed second insulation barrel 7 and the first insulation barrel 6 can effectively improve the temperature gradient in the thermal field of the single crystal furnace, enhance the insulation effect, and obtain a more uniform temperature gradient. It can effectively improve the thermal insulation effect of the single crystal furnace body 18, and can reduce the heat dissipation speed of the melt surface when the single crystal furnace body 18 is working. It can effectively increase the radial temperature gradient, which is beneficial to stabilize the crystal growth rate. At the same time, it is also beneficial to form a uniform axial temperature gradient, which can not only ensure the protrusion rate of the crystal growth front, make it easy to discharge bubbles, but also avoid In order to prevent the crystal from growing too fast in the later stage, the second insulation barrel 7 and the first guide groove 8 are placed at different positions and at different heights, so that the single crystal furnace body 18 has the function of controlling the temperature gradient in the furnace, which is beneficial to the formation of a convex interface during the crystal growth process, and adjusts the position and range of the crystal growth remelting zone, so that the temperature distribution on the crystal surface is smoother, and the probability of crystal cracking due to excessive thermal stress is reduced. It can also optimize the thermal field distribution in the single crystal growth furnace, control and improve the axial temperature gradient in the furnace, thereby promoting the formation of a convex liquid-solid interface during the crystal growth process, reducing the thermal stress inside the crystal during in-situ annealing, and effectively improving the crystal quality.
[0026] The second insulation barrel 7 and the first insulation barrel 6 are insulation barrel structures whose diameter gradually increases from the inside to the outside and whose height of each insulation barrel gradually increases from the inside to the outside. The first guide groove 8, the first guide column 9, the second guide groove 12 and the second guide column 13 arranged on the outer wall and the inner wall of the first insulation barrel 6 and the second insulation barrel 7 can be conveniently installed on the outer wall of the single crystal furnace body 18. At the same time, insulation barrels can be added or reduced according to usage requirements, so as to facilitate the control of the thermal field temperature gradient inside the single crystal furnace body 18.
[0027] It should be noted that the utility model is an insulation structure for a single crystal furnace. When in use, the top cover 4 is removed, and the first insulation barrel 6 and the second insulation barrel 7 are installed as needed. During installation, the first insulation barrel 6 is sleeved in the inner cavity of the second guide groove 12 on the outer wall of the second insulation barrel 7 through the first guide column 9 in the inner cavity of the first through groove 11, and the fastening bolts 17 at the corresponding positions are located to fix the first insulation barrel 6 on the top of the mounting base 1. When the single crystal furnace body 18 is in use, the external first insulation barrel 6 and the second insulation barrel 7 can have a better insulation effect on it.
[0028] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.
Claims
1. A thermal insulation structure for a single crystal furnace, comprising a mounting seat (1), characterized in that: A main insulation barrel (3) is fixedly connected to the center of the top of the mounting seat (1), a single crystal furnace body (18) is installed in the inner cavity of the main insulation barrel (3), a second insulation barrel (7) is arranged on the outer wall of the single crystal furnace body (18), a first insulation barrel (6) is arranged on the outer wall of the second insulation barrel (7), and a fastening bolt (17) is threadedly connected to the bottom of the mounting seat (1).
2. The thermal insulation structure for a single crystal furnace according to claim 1, characterized in that: The main heat-insulating barrel (3) is a hollow structure, a top cover (4) is threadedly connected in the middle of the top of the main heat-insulating barrel (3), and a sealing cover (5) is installed in the middle of the top of the top cover (4).
3. The single crystal furnace insulation structure according to claim 1, characterized in that: The bottom of the single crystal furnace body (18) is fixedly connected to the center of the top of the mounting seat (1); the second heat-insulating barrel (7) is sleeved on the outer wall of the single crystal furnace body (18); the height of the first heat-insulating barrel (6) is greater than the height of the second heat-insulating barrel (7); and support columns (2) are symmetrically fixedly connected around the bottom of the mounting seat (1).
4. The thermal insulation structure for a single crystal furnace according to claim 1, characterized in that: The outer wall of the first heat-insulating barrel (6) is symmetrically provided with first guide grooves (8), the center of the first heat-insulating barrel (6) is provided with a first through groove (11), the inner cavity of the first through groove (11) is symmetrically provided with first guide columns (9), the bottom of the first heat-insulating barrel (6) is symmetrically provided with first thread grooves (10), and the bottom of the mounting seat (1) is provided with a reserved hole (16).
5. The single crystal furnace insulation structure according to claim 4, characterized in that: The second heat-insulating barrel (7) is symmetrically provided with second thread grooves (15) around the bottom, the second thread grooves (15) are of the same size as the first thread grooves (10), the reserved holes (16) are located relative to the first thread grooves (10) and the second thread grooves (15), and the fastening bolts (17) pass through the reserved holes (16) and are threadedly connected to the first heat-insulating barrel (6) and the second heat-insulating barrel (7) through the second thread grooves (15) and the first thread grooves (10).
6. The single crystal furnace insulation structure according to claim 4, characterized in that: The outer wall of the second heat-insulating barrel (7) is symmetrically provided with second guide grooves (12), the inner cavity of the second heat-insulating barrel (7) is centrally provided with a second through groove (14), the inner cavity of the second through groove (14) is symmetrically and fixedly connected with second guide posts (13) around the inner cavity, the first guide post (9) and the second guide groove (12) are matched in size, the first guide post (9) and the second guide groove (13) are connected in size, the first guide groove (8) and the second guide groove (12) are connected in size, the first guide post (9) is inserted into the inner cavity of the second guide groove (12), and the first heat-insulating barrel (6) is sleeved on the outer wall of the second heat-insulating barrel (7).