Drying device for photoresist production

Abstract

The utility model discloses a drying device for photoresist production, which relates to the technical field of photoresist production and comprises a base, a drying barrel fixedly connected onto the base, a sealing cover arranged above the drying barrel in a matching manner, a bearing component for bearing photoresist and a driving component for driving the bearing component to rotate, the bearing assembly comprises a rotating basin arranged in the drying barrel in a matched mode, and a mounting basin is arranged in the rotating basin in a matched mode. When the device is used, the photoresist needs to be poured into the mounting basin, the sealing cover is closed, the fan and the motor are started, the motor drives the rotating basin to rotate, and the rotating basin drives the mounting basin to rotate, so that the photoresist in the mounting basin is automatically spread under the action of centrifugal force and moves upwards along the hemispherical mounting basin body; and meanwhile, when the photoresist rotates under the action of the mounting basin, the convection speed of surface molecules can also be accelerated, so that the loss of water molecules is accelerated.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist production, in particular to a drying device for photoresist production. Background Art

[0002] Photoresist production is a complex and delicate process involving multiple steps and highly specialized technologies. Photoresist, also known as photoresist, is a photochemically sensitive, etch-resistant thin-film organic material and a key chemical material in microfabrication technology.

[0003] A Chinese patent with announcement number CN218443225U discloses a rapid drying device for photoresist production. The working principle of the device is: the guide groove is located at the bottom of the feed port and the air storage box, and the outside air can be quickly flowed to the inside of the heating box through a blower, and the flowing air can be continuously heated through multiple heating tubes, and the hot air can be evenly blown to the surface of the photoresist through multiple air outlets. The photoresist is poured in from the inside of the feed port, and the first telescopic rod is started to control the inclination angle of the guide plate. The photoresist will approach the air outlet along the guide groove and be evenly distributed inside the guide groove, so that the photoresist is evenly dried.

[0004] The shortcomings of the above-mentioned prior art solution are: first, the drying efficiency of the photoresist close to the air outlet is higher, and the drying efficiency of the photoresist far from the air outlet is lower, resulting in uneven drying, thereby reducing the implementation effect; secondly, the feed port that is sticky with photoresist needs to be maintained after the work is completed, thereby increasing the maintenance workload. Utility Model Content

[0005] The purpose of the utility model is to provide a drying device for photoresist production, so as to solve the technical problem in the prior art that the photoresist drying efficiency is higher near the air outlet, while the photoresist drying efficiency is lower far from the air outlet, resulting in uneven drying, thereby reducing the implementation effect.

[0006] The technical problem to be solved by the utility model can be achieved through the following technical solutions:

[0007] A drying device for photoresist production comprises a base, a drying barrel is fixedly connected to the base, a sealing cover is arranged above the drying barrel, the device also comprises a bearing assembly for bearing the photoresist and a driving assembly for driving the bearing assembly to rotate, the bearing assembly comprises a rotating basin arranged inside the drying barrel, a mounting basin is arranged inside the rotating basin, the mounting basin is arranged in a hemispherical shape, handles are fixedly connected on both sides of the mounting basin, the driving assembly is arranged inside the drying barrel, and a drying assembly matching the mounting basin is arranged on the sealing cover.

[0008] As a further solution of the utility model: the driving assembly includes a motor fixedly connected to the bottom of the drying barrel, the output end of the motor is fixedly connected to a transmission shaft, and the transmission shaft is fixedly connected to the rotating basin at one end away from the motor.

[0009] As a further solution of the utility model: a fixing ring is fixedly connected to the inner wall of the drying barrel, a mounting ring is matched with the fixing ring, and the rotating basin is coaxially rotatably sleeved inside the mounting ring.

[0010] As a further solution of the utility model: a vent which penetrates the lap ring is provided on the lap ring.

[0011] As a further solution of the utility model: the drying component includes a fan fixedly connected to the top of the sealing cover, the bottom of the sealing cover is fixedly connected to an air outlet scoop matching the output end of the fan, the inside of the air outlet scoop is fixedly connected to an electric heating wire, and a vent is opened at the bottom of the drying barrel.

[0012] As a further solution of the utility model: an electric telescopic rod is arranged on the side of the drying barrel, and the output end of the electric telescopic rod is fixedly connected to the sealing cover.

[0013] Beneficial effects of the utility model:

[0014] 1. When the utility model is in use, it is necessary to first pour the photoresist into the installation basin, close the sealing cover, start the fan, the heating wire and the motor, and drive the rotating basin to rotate through the motor, and the rotating basin drives the installation basin to rotate, so that the photoresist inside the installation basin is automatically spread out under the action of centrifugal force, and moves up along the hemispherical installation basin body, thereby increasing the drying area. The heating wire is located above the hemispherical installation basin to ensure that the surface of the rotating photoresist is evenly heated. At the same time, when the photoresist rotates under the action of the installation basin, the surface molecular convection speed will also be accelerated, thereby accelerating the loss of water molecules and improving the drying effect.

[0015] 2. After the drying operation is completed, the utility model turns off the fan and the motor, opens the sealing cover, and directly takes out the installation basin from the inside of the rotating basin. At the same time, another group of installation basins that have been maintained are placed in the rotating basin, and the corresponding photoresist is poured in, so that the drying operation of the other group of photoresist is continued, thereby facilitating the replacement and maintenance of the installation basin, and the time for disassembly and installation of the installation basin is short, thereby improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The utility model is further described below in conjunction with the accompanying drawings.

[0017] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0018] Figure 2It is a schematic diagram of the overall longitudinal section structure of the utility model;

[0019] Figure 3 It is a schematic diagram of the structure of the rotating basin and the installation basin of the utility model.

[0020] In the figure: 1. Base; 2. Drying barrel; 3. Fixed ring; 4. Rotating basin; 5. Mounting basin; 6. Motor; 7. Transmission shaft; 8. Handle; 9. Ring; 10. Ventilation hole; 11. Electric telescopic rod; 12. Sealing cover; 13. Fan; 14. Air outlet; 15. Heating wire. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] like Figure 1-Figure 3 As shown, a drying device for photoresist production includes a base 1, a drying barrel 2 is fixedly connected to the base 1, a sealing cover 12 is arranged above the drying barrel 2, and also includes a bearing component for bearing photoresist and a driving component for driving the bearing component to rotate. The bearing component includes a rotating basin 4 arranged inside the drying barrel 2, and a mounting basin 5 is arranged inside the rotating basin 4. The mounting basin 5 is used to carry photoresist. The mounting basin 5 is arranged in a hemispherical shape. Handles 8 are fixedly connected on both sides of the mounting basin 5 to facilitate the separation of the mounting basin 5 and the rotating basin 4. The driving component is arranged inside the drying barrel 2, and a drying component matching the mounting basin 5 is arranged on the sealing cover 12. When in use, it is necessary to first pour the photoresist into the mounting basin 5, close the sealing cover 12, and start the drying. The assembly and the driving assembly drive the rotating basin 4 to rotate through the driving assembly, and the rotating basin 4 drives the installation basin 5 to rotate, so that the photoresist inside the installation basin 5 is automatically spread out under the action of centrifugal force, and moves up along the hemispherical installation basin 5, thereby increasing the drying area. At the same time, when the photoresist rotates under the action of the installation basin 5, the convection speed of the surface molecules is also accelerated, thereby accelerating the loss of water molecules. When the drying operation is completed, the drying assembly and the driving assembly are closed, the sealing cover 12 is opened, and the installation basin 5 is directly taken out from the rotating basin 4. At the same time, another group of maintenance-completed installation basins 5 are placed in the rotating basin 4, and the corresponding photoresist is poured in, so as to facilitate the replacement and maintenance of the installation basin 5, and the disassembly and installation time of the installation basin 5 is short, thereby improving production efficiency.

[0023] In some specific embodiments, in order to achieve automatic rotation of the rotating basin 4, the driving assembly includes a motor 6 fixedly connected to the bottom of the drying barrel 2, and the output end of the motor 6 is fixedly connected to a transmission shaft 7, and the end of the transmission shaft 7 away from the motor 6 is fixedly connected to the rotating basin 4; when photoresist is poured into the installation basin 5, the motor 6 is started, and the motor 6 drives the transmission shaft 7 to rotate, and the transmission shaft 7 drives the rotating basin 4 and the installation basin 5 to rotate, so that the photoresist inside the installation basin 5 generates centrifugal force, which facilitates the automatic spreading of the photoresist.

[0024] In some specific implementation schemes, in order to ensure the stability of the rotating basin 4 during the rotation process, a fixing ring 3 is fixedly connected to the inner wall of the drying barrel 2, and a mounting ring 9 is provided on the fixing ring 3. The rotating basin 4 is coaxially rotatable and sleeved inside the mounting ring 9; when the rotating basin 4 rotates, the mounting ring 9 supports the rotating basin 4 and transmits the pressure transmitted by the rotating basin 4 to the fixing ring 3, thereby ensuring the stability of the rotating basin 4 during the rotation process.

[0025] In some specific embodiments, in order to facilitate the circulation of air flow inside the drying barrel 2, an air vent that passes through the ring is opened on the ring 9; the hot air flow above the rotating basin 4 will enter the bottom of the rotating basin 4 through the air vent, thereby heating the bottom of the rotating basin 4, and indirectly transfer the heat to the photoresist through the rotating basin 4, thereby further improving the drying efficiency of the photoresist.

[0026] In some specific embodiments, in order to achieve heating and drying of the photoresist, the drying component includes a fan 13 fixedly connected to the top of the sealing cover 12, and the bottom of the sealing cover 12 is fixedly connected to an air outlet 14 that cooperates with the output end of the fan 13, and the inside of the air outlet 14 is fixedly connected to an electric heating wire 15, and a vent 10 is opened at the bottom of the drying barrel 2; when drying the photoresist, the fan 13 draws external air into the drying barrel 2, and the drawn air flow is heated by the electric heating wire 15 when passing through the air outlet 14, and the air flow carrying heat contacts the rotating photoresist surface, thereby achieving drying of the photoresist, and then the air flow will carry water vapor and flow out of the drying barrel 2 from the vent 10, thereby forming an air flow path to ensure the drying effect.

[0027] In some specific implementation schemes, in order to facilitate the opening and closing of the sealing cover 12, an electric telescopic rod 11 is provided on the side of the drying barrel 2, and the output end of the electric telescopic rod 11 is fixedly connected to the sealing cover 12; when the sealing cover 12 needs to be opened, the electric telescopic rod 11 extends, driving the sealing cover 12 and air flow processing components such as the fan 13, the air outlet scoop 14, and the heating wire 15 to rise together, thereby reducing the manpower input.

[0028] In order to facilitate the understanding of the embodiments of the present invention by those skilled in the art, the working principle of the embodiments of the present invention is now described in combination with specific application scenarios:

[0029] When in use, it is necessary to first pour the photoresist into the installation basin 5, close the sealing cover 12, and start the fan 13. The fan 13 draws external air into the drying barrel 2. When the drawn airflow passes through the air outlet hopper 14, it is heated by the electric heating wire 15, and the airflow with heat contacts the surface of the photoresist, thereby realizing the drying operation. The motor 6 is started, and the motor 6 drives the transmission shaft 7 to rotate. The transmission shaft 7 drives the rotating basin 4 and the installation basin 5 to rotate, so that the photoresist inside the installation basin 5 is automatically spread out under the action of centrifugal force, and moves up along the hemispherical installation basin 5, thereby increasing the drying surface. At the same time, when the photoresist rotates under the action of the installation basin 5, the surface molecular convection speed will be accelerated, thereby accelerating the loss of water molecules. When the drying operation is completed, the fan 13 and the motor 6 are turned off, and the electric telescopic rod 11 is extended, driving the sealing cover 12 and the air flow processing components such as the fan 13, the air outlet hopper 14, and the heating wire 15 to rise together, and the installation basin 5 is directly taken out from the inside of the rotating basin 4. At the same time, another group of maintenance-completed installation basins 5 are placed in the rotating basin 4, and the corresponding photoresist is poured in, so as to facilitate the replacement and maintenance of the installation basin 5, and the disassembly and installation time of the installation basin 5 is short, thereby improving production efficiency.

[0030] The above is a detailed description of an embodiment of the utility model, but the content is only a preferred embodiment of the utility model and cannot be considered to limit the scope of implementation of the utility model. All equivalent changes and improvements made within the scope of application of the utility model should still fall within the scope of the patent coverage of the utility model.

Claims

1. A drying device for photoresist production, comprising a base (1), a drying barrel (2) fixedly connected to the base (1), a sealing cover (12) arranged above the drying barrel (2), characterized in that , also includes: A bearing assembly for bearing photoresist and a driving assembly for driving the bearing assembly to rotate, the bearing assembly comprising a rotating basin (4) arranged in cooperation with the inside of a drying barrel (2), a mounting basin (5) arranged in cooperation with the inside of the rotating basin (4), the mounting basin (5) being arranged in a hemispherical shape, handles (8) being fixedly connected to both sides of the mounting basin (5), the driving assembly being arranged in the inside of the drying barrel (2), and a drying assembly matching with the mounting basin (5) being arranged on the sealing cover (12).

2. A drying device for photoresist production according to claim 1, characterized in that: The driving assembly comprises a motor (6) fixedly connected to the inner bottom of the drying barrel (2); an output end of the motor (6) is fixedly connected to a transmission shaft (7); and an end of the transmission shaft (7) away from the motor (6) is fixedly connected to the rotating basin (4).

3. A drying device for photoresist production according to claim 1, characterized in that: A fixing ring (3) is fixedly connected to the inner wall of the drying barrel (2), a mounting ring (9) is provided on the fixing ring (3), and the rotating basin (4) is coaxially rotatably sleeved inside the mounting ring (9).

4. A drying device for photoresist production according to claim 3, characterized in that: The clasp ring (9) is provided with a ventilating opening penetrating the clasp ring (9).

5. A drying device for photoresist production according to claim 1, characterized in that: The drying assembly comprises a fan (13) fixedly connected to the top of a sealing cover (12); a wind outlet (14) matched with the output end of the fan (13) is fixedly connected to the bottom of the sealing cover (12); a heating wire (15) is fixedly connected inside the wind outlet (14); and a vent (10) is provided at the bottom of the drying barrel (2).

6. A drying device for photoresist production according to claim 1, characterized in that: An electric telescopic rod (11) is arranged on the side of the drying barrel (2), and the output end of the electric telescopic rod (11) is fixedly connected to the sealing cover (12).

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