Cooling tower of tail gas treatment equipment

Abstract

The utility model belongs to the technical field of tail gas treatment, and particularly relates to a cooling tower of tail gas treatment equipment, which can realize dry type water-free waste gas treatment and meet the pure water-free condition of factory affairs, and comprises a cooling tower lower section, a cooling tower middle section, a cooling tower reducing section and a cooling tower upper section which are sequentially arranged from bottom to top, an air inlet is formed in the bottom of the cooling tower lower section, a CDA purging pipe is arranged at the bottom of the cooling tower lower section, a cooling water coil pipe is arranged in the cooling tower lower section, cooling water jackets are arranged on the cooling tower lower section and the cooling tower middle section, and an adsorbent is arranged in the cooling tower reducing section.

Description

Technical Field

[0001] The utility model belongs to the technical field of tail gas treatment, and in particular relates to a cooling tower for tail gas treatment equipment. Background Art

[0002] Environmental protection has become a hot topic, and governments around the world are making every effort to protect the environment. In order to keep up with the trend of the times and achieve sustainable development, all walks of life are increasingly controlling pollution sources, especially industrial waste gas emissions.

[0003] In the semiconductor industry, a variety of special gases, a large amount of chemicals such as acids and alkalis, as well as organic solvents and volatile liquids are required. These industrial raw materials will produce waste gas in the semiconductor manufacturing process. At present, electric heating treatment is one of the main means of waste gas treatment. This equipment mainly uses heating rods to increase the temperature, treats industrial waste gas into tail gas that meets emission standards, and discharges it through the factory service end.

[0004] Perovskite, as a material with excellent photoelectric properties and good stability, has shown great development potential in the semiconductor field. However, due to limited factory conditions, the pilot line equipment used by perovskite equipment R&D companies and related scientific research institutes cannot provide pure water. Traditional water-washing electric heating scrubber equipment or water-washing plasma scrubber equipment are objectively unable to meet the external conditions. Summary of the invention

[0005] In order to solve the above technical problems, the utility model provides a cooling tower for tail gas treatment equipment, which can realize dry waterless treatment of waste gas and meet the condition of no pure water in factory affairs.

[0006] The technical solution is as follows: a cooling tower for exhaust gas treatment equipment, characterized in that it includes a cooling tower lower section, a cooling tower middle section, a cooling tower variable section and a cooling tower upper section arranged in sequence from bottom to top, the bottom of the cooling tower lower section is an air inlet and is provided with a CDA purge pipe, a cooling water coil is provided inside the cooling tower lower section, the cooling tower lower section and the cooling tower middle section are both provided with cooling water jackets, and an adsorbent is provided in the cooling tower variable section.

[0007] It is further characterized in that mesh plates are provided at the upper and lower ends of the cooling tower variable diameter section, and the adsorbent is supported on the mesh plate at the lower end;

[0008] The top of the upper section of the cooling tower is an air outlet, and the side is connected to an inlet ball valve;

[0009] A temperature measuring module, a pressure measuring module and a sampling module are arranged on the side wall of the upper section of the cooling tower;

[0010] The pipe water inlet and the pipe water outlet corresponding to the cooling water coil respectively pass through the cooling water jacket and are at the same height.

[0011] After adopting the utility model, there is no need to use pure water in the cooling water jacket and the cooling water coil, and the tail gas enters the lower section of the cooling tower and the middle section of the cooling tower from the lower end for secondary cooling to meet the discharge requirements, and then continues to be adsorbed and purified by the adsorbent upwards, and finally discharged from the air outlet at the top, realizing dry waterless treatment of waste gas and meeting the condition of no pure water for factory affairs. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is the front view of the structure of the utility model;

[0013] Figure 2 This is the right side view of the structure of the utility model;

[0014] Figure 3 It is a longitudinal sectional view of the utility model. DETAILED DESCRIPTION

[0015] See Figure 1 , Figure 2 , Figure 3 As shown, a cooling tower for exhaust gas treatment equipment comprises a cooling tower lower section 1, a cooling tower middle section 2, a cooling tower variable diameter section 3 and a cooling tower upper section 4 which are arranged in sequence from bottom to top. The bottom of the cooling tower lower section 1 is an air inlet and is provided with a CDA purge pipe 13. The CDA purge pipe 13 can achieve a certain dust removal effect by backblowing downward, and can also serve as a support for the cooling tower lower section 1 to improve its strength. A cooling water coil 12 is provided inside the cooling tower lower section 1, and cooling water jackets 11 and 12 are provided in the cooling tower lower section 1 and the cooling tower middle section 2, respectively. Grid plates 31 and 33 are provided at the upper and lower ends of the cooling tower variable diameter section 3, respectively, and an adsorbent 32 is supported on the grid plate 31 at the lower end.

[0016] The top of the upper section 4 of the cooling tower is the air outlet, and an inlet ball valve 41 is installed on the side, which can normally pressurize air inward to play a role of purging or pressure regulation. The side wall of the upper section 4 of the cooling tower is provided with a temperature measuring module 42, a pressure measuring module 43, and a sampling module 44, which can detect and sample the treated exhaust gas to ensure that the emission meets the standards.

[0017] The pipe water inlet 16 and the pipe water outlet 17 corresponding to the cooling water coil 12 respectively pass through the cooling water jacket 11 and are at the same height. Figure 1 In the figure, 14 and 15 are respectively the water inlet and the water outlet of the cooling water jacket 11, and 22 and 23 are respectively the water inlet and the water outlet of the cooling water jacket 21.

[0018] The exhaust gas enters from the bottom of the cooling tower, and is first back-blown and dust-removed by the CDA purge pipe 13. The exhaust gas then passes through the lower section 1 of the cooling tower and the middle section 2 of the cooling tower for secondary cooling to allow the temperature to reach the emission standard. The exhaust gas then passes through the adsorbent in the variable diameter section 3 of the cooling tower for adsorption, and then enters the upper section 4 of the cooling tower to prepare for discharge. Before discharge, the temperature, pressure, etc. can be tested and sampled. After meeting the standard, the exhaust gas can be discharged from the top of the upper section 4 of the cooling tower.

Claims

1. A cooling tower for tail gas treatment equipment, characterized in that: It comprises a cooling tower lower section, a cooling tower middle section, a cooling tower variable diameter section and a cooling tower upper section which are arranged in sequence from bottom to top. The bottom of the cooling tower lower section is an air inlet and is provided with a CDA purge pipe. A cooling water coil is provided inside the cooling tower lower section. Both the cooling tower lower section and the cooling tower middle section are provided with cooling water jackets. An adsorbent is provided in the cooling tower variable diameter section.

2. A cooling tower for tail gas treatment equipment according to claim 1, characterized in that: The upper and lower ends of the cooling tower variable diameter section are both provided with grid plates, and the adsorbent is supported by the grid plates at the lower end.

3. The exhaust gas treatment equipment cooling tower according to claim 1, characterized in that: The top of the upper section of the cooling tower is an air outlet, and the side is connected to an inlet ball valve.

4. The cooling tower for tail gas treatment equipment according to claim 1, characterized in that: A temperature measuring module, a pressure measuring module and a sampling module are arranged on the side wall of the upper section of the cooling tower.

5. The exhaust gas treatment equipment cooling tower according to claim 1, characterized in that: The pipe water inlet and the pipe water outlet corresponding to the cooling water coil respectively pass through the cooling water jacket and are at the same height.

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