Superlens, uniform light emitting device and TOF sensor

Abstract

The utility model provides a super lens, a uniform light emitting device and a TOF sensor. The super lens is used for modulating incident light beams received at all positions on the super lens and outputting emergent light beams; all the emergent light beams jointly form a light spot on a target plane. The phase of the super lens comprises a dodging phase used for diffusing the incident light beam; the collimation phase is used for collimating the incident light beam; wherein the collimation phase is provided with a regulation factor, and the regulation factor is in negative correlation with the edge steepness of the light spot. The utility model provides the super lens comprising the dodging phase and the collimation phase provided with the adjustment factor, so that the received incident light beam can be better modulated, the edge steepness of the emergent light beam obtained through modulation is improved, the edge steepness of a light spot formed by the emergent light beam is improved, and the brightness of the light spot is improved. And the edge of the light spot is clearer and sharper.

Description

Technical Field

[0001] The present application relates to the field of optics, and in particular to a superlens, a uniform light emitting device and a TOF sensor. Background Art

[0002] TOF, or Time Of Flight, is a technology that measures distance by measuring the time during light transmission. The TOF sensor can measure the distance from the object to the sensor by calculating the time difference between the outgoing light and the received light. Most TOF sensor transmitters use a homogenized light spot as the outgoing light for detection, and are widely used in close-range object measurement, such as gesture recognition, mobile phone auxiliary focus, etc.

[0003] However, the uniform light emitting device in the TOF sensor of the prior art emits a uniform light spot whose edge steepness is low, that is, the edge of the uniform light spot is blurred, and there is a disadvantage of low light energy utilization rate. Utility Model Content

[0004] One purpose of the present application is to propose a superlens, a uniform light emitting device and a TOF sensor, which can improve the edge steepness of the light spot projected by the uniform light emitting device, make the edge of the light spot clearer and sharper, and improve the utilization rate of light energy.

[0005] According to one aspect of an embodiment of the present application, a metalens for light uniformity is disclosed, wherein the metalens is used to provide a phase for an incident light beam received at various positions thereon, so as to modulate the incident light beam received at various positions thereon into an outgoing light beam; all the outgoing light beams together form a light spot on a target plane.

[0006] The phases of the metalens include: a homogenization phase for diffusing the incident light beam; a collimation phase for collimating the incident light beam;

[0007] The collimation phase is provided with an adjustment factor, and the adjustment factor is negatively correlated with the edge steepness of the light spot.

[0008] In an exemplary embodiment of the present application, the collimation phase satisfies:

[0009]

[0010] in, is the collimation phase, λ is the central wavelength of the incident light beam, f is the focal length of the superlens, x and y are the coordinates of the superlens on the two-dimensional plane, and n is the adjustment factor.

[0011] In an exemplary embodiment of the present application, the value range of the adjustment factor is [1, +∞).

[0012] According to one aspect of an embodiment of the present application, a uniform light emitting device for a TOF sensor is disclosed, the uniform light emitting device comprising: a light source; a substrate; a super lens as described in any one of the above items;

[0013] The light source is arranged on the substrate;

[0014] The super lens is arranged on the light-emitting side of the light source, and is used to receive and modulate the incident light beam emitted by the light source, and output an outgoing light beam, so that the outgoing light beam forms a light spot on the target plane.

[0015] In an exemplary embodiment of the present application, the uniform light emitting device further includes: a housing;

[0016] The shell is arranged on a substrate on the same side as the light source, the light source and the super lens are arranged inside a space enclosed by the shell, and the shell includes a light exit hole.

[0017] In an exemplary embodiment of the present application, the uniform light emitting device further includes: a detector;

[0018] The detector is arranged on the substrate on the same side as the light source, and is used to receive the reflected light beam reflected by the super lens or the target plane, and sense the light intensity of the reflected light beam.

[0019] In an exemplary embodiment of the present application, a filter is provided on the surface of the housing;

[0020] The filter is arranged on any side of the light exit hole, and is used to filter the light beam outside the working band of the incident light beam emitted by the light source.

[0021] In an exemplary embodiment of the present application, the superlens is arranged at the light exit hole on the inner surface of the shell, and a filter film is provided on the superlens, and the filter film is used to filter the light beam outside the working band of the incident light beam emitted by the light source.

[0022] In an exemplary embodiment of the present application, the uniform light emitting device further includes: a fixing structure;

[0023] The fixing structure is disposed in the housing, and the fixing structure is used to fix the super lens;

[0024] The fixing structure is arranged on the inner surface of the housing, or the fixing structure is arranged on a substrate on the same side as the light source.

[0025] According to one aspect of an embodiment of the present application, a TOF sensor is disclosed, and the TOF sensor includes: a receiving device; and a uniform light emitting device as described in any one of the above items.

[0026] The metalens provided in the present application is used to modulate the incident light beam received at various positions thereon and output an outgoing light beam; all the outgoing light beams together form a light spot on the target plane. The phase of the metalens includes: a uniform light phase for diffusing the incident light beam; a collimation phase for collimating the incident light beam; wherein the collimation phase is provided with an adjustment factor, and the adjustment factor is negatively correlated with the edge steepness of the light spot. The phase of the metalens of the present application includes a uniform light phase and a collimation phase provided with an adjustment factor, thereby being able to improve the edge steepness of the light spot formed on the target plane or the detector, making the edge of the light spot clearer and sharper, and improving the utilization rate of light energy.

[0027] Other features and advantages of the present application will become apparent from the following detailed description, or may be learned in part by the practice of the present application.

[0028] It should be understood that the foregoing general description and the following detailed description are exemplary only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and other objects, features and advantages of the present application will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.

[0030] Figure 1 A schematic diagram of the structure of a metalens provided in one embodiment of the present application is shown.

[0031] Figure 2 A schematic structural diagram of a uniform light emitting device provided in one embodiment of the present application is shown.

[0032] Figure 3 A schematic structural diagram of a uniform light emitting device provided in one embodiment of the present application is shown.

[0033] Figure 4 A schematic structural diagram of a uniform light emitting device provided in one embodiment of the present application is shown.

[0034] Figure 5 A schematic structural diagram of a uniform light emitting device provided in one embodiment of the present application is shown.

[0035] Figure 6 A schematic structural diagram of a uniform light emitting device provided in one embodiment of the present application is shown.

[0036] Figure 7 A schematic structural diagram of a uniform light emitting device provided in one embodiment of the present application is shown.

[0037] Figure 8 A schematic structural diagram of a uniform light emitting device provided in one embodiment of the present application is shown.

[0038] Fig. 9 A schematic structural diagram of a uniform light emitting device provided in one embodiment of the present application is shown.

[0039] Fig.10 A schematic structural diagram of a uniform light emitting device provided in an embodiment of the present application is shown.

[0040] Fig.11 A schematic diagram of a homogenized light spot projected by the homogenized light emitting device provided in Example 1 of the present application is shown.

[0041] Fig.12 A schematic diagram showing the light intensity of the uniform light spot projected by the uniform light emitting device provided in Example 1 of the present application in the x-center section and the y-center section is shown.

[0042] Fig.13 A schematic diagram of a homogenized light spot projected by the homogenized light emitting device provided in Example 2 of the present application is shown.

[0043] Fig.14 A schematic diagram showing the light intensity of the uniform light spot projected by the uniform light emitting device provided in Example 2 of the present application in the x-center section and the y-center section is shown.

[0044] Fig.15 A schematic diagram of a homogenized light spot projected by the homogenized light emitting device provided in Example 3 of the present application is shown.

[0045] Fig.16 A schematic diagram showing the intensity of the homogenized light spot projected by the homogenized light emitting device provided in Example 3 of the present application in the x center section and the y center section.

[0046] Fig.17 A schematic diagram of a homogenized light spot projected by the homogenized light emitting device provided in Example 4 of the present application is shown.

[0047] Fig.18 A schematic diagram showing the light intensity of the uniform light spot projected by the uniform light emitting device provided in Example 4 of the present application in the x-center section and the y-center section is shown.

[0048] Fig.19 A schematic diagram of a homogenized light spot projected by the homogenized light emitting device provided in Example 5 of the present application is shown.

[0049] Fig. 20 A schematic diagram showing the light intensity of the uniform light spot projected by the uniform light emitting device provided in Example 5 of the present application in the x-center section and the y-center section is shown.

[0050] Reference numerals:

[0051] 1-light source; 2-substrate; 3-housing; 4-superlens; 41-base; 42-micro-nanostructure;

[0052] 5-light exit hole; 6-detector; 7-filter / filter film; 8-fixed structure;

[0053] A - Target plane / detected object. DETAILED DESCRIPTION

[0054] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the examples set forth herein; rather, these example embodiments are provided so that the description of the present application will be more comprehensive and complete and the concepts of the example embodiments will be fully conveyed to those skilled in the art. The accompanying drawings are only schematic illustrations of the present application and are not necessarily drawn to scale. The same reference numerals in the figures represent the same or similar parts, and thus their repeated description will be omitted.

[0055] In addition, the described features, structures or characteristics may be combined in one or more example embodiments in any suitable manner. In the following description, many specific details are provided to provide a full understanding of the example embodiments of the present application. However, those skilled in the art will appreciate that the technical solution of the present application may be practiced while omitting one or more of the specific details, or other methods, components, steps, etc. may be adopted. In other cases, known structures, methods, implementations or operations are not shown or described in detail to avoid obscuring the present application and making the various aspects of the present application obscure.

[0056] In the prior art, a uniform light emitting device is usually used as the transmitting end of the TOF sensor, and a light beam is emitted by the uniform light emitting device to form a uniform light spot on the target plane or the detection object. However, the uniform light emitting device in the prior art does not take into account that the uniform light spot formed has a low edge steepness, that is, the edge of the uniform light spot is blurred, resulting in low light energy utilization efficiency of the uniform light spot.

[0057] In order to overcome the above-mentioned defects of the related art, the present application provides a metalens for light homogenization, which can modulate the received light beam and form a homogenized light spot at the target plane or the detection object, while improving the edge steepness of the homogenized light spot, thereby ensuring that the edge of the homogenized light spot is clear and sharp.

[0058] The present application provides a metalens for light homogenization, such as Figure 1 As shown, Figure 1The schematic diagram of the structure of a superlens provided in an embodiment of the present application is shown, and the superlens 4 includes a substrate 41 and a micro-nano structure 42 arranged on the substrate 41; the micro-nano structure 42 is a subwavelength structure, and the micro-nano structure 42 can be arranged on the surface of the substrate 42 facing the light source 1, or on the surface of the substrate 42 facing away from the light source 1. The superlens 4 is used to modulate the incident light beams received at various positions thereon, and output outgoing light beams, and all outgoing light beams form light spots at the target plane A or the detection object A. It should be noted that different positions on the superlens 4 have different phase gradients, and different phase mutations are applied to the received incident light beams, so that the superlens 4 can modulate the incident light beams received at different positions thereon.

[0059] Based on the superposition of the metalens phase, the phase of the metalens 4 includes: a uniform light phase and a collimation phase; wherein the uniform light phase is used to diffuse the incident light beam; and the collimation phase is used to collimate the incident light beam. In other words, the phase distribution of the metalens 4 in the present application within its coverage area includes a uniform light phase for diffusing the incident light beam, and a collimation phase for collimating the incident light beam. In this way, the edge steepness of the outgoing light beam modulated by the metalens 4 can be improved, thereby improving the edge steepness of the light spot formed by the outgoing light beam at the target plane A or the detection object A, making the edge of the formed light spot clearer and sharper.

[0060] The collimation phase of the metalens 4 is provided with an adjustment factor, which is an adjustable parameter in the collimation phase. By adjusting the adjustment factor, the collimation phase of the metalens 4 can be adjusted, and then the collimation ability of the metalens 4 to the incident light beam received can be adjusted. In the process of adjustment, the adjustment factor is negatively correlated with the edge steepness of the light spot. That is, within the value range of the adjustment factor, when the adjustment factor is smaller, the collimation ability of the metalens 4 to the incident light beam received is better, the edge steepness of the modulated output light beam is higher, the edge steepness of the light spot formed on the target plane A is also higher, and the edge of the formed light spot is clearer and sharper; when the adjustment factor is smaller, the collimation ability of the metalens 4 to the incident light beam received is worse, and the edge of the light spot finally formed is more blurred.

[0061] In one embodiment, the uniform light phase of the metalens 4 is obtained by optimizing the GS (Gerchberg-Saxton Algorithm); the GS algorithm is a phase recovery algorithm, and its principle is to recover the corresponding phase distribution through the known light intensity distribution of the object surface and the intensity distribution of the observation surface. The present application uses the GS algorithm to design the uniform light phase of the metalens 4 as a whole, and simultaneously considers the optimization of multiple light sources to find the uniform light phase with the best uniform light effect on the light source 1, thereby improving the uniform light effect of the metalens 4 on the light source 1, reducing losses, and improving the utilization rate of light energy.

[0062] In one embodiment, the collimation phase of the superlens 4 satisfies:

[0063]

[0064] in, is the collimation phase, λ is the central wavelength of the incident light beam, f is the focal length of the metalens, x and y are the coordinates of the metalens on the two-dimensional plane, and n is the adjustment factor.

[0065] In one embodiment, the value range of the adjustment factor n is [1, +∞). When the adjustment factor is 1, it means that the collimation ability of the metalens 4 to the incident light beam is the best. At this time, the edge steepness of the light spot formed by the outgoing light beam modulated by the metalens 4 at the target plane A or the detection object A is the highest, that is, the edge of the light spot is the clearest and sharpest; when the adjustment factor approaches +∞, it means that the collimation ability of the metalens 4 to the incident light beam is the worst. At this time, the edge steepness of the light spot formed by the outgoing light beam modulated by the metalens at the target plane A or the detection object A is the lowest, that is, the edge of the light spot is the most blurred. It should be noted that the above-mentioned light spot has the lowest edge steepness / the most blurred edge of the light spot, which is actually the relative lowest / relatively most blurred within the value range of the adjustment factor when the collimation phase is superimposed on the metalens; in fact, compared with the metalens without the collimation phase, the metalens with the collimation phase superimposed provided by the present application, even when the adjustment factor approaches +∞, the edge steepness of the light spot formed by the metalens provided by the present application will be higher than the edge steepness of the light spot formed by the metalens without the collimation phase. In other words, for the metalens with the collimation phase superimposed provided by the present application, no matter what value the adjustment factor takes within the value range, the light spot formed by the metalens provided by the present application will be clearer and sharper than the light spot formed by the metalens without the collimation phase superimposed.

[0066] According to the above collimation phase formula, it can be understood that the adjustment factor n is an adjustable parameter, and the change of the adjustment factor will directly affect the phase corresponding to each position on the metalens. It should be noted that although the present application defines that the adjustment factor is negatively correlated with the edge steepness of the light spot, this is because the adjustment factor is defined as n in the present application. In another embodiment of the present application, the adjustment factor can also be defined as a different character, so that the adjustment factor is positively correlated with the edge steepness of the light spot. As an example, the adjustment factor can be set to At this time, the adjustment factor is positively correlated with the edge steepness of the light spot, and the value range of the adjustment factor is (0, 1]. When the adjustment factor is close to 0, it means that the collimation ability of the metalens 4 to the incident light beam is the worst; when the adjustment factor is 1, the collimation ability of the metalens 4 to the incident light beam is the best.

[0067] The present application also provides a uniform light emitting device for a TOF sensor. Figure 2 As shown, Figure 2 A schematic structural diagram of a uniform light emitting device provided in an embodiment of the present application is shown. The uniform light emitting device comprises: a light source 1; a substrate 2; and a super lens 4 as described in the above embodiment.

[0068] The light source 1 is disposed on a substrate 2 , and the substrate 2 is used to fix the light source 1 and provide a driving current for the light source 1 .

[0069] The superlens 4 is arranged on the light-emitting side of the light source 1, that is, the superlens 4 is arranged downstream of the light source 1 along the propagation direction of the optical path. The superlens 4 is a transmissive optical element, which receives the incident light beam emitted by the light source 1, diffuses and collimates the incident light beam according to the uniform light phase and collimation phase provided by the superlens 4, and outputs an outgoing light beam with a high edge steepness in a transmissive manner. After the outgoing light beam with a high edge steepness propagates a certain distance, a light spot with a clear and sharp edge is formed at the target plane A or the detection object A.

[0070] In one embodiment, the uniform light emitting device further includes a housing 3; the housing 4 is disposed on the substrate 2 on the same side as the light source 2. Furthermore, the light source 1 and the super lens 4 are disposed inside the space enclosed by the housing 3, that is, in this embodiment, the light source 1 and the super lens 4 are both disposed inside the housing 3; a light exit hole 5 is also disposed on the housing 3, and the light exit hole 5 and the light source 1 are disposed on the same optical axis. In this case, after receiving and modulating the incident light beam emitted by the light source 1, the super lens 4 outputs an outgoing light beam, and after passing through the light exit hole 5 and propagating a certain distance, the outgoing light beam forms a light spot with clear and sharp edges at the target plane A or the detection object A.

[0071] In another embodiment, the super lens 4 may also be disposed at the light exit hole 5 on the outer surface of the housing 3, such as Figure 3 As shown, Figure 3 The structure diagram of the uniform light emitting device provided in one embodiment of the present application is shown. Figure 3 In the embodiment, the light incident surface of the metalens 4 is flush with the outer surface of the housing 3. In this case, the incident light beam emitted by the light source 1 first passes through the light exit hole 5 and then reaches the metalens 4. After the metalens 4 modulates the incident light beam, it directly emits the outgoing light beam to the target plane A or the detection object A, thereby forming a light spot with clear and sharp edges.

[0072] Similarly, the superlens 4 can also be arranged at the light exit hole 5 on the inner surface of the shell 3; in this case, a fixing structure is provided inside the shell 3 so as to fix the superlens 4 at the above position.

[0073] It should be noted that, in the present application, the size of the light output hole 5 is not limited, as long as it can allow all the outgoing light beams modulated by the super lens 4 to pass through, or all the incident light beams emitted by the light source 1 to pass through.

[0074] Figure 4 The structure diagram of the uniform light emitting device provided in one embodiment of the present application is shown. Figure 4 In the embodiment, the uniform light emitting device further includes a detector 6 ; the detector 6 is arranged on a substrate 2 on the same side as the light source 1 , and the substrate 2 provides a driving current for the detector 6 .

[0075] It should be noted that although the super lens 4 in the uniform light emitting device provided in the present application is transmissive, this does not mean that all incident light beams emitted by the light source 1 will be transmitted through the super lens 4. Figure 4 As shown, part of the incident light beam emitted by the light source 1 will be reflected by the super lens 4 to form a reflected light beam.

[0076] Therefore, the detector 6 is used to receive the reflected light beam reflected by the super-transparent light 4, and sense the received reflected light beam to obtain the light intensity corresponding to the reflected light beam. In this embodiment, the light source 1 and the detector 6 are actually connected to a light source current regulating module (not shown in the figure). After the detector 6 senses the light intensity of the reflected light, it will send the light intensity to the light source current regulating module. After receiving the light intensity, the light source current regulating module will adjust the input current of the light source 1 according to the light intensity, thereby realizing real-time control of the working power of the light source 1.

[0077] It should be noted that the location of the detector 6 on the substrate 2 is not limited in the present application, as long as the detector 6 can receive the reflected light beam reflected by the super lens 4 .

[0078] Furthermore, in the above embodiment of the uniform light emitting device equipped with a detector, a filter 7 may be provided on the surface of the housing 3, and the filter 7 may be provided on any side of the light exit hole 5. Figure 5 and Figure 6 As shown, Figure 5 The structure diagram of the uniform light emitting device provided in one embodiment of the present application is shown. Figure 6 The structure diagram of the uniform light emitting device provided in one embodiment of the present application is shown. Figure 5 In the embodiment, the filter 7 is arranged on the outer surface side of the light exit hole 5 on the housing 3; Figure 6 In the embodiment, the filter 7 is arranged on the inner surface side of the light exit hole 5 of the housing 3 .

[0079] The filter 7 is used to filter the light beam outside the working band of the incident light beam emitted by the light source 1, that is, the filter 7 can block the light beam outside the working band of the incident light beam from reaching the detector 6 from the outside of the uniform light emitting device, thereby avoiding the external light beam of the uniform light emitting device from interfering with the detector 6, thereby ensuring that the detector 6 can accurately receive the reflected light beam reflected by the super lens 4, further ensuring the accuracy of the real-time control of the light source 1 by the light source current regulation module.

[0080] In one embodiment, the super lens 4 can be arranged at the light exit hole 5 on the inner surface of the housing 3, such as Figure 7 and Figure 8 As shown, Figure 7 The structure diagram of the uniform light emitting device provided in one embodiment of the present application is shown. Figure 8 FIG. 1 shows a schematic diagram of the structure of a uniform light emitting device provided in an embodiment of the present application. Figure 7 and Figure 8 In order to accurately set the super lens 4 at the light exit hole 5 on the inner surface of the housing 3, a fixed structure ( Figure 7 and Figure 8 (not shown in the figure), the fixing structure is used to fix the super lens 4 at the corresponding position.

[0081] Furthermore, a filter film 7 is provided on the super lens 4, and the filter film 7 is used to filter the light beam outside the working band of the incident light beam emitted by the light source. It should be noted that the filter film 7 can be provided on the light exit surface of the super lens 4, and can also be provided on the light entrance surface of the super lens 4. Figure 7 In the embodiment, the filter film 7 is arranged on the light-emitting surface of the super lens 4; Figure 8 In the figure, the filter film 7 is arranged on the light exiting surface of the super lens 4.

[0082] In one embodiment, the uniform light emitting device further includes: a fixing structure 8 ; the fixing structure 8 is disposed in the housing 3 , and the fixing structure 8 is used to fix the super lens 4 .

[0083] It should be noted that the fixing structure 8 can be arranged on the substrate 2 on the same side as the light source 1, or on the inner surface of the housing 3; that is, one side of the fixing structure 8 can be connected to the substrate 2, or to the inner surface of the housing 3, and the other side is used to connect to the super lens 4 to provide a fixing effect for the super lens 4. Specifically, Figure 2 As shown, Figure 2 The fixing structure 8 is connected to the substrate 2 on the same side of the light source 1; Fig. 9 As shown, Fig. 9 The structure diagram of the uniform light emitting device provided in one embodiment of the present application is shown. Fig. 9 In the embodiment, the fixing structure 8 is connected to the inner surface of the shell 3 .

[0084] Furthermore, the fixing structure 8 may also be a part of the housing 3, that is, the fixing structure 8 and the housing 3 are integral. Fig.10 As shown, Fig.10 The structure diagram of the uniform light emitting device provided in one embodiment of the present application is shown. Fig.10 In the figure, the fixing structure 8 is actually a part of the shell 3, and the fixing structure 8 is provided with a raised portion at the light incident surface of the superlens 4, and the raised portion is used to support and fix the superlens 4; in this case, the aperture of the light exit hole 5 on the inner surface side of the shell 3 is smaller than the aperture of the light exit hole 5 on the outer surface side of the shell 3.

[0085] It should be noted that, in the present application, the specific shape of the fixing structure 8 is not limited, as long as the fixing structure 8 can fix the superlens 4 at the corresponding position.

[0086] Furthermore, considering that the detector 6 in the uniform light emitting device needs to receive the reflected light beam reflected by the superlens 4, the fixed structure 8 can avoid the reflected light beam in space, that is, the specific setting position of the fixed structure 8 will not block the propagation of the reflected light beam; the fixed structure 8 can also be a material that is transparent in the working band of the reflected light beam, so that the detector 6 can accurately receive the reflected light beam.

[0087] The present application also provides a TOF sensor, which includes: a receiving device; and a uniform light emitting device as described in the above embodiment.

[0088] Specifically, after the uniform light emitting device emits an outgoing light beam and forms a light spot at the target plane A or the detection object A, the reflected light beam reflected by the light spot can be received by the detector carried on the receiving device, that is, the detector on the receiving device can sense the light spot, so that the TOF sensor can determine the distance, shape or posture of the target plane A or the detection object A based on the light spot sensed by the detector on the receiving device.

[0089] Example 1

[0090] See also Fig.11 and Fig.12 , Fig.11 A schematic diagram of a homogenized light spot projected by the homogenized light emitting device provided in Example 1 of the present application is shown. Fig.12A schematic diagram of the light intensity of the homogenized light spot projected by the homogenized light emitting device provided in Example 1 of the present application at the x-center section and the y-center section is shown. In this embodiment, the light source 1 is a VCSEL (Vertical-Cavity Surface-Emitting Laser) array with a wavelength of 940nm. The FOI (Field Of Illumination, coverage angle) of the homogenized light spot projected by this homogenized light emitting device at the maximum light intensity is 40°x40° (VxH); the FOI of the homogenized light spot at 75% of the maximum light intensity is 50°x50° (VxH); the FOI of the homogenized light spot at 10% of the maximum light intensity is 65°x65° (VxH).

[0091] Example 2

[0092] See also Fig.13 and Fig.14 , Fig.13 A schematic diagram of a homogenized light spot projected by the homogenized light emitting device provided in Example 2 of the present application is shown. Fig.14 The schematic diagram of the light intensity of the homogenized light spot projected by the homogenized light emitting device provided in Example 2 of the present application in the x-center section and the y-center section is shown. In this embodiment, the light source 1 is a VCSEL array with a wavelength of 940nm. The FOI of the homogenized light spot projected by the homogenized light emitting device is 45°x45° (VxH) at 75% of the maximum light intensity; the FOI of the homogenized light spot at 10% of the maximum light intensity is 60°x60° (VxH).

[0093] Example 3

[0094] See also Fig.15 and Fig.16 , Fig.15 A schematic diagram of a homogenized light spot projected by the homogenized light emitting device provided in Example 3 of the present application is shown. Fig.16 The schematic diagram of the light intensity of the homogenized light spot projected by the homogenized light emitting device provided in Example 3 of the present application in the x-center section and the y-center section is shown. In this embodiment, the light source 1 is a VCSEL array with a wavelength of 850nm. The FOI of the homogenized light spot projected by the homogenized light emitting device is 45°x45°(VxH) at 75% of the maximum light intensity; the FOI of the homogenized light spot at 10% of the maximum light intensity is 58°x58°(VxH).

[0095] Example 4

[0096] See also Fig.17 and Fig.18 , Fig.17 A schematic diagram of a homogenized light spot projected by the homogenized light emitting device provided in Example 4 of the present application is shown. Fig.18The schematic diagram of the light intensity of the homogenized light spot projected by the homogenized light emitting device provided in Example 4 of the present application in the x-center section and the y-center section is shown. In this embodiment, the light source 1 is a VCSEL array with a wavelength of 940nm. The FOI of the homogenized light spot projected by the homogenized light emitting device is 65°x65° (VxH) at the maximum light intensity; the FOI of the homogenized light spot at 10% of the maximum light intensity is 85°x85° (VxH).

[0097] Example 5

[0098] See also Fig.19 and Fig. 20 , Fig.19 A schematic diagram of a homogenized light spot projected by the homogenized light emitting device provided in Example 5 of the present application is shown. Fig. 20 The schematic diagram of the light intensity of the homogenized light spot projected by the homogenized light emitting device provided in Example 5 of the present application at the x-center section and the y-center section is shown. In this embodiment, the light source 1 is a VCSEL array with a wavelength of 1550nm. The FOI of the homogenized light spot projected by the homogenized light emitting device at the maximum light intensity is 112°x112°(VxH); the FOI of the homogenized light spot at 10% of the maximum light intensity is 130°x130°(VxH).

[0099] Those skilled in the art will readily appreciate other embodiments of the present application after considering the specification and practicing the utility model disclosed herein. The present application is intended to cover any modification, use or adaptation of the present application, which follows the general principles of the present application and includes common knowledge or customary techniques in the art that are not disclosed in the present application. The specification and examples are intended to be exemplary only, and the true scope and spirit of the present application are indicated by the appended claims.

Claims

1. A superlens, characterized in that: The metalens is used to modulate the incident light beam received at various positions on the metalens and output an outgoing light beam; All of the outgoing light beams together form a light spot on the target plane; The phases of the metalens include: a homogenization phase for diffusing the incident light beam; a collimation phase for collimating the incident light beam; The collimation phase is provided with an adjustment factor, and the adjustment factor is negatively correlated with the edge steepness of the light spot.

2. The metalens according to claim 1, characterized in that The collimation phase satisfies: in, is the collimation phase, λ is the central wavelength of the incident light beam, f is the focal length of the superlens, x and y are the coordinates of the superlens on the two-dimensional plane, and n is the adjustment factor.

3. The metalens according to claim 2, characterized in that The value range of the adjustment factor is [1, +∞).

4. A uniform light emitting device, characterized in that: The uniform light emitting device comprises: a light source; a substrate; a super lens as claimed in any one of claims 1 to 3; The light source is arranged on the substrate; The super lens is arranged on the light-emitting side of the light source, and is used to receive and modulate the incident light beam emitted by the light source, and output an outgoing light beam, so that the outgoing light beam forms a light spot on the target plane.

5. The uniform light emitting device according to claim 4, characterized in that: The uniform light emitting device further comprises: a housing; The shell is arranged on a substrate on the same side as the light source, the light source and the super lens are arranged inside a space enclosed by the shell, and the shell includes a light exit hole.

6. The uniform light emitting device according to claim 5, characterized in that: The uniform light emitting device further comprises: a detector; The detector is arranged on the substrate on the same side as the light source, and is used for receiving the reflected light beam reflected by the super lens and sensing the light intensity of the reflected light beam.

7. The uniform light emitting device according to claim 6, characterized in that: A filter is arranged on the surface of the housing; The filter is arranged on any side of the light exit hole, and is used to filter the light beam outside the working band of the incident light beam emitted by the light source.

8. The uniform light emitting device according to claim 6, characterized in that: The super lens is arranged at the light exit hole on the inner surface of the shell, and a filter film is provided on the super lens, and the filter film is used to filter the light beam outside the working band of the incident light beam emitted by the light source.

9. The uniform light emitting device according to claim 5, characterized in that: The uniform light emitting device further comprises: a fixing structure; The fixing structure is disposed in the housing, and the fixing structure is used to fix the super lens; The fixing structure is arranged on the inner surface of the housing, or the fixing structure is arranged on a substrate on the same side as the light source.

10. A TOF sensor, characterized in that: The TOF sensor comprises: a receiving device; and a uniform light emitting device as described in any one of claims 4 to 9.

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