Substrate slice cleaning device

Abstract

The utility model discloses a substrate slice cleaning device which comprises a water tank used for containing cleaning liquid, a jig assembly, a support, a rotary driving part and a driving assembly, the jig assembly is located in the water tank, the rotary driving part is connected with the jig assembly so as to drive the jig assembly to rotate, and the driving assembly drives the support to rotate. The rotary driving piece is installed on the support in a sliding mode through the driving assembly so as to drive the jig assembly to do reciprocating motion in the direction parallel to the liquid level of the cleaning liquid. The driving assembly enables the jig assembly to do reciprocating motion in the direction parallel to the cleaning liquid level, water impact force generated by the reciprocating motion directly impacts the surface of the substrate piece in the front face mode, pollutants can be better removed, and the cleaning efficiency and cleanliness are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate sheet cleaning, in particular to a substrate sheet cleaning device. Background Art

[0002] In the fields of semiconductor manufacturing, microelectronic device processing, and precision optical component cleaning, traditional cleaning methods mainly rely on a single rotation mechanism to remove impurities and residues attached to the substrate. Rotary cleaning mainly relies on the centrifugal force of the liquid, which is insufficient for the direct impact force on the surface, making it difficult to effectively remove stubborn stains. Utility Model Content

[0003] The technical problem to be solved by the utility model is that the traditional cleaning method mainly relies on a single rotating mechanism to remove impurities and residues attached to the substrate sheet, and it is difficult to effectively remove stubborn stains.

[0004] In order to solve the above technical problems, the utility model provides a substrate sheet cleaning device, including a water tank for accommodating cleaning liquid, a jig assembly, a bracket, a rotating drive member and a driving assembly, the jig assembly is located in the water tank, and the rotating drive member is connected to the jig assembly to drive the jig assembly to rotate, and the rotating drive member is slidably installed on the bracket through the driving assembly to drive the jig assembly to reciprocate in a direction parallel to the liquid surface of the cleaning liquid through the driving assembly.

[0005] In some embodiments, the driving assembly includes a first driving member, a guide rail and a slider. The guide rail and the first driving member are installed on a bracket, and the guide rail is arranged in a direction parallel to the liquid surface of the cleaning liquid. The rotating driving member is connected to the slider, and the slider is slidably installed on the guide rail so that the slider is driven by the first driving member to move along the length direction of the guide rail.

[0006] In some embodiments, the driving assembly also includes a first fixed plate, a second fixed plate, a protrusion and an elastic member, the first fixed plate is connected to the bracket, the guide rail is installed on the first fixed plate, the second fixed plate is connected to the slider, the rotation driving member is installed on the second fixed plate, the first driving member is connected to the protrusion to drive the protrusion to perform an eccentric rotational movement until it abuts against one end of the second fixed plate to push the second fixed plate to slide, one end of the elastic member is connected to one end of the first fixed plate away from the first driving member, and the other end of the elastic member abuts against the other end of the second fixed plate to drive the second fixed plate to move in the direction of the protrusion.

[0007] In some embodiments, the first fixed plate includes a first plate and a mounting block, the first plate is connected to the bracket, the guide rail is mounted on the first plate, the mounting block is arranged at an end of the first plate away from the first driving member, one end of the elastic member abuts against the mounting block, and the other end of the elastic member abuts against the other end of the second fixed plate.

[0008] In some embodiments, a mounting hole is formed on a side of the mounting block facing the first driving member, and one end of the elastic member extends into the mounting hole and abuts against the bottom of the mounting hole.

[0009] In some embodiments, the second fixing plate includes a second plate, a third plate and a fourth plate, the third plate and the fourth plate are arranged at two ends of the second plate opposite to each other, the third plate abuts against the other end of the elastic member, and the fourth plate is used to abut against the protrusion.

[0010] In some embodiments, the bracket includes a first support frame, a second support frame and a third support frame, the first support frame is connected to the second support frame, and the first support frame and the second support frame are vertically arranged, the third support frame is installed on the second support frame, the first driving member is installed on the third support frame, and the output shaft of the first driving member passes through the third support frame and is connected to the protrusion.

[0011] In some embodiments, the fixture assembly includes a first limiting plate and a second limiting plate, the first limiting plate having a mounting shaft connected to the rotating drive member, the first limiting plate having a first cleaning hole for passing a cleaning liquid, the second limiting plate having a second cleaning hole arranged corresponding to the first cleaning hole, the first limiting plate is connected to the second limiting plate to clamp the substrate sheet.

[0012] In some embodiments, a mounting groove is formed on a side of the first limiting plate facing the second limiting plate.

[0013] In some embodiments, the jig assembly includes two jig assemblies, and the two jig assemblies are spaced apart along the length direction of the second plate.

[0014] Compared with the prior art, the substrate cleaning device of the present utility model has the following beneficial effects:

[0015] The water tank of the utility model embodiment is used to contain the cleaning liquid, ensuring that the substrate sheet is completely immersed in the liquid, which is conducive to the chemical reaction and physical flushing of the liquid and pollutants. The rotating drive member is connected to the fixture assembly, and the fixture assembly can rotate by transmitting power to initially remove surface pollutants by centrifugal force. The driving assembly allows the fixture assembly to reciprocate in a direction parallel to the cleaning liquid surface, so that the "water impact force" generated by the reciprocating motion directly impacts the surface of the substrate sheet, which can better remove pollutants and improve the cleaning efficiency and cleanliness. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a substrate cleaning device provided by an embodiment of the utility model;

[0017] Figure 2 It is a structural schematic diagram of a drive assembly provided by an embodiment of the utility model;

[0018] Figure 3 It is a structural schematic diagram of a fixture assembly provided by an embodiment of the utility model;

[0019] Figure 4 It is a structural schematic diagram of a first limiting plate provided in an embodiment of the utility model;

[0020] In the figure, 1, water tank; 2, fixture assembly; 21, first limiting plate; 211, first cleaning hole; 212, mounting groove; 22, second limiting plate; 221, second cleaning hole; 23, mounting shaft; 3, bracket; 31, first support frame; 32, second support frame; 33, third support frame; 4, rotating drive member; 5, drive assembly; 51, first drive member; 52, guide rail; 53, slider; 54, first fixed plate; 541, first plate; 542, mounting block; 55, second fixed plate; 551, second plate; 552, third plate; 553, fourth plate; 56, bump; 57, elastic member. DETAILED DESCRIPTION

[0021] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0022] like Figure 1 As shown, the utility model provides a substrate sheet cleaning device, including a water tank 1 for accommodating a cleaning liquid, a fixture assembly 2, a bracket 3, a rotary drive member 4 and a drive assembly 5, the fixture assembly 2 is located in the water tank 1, and the rotary drive member 4 is connected to the fixture assembly 2 to drive the fixture assembly 2 to rotate, and the rotary drive member 4 is slidably mounted on the bracket 3 through the drive assembly 5 to drive the fixture assembly 2 to reciprocate in a direction parallel to the liquid surface of the cleaning liquid through the drive assembly 5.

[0023] Based on the above structure, the water tank 1 of this embodiment is used to contain the cleaning liquid to ensure that the substrate sheet is completely immersed in the liquid, which is conducive to the chemical reaction and physical flushing of the liquid and the pollutants. The rotating drive member 4 is connected to the fixture assembly 2, and the fixture assembly 2 can rotate by transmitting power to use centrifugal force to preliminarily remove surface pollutants. The driving assembly 5 allows the fixture assembly 2 to reciprocate in a direction parallel to the cleaning liquid surface, so that the "water impact force" generated by the reciprocating motion directly impacts the surface of the substrate sheet, which can better remove pollutants and improve the cleaning efficiency and cleanliness.

[0024] Read also Figure 2 The driving assembly 5 includes a first driving member 51, a guide rail 52 and a slider 53. The guide rail 52 and the first driving member 51 are installed on the bracket 3, and the guide rail 52 is set in a direction parallel to the liquid surface of the cleaning liquid to provide a stable linear motion path for the slider 53, ensuring a smooth sliding process and avoiding unnecessary vibration or deviation. The rotating driving member 4 is connected to the slider 53, and the slider 53 is slidably installed on the guide rail 52 to drive the slider 53 to move along the length direction of the guide rail 52 through the first driving member 51.

[0025] Based on the above structure, the driving assembly 5 ensures that the fixture assembly 2 can not only rotate, but also slide back and forth regularly in a direction parallel to the surface of the substrate sheet. This composite motion mode not only increases the contact opportunity and cleaning intensity between the liquid medicine and the surface of the substrate sheet, but also effectively improves the cleaning effect through the front water impact force.

[0026] In some embodiments, the driving assembly 5 also includes a first fixed plate 54, a second fixed plate 55, a protrusion 56 and an elastic member 57. The first fixed plate 54 is connected to the bracket 3, the guide rail 52 is installed on the first fixed plate 54, the second fixed plate 55 is connected to the slider 53, the rotary driving member 4 is installed on the second fixed plate 55, the first driving member 51 is connected to the protrusion 56 to drive the protrusion 56 to make an eccentric rotational movement until it abuts against one end of the second fixed plate 55 and pushes the second fixed plate 55 to slide, one end of the elastic member 57 is connected to one end of the first fixed plate 54 away from the first driving member 51, and the other end of the elastic member 57 abuts against the other end of the second fixed plate 55 to drive the second fixed plate 55 to move in the direction of the protrusion 56.

[0027] This embodiment not only drives the protrusion 56 to perform eccentric rotational motion through the first driving member 51 to directly push the second fixed plate 55, but also ensures the continuous and smooth sliding of the slider 53 in two directions through the cooperation of the elastic member 57. When the first driving member 51 drives the protrusion 56 to rotate, the protrusion 56 will periodically contact and push one end of the second fixed plate 55, causing the second fixed plate 55 to move along the guide rail 52. After the protrusion 56 is out of contact with the second fixed plate 55, the second fixed plate 55 is pushed back by the rebound force of the elastic member 57 itself, thereby realizing the driving force in the other direction of the reciprocating motion.

[0028] In some embodiments, the first fixing plate 54 includes a first plate 541 and a mounting block 542, the first plate 541 is connected to the bracket 3, the guide rail 52 is mounted on the first plate 541, the mounting block 542 is arranged at one end of the first plate 541 away from the first driving member 51, one end of the elastic member 57 abuts against the mounting block 542, and the other end of the elastic member 57 abuts against the other end of the second fixing plate 55. In this embodiment, by providing the mounting block 542, the installation stability of the elastic member 57 is ensured, so that its tension can be fully utilized, not only can it be pulled back in time after the protrusion 56 pushes the second fixing plate 55 to slide, so as to maintain the continuous reciprocating motion of the system, but also the impact and vibration during the motion can be effectively absorbed, so as to improve the running stability and life of the whole cleaning device.

[0029] In some embodiments, a mounting hole is opened on the side of the mounting block 542 facing the first driving member 51, and one end of the elastic member 57 extends into the mounting hole and abuts against the bottom of the mounting hole, ensuring that the elastic member 57 will not fall out or shift during operation, providing a reliable mounting point and enhancing the stability of the entire device.

[0030] In some embodiments, the second fixed plate 55 includes a second plate 551, a third plate 552 and a fourth plate 553. The third plate 552 and the fourth plate 553 are arranged at both ends of the second plate 551 opposite to each other. The third plate 552 abuts against the other end of the elastic member 57 to ensure that the restoring force applied by the elastic member 57 can be effectively transmitted to the second fixed plate 55. When the protrusion 56 pushes the second fixed plate 55 to move, the elastic member 57 pulls back the second fixed plate 55 through the third plate 552 to achieve reverse drive of the reciprocating motion. The fourth plate 553 is used to abut against the protrusion 56. When the first driving member 51 drives the protrusion 56 to perform eccentric rotational motion, the protrusion 56 will contact one end of the fourth plate 553, and the second fixed plate 55 will slide forward along the guide rail 52 through direct physical thrust, completing the propulsion in one direction of the reciprocating motion during the cleaning process.

[0031] In some embodiments, the bracket 3 includes a first support frame 31, a second support frame 32 and a third support frame 33. The first support frame 31 is connected to the second support frame 32, and the first support frame 31 and the second support frame 32 are arranged vertically to ensure structural stability and load bearing capacity. The third support frame 33 is installed on the second support frame 32 to carry the first driving member 51. The first driving member 51 is installed on the third support frame 33, and the output shaft of the first driving member 51 passes through the third support frame 33 and is connected to the protrusion 56, so that the rotational power generated by the first driving member 51 can be directly transmitted to the protrusion 56 through the output shaft, thereby driving the entire reciprocating sliding mechanism. Such a layout ensures the directness and efficiency of power transmission, and is also conducive to maintenance and adjustment.

[0032] See also Figure 3 and Figure 4 The fixture assembly 2 includes a first limiting plate 21 and a second limiting plate 22. The first limiting plate 21 has a mounting shaft 23 connected to the rotating drive member 4. The first limiting plate 21 has a first cleaning hole 211 for the cleaning liquid to pass through. The second limiting plate 22 has a second cleaning hole 221 arranged corresponding to the first cleaning hole 211. The first limiting plate 21 is connected to the second limiting plate 22 to clamp the substrate sheet to prevent the substrate sheet from shifting or being damaged.

[0033] Based on the above structure, the first limiting plate 21 of the present embodiment can rotate along with the movement of the rotary drive member 4, driving the substrate sheet clamped between the first limiting plate 21 and the second limiting plate 22 to rotate together. In addition, the first limiting plate 21 is provided with a first cleaning hole 211, and the second limiting plate 22 is provided with a second cleaning hole 221, which is used to allow the cleaning liquid to flow freely, ensuring that the liquid can directly act on the two surfaces of the substrate sheet, and can continue to rinse even when the fixture assembly 2 rotates and reciprocates.

[0034] In some embodiments, a mounting groove 212 is formed on one side of the first limiting plate 21 facing the second limiting plate 22 for mounting a substrate sheet. In addition, the width of the mounting groove 212 is greater than the width of the first cleaning hole 211, which restricts the substrate sheet to prevent it from slipping while allowing cleaning liquid to pass through to clean the substrate sheet.

[0035] In some embodiments, the fixture assembly 2 includes two fixture assemblies 2 , and the two fixture assemblies 2 are spaced apart along the length direction of the second plate 551 .

[0036] This embodiment improves the processing capacity and production efficiency of the equipment by using two fixture assemblies 2, wherein the spacing setting can provide sufficient space for each fixture assembly 2 and the substrate sheet therein, so that the cleaning liquid can flow through each substrate sheet without hindrance, ensuring that each part can be fully cleaned, and avoiding the cleaning blind area that may be generated between adjacent fixture assemblies 2. In addition, when performing reciprocating and rotating motions, maintaining a certain distance between the fixture assemblies 2 can reduce physical interference between each other and mutual influence of the flow of the cleaning liquid, and maintain the independence and accuracy of the cleaning action.

[0037] In summary, the embodiment of the utility model provides a substrate sheet cleaning device, wherein the water tank 1 is used to contain the cleaning liquid to ensure that the substrate sheet is completely immersed in the liquid, which is beneficial to the chemical reaction and physical flushing of the liquid and the pollutants. The rotating drive member 4 is connected to the fixture assembly 2, and the fixture assembly 2 can rotate by transmitting power to use centrifugal force to preliminarily remove surface pollutants. The driving assembly 5 allows the fixture assembly 2 to reciprocate in a direction parallel to the cleaning liquid surface, so that the "water impact force" generated by the reciprocating motion directly impacts the surface of the substrate sheet, which can better remove pollutants and improve the cleaning efficiency and cleanliness.

[0038] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A substrate cleaning device, characterized in that: The invention comprises a water tank for accommodating cleaning liquid, a fixture assembly, a bracket, a rotary driving member and a driving assembly, wherein the fixture assembly is located in the water tank, and the rotary driving member is connected to the fixture assembly to drive the fixture assembly to rotate, and the rotary driving member is slidably mounted on the bracket through the driving assembly to drive the fixture assembly to reciprocate in a direction parallel to the liquid surface of the cleaning liquid through the driving assembly.

2. The substrate cleaning device according to claim 1, characterized in that: The driving assembly includes a first driving member, a guide rail and a slider. The guide rail and the first driving member are installed on a bracket, and the guide rail is arranged in a direction parallel to the liquid surface of the cleaning liquid. The rotating driving member is connected to the slider, and the slider is slidably installed on the guide rail so that the slider is driven by the first driving member to move along the length direction of the guide rail.

3. The substrate cleaning device according to claim 2, characterized in that: The driving assembly also includes a first fixed plate, a second fixed plate, a protrusion and an elastic member, the first fixed plate is connected to the bracket, the guide rail is installed on the first fixed plate, the second fixed plate is connected to the slider, the rotation driving member is installed on the second fixed plate, the first driving member is connected to the protrusion to drive the protrusion to perform eccentric rotational movement until it abuts against one end of the second fixed plate to push the second fixed plate to slide, one end of the elastic member is connected to one end of the first fixed plate away from the first driving member, and the other end of the elastic member abuts against the other end of the second fixed plate to drive the second fixed plate to move in the direction of the protrusion.

4. The substrate cleaning device according to claim 3, characterized in that: The first fixed plate includes a first plate and a mounting block, the first plate is connected to the bracket, the guide rail is mounted on the first plate, the mounting block is arranged at an end of the first plate away from the first driving member, one end of the elastic member abuts against the mounting block, and the other end of the elastic member abuts against the other end of the second fixed plate.

5. The substrate cleaning device according to claim 4, characterized in that: The mounting block is provided with a mounting hole on a side surface facing the first driving member, and one end of the elastic member extends into the mounting hole and abuts against the bottom of the mounting hole.

6. The substrate cleaning device according to claim 3, characterized in that: The second fixing plate includes a second plate, a third plate and a fourth plate. The third plate and the fourth plate are arranged at two ends of the second plate opposite to each other. The third plate abuts against the other end of the elastic member, and the fourth plate is used to abut against the protrusion.

7. The substrate cleaning device according to claim 3, characterized in that: The bracket includes a first support frame, a second support frame and a third support frame, the first support frame is connected to the second support frame, and the first support frame and the second support frame are vertically arranged, the third support frame is installed on the second support frame, the first driving member is installed on the third support frame, and the output shaft of the first driving member passes through the third support frame and is connected to the protrusion.

8. The substrate cleaning device according to claim 1, characterized in that: The fixture assembly includes a first limiting plate and a second limiting plate, the first limiting plate having a mounting shaft connected to the rotating drive member, the first limiting plate having a first cleaning hole for a cleaning liquid to pass through, the second limiting plate having a second cleaning hole arranged corresponding to the first cleaning hole, the first limiting plate is connected to the second limiting plate to clamp the substrate sheet.

9. The substrate cleaning device according to claim 8, characterized in that: A mounting groove is formed on one side of the first limiting plate facing the second limiting plate.

10. The substrate cleaning device according to claim 6, characterized in that: The fixture assemblies include two, and the two fixture assemblies are spaced apart along the length direction of the second plate.

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