Four-axis turntable replaceable radiation type vacuum chuck tool
By designing a four-axis turntable switchboard replaceable radiation vacuum suction cup tooling, the problem of long replacement time and unstable accuracy of traditional tooling when dealing with workpieces of different diameters is solved, and the workpieces are quickly and accurately fixed and processed, improving processing efficiency and product quality.
Patent Information
- Application Number
- CN202421622305.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-10
- Publication Date
- 2025-05-02
- Estimated Expiration
- 2034-07-10
AI Technical Summary
When traditional vacuum suction cup tooling processes CVD silicon carbide workpieces of different diameters, there are problems such as long replacement time, unstable accuracy, and easy scratches on the workpiece surface, resulting in extended manufacturing cycle and product quality.
A four-axis turntable switchboard switchboard switchboard switchboard switchboard switchboard switchboard switchboard switchboard switchboard switchboard switchboard switchboards are designed with a threaded connection to the base of the four-axis turntable, combined with the intermediate gasket and sealing ring, and a radial workpiece is formed through the annular airway, the direct airway and the radial airway to adapt to workpieces of different diameters.
It realizes rapid and precise fixing and processing of workpieces, reduces processing cycles, improves processing efficiency and product quality, and reduces the consumption of manpower and time resources.
Smart Images
Figure CN222826389U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of vacuum suction cup tooling, in particular to a four-axis turntable replaceable radiation type vacuum suction cup tooling. Background Art
[0002] CVD silicon carbide products are one of the important parts of semiconductor equipment. The material itself is expensive and requires extremely high precision. Due to its material characteristics, the clamping of the workpiece becomes one of the key processes in the manufacturing process. In order to ensure that the processing of CVD silicon carbide products on machine tools can achieve efficient and precise results, it is particularly important to design a special clamping tooling that meets the needs of products with different diameters.
[0003] The design of this tooling takes into account the characteristics of CVD silicon carbide materials, such as high hardness and brittleness. Therefore, the tooling must have sufficient stability and high precision, and the different diameters of various products to ensure that the CVD silicon carbide products will not be damaged during the processing. At the same time, the design of the tooling should also take into account the convenience and efficiency of operation, so that the operator can quickly complete the clamping and unloading work.
[0004] In view of the high precision and difficult processing characteristics of semiconductor CVD silicon carbide material accessories, the previous solution was to open a circular airway on the suction cup to vacuum absorb the workpiece, but this circular airway can only process workpieces of several fixed diameters. Once the diameter of the product changes beyond the diameter of the airway, it cannot be used. Because the suction cup material is relatively hard, there will be scratches and other undesirable appearance defects when the workpiece is in direct contact with the suction cup. In the actual product production process, it is often necessary to replace tooling, and on-site personnel need to spend a lot of time to operate. In addition, the accuracy of the tooling after each replacement is different, which will consume a lot of manpower and time resources, not only increasing the manufacturing cycle, but also may affect the accuracy and quality of the product due to differences in human operations. Utility Model Content
[0005] In order to make up for the above shortcomings, the utility model provides a four-axis turntable replaceable radial vacuum suction cup tooling, which aims to improve the problem that the traditional radial vacuum suction cup tooling production process requires a lot of time to operate, and the tooling accuracy is different after each replacement, which will consume a lot of manpower and time resources, increase the manufacturing cycle, and affect the accuracy and quality of the product.
[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a replaceable radiation-type vacuum suction cup tooling for a four-axis turntable, including an intermediate gasket, a plurality of fixing bolts are arranged inside the intermediate gasket, a suction cup body is arranged at the bottom of the intermediate gasket, a four-axis turntable base is arranged at the bottom of the suction cup body, and holes and grooves are opened inside the intermediate gasket, the outer wall of each of the fixing bolts is threadedly connected to the four-axis turntable base.
[0007] Furthermore, a sealing ring is provided between the suction cup body and the four-axis turntable base.
[0008] Furthermore, a radiation air channel is provided inside the suction cup body.
[0009] Furthermore, an annular air passage is provided inside the suction cup body.
[0010] Furthermore, a straight air passage is provided inside the suction cup body.
[0011] The utility model has the following beneficial effects:
[0012] 1. In the utility model, firstly, the threaded connection relationship between the fixing bolts and the four-axis turntable base is used to fix the suction cup body and the four-axis turntable base, and the workpiece is fixed by vacuuming to achieve processing of the workpiece. This tooling is convenient to install and use, improves processing efficiency, and reduces processing cycle.
[0013] 2. In the utility model, the annular airway, the straight airway and the radial tooling are formed by the suction cup body. This radial tooling has good adaptability to workpieces of different diameters and can be used within the range covered by the radial airway. This can save the time of replacing tooling of annular airways of different diameters. The soft metal pad has both strength and toughness and will not scratch the surface of the workpiece, eliminating the need for subsequent processing caused by surface scratches, saving manpower, materials and time. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 A three-dimensional diagram of the replaceable radial vacuum chuck tooling of the four-axis turntable proposed by the utility model;
[0015] Figure 2 This is a schematic diagram of the structural disassembly of the four-axis turntable replaceable radiation type vacuum suction cup tooling proposed by the utility model;
[0016] Figure 3 This is a double view of the replaceable radial vacuum suction cup tooling of the four-axis turntable proposed by the utility model.
[0017] Legend:
[0018] 1. Middle gasket; 2. Fixing bolt; 3. Suction cup body; 4. Sealing ring; 5. Four-axis turntable base; 6. Radial air duct; 7. Annular air duct; 8. Straight air duct. DETAILED DESCRIPTION
[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0020] Reference Figure 1-Figure 2 The utility model provides an embodiment: a four-axis turntable replaceable radiation-type vacuum suction cup tooling, including an intermediate gasket 1, a plurality of fixing bolts 2 are arranged inside the intermediate gasket 1, a suction cup body 3 is arranged at the bottom of the intermediate gasket 1, and a four-axis turntable base 5 is arranged at the bottom of the suction cup body 3, and holes are opened inside the intermediate gasket 1, the suction cup body 3 and the four-axis turntable base 5, and the outer wall of each fixing bolt 2 is threadedly connected to the four-axis turntable base 5.
[0021] Specifically, the tooling design utilizes the threaded connection between the fixing bolts 2 and the four-axis turntable base 5 to achieve a firm fixation of the suction cup body 3 and the four-axis turntable base 5. First, by tightening the fixing bolts 2, ensure that the suction cup body 3 is tightly connected to the surrounding turntable bases 5 to form a stable processing platform. Then, the middle gasket 1 is placed on the surface of the suction cup body 3. This gasket is designed to protect the workpiece surface from damage during the processing and increase the friction between the workpiece and the tooling to prevent the workpiece from shifting during the processing. During processing, the operator places the workpiece on the middle gasket 1 and quickly and accurately fixes the workpiece by vacuuming, thereby achieving fine processing of the workpiece. This fixing method not only improves the processing accuracy, but also significantly improves the processing efficiency, while reducing the entire processing cycle.
[0022] Reference Figure 3 A sealing ring 4 is arranged between the suction cup body 3 and the four-axis turntable base 5, a radial air passage 6 is opened inside the suction cup body 3, a ring air passage 7 is opened inside the suction cup body 3, and a straight air passage 8 is opened inside the suction cup body 3.
[0023] Specifically, the tooling adopts a sealing ring 4 to play a key sealing role between the radial suction cup fixing device and the four-axis turntable base, ensuring that the gas will not leak during the processing, thereby maintaining a stable adsorption force. The suction cup body 3 is specially designed with an annular airway 7, straight airways 8 and 9 to form an efficient radial tooling system. The radial tooling of this design can adapt to workpieces of different diameters, enhancing the versatility and flexibility of the tooling. The workpiece only needs to be located within the coverage range of the radial airway 6 to be firmly fixed, and there is no need to frequently replace the annular airway 7 tooling of different diameters, which greatly saves the replacement time and related costs. In addition, the soft metal pad material used in the tooling has existing strength and toughness, and can withstand the pressure during the processing without deformation. At the same time, its soft properties ensure that the surface of the workpiece will not be scratched, thereby avoiding subsequent processing work caused by surface damage, further saving manpower, materials and time. This tooling design not only improves production efficiency, but also optimizes processing quality.
[0024] Working principle: Through the threaded connection between the fixing bolt 2 and the four-axis turntable base 5, the suction cup body 3 is fixed to the four-axis turntable base 5 with the fixing bolt 2, and the intermediate gasket 1 is placed on the surface of the suction cup body 3. During processing, the product is placed on the intermediate gasket 1 and the workpiece is fixed by vacuuming to achieve processing of the workpiece. This tooling is convenient to install and use, which improves processing efficiency and reduces processing cycle. The sealing ring 4 plays a sealing role between the radial suction cup and the four-axis turntable base. The annular airway 7, straight airway 8 and 9 provided on the suction cup body 3 form a radial tooling. This radial tooling has good adaptability to workpieces of different diameters and can be used as long as it is within the range covered by the radial airway 6. It can save the time of replacing tooling of annular airways 7 of different diameters. The soft metal pad has both strength and toughness, and will not scratch the surface of the workpiece, eliminating the subsequent processing caused by surface scratches, saving manpower, materials and time.
[0025] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A four-axis turntable replaceable radiant vacuum suction cup tooling, comprising an intermediate gasket (1), characterized in that: A plurality of fixing bolts (2) are arranged inside the intermediate gasket (1), a suction cup body (3) is arranged at the bottom of the intermediate gasket (1), a four-axis turntable base (5) is arranged at the bottom of the suction cup body (3), holes and grooves are arranged inside the intermediate gasket (1), the suction cup body (3) and the four-axis turntable base (5), and the outer wall of each fixing bolt (2) is threadedly connected to the four-axis turntable base (5).
2. The four-axis turntable replaceable radiation type vacuum chuck tooling according to claim 1 is characterized in that: A sealing ring (4) is provided between the suction cup body (3) and the four-axis turntable base (5).
3. The four-axis turntable replaceable radiation type vacuum chuck tooling according to claim 2 is characterized in that: A radiation air channel (6) is provided inside the suction cup body (3).
4. The four-axis turntable replaceable radiation type vacuum chuck tooling according to claim 3 is characterized in that: An annular air passage (7) is provided inside the suction cup body (3).
5. The four-axis turntable replaceable radiation type vacuum chuck tooling according to claim 4 is characterized in that: A straight air passage (8) is provided inside the suction cup body (3).